JP2000338686A5 - - Google Patents
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- Publication number
- JP2000338686A5 JP2000338686A5 JP1999150032A JP15003299A JP2000338686A5 JP 2000338686 A5 JP2000338686 A5 JP 2000338686A5 JP 1999150032 A JP1999150032 A JP 1999150032A JP 15003299 A JP15003299 A JP 15003299A JP 2000338686 A5 JP2000338686 A5 JP 2000338686A5
- Authority
- JP
- Japan
- Prior art keywords
- sidewalls
- liquid according
- sidewall
- weight
- sulfuric acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15003299A JP4207311B2 (ja) | 1999-05-28 | 1999-05-28 | サイドウォール除去液 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15003299A JP4207311B2 (ja) | 1999-05-28 | 1999-05-28 | サイドウォール除去液 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000338686A JP2000338686A (ja) | 2000-12-08 |
| JP2000338686A5 true JP2000338686A5 (https=) | 2006-04-06 |
| JP4207311B2 JP4207311B2 (ja) | 2009-01-14 |
Family
ID=15488020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15003299A Expired - Fee Related JP4207311B2 (ja) | 1999-05-28 | 1999-05-28 | サイドウォール除去液 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4207311B2 (https=) |
-
1999
- 1999-05-28 JP JP15003299A patent/JP4207311B2/ja not_active Expired - Fee Related
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