JP2000333480A - Piezoelectric actuator, watch and portable apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a piezoelectric actuator by which the vibration of a piezoelectric element is transmitted with satisfactory efficiency, which is suitably miniaturized, suitably made thin and by which a drive force is transmitted stably. SOLUTION: A long plate-like diaphragm 10, in which a piezoelectric element and a reinforcing plate are laminated, is supported to a base plate by a support member 11, and it is urged to the side of a rotor 100 by the elastic force of the support member 11. Thereby, a protrusion part 36, which is installed at the diaphragm 10 is brought into contact with the side face of the rotor 100. When the diaphragm 10 is vibrated longitudinally to the right and left directions in the figure by this constitution, the rotor 10 is made to turn counterclockwise according to the displacement of the protrusion part 36.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric actuator, and a timepiece and a portable device provided with the piezoelectric actuator.

[0002]

2. Description of the Related Art Various types of piezoelectric actuators utilizing the piezoelectric effect of piezoelectric elements have been developed recently because piezoelectric elements have excellent conversion efficiency from electric energy to mechanical energy and excellent responsiveness. This piezoelectric actuator includes a piezoelectric buzzer, a printer inkjet head,
Alternatively, it is applied to fields such as ultrasonic motors.

FIG. 38 is a plan view schematically showing an ultrasonic motor using a conventional piezoelectric actuator. As shown in FIG. 1, this type of ultrasonic motor is of the so-called "stick type" type, in which the tip of a vibrating reed coupled to a piezoelectric element is brought into contact with the rotor surface with a slight inclination. Under such a configuration, when the piezoelectric element expands and contracts due to the AC voltage from the oscillating section, and the vibrating piece reciprocates in the length direction, a component force is generated in the circumferential direction of the rotor and the rotor rotates. ing.

There is also known a technique in which two ultrasonic vibrators (piezoelectric elements) are provided, each ultrasonic vibrator is vibrated at its own electric resonance frequency, and the vibrating piece is displaced by the vibration. (JP-A-10-225151).

[0005]

However, the displacement of the piezoelectric element is very small, depending on the applied voltage, and is usually about several μm. The same applies to the case where the piezoelectric element is vibrated at the above-described resonance frequency. For this reason, it has been practiced to amplify the displacement and transmit it to the rotor by some kind of amplifying mechanism. However, when the amplification mechanism is used, there is a problem that energy is consumed to move the amplification mechanism, and efficiency is reduced. Further, in the case where the driving force is transmitted through the amplification mechanism, it may be difficult to transmit the driving force to the stable rotor.

[0006] Further, small portable devices such as wristwatches are driven by batteries, so that it is necessary to suppress power consumption and drive voltage. Therefore, when a piezoelectric actuator is incorporated in such a portable device, it is particularly required that the energy efficiency is high and the driving voltage is low.

In a calendar display mechanism for displaying the date and day of the week in a timepiece or the like, the rotational driving force of an electromagnetic step motor is intermittently transmitted to a date wheel and the like via a handwheel train. It is common to feed and drive a date wheel. On the other hand, since a wristwatch is carried around a wrist with a belt, there has been a long-standing demand for a thin wristwatch for convenient carrying. To pursue a reduction in thickness, it is necessary to reduce the thickness of the calendar display mechanism. However, since a step motor is configured by incorporating components such as a coil and a rotor in an out-of-plane direction, there is a limit in reducing its thickness. For this reason, the conventional calender mechanism using the step motor has a problem that it is not suitable for thinning the structure.

[0008] In particular, a clock having a calendar display mechanism,
In order to share the mechanical system of hand movement (so-called movement) with a watch without such a mechanism, it is necessary to configure a calendar display mechanism on the dial side. It is difficult to make it thin enough to be configured. Therefore, in the conventional timepiece, it is necessary to separately design and manufacture the mechanical system of the hand movement depending on the presence or absence of the display mechanism, which has been a problem in improving the productivity.

The present invention has been made in view of the above circumstances, and efficiently transmits vibration of a piezoelectric element, is suitable for reduction in size and thickness, and is capable of stably transmitting a driving force. An object of the present invention is to provide an actuator, and a timepiece and a portable device including the same.

[0010]

In order to solve the above-mentioned problems, a piezoelectric actuator according to the present invention comprises: a support; a vibration plate in which a plate-shaped piezoelectric element having a longitudinal direction and a reinforcing plate are laminated; An elastic member having a fixed portion fixed to a support, and an attaching portion attached to the diaphragm, wherein the elastic force is applied to the diaphragm such that a longitudinal end of the diaphragm abuts on the driven object. When the piezoelectric element vibrates in the longitudinal direction of the diaphragm, the vibration causes the diaphragm to vibrate,
The driving target is driven in one direction in accordance with displacement of the diaphragm due to the vibration.

Further, the piezoelectric actuator according to the present invention includes a support, a vibration plate in which a plate-shaped piezoelectric element having a longitudinal direction and a reinforcing plate are laminated, a fixing portion fixed to the support, A support member having an attachment portion attached to the diaphragm, the support member supporting the diaphragm on the support, and an elastic force applied to the diaphragm so that a longitudinal end of the diaphragm abuts on the driven object. An elastic member to be provided, and when the piezoelectric element vibrates in the longitudinal direction of the diaphragm, the vibration causes the diaphragm to vibrate, and the driven object is displaced by the displacement of the diaphragm due to the vibration. Is driven in one direction.

According to this configuration, the diaphragm vibrates due to the vibration of the piezoelectric element. With the displacement of the diaphragm due to this vibration, the driven object with which the diaphragm is in contact is driven in one direction. In this configuration, since a diaphragm having a long plate-shaped piezoelectric element is used, a large displacement can be obtained at a low voltage, and efficient driving can be performed.
In addition, since components and the like arranged to overlap the diaphragm are unnecessary, if the diaphragm is reduced in thickness, the entire actuator can be reduced in thickness. Further, since the diaphragm is brought into contact with the driven object, the contact state between the diaphragm and the driven object is stabilized, and more stable transmission of the driving force can be performed. Further, since the diaphragm has a structure in which the reinforcing plate and the piezoelectric element are laminated, breakage of the diaphragm due to excessive amplitude or external force can be reduced. Further, since the diaphragm drives the driven object in one direction, the driving force can be transmitted efficiently.

[0013] The diaphragm may be rotatably supported in a plane to which the diaphragm belongs. At this time, the center of rotation of the diaphragm is a reverse line extending from the contact point of the diaphragm and the driven object in a direction opposite to the driving direction of the driven object, and a line orthogonal to the reverse line at the contact point. And may be located in a quadrant formed between the diaphragm and an orthogonal line extending toward the diaphragm. With this configuration, when the driven object tries to move in the opposite direction due to an external force or the like, the end of the diaphragm is kept in contact with the driven object by rotating the diaphragm. By returning to the position, the driven object can be returned to the position before moving in the reverse direction.

Further, the piezoelectric actuator according to the present invention includes a support, a vibration plate in which a plate-shaped piezoelectric element having a longitudinal direction and a reinforcing plate are laminated, and the vibration plate in a plane to which the vibration plate belongs. Selecting means for selecting any of longitudinal vibration for vibrating in the longitudinal direction and bending vibration for swinging the diaphragm in a width direction orthogonal to the longitudinal direction in the plane, and fixed to the support; A fixing member, an elastic member having an attaching portion attached to the diaphragm, a support member that applies an elastic force to the diaphragm so that a longitudinal end of the diaphragm contacts the driven object. When the longitudinal vibration is selected by the selecting means, by the longitudinal vibration of the diaphragm,
The driving object is driven in one direction in accordance with the displacement of the vibration plate due to the vibration, and when the bending vibration is selected by the selection means, the vibration plate performs the bending vibration, thereby causing the vibration due to the vibration. The apparatus is characterized in that the object to be driven is driven in a direction opposite to that during the longitudinal vibration in accordance with the displacement of the plate.

Further, a piezoelectric actuator according to the present invention is characterized in that a vibration plate in which a support, a plate-shaped piezoelectric element having a longitudinal direction and a reinforcing plate are laminated, and the vibration plate in a plane to which the vibration plate belongs are provided. Selecting means for selecting any of longitudinal vibration for vibrating in the longitudinal direction and bending vibration for swinging the diaphragm in a width direction orthogonal to the longitudinal direction in the plane, and fixed to the support; A support member that has a fixed portion and an attachment portion attached to the vibration plate, and supports the vibration plate on the support, and the vibration member is configured such that a longitudinal end of the vibration plate comes into contact with the driven object. An elastic member that applies elastic force to the plate, and when the longitudinal vibration is selected by the selection unit, the diaphragm vibrates by the longitudinal vibration, so that the diaphragm is displaced by the vibration. Drive When the elephant is driven in one direction, and the bending vibration is selected by the selecting means, the vibration plate performs the bending vibration, thereby causing the driven object to move along the longitudinal vibration with the displacement of the vibration plate due to the vibration. It is characterized by being driven in the opposite direction to the time.

According to this configuration, when the selecting means selects the longitudinal vibration, the driven object with which the diaphragm is in contact is driven in one direction with the displacement of the diaphragm due to the vibration. . On the other hand, when the selecting means selects the bending vibration, the driven object with which the diaphragm is in contact is driven in the opposite direction with the displacement of the diaphragm due to the vibration. Therefore, the drive target can be driven in the forward and reverse directions without disposing a plurality of diaphragms or providing a mechanism for adjusting the direction of the diaphragm, that is, without increasing the size of the apparatus. In addition, since components and the like arranged to overlap the diaphragm are unnecessary, if the diaphragm is reduced in thickness, the entire actuator can be reduced in thickness. Further, since the diaphragm is brought into contact with the driven object, the contact state between the diaphragm and the driven object is stabilized, and more stable transmission of the driving force can be performed. Further, since the diaphragm has a structure in which the reinforcing plate and the piezoelectric element are laminated, breakage of the diaphragm due to excessive amplitude or external force can be reduced.

The vibrating plate may be formed in a tapered shape in which the end portion contacting the driven object is narrower than the other end. With this configuration, it is possible to increase the displacement of the end portion that comes into contact with the driven object. If the end contacting the drive target has irregularities and the displacement of the end is small, the amount of driving may decrease due to the influence of the irregularities. The driving force can be transmitted more reliably without being affected by the driving force. Further, it is possible to suppress the vibration in the width direction of the vibration plate from resonating and amplifying, that is, it is possible to suppress the vibration that hinders the vibration for driving the driven object. Therefore, the driving force can be transmitted more efficiently.

Further, the reinforcing plate may have an extending portion which is thinner than a central portion of the vibration plate on the driven object side than the piezoelectric element and extends to the driven object side to abut on the driven object. Good. With this configuration, the displacement of the extension portion due to the vibration of the diaphragm can be increased, and the driving force can be transmitted more efficiently.

Further, the mounting portion of the support member may be mounted at a plurality of locations in the longitudinal direction of the diaphragm. With this configuration, the mounting position of the diaphragm is stabilized, and more stable transmission of the driving force can be achieved.

Further, one of the attachment portions of the support member may be attached to a position of the vibration plate that serves as a node of vibration. By doing so, the vibration energy loss of the diaphragm is reduced, and the driving force can be transmitted more efficiently.

Further, the position of the mounting portion of the support member may substantially coincide with the antinode position of the vibration of the support member accompanying the vibration of the diaphragm. In this way, even when the diaphragm is supported at a plurality of locations, the interference of the vibration of the diaphragm is reduced, and the driving force can be transmitted more efficiently.

Also, the resonance frequency of the longitudinal vibration of the vibration plate due to the vibration of the piezoelectric element and the resonance frequency of the bending vibration generated in the vibration plate due to the reaction force received from the driven object when the vibration plate vibrates are substantially the same. It may be the same. With this configuration, the vibration due to the vibration of the piezoelectric element and the vibration due to the reaction force from the driven object resonate, and the end of the diaphragm moves along the elliptical orbit. If the end moves along the elliptical trajectory in this way, the contact time between the end and the driven object increases, that is, the displacement of the end at the time of contact increases, and the driving force is transmitted more efficiently. be able to.

Further, the reinforcing plate may be formed thinner than the piezoelectric element. With this configuration, the effect of the reinforcing plate that hinders the vibration of the piezoelectric element is reduced, and more efficient driving force transmission can be performed.

Further, the end of the vibration plate which contacts the object to be driven may have a projection, and the projection may contact the object to be driven. With this configuration, even when the driving target is a metal member, it is possible to prevent a short circuit or the like due to the contact between the piezoelectric element and the driving target, and the protrusion serving as a contact portion with the driving target. Since only the portion needs to be polished or the like, manufacturing and maintenance are facilitated.

Further, the diaphragm may be formed in a rectangular shape with one apex notched, and the notched portion of the diaphragm abuts on the driven object. By doing so, only the notched portion needs to be polished or the like, which facilitates manufacture and maintenance.

Further, the piezoelectric element includes an electrode portion disposed at a central portion in the longitudinal direction of the diaphragm, and an electrodeless portion having no electrodes disposed at both ends in the longitudinal direction of the diaphragm. You may have it. With this configuration, if power is supplied only to the central electrode of the piezoelectric element, the vibration of the central part of the piezoelectric element is transmitted to both ends. Further, when resonance occurs due to vibration of the central portion of the piezoelectric element, the amount of deformation at both ends becomes large, and it is not necessary to supply power to both ends to deform the piezoelectric elements at both ends. Therefore,
Power consumption can be reduced while maintaining the displacement of the diaphragm, that is, the driving force.

Further, the mounting portion of the support member may be mounted at a position that serves as a node of vibration of the diaphragm. By doing so, the loss of vibration energy of the diaphragm is reduced, and the driving force can be transmitted more efficiently. Further, the position of the mounting portion of the support member may substantially coincide with the position of a node of vibration of the support member accompanying the vibration of the diaphragm.

Further, the fixing portion of the support member may be located on a driving direction line of the driven object. With this configuration, the contact position and the contact angle between the end of the diaphragm and the driven object are stabilized, and more stable transmission of the driving force becomes possible.

Further, a conductor may be used as the reinforcing plate, and the conductor may be laminated above and below the piezoelectric element, and power may be supplied to the piezoelectric element via the reinforcing plate laminated above and below the piezoelectric element. It may be. With this configuration, since the reinforcing plate that suppresses the breakage of the diaphragm has a function of supplying power to the piezoelectric element, a conductive configuration between the outside and the piezoelectric element is simplified.

Further, a conductor may be used as the support member, and electric power may be supplied to the piezoelectric element via the support member. According to this configuration, the support member has a support function of supporting the diaphragm and a power supply function, and the conduction configuration between the outside and the piezoelectric element is simplified.

Further, an elastic conductor may be further provided to contact the upper and lower surfaces of the vibrating plate to sandwich the vibrating plate, and to supply power to the piezoelectric element via the elastic conductive member. Good. This simplifies the electrical connection between the outside and the piezoelectric element.

In addition, the apparatus may further include a conductive wire wound around the diaphragm while being in contact with the periphery of the diaphragm, and power may be supplied to the front piezoelectric element via the conductive wire. This simplifies the electrical connection between the outside and the piezoelectric element.

A piezoelectric actuator according to the present invention has a piezoelectric element, and drives a driven object by the vibration of the piezoelectric element. The piezoelectric actuator is stacked on and under the piezoelectric element and is formed of a conductor. It is characterized by comprising a reinforcing plate and supplying power to the piezoelectric element via the reinforcing plate. According to this configuration, since the reinforcing plates are provided above and below the piezoelectric element, damage to the piezoelectric element due to excessive amplitude or external force can be reduced. Also, power can be supplied to the piezoelectric element through this reinforcing plate,
The conduction configuration to the piezoelectric element is simplified.

A piezoelectric actuator according to the present invention has a piezoelectric element, and drives a driven object by vibration of the piezoelectric element. The piezoelectric actuator is formed of a support and a conductor. And a support member for supporting the support, wherein power is supplied to the piezoelectric element via the support member. According to this configuration, the support member has a support function of supporting the piezoelectric element and a power supply function, and the conduction configuration between the outside and the piezoelectric element is simplified.

Further, the piezoelectric actuator according to the present invention has a piezoelectric element, and drives a driven object by vibrating the piezoelectric element. An elastic conductor sandwiching the piezoelectric element is provided, and power is supplied to the piezoelectric element via the elastic conductor. According to this configuration, the conductive configuration between the outside and the piezoelectric element is simplified.

Further, the piezoelectric actuator according to the present invention is a piezoelectric actuator having a piezoelectric element and driving an object to be driven by vibration of the piezoelectric element, comprising a conductive wire wound around the piezoelectric element while being in contact therewith. ,
Power is supplied to the piezoelectric element through the conductive wire. According to this configuration, the conductive configuration between the outside and the piezoelectric element is simplified.

Further, a timepiece according to the present invention is a piezoelectric actuator according to any one of claims 1 to 22, a disk-shaped rotor driven to rotate by the piezoelectric actuator, and a ring rotated by the rotational force of the rotor. And a calendar display car in a shape of a letter. According to this configuration, the built-in piezoelectric actuator has a structure suitable for thinning, so that the entire timepiece can be easily thinned. In addition, since the built-in piezoelectric actuator has high efficiency, the energy consumption of the entire timepiece can be reduced.

The portable device according to the present invention is characterized in that
A piezoelectric actuator according to any one of claims 22 to 22,
And a battery for supplying electric power to the piezoelectric actuator. According to this configuration, since the built-in piezoelectric actuator is suitable for thinning, it is easy to reduce the thickness of the entire device, and a high-efficiency piezoelectric actuator is mounted, so that the battery life is extended,
It is suitable as a portable device.

[0039]

Embodiments of the present invention will be described below with reference to the drawings. A. First embodiment A-1. First, a calendar display mechanism of a wristwatch FIG. 1 is a diagram showing a calendar display mechanism of a wristwatch including a piezoelectric actuator according to the first embodiment of the present invention. As shown in the figure, this calendar display mechanism
Piezoelectric actuator A1, rotor 100, intermediate wheel 10
1 and a ring-shaped date indicator 102 on which day and day are written.

The rotor 100 supported by the main plate (support) 103 is moved by an arrow Y in FIG.
It is designed to be driven to rotate in the direction shown by. The intermediate wheel 1 supported by the main plate 103 is attached to the rotor 100.
01 is meshed, and the date wheel 102 is meshed with the intermediate wheel 101. With this configuration, the date indicator 10 is rotated with the rotation of the rotor 100 driven by the piezoelectric actuator A1.
2 can be rotated in the direction indicated by arrow Z in the figure.

Next, the configuration of a timepiece incorporating the above-described calendar display mechanism will be described with reference to FIG. In the figure, the above-mentioned calendar display mechanism is incorporated in the shaded portion. A disk-shaped dial 201 is provided above the calendar display mechanism (hatched portion). A window 202 is provided on a part of the outer periphery of the dial 201 for displaying a date.
The date written in 02 can be seen. A movement 204 for driving the hands 203 is provided below the dial 201. Under this configuration, the date indicator 102
Is rotated, the display such as the day or day of the week displayed on the window 202 is switched.

A-2. Next, the piezoelectric actuator according to the present embodiment will be described with reference to FIGS. As shown in FIG. 3, the piezoelectric actuator A1 includes a long plate-shaped vibrating plate 10 formed long in the left-right direction in the figure and a support member 11 for supporting the vibrating plate 10 on the ground plate 103 (see FIG. 1). Have.

A protrusion 36 projects from the longitudinal end 35 of the diaphragm 10 toward the rotor 100, and the protrusion 36 contacts the side surface of the rotor 100. By providing such protrusions 36, the rotor 100
In order to maintain the state or the like of the contact surface with the rotor 100, work such as polishing may be performed only on the protrusion 36, so that the contact portion with the rotor 100 can be easily managed. As the protrusion 36, a conductor or a non-conductor can be used.
If the piezoelectric elements 30 and 31 are made of a non-conductor, even if they come into contact with the rotor 100 which is generally made of a metal,
Can be prevented from being short-circuited.

One end (attachment) 3 of the support member 11 is located slightly closer to the rotor 100 than the center of the diaphragm 10 in the longitudinal direction.
7 is attached. The other end (fixed portion) 38 of the support member 11 is supported on the main plate 103 (see FIG. 1) by screws 39. Under this configuration, the supporting member 11 supports the diaphragm 10 in a state where the diaphragm 10 is urged toward the rotor 100 by the elastic force, and thereby the projection 3 of the diaphragm 10 is formed.
6 is in contact with the side surface of the rotor 100.

As shown in FIG. 4, the diaphragm 10 is provided between two piezoelectric elements 30, 31.
It has a laminated structure in which a reinforcing plate 32 made of stainless steel or the like having a smaller thickness than that of the first metal plate 1 is arranged. Thus, the piezoelectric element 3
By arranging the reinforcing plate 32 between 0 and 31, it is possible to reduce damage to the diaphragm 10 due to excessive amplitude or external force of the diaphragm 10. Further, by using a reinforcing plate 32 having a smaller thickness than the piezoelectric elements 30 and 31, vibration of the piezoelectric elements 30 and 31 is prevented as much as possible.

Electrodes 33 are arranged on the surfaces of the piezoelectric elements 30 and 31 arranged vertically. A voltage is supplied to the piezoelectric elements 30 and 31 via the electrodes 33 from a conductive configuration described later. Here, as the piezoelectric elements 30 and 31, lead zirconate titanate (PZT (trademark)), quartz, lithium niobate, barium titanate, lead titanate, lead metaniobate, polyvinylidene fluoride, lead zinc niobate ( (Pb (Zn1 / 3-Nb2 / 3) 03 1-
x-PbTi 03 x) x varies depending on the composition. x = 0.09), lead scandium niobate ((Pb ((Sc1 / 2Nb1 / 2) 1-x Tix)) 0
3) x varies depending on the composition. x = 0.09) or the like.

When an AC voltage is applied to the piezoelectric elements 30 and 31 from the drive circuit, which will be described later, via the electrodes 33, the diaphragm 10 vibrates as the piezoelectric elements 30 and 31 expand and contract. At this time, as shown in FIG. 5, the diaphragm 10 is vibrated by longitudinal vibration that expands and contracts in the longitudinal direction, whereby the diaphragm 10 vibrates in the direction indicated by the arrow in FIG. 3 ( No load state, that is, a state in which the protrusion 36 is not in contact with the rotor 100). Further, as described above, the vibration plate 10 is replaced with the long plate-shaped piezoelectric elements 30 and 31.
Are stacked, and driven in parallel, a larger displacement can be obtained with a low driving voltage.

A-3. Operation of Piezoelectric Actuator Next, the operation of the piezoelectric actuator A1 having the above configuration will be described. First, when a voltage is applied to the diaphragm 10 from a drive circuit (not shown), the piezoelectric elements 30 and 31 bend and vibrate due to expansion and contraction, and as shown in FIG. The diaphragm 10 vibrates in the direction of the arrow. The rotor 100 is rotated in the direction of the arrow in FIG. Thus, the rotor 10
By rotating 0, the date wheel 102 is rotated via the intermediate wheel 101 (see FIG. 1), and the displayed day or day is switched.

Here, in the piezoelectric actuator A1, the projection 36 to be brought into contact with the rotor 100 is provided at a position deviated from the center line of the diaphragm 10 shown by a dashed line in FIG. The bending force is generated in the diaphragm 10 by the reaction force of FIG. If the applied voltage, the shape of the diaphragm 10 and the position of the protrusion 36 are set so that the vibration frequency of the bending vibration and the longitudinal vibration generated by the expansion and contraction of the piezoelectric elements 30 and 31 substantially resonate, the vibration can be obtained. The amplitude of the vibration generated in the plate 10 increases. Thus, the piezoelectric element 30,
If the longitudinal vibration caused by the expansion and contraction of 31 and the bending vibration described above resonate, the projection 36 moves along the elliptical orbit as shown in FIG. That is, if the bending vibration that resonates with the longitudinal vibration is excited, the protrusion 36 moves along a larger elliptical orbit. If the protrusion 36 moves along such a large elliptical trajectory, the time during which the protrusion 36 contacts the rotor 100 becomes longer, and the displacement of the protrusion 36 at the time of contact increases. Therefore, by inducing bending vibration that resonates with longitudinal vibration due to expansion and contraction of the piezoelectric elements 30 and 31, it is possible to transmit driving force with higher efficiency.

Also, in the piezoelectric actuator A1,
The protruding portion 36 causes the rotor 10
Since it is urged to the zero side, the rotor 100 and the protrusion 36
Sufficient friction is obtained. Thereby, slippage between the protrusion 36 and the rotor 100 is reduced, and stable driving force transmission from the protrusion 36 to the rotor 100 becomes possible. Furthermore, contact can be maintained even if there is a dimensional error or a change with time. In order to induce the bending vibration due to the reaction force from the rotor 100 described above, it is sufficient that the contact portion of the diaphragm 10 with the rotor 100, that is, the protrusion 36 is displaced from the center line of the diaphragm 10. The part 36 may be provided at a position other than the position shown in the figure.

In the piezoelectric actuator A1 according to the present embodiment, the end 37 of the support member 11 is located at a position where the amplitude of the center line of the diaphragm 10 shown by the broken line in FIG. Is attached. More specifically, the rotor 100 is located closer to the center of the diaphragm 10 in the longitudinal direction.
Attached to the side. This is because when the diaphragm 10 is rectangular as described above, the central portion in the longitudinal direction of the diaphragm 10 becomes a node of vibration when no load is applied, but due to the influence of the reaction force from the rotor 100 as described above. This is because, as shown in FIG. 8, the node of the vibration is actually located closer to the rotor 100 than the center. Thus, the diaphragm 1
By supporting 0 at a position that is a node of vibration, loss of vibration energy is reduced, and more efficient driving force transmission becomes possible. Further, the supporting member 11 accompanying the vibration of the diaphragm 10
By making the position of the vibration node substantially coincide with the end 37 of the support member 11, the loss of vibration energy can be further reduced.

Further, in the piezoelectric actuator A1 according to the present embodiment, the vibration plate 10 having the structure in which the piezoelectric elements 30 and 31 and the reinforcing plate 32 are laminated can drive the rotor 100 to rotate without interposing the amplification member. Therefore, the configuration is simplified, and the size of the device is easily reduced. Further, the mechanical components of the piezoelectric actuator A1 are only the vibration plate 10 and the support member 11, and no components or the like are stacked in the thickness direction (the direction perpendicular to the paper surface of FIG. 1). is there.

The piezoelectric actuator A1 is configured to drive the rotor 100 only in the direction indicated by the arrow in the figure, so that another diaphragm for driving the rotor 100 in the opposite direction or a diaphragm attached to the rotor 100 can be used. Since there is no mechanism for changing the contact direction, that is, there are few elements that hinder the vibration of the diaphragm 10, the driving force can be transmitted more efficiently.

In the piezoelectric actuator A1 according to this embodiment, since the rotor 100 is driven only in one direction, it is necessary to restrict the rotation of the rotor 100 in the reverse direction. May try to reverse rotation. For example, the protrusion 36 and the rotor 1
When a reverse rotation force exceeding the frictional force between 00 and 00 is generated, the two slip and allow the reverse rotation of the rotor 100. However, in the piezoelectric actuator A1 according to the present embodiment, as shown in FIG. 9, the support member 11 is not rigid but has elasticity. With rotation,
With the protrusion 36 in contact with the rotor 100, the diaphragm 10
Is allowed to rotate. And
Due to the elastic force of the support member 11, the diaphragm 10 returns to the lower position indicated by the dashed line in the figure. At this time, since the protrusions 36 are in contact with the rotor 100, the rotor 100 also returns in the forward direction in accordance with the return of the diaphragm 10. Therefore, the reverse rotation of the rotor 100 can be restricted. Here, as shown in FIG. 10, in the present embodiment, the diaphragm 1
A quadrant formed by a line B extending from the contact point A between the rotor 100 and the protrusion 36 in the direction opposite to the driving direction of the rotor 100 at the point A, and a line C orthogonal to the line B at the point A The support member 1 is set so that the center of rotation is located within the quadrant.
The vibration plate 10 is allowed to rotate around one end 38. By providing the rotation center at such a position, the rotation and the return operation are performed by the diaphragm 10 as described above, and the reverse rotation of the rotor 100 can be suppressed.

When the piezoelectric actuator A1 is applied to the calendar display mechanism as described above, the size of the piezoelectric actuator A1 itself can be easily reduced. The diameter of the rotor 100 can be increased. Therefore, the rotor 1 obtained from the piezoelectric actuator A1 can be obtained without increasing the voltage applied to the piezoelectric elements 30 and 31.
00 can be increased.

A-4. Modifications of Piezoelectric Actuator The piezoelectric actuator according to the present invention is not limited to the above-described embodiment, and various modifications as described below are possible.

A-4-1. First Modification In the piezoelectric actuator A1 shown in the above-described embodiment, the protrusion 36 is provided at the contact portion of the vibration plate 10 with the rotor 100. However, as shown in FIG. A notch 90 may be formed by cutting a vertex of the plate 10 on the rotor 100 side, and the notch 90 may be brought into contact with the side surface of the rotor 100. Also in this case, similarly to the above-described protrusion 36, the notch 90
It becomes easy to manage the surface condition of the substrate.

A-4-2. Second Modification In the above-described embodiment, the electrodes 33 are provided on the entire surfaces of the piezoelectric elements 30 and 31. However, as shown in FIG. The electrodes 33 may be arranged, and the electrodes 33 may not be arranged at both ends. That is, the piezoelectric elements 30 and 31 may be configured to have an electrode portion having an electrode on its surface and electrodeless portions located on both ends thereof. This makes it possible to reduce the driving voltage while maintaining the driving force to the rotor 100. This is because when the vibration plate 10 is vibrated at its natural vibration frequency, the displacement at both ends of the vibration plate 10 due to the vibration is sufficiently large, and a voltage is applied to that portion to expand and contract the piezoelectric elements 30 and 31 at both ends. This is because, even if it is performed, the displacement is not further increased.

A-4-3. Third Modified Example In the above-described embodiment, the rectangular diaphragm 10 is used. However, as shown in FIG. 13, a tapered diaphragm 95 having a narrower rotor 100 side is used. Is also good. When manufacturing the vibration plate 95 having such a shape, a tapered piezoelectric element and a reinforcing plate may be laminated similarly to the vibration plate 10 described above. Such a diaphragm 95
By using this, the displacement of the end portion 96 of the diaphragm 10 on the rotor 100 side is increased, and the transmission efficiency of the driving force is improved. Further, since the length in the width direction, which is the vertical direction in the figure, becomes uneven, resonance in the width direction of the diaphragm 10 can be suppressed, that is, vibration in the width direction can be reduced.

A-4-4. Fourth Modification In addition, as shown in FIG.
A horn portion (extending portion) 110 extending to the 0 side may be provided. When such a horn portion 110 is provided, as shown in FIG. 15, the reinforcing plate 32 is formed into a shape including the horn portion 110 as shown in the figure, and the piezoelectric elements 30 and 31 are respectively laminated on the upper and lower sides of this. What should I do? By vibrating the diaphragm 10 under this configuration, FIG.
The diaphragm 10 and the horn 1 have an amplitude as indicated by the middle broken line.
10 vibrates. Therefore, the displacement of the tip of the horn portion 110 that comes into contact with the rotor 100 is increased, and the driving force can be efficiently applied. The horn section 110 is shown in FIG.
The shape shown in FIG. 16 is not limited to the shape shown in FIG.

A-4-5. Fifth Modification As shown in FIG. 17, a tangent between the protrusion 36 of the diaphragm 10 and the rotor 100, that is, a direction perpendicular to the direction of the pressing force F from the protrusion 36 to the rotor 100 in the initial state of vibration. The end 38 of the support member 11, that is, the portion fixed to the main plate 103 may be located substantially on the line S, that is, the driving direction line at the contact point between the rotor 100 and the protrusion 36. If the diaphragm 10, the support member 11, and the rotor 100 are arranged in such a positional relationship, the protrusion 3
6 to adjust the pressing force against the rotor 100, etc.
Even when the positions of the support member 11 and the diaphragm 10 are finely adjusted around the end 38 fixed by the screw 39, the contact position and the angle between the rotor 100 and the projection 36 do not change.
A stable driving force can always be applied. Further, it is possible to prevent a change in the contact angle between the diaphragm and the rotor due to a shape, a positional shift, a change with time, and the like.

A-4-6. Sixth Modification As shown in FIG. 18, two ends of the diaphragm 10 in the longitudinal direction may be supported by two support members 11, respectively. In this way, vibration in the width direction (vertical direction in the figure) of the diaphragm 10 can be suppressed, that is, vibration that hinders horizontal vibration in the figure required for driving the rotor 100 can be suppressed. . In this case, as shown in FIG. 19, the end 37 of the support member 11 substantially coincides with the antinode of the vibration of the support member 11 caused by the vibration of the diaphragm 10, for example, the length of the support member 11 is changed to the length of the support member 11. When the length is set to １ ／ of the vibration wavelength of the above, the interference of the vibration of the diaphragm 10 in the left-right direction in the drawing is reduced, and the efficiency is further improved.

When the diaphragm 10 is supported by the two support members 11 as described above, as shown in FIG. 20, one of the support members 11 supports a position serving as a node of the vibration of the diaphragm 10. Alternatively, the other support member 11 may support the end of the diaphragm 10 on the rotor 100 side. With this configuration, since one of the support members 11 supports the node of vibration, the loss of vibration energy is reduced, and the other support member 11 is moved in the width direction near the contact portion with the rotor 100. Vibration can be suppressed.

A-4-7. Seventh Modification In the embodiment described above, the support member 11 is
0 was urged to the rotor 100 side, but FIG.
As shown in FIG. 1, a spring member (elastic member) 180 may be provided to urge the diaphragm 10 toward the rotor 100. As shown in the figure, a support member 11 is attached to the upper side of the diagram of the diaphragm 10, and a lower side of the diaphragm 10 is
One end of the spring member 180 is attached. The other end of the spring member 180 is supported by a pin 181 erected on the main plate 103 (see FIG. 1). Thereby, the diaphragm 10
Are urged toward the rotor 100 on the upper side of the figure,
6 is brought into contact with the side surface of the rotor 100. If the spring member 180 is provided to urge the diaphragm 10 toward the rotor 100 in this manner, stable transmission of the driving force can be performed similarly to the piezoelectric actuator A1 of the above-described embodiment.

In the case where the supporting member 11 for supporting the vibration plate 10 and the spring member 180 for urging the vibration plate 10 toward the rotor 100 are provided, as shown in FIG. The diaphragm 10 may be rotatable around a quadrant formed by the lines B and C, for example, around the position of the end 38 as shown in the figure. With this configuration, even when the rotor 100 attempts to reversely rotate due to external force, as shown in FIG. 23, after the diaphragm 10 rotates with the reverse rotation of the rotor 100, the diaphragm 10 By returning to the position, the rotor 100 returns in the forward direction with the return of the diaphragm 10, and the reverse rotation of the rotor 100 can be suppressed.

When the support member 11 and the spring member 180 are provided as described above, the diaphragm 10 may be formed in a tapered shape as shown in FIG. 24, or a horn portion (see FIG. 14). ) May be provided.

A-4-8. Eighth Modification In the above-described embodiment, the vibration plate 10 has a structure in which the piezoelectric elements 30 and 31 are laminated on the reinforcing plate 32 and below, respectively.
The reinforcing plates 32 may be laminated on the upper and lower sides of 51, respectively. In this case, as shown in FIG. 25, the upper reinforcement plate 32 is supported by the support member 11a, and the lower reinforcement plate 32 is supported by the support member 11b.
The support members 11a and 11b may be formed of a conductor. Under this configuration, the drive circuit 250 sends the support members 11a and 11a
b and the driving voltage through the reinforcing plate 32 to the piezoelectric element 251.
May be supplied. In this way, the support members 11a and 11b have a conduction function of supplying a driving voltage to the piezoelectric element 251 in addition to a function of supporting the vibration plate 10 while urging the same toward the rotor 100 side. Therefore,
It is not necessary to separately provide a conductive configuration for supplying a driving voltage to the piezoelectric element 251, and the configuration is simplified. Also,
Conductive parts or the like that hinder the vibration of the diaphragm 10 are not required, and efficient driving force transmission can be performed.

A-4-9. Ninth Modification As shown in FIGS. 26 and 27, a supporting member formed of a conductor is also used in the case of using a reinforcing plate 32 and a vibrating plate 10 in which piezoelectric elements 30 and 31 are respectively stacked above and below the reinforcing plate 32. A drive voltage may be supplied from the drive circuit 250 to the piezoelectric elements 30 and 31 via 11c and 11d.

The support member 11c is formed into a shape that is branched into two on the diaphragm 10 side, and has an upper end portion 260 that is branched upward (toward the paper surface in FIG. 26) and a lower portion (toward the paper surface in FIG. 26). And has a lower end portion 261 that branches off. Upper end 26
Numeral 0 is attached to the electrode 33 formed on the surface of the piezoelectric element 30 by solder or a conductive adhesive, and the lower end 261 is connected to the electrode 33 formed on the surface of the piezoelectric element 31 by soldering or conductive. It is attached with a conductive adhesive or the like. On the other hand, the support member 11d is attached to the reinforcing plate 32, so that the driving circuit 250
Is supplied with a drive voltage. Also in this case, as described above, the support members 11c and 11d
0 and a function of supporting the piezoelectric elements 30 and 3
As a result, the structure has a simple structure, and efficient driving force transmission can be performed.

A-5. Next, a description will be given of a conductive configuration for supplying a drive voltage from a drive circuit to the piezoelectric elements of the piezoelectric actuators of the various aspects described above. As described in the eighth and ninth modified examples described above, a drive voltage may be supplied from a drive circuit to a piezoelectric element via a support member formed of a conductor, but as shown in FIG. The driving voltage may be supplied to the piezoelectric element in a simple conduction configuration. As shown in the drawing, in this conductive configuration, the upper and lower surfaces (electrodes 33) of the diaphragm 10 are sandwiched by a C-shaped elastic conductive member 280, and wiring is connected from the reinforcing plate 32 to the drive circuit 250. If such an elastic conducting member 280 is used, it has a simple configuration,
The piezoelectric elements 30 and 3 stacked vertically from the drive circuit 250
1 can be supplied with a drive voltage.

As shown in FIGS. 29 and 30,
The conductive wire 290 may be wound around the diaphragm 10, and a drive voltage may be supplied from the drive circuit 250 to the piezoelectric elements 30 and 31 via the wound conductive wire 290. Even in this case, the driving voltage can be supplied to the piezoelectric elements 30 and 31 with a simple conduction configuration. When a voltage is supplied through the elastic conductive member 280 or the conducting wire 290 as described above, the laminated structure of the diaphragm 10 may be a structure in which electrodes are arranged on upper and lower surfaces, or a conductor may be formed on upper and lower surfaces. A structure in which such a reinforcing plate is arranged may be used. In addition to the vibration plate having the laminated structure of the piezoelectric element and the reinforcing plate, the above-described elastic conductive member 2 is also used when supplying a voltage to the piezoelectric element.
80 or a conductor 290 can be used.

B. Second Embodiment Next, a piezoelectric actuator according to a second embodiment of the present invention will be described. As shown in FIG. 31, the piezoelectric actuator according to the second embodiment includes a diaphragm 31 instead of the diaphragm 10 of the piezoelectric actuator A1 according to the first embodiment.
0 is provided.

As shown in FIG. 32, the diaphragm 310 has a structure in which the piezoelectric elements 30 and 31 are respectively stacked on the upper and lower sides of the reinforcing plate 32 as in the case of the diaphragm 10 in the first embodiment. The third embodiment differs from the vibration plate 10 in that electrodes 33a, 33b, 33c and 33d are arranged on the piezoelectric elements 30 and 31, respectively. As shown in the drawing, in the diaphragm 310, the piezoelectric element 30 is divided into four regions (not shown, but the same applies to the piezoelectric element 31), and electrodes 33a, 33b, 33c, 33d are respectively placed on the divided regions. Have been placed.

Referring to FIG. 34, a conduction structure for supplying a drive voltage to the electrodes 33a, 33b, 33c, and 33d arranged on the four regions of the piezoelectric element 30 will be described. As shown in the figure, by turning on / off a switch (selection means) 341, the drive voltage is supplied from the power supply 340 to all the electrodes 33 a, 33 b, 33 c, 33 d.
And the electrodes 33a, 33 from the power supply 340.
It is possible to switch the mode to be supplied to d.

Here, the switch 341 is turned on,
When the mode for supplying the drive voltage to all the electrodes 33a, 33b, 33c, 33d is selected, FIG.
As shown in FIG. 7, the diaphragm 3 is provided in the same manner as in the first embodiment.
10 expands and contracts in the longitudinal direction, and longitudinally vibrates in the longitudinal direction of the diaphragm 310 (hereinafter referred to as longitudinal vibration mode). On the other hand, the switch 341 is turned off and the electrode 33 is turned off.
When the mode in which the drive voltage is supplied only to the drive voltages a and 33d is selected, the piezoelectric element expands and contracts only in the area to which the drive voltage is applied, and as shown in FIG. Width direction (vertical direction in the figure) in the plane to which 310 belongs
(Hereinafter, referred to as a bending vibration mode). Thus, the vibration mode of the diaphragm 310 can be selected by switching the switch 341.

In the piezoelectric actuator according to the second embodiment, the rotor 100 is driven by using the vibration plate 310 capable of switching between the two vibration modes as described above.
Can be switched. When the longitudinal vibration mode is selected, as shown in FIG.
A rightward driving force in the figure is applied from the abutting portion of the protrusions 36 with the 00, thereby rotating the rotor 100 counterclockwise in the figure.

On the other hand, when the bending vibration mode is selected,
As shown in FIG. 37, the bending vibration of the diaphragm 310 applies an upward driving force in the figure from the contact portion between the rotor 100 and the protrusion 36, thereby rotating the rotor 100 clockwise in the figure. It has become.

In the piezoelectric actuator according to the second embodiment, the switch 1
00 can be driven in forward and reverse directions. As described above, the driving direction is switched by switching the vibration mode of the diaphragm 310.
It is not necessary to provide a diaphragm for each driving direction or to provide an adjusting mechanism for adjusting the positional relationship between the diaphragm and the rotor to be driven. Therefore, it is possible to switch the driving direction between the forward and reverse directions without complicating the configuration and increasing the size of the device.

The piezoelectric actuator according to the second embodiment can be variously modified in the same manner as the first embodiment. For example, the protrusions 36
A notch may be provided instead of (FIG. 1
1). The protrusion 36 of the diaphragm 310 and the rotor 1
The end 38 of the support member 11 may be located on a tangent to 00 (see FIG. 17). Further, a spring member may be provided in addition to the support member 11, and the diaphragm 310 may be urged toward the rotor 100 by the spring member (see FIG. 21).

C. Modifications In the various embodiments described above, the piezoelectric actuator is configured to rotationally drive the disk-shaped rotor. However, the drive target is not limited to this, and may be, for example, a substantially rectangular parallelepiped member. The above-described diaphragm may be brought into contact with the rectangular parallelepiped member to be driven in the longitudinal direction.

The piezoelectric actuator according to the various embodiments described above can be mounted on a portable device other than a battery-powered timepiece in addition to being mounted on a calendar display mechanism of a timepiece.

[0082]

As described above, according to the present invention,
Since a vibration plate having a long plate-shaped piezoelectric element is used, a large displacement can be obtained at a low voltage, and a driving target can be efficiently driven. In addition, since components and the like arranged to overlap the diaphragm are unnecessary, if the diaphragm is reduced in thickness, the entire actuator can be reduced in thickness. Further, since the diaphragm is brought into contact with the driven object, the contact state between the diaphragm and the driven object is stabilized, and more stable transmission of the driving force can be performed. Further, since the diaphragm has a structure in which the reinforcing plate and the piezoelectric element are laminated, breakage of the diaphragm due to excessive amplitude or external force can be reduced.

[Brief description of the drawings]

FIG. 1 is a plan view showing a calendar display mechanism of a timepiece including a piezoelectric actuator according to a first embodiment of the present invention.

FIG. 2 is a side sectional view showing a schematic configuration of a timepiece incorporating the calendar display mechanism.

FIG. 3 is a plan view showing an overall configuration of the piezoelectric actuator.

FIG. 4 is a side sectional view showing a diaphragm which is a component of the piezoelectric actuator.

FIG. 5 is a diagram showing how the diaphragm vibrates longitudinally.

FIG. 6 is a view showing a state in which when the diaphragm vibrates, it bends and vibrates due to a reaction force from a rotor of the calendar display mechanism.

FIG. 7 is a diagram for explaining a trajectory of a projection provided on the diaphragm during the bending vibration.

FIG. 8 is a diagram for explaining an amplitude when the diaphragm vibrates; FIG.

FIG. 9 is a diagram for explaining a state of the diaphragm when the rotor is about to rotate in the reverse direction.

FIG. 10 is a diagram for explaining a position of a center of rotation for supporting the diaphragm rotatably.

FIG. 11 is a plan view showing a first modification of the piezoelectric actuator.

FIG. 12 is a side sectional view showing a diaphragm in a second modified example of the piezoelectric actuator.

FIG. 13 is a plan view showing a third modification of the piezoelectric actuator.

FIG. 14 is a plan view showing a fourth modification of the piezoelectric actuator.

FIG. 15 is a view for explaining a method of manufacturing a diaphragm according to a fourth modification of the piezoelectric actuator.

FIG. 16 is a view showing another modified example of the fourth modified example of the piezoelectric actuator.

FIG. 17 is a plan view showing a fifth modification of the piezoelectric actuator.

FIG. 18 is a plan view showing a sixth modification of the piezoelectric actuator.

FIG. 19 is a diagram for explaining the amplitude of a support member that is a component of a sixth modification of the piezoelectric actuator.

FIG. 20 is a plan view showing another example of the sixth modified example of the piezoelectric actuator.

FIG. 21 is a plan view showing a seventh modification of the piezoelectric actuator.

FIG. 22 is a view for explaining a position of a center of rotation for rotatably supporting a diaphragm which is a component of a seventh modification of the piezoelectric actuator.

FIG. 23 is a diagram illustrating a state of the diaphragm of the diaphragm when the rotor is about to rotate in the reverse direction in the seventh modification.

FIG. 24 is a plan view showing another example of the seventh modified example of the piezoelectric actuator.

FIG. 25 is a view showing an eighth modification of the piezoelectric actuator.

FIG. 26 is a plan view showing a ninth modification of the piezoelectric actuator.

FIG. 27 is a side view showing a ninth modification of the piezoelectric actuator.

FIG. 28 is a diagram showing a conductive configuration for supplying a drive voltage to the piezoelectric actuator.

FIG. 29 is a plan view showing another example of a conduction configuration for supplying a drive voltage to the piezoelectric actuator.

FIG. 30 is a side view showing another example of the conduction configuration for supplying a drive voltage to the piezoelectric actuator.

FIG. 31 is a plan view showing an overall configuration of a piezoelectric actuator according to a second embodiment of the present invention.

FIG. 32 is a side view showing a diaphragm which is a component of the piezoelectric actuator according to the second embodiment.

FIG. 33 is a plan view showing the diaphragm of the piezoelectric actuator according to the second embodiment.

FIG. 34 is a diagram showing a conduction configuration for supplying a drive voltage to the piezoelectric actuator according to the second embodiment.

FIG. 35A is a diagram illustrating a state where the diaphragm of the piezoelectric actuator according to the second embodiment vibrates longitudinally, and FIG. 35B is a diagram illustrating a state where the diaphragm undergoes bending vibration.

FIG. 36 is a view for explaining a driving direction of the rotor when the vibration plate of the piezoelectric actuator according to the second embodiment longitudinally vibrates.

FIG. 37 is a diagram for explaining a driving direction of the rotor when the vibration plate of the piezoelectric actuator according to the second embodiment undergoes bending vibration.

FIG. 38 is a plan view schematically showing an ultrasonic motor using a conventional piezoelectric actuator.

[Explanation of symbols]

10: diaphragm, 11: support member, 11a, 11b,
11c, 11d: support member, 30: piezoelectric element, 31
…… Piezoelectric element, 32 …… Reinforcement plate, 33 …… Electrode, 35…
... End, 36 ... Protrusion, 37 ... End (mounting part), 3
8 ... End (fixed part), 90 ... Notch, 95 ...
Diaphragm 96, end 100, rotor 101
Intermediate wheel, 102 ... Date wheel, 103 ... Main plate (support),
110: Horn part (extended part), 180: Spring member (elastic member), 250: Drive circuit, 251: Piezoelectric element, 280: Elastic conducting member, 290: Conducting wire, 310
... Diaphragm 340 power supply 341 switch (selection means)

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tsukasa Funasaka 3-5-5 Yamato, Suwa-shi, Nagano Seiko Epson Corporation (72) Inventor Makoto Furuhata 3-5-5 Yamato, Suwa-shi, Nagano Seiko-Epson In-house F term (reference) 5H680 AA00 AA06 AA08 AA12 AA19 BB02 BC02 CC02 DD01 DD15 DD23 DD24 DD28 DD39 DD53 DD67 DD72 DD73 DD82 DD85 DD89 DD92 DD93 DD95 DD97 EE10 EE12 FF08 FF36 GG02 GG20 GG27

Claims (30)

[Claims] 1. A support, a diaphragm in which a plate-shaped piezoelectric element having a longitudinal direction and a reinforcing plate are laminated, a fixing portion fixed to the support, and a mounting portion mounted to the diaphragm. A supporting member that applies an elastic force to the vibration plate such that a longitudinal end of the vibration plate abuts on the driven object, and wherein the piezoelectric element includes the vibration plate. When vibrating in the longitudinal direction of
The vibration vibrates the vibration plate due to the vibration, and drives the driven object in one direction according to displacement of the vibration plate due to the vibration. 2. The piezoelectric actuator according to claim 1, wherein the diaphragm is rotatably supported by the support member in a plane to which the diaphragm belongs. 3. A support, a vibration plate in which a plate-shaped piezoelectric element having a longitudinal direction and a reinforcing plate are laminated, a fixing portion fixed to the support, and a mounting portion mounted to the vibration plate. A supporting member that supports the diaphragm on the support, and an elastic member that applies an elastic force to the diaphragm so that a longitudinal end of the diaphragm contacts the driven object. When the piezoelectric element vibrates in the longitudinal direction of the diaphragm,
The vibration vibrates the vibration plate due to the vibration, and drives the driven object in one direction according to displacement of the vibration plate due to the vibration. 4. The piezoelectric actuator according to claim 3, wherein the diaphragm is rotatably supported by the support member and the elastic member in a plane to which the diaphragm belongs. 5. A center of rotation of the diaphragm includes a reverse line extending in a direction opposite to a driving direction of the driven object from a contact point between the diaphragm and the driven object, and the reverse line at the contact point. The piezoelectric actuator according to claim 2, wherein the piezoelectric actuator is located in a quadrant formed between the orthogonal line and the orthogonal line extending toward the diaphragm. 6. A vibration plate in which a support, a plate-shaped piezoelectric element having a longitudinal direction, and a reinforcing plate are laminated, and a longitudinal vibration that vibrates the diaphragm in the longitudinal direction in a plane to which the diaphragm belongs. Selecting means for selecting any one of bending vibration in which the diaphragm is rocked in the width direction orthogonal to the longitudinal direction in the plane, and a fixing portion fixed to the support, and the diaphragm An elastic member having an attaching portion to be attached, the supporting member providing an elastic force to the diaphragm so that a longitudinal end of the diaphragm abuts on the driven object; When the longitudinal vibration is selected by the means, the vibration plate vibrates in the longitudinal direction, so that the driven object is driven in one direction with the displacement of the diaphragm due to the vibration, and the bending vibration is selected by the selecting means. Is selected If,
A piezoelectric actuator, wherein the vibrating plate performs the bending vibration, thereby driving the driven object in a direction opposite to that of the longitudinal vibration in accordance with displacement of the vibrating plate due to the vibration. 7. A vibrating plate in which a support, a plate-shaped piezoelectric element having a longitudinal direction and a reinforcing plate are laminated, and a longitudinal vibration for vibrating the vibrating plate in the longitudinal direction in a plane to which the vibrating plate belongs. Selecting means for selecting any one of bending vibration in which the diaphragm is rocked in the width direction orthogonal to the longitudinal direction in the plane, and a fixing portion fixed to the support, and the diaphragm A support member having an attachment portion to be attached, the support member supporting the diaphragm on the support, and an elasticity for applying an elastic force to the diaphragm so that a longitudinal end of the diaphragm comes into contact with the driven object. When the longitudinal vibration is selected by the selecting unit, the longitudinal vibration of the diaphragm causes the driven object to move in one direction with displacement of the diaphragm due to the vibration. Drive, to the selection means Therefore, when the bending vibration is selected,
A piezoelectric actuator, wherein the vibrating plate performs the bending vibration, thereby driving the driven object in a direction opposite to that of the longitudinal vibration in accordance with displacement of the vibrating plate due to the vibration. 8. The vibration plate according to claim 1, wherein the diaphragm is formed in a tapered shape in which the end portion in contact with the driven object is thinner than the other end. Piezo actuator. 9. The reinforcing plate has an extending portion which is thinner than a central portion of the vibration plate on the driven object side than the piezoelectric element and extends to the driven object side to contact the driven object. The piezoelectric actuator according to any one of claims 1, 2, 3, 4, 5, and 8, wherein: 10. The diaphragm according to claim 1, wherein the mounting portions of the support member are mounted at a plurality of positions in a longitudinal direction of the diaphragm. A piezoelectric actuator according to any one of the above. 11. One of the attachment portions of the support member,
The piezoelectric actuator according to claim 10, wherein the piezoelectric actuator is attached to a position serving as a node of vibration of the diaphragm. 12. The apparatus according to claim 10, wherein the position of the mounting portion of the support member substantially coincides with a position of an antinode of the vibration of the support member accompanying the vibration of the diaphragm.
Or the piezoelectric actuator according to 11. 13. A resonance frequency of a longitudinal vibration of the vibration plate due to the vibration of the piezoelectric element and a resonance frequency of a bending vibration generated in the vibration plate due to a reaction force received from the driven object when the vibration plate vibrates. 13. The piezoelectric actuator according to claim 1, wherein the piezoelectric actuators are made the same. 14. The method according to claim 1, wherein the reinforcing plate is formed thinner than the piezoelectric element.
The piezoelectric actuator according to any one of the above. 15. The vibration plate according to claim 1, wherein the end portion of the diaphragm abutting on the driven object has a projection, and the projection abuts on the driven object. 3. The piezoelectric actuator according to claim 1. 16. The vibration plate is formed in a rectangular shape with one apex cut out, and the cut out part of the vibration plate abuts on the driven object. 15. The piezoelectric actuator according to any one of items 14 to 14. 17. The piezoelectric element according to claim 1, further comprising: an electrode portion disposed at a central portion in the longitudinal direction of the diaphragm, and an electrodeless portion having no electrodes disposed at both ends in the longitudinal direction of the diaphragm. The piezoelectric actuator according to any one of claims 1 to 16, comprising: 18. The mounting part of the support member,
The piezoelectric actuator according to claim 1, wherein the piezoelectric actuator is attached to a position that serves as a node of vibration of the vibration plate. 19. The apparatus according to claim 18, wherein a position of said mounting portion of said support member substantially coincides with a position serving as a node of vibration of said support member accompanying vibration of said diaphragm.
3. The piezoelectric actuator according to claim 1. 20. The piezoelectric actuator according to claim 1, wherein the fixing portion of the support member is located on a driving direction line of the driving target. 21. The reinforcing plate is a conductor, and is stacked above and below the piezoelectric element, and supplies power to the piezoelectric element via the reinforcing plate stacked above and below the piezoelectric element. Claim 1 characterized by the following:
21. The piezoelectric actuator according to any one of the above items. 22. The piezoelectric actuator according to claim 1, wherein the support member is a conductor, and supplies power to the piezoelectric element via the support member. 23. An electro-optical device according to claim 23, further comprising: an elastic conductor sandwiching the diaphragm in contact with upper and lower surfaces of the diaphragm, and supplying power to the piezoelectric element via the elastic conductor. Item 22. The piezoelectric actuator according to any one of Items 1 to 21. 24. The piezoelectric device according to claim 1, further comprising a conductive wire wound around the diaphragm while being in contact with a periphery of the vibration plate, and supplying power to the front piezoelectric element via the conductive wire. Piezoelectric actuator. 25. A piezoelectric actuator having a piezoelectric element and driving an object to be driven by vibration of the piezoelectric element, comprising: a reinforcing plate laminated on and under the piezoelectric element and formed of a conductor; A piezoelectric actuator that supplies electric power to the piezoelectric element via a piezoelectric element. 26. A piezoelectric actuator having a piezoelectric element and driving an object to be driven by vibration of the piezoelectric element, wherein the supporting member is formed of a support and a conductor, and supports the piezoelectric element on the support. And supplying power to the piezoelectric element via the support member. 27. A piezoelectric actuator having a piezoelectric element and driving an object to be driven by vibration of the piezoelectric element, comprising: an elastic conductor that contacts the upper and lower surfaces of the piezoelectric element and sandwiches the piezoelectric element, A piezoelectric actuator, wherein electric power is supplied to the piezoelectric element via the elastic conductor. 28. A piezoelectric actuator having a piezoelectric element and driving a driven object by vibration of the piezoelectric element, comprising: a lead wound around the piezoelectric element while being in contact therewith; A piezoelectric actuator for supplying power to an element. 29. The piezoelectric actuator according to claim 1, a disk-shaped rotor driven to rotate by the piezoelectric actuator, and a ring-shaped calendar display wheel rotated by the rotation force of the rotor. A timepiece comprising: 30. A portable device comprising: the piezoelectric actuator according to claim 1; and a battery that supplies power to the piezoelectric actuator.