JP2000348618A - Manufacture of vacuum container for ion-beam applying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize reduction in man-hours, improvement in workability, and improvement in product reliability, by using a method reducing post-welding deformation in joining a cylindrical container to a flange, etc., and thus eliminating machining work after welding. SOLUTION: Component parts, such as a cylindrical container 2 and a flange 3, are finished on a part-by-part basis by highly accurate machining work prior to joining them, laser welding is used for joining the highly accurately machined component parts, a joining part of the cylindrical container 2 to the flange 3 is formed into a butt joint, a groove for absorbing distortion is formed in the joint portion, and thus joining is performed with post-welding deformation reduced. This enables a highly accurately finished vacuum container to be manufactured without machining work after welding, enables a magnetic field to be kept uniform by having a highly accurate groove for disposing a permanent magnet of an ion source, the most important part as a product, realizes improvement in performance of the product and improvement in reliability thereof, and can realize improved workability of vacuum container manufacture and a reduced cost of the product.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a vacuum vessel of an apparatus using an ion beam such as ion beam milling, and particularly requires high-precision machining in order to improve the performance of an ion beam application apparatus. And a method of manufacturing a vacuum container.

[0002]

2. Description of the Related Art An ion beam application device has a high performance.
It is necessary to keep the magnetic field of the ion source uniform and generate a uniform ion beam with a low divergence angle. The magnetic field of the ion source is formed by permanent magnets provided on the outer wall of the vacuum vessel. In order to form a uniform magnetic field, it is necessary to arrange the permanent magnets uniformly on the outer wall of the vacuum vessel. For this reason, the cylindrical outer wall of the vacuum vessel is provided with multiple rows of grooves for permanent magnet positioning uniformly along the circumference.

Also, in order to maintain a high degree of vacuum, the vacuum vessel of the ion beam application apparatus is to form each flange face with high precision and to form a high precision groove, and when connecting the flange there is a resin vacuum. The degree of vacuum is maintained by disposing a sealing material as a sealing component. Therefore, high-precision machining is required for the flange surface and the groove.

[0004] For the above purpose, the machining performed on the vacuum vessel of the ion beam application device affects the performance of the ion beam application device depending on the processing accuracy, and causes a problem such as deterioration of the ion beam quality. Leads to.

Conventionally, in manufacturing this vacuum vessel, machining of parts is performed with a required margin left, and each part is joined to the vacuum vessel by a flange or the like by TIG (Tungsten Inert Gas) welding. Had been joined. After welding, distortion due to welding was removed by machining again.

[0006]

As described above, the TIG
According to welding, heat deformation is unavoidable during welding of the vacuum vessel and the flange, and to maintain high quality of the ion source, a TI
After G welding, it was necessary to remove welding deformation. Further, machining such as groove processing for positioning the permanent magnet on the outer wall of the vacuum vessel requiring high precision and groove processing for arranging vacuum sealing parts on the flange surface had to be performed after welding. However, in machining after welding, since all parts are attached, in order to maintain the accuracy after machining, unless the accuracy at the time of machining setting before machining is increased, the accuracy of the entire vacuum vessel is not Therefore, many man-hours are required, and there are many disadvantages in terms of workability and product cost. Furthermore, when machining is performed for a long time after assembling the vacuum vessel by welding, the processing heat causes expansion and the like, and it has been difficult to achieve high precision by machining.

SUMMARY OF THE INVENTION It is an object of the present invention to use laser welding with little deformation after welding for joining a vacuum vessel and a flange, etc., to perform high-precision machining of parts before welding, and to eliminate machining after welding. Accordingly, the present invention provides a highly accurate and high-performance container manufacturing method for reducing man-hours and improving workability.

[0008]

SUMMARY OF THE INVENTION The object of the present invention is to finish a cylindrical container and a flange by welding with a predetermined finishing dimension with high precision before welding, and to weld the machined cylindrical container and the flange by laser welding. It is achieved by joining at.

Further, the above object is achieved by forming a joint between the cylindrical container and the flange as a butt joint, and forming a groove for absorbing distortion in the joint to perform laser welding.

Further, the above object is achieved by welding a simple portion having a straight or circular arc at a joint between the cylindrical container and the flange by laser welding, and joining other portions by TIG welding.

According to the above-mentioned means, processing requiring high-precision machining is required in terms of the performance of the ion beam application apparatus. Processing is performed with predetermined finishing dimensions. Thereby, high precision processing can be easily performed. Then, the joining of the cylindrical container and the flange machined with high accuracy is joined by laser welding, and the joining after welding is reduced. This prevents machining after welding.

The joint between the cylindrical container and the flange machined with high precision is used as a butt joint, and a groove for absorbing distortion is formed in the joint, so that the distortion during welding is absorbed in this groove. , Eliminate welding deformation.

[0013] In addition, laser welding is used for a simple shape portion whose welding portion is straight or circular, and the joints of the simple shape portions are formed by T.
By using IG welding, TIG welding is reduced as much as possible to perform welding with reduced welding deformation.

[0014]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view of an ion source container for an ion beam application apparatus according to an embodiment of the present invention. FIG. 2 shows an exploded view of the components. The cylindrical container 2 constituting the ion source container 1 has a groove 4 for installing a permanent magnet and a groove 5 for installing a cooling water pipe on the outer peripheral wall. Further, a flange 3 having a sealing groove 8 for a sealing material 7 for maintaining the degree of vacuum of the container 2 and a flange surface 6 with high precision flatness is joined to both surfaces of the container 2. As a joining method, in order to suppress distortion due to welding heat, high-energy-density laser welding that has a high welding speed, a small amount of heat input, and a deep penetration is used.

The joint at the joint is a butt joint 16 as shown in the sectional view of FIG. 5, and can be joined without adding a filler material. In addition, a groove 15 for absorbing welding distortion is provided in this joint portion in order to generate some distortion due to welding heat. By using this joint and laser welding, welding deformation can be minimized.

The cylindrical container 2 and the flange 3, which are components of the vacuum container shown in FIG. 2, have a groove 4 for installing a permanent magnet, a groove 5 for installing a cooling water pipe, a seal groove 8 for a sealing material, and a flat surface. The flange surface 6 and the like are subjected to high-precision machining with predetermined finishing dimensions. In these parts-by-part machining, machining is easy, and each part has a short machining time, generates little heat, and can be machined and finished with high precision for each part.

[0018] Since this is joined by laser welding with a high welding speed, a deep penetration and a small heat input, it is possible to perform welding with less distortion deformation due to welding heat. Moreover, the weld is a butt joint 16, and the groove 1 for absorbing the strain is used.
5, the welding can be performed without leaving any distortion after welding even if the influence of welding heat is slight.

Even if there is thermal expansion of each part due to welding heat at the time of welding, each part returns to its original dimension and shape processed with high precision after welding and does not leave distortion deformation. This is unnecessary, and thermal deformation such as when machining the entire vacuum vessel after welding can be prevented.

The vacuum container thus joined is provided with a permanent magnet installation groove 4 formed on the outer peripheral wall of the container 2 with high precision.
A uniform magnetic field can be formed by uniformly disposing permanent magnets in the magnet, and a uniform ion beam with a low divergence angle can be generated. In addition, the flatness of the flange 3 is maintained at a high precision surface finished by machining, and the flange 3 can be vacuum-sealed in the seal groove 8 via the seal material 7, so that a vacuum exhaust container with a high degree of vacuum can be easily configured. , Can generate a high energy beam.

FIG. 3 is a perspective view of a vacuum vessel for an ion beam application apparatus according to another embodiment of the present invention. FIG.
FIG. 2 shows an exploded view of the components. The vacuum vessel 9 includes a cylindrical vessel 10, a flange 11 having a round hole, a flange 13 having a square hole, a flange 12 having no hole, and a nozzle flange 14 for performing vacuuming or the like. It is composed of

Similarly to the above, the vacuum container 9 includes a sealing groove 8 for a sealing material for maintaining vacuum evacuation, flanges 11 to 13 having a flange surface with high precision flatness, and a nozzle flange 14 and a cylindrical container 10. Are joined to the respective openings. In order to suppress distortion due to welding heat, laser welding with a high welding speed and a high energy density capable of deep penetration is basically used. Laser welding welds simple shapes such as straight lines or circular arcs. Most of the simple shape portions are welded by laser welding. However, there are portions that are not simple shapes, such as seams between the simple shape portions, and the portions are performed using TIG welding in combination.

Further, since the joint at the joint is fillet welding, both laser welding and TIG welding are performed by adding a filler metal. When adding a filler material, if added more than necessary, the distortion increases due to heat. Therefore, the minimum necessary filler material is added. As a result, in the joining method, laser welding and TIG welding are used in combination, and the joint is fillet welded with a minimum amount of filler metal, but most of the welding length is laser welding, and distortion due to welding heat is generated. Can suppress distortion similarly to the case where laser welding is performed alone.
Therefore, it is possible to perform high-precision machining with predetermined finishing dimensions for each component as shown in FIG. 4 before welding, and to join them in a state where they are machined with high precision.

[0024]

According to the method for manufacturing a vacuum vessel for an ion beam application apparatus of the present invention, distortion due to welding can be suppressed. By applying laser welding,
It is possible to perform high-precision machining with predetermined finishing dimensions for each part before welding, leaving the allowance as before,
A vacuum container with higher precision can be easily manufactured as compared with a device that removes distortion by machining after welding. Thereby, as the ion source container, the magnetic field of the ion source can be kept uniform by the uniform arrangement of the permanent magnets which are the most important in the product, and the performance can be improved and the reliability of the product can be improved. In addition, it is possible to improve the workability of manufacturing a vacuum vessel and to reduce the product cost, for example, by removing a distortion removing process after welding.

[Brief description of the drawings]

FIG. 1 is a perspective view showing the structure of an ion source container for an ion beam application device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing the disassembled components of FIG. 1;

FIG. 3 is a perspective view showing a structure of a vacuum container for an ion beam application device according to another embodiment of the present invention.

FIG. 4 is a perspective view showing the disassembled components of FIG. 3;

FIG. 5 is a cross-sectional view of a joint of an ion source container joint.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Ion source container, 2 ... Vacuum container, 3 ... Flange, 4 ...
Groove for permanent magnet installation, 5 ... groove for cooling water piping installation, 6 ... flange surface, 7 ... seal material, 8 ... seal groove, 9 ... vacuum container,
DESCRIPTION OF SYMBOLS 10 ... Container, 11 ... Flange with a round hole, 12 ... Flange without a hole, 13 ... Flange with a square hole, 14 ... Nozzle flange, 15 ... Groove which absorbs distortion, 16 ... Weld joint.

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Shinichi Kobayashi 1-1-1, Kokubuncho, Hitachi City, Ibaraki Prefecture Inside Kokubu Plant, Hitachi, Ltd. (72) Inventor Masayoshi Hashiura 1-1-1 Kokubuncho, Hitachi City, Ibaraki Prefecture No. 1 Inside Kokubu Plant, Hitachi, Ltd. (72) Inventor Motoo Oga 1-1-1, Kokubuncho, Hitachi, Hitachi, Ibaraki Prefecture Inside Kokubu Plant, Hitachi, Ltd. (72) Inventor Satoru Shirata, Kokubu, Hitachi, Ibaraki 1-1 1-1 Kokubu Factory, Hitachi, Ltd. (72) Inventor Sadao Nakagawa 1-1-1, Kokubuncho, Hitachi City, Hitachi, Ibaraki Prefecture Kokubu Factory, Hitachi, Ltd. (72) Inventor Yuki Takahashi Kokubu, Hitachi, Ibaraki 1-1-1, Machi F-term in Hitachi Kokubu Plant (reference) 4E068 BA06 BD01 DA06 4E081 YK10 5C012 AA09 BC03 BC05

Claims (4)

[Claims] 1. A method for manufacturing a vacuum vessel for an ion beam application apparatus in which a flange is welded to an end face of a cylindrical vessel, wherein the cylindrical vessel and the flange are machined with high precision with predetermined finishing dimensions for each of the cylindrical vessel and flange before welding. The joint for the machined cylindrical container and the flange is a butt joint, and a groove for absorbing distortion is formed in the joint, and the joint is welded by laser welding. How to make a container. 2. A method of manufacturing a vacuum vessel for an ion beam application apparatus in which a flange is welded to an end face of a cylindrical vessel, wherein the cylindrical vessel and the flange are machined with high precision with predetermined finishing dimensions for each of the cylindrical vessel and the flange before welding. A vacuum vessel for an ion beam application device, wherein a welded portion of the machined cylindrical vessel and flange having a straight or circular arc is welded by laser welding, and other parts are welded by TIG welding. Production method. 3. The vacuum vessel for an ion beam application apparatus according to claim 2, wherein the joint at the joint between the cylindrical vessel and the flange is fillet welded and welded by adding a minimum necessary filler material. Production method. 4. The cylindrical container has a permanent magnet installation groove formed evenly on the outer peripheral wall of the cylinder, and the flange has a sealing material circle for maintaining a degree of vacuum on a flange surface having a high flatness. 4. The ion beam application apparatus according to claim 1, wherein an annular groove is formed, and the permanent magnet installation groove and the seal material annular groove are formed before welding. How to make a vacuum container.