JP2000327186A - Film winding device and film winding method - Google Patents

Abstract

(57) [Summary] [PROBLEM] To exchange and connect a material roll in a vacuum.
Provided is a film winding device and a film winding method capable of automatically changing a winding core, cutting a film, and winding the film onto a changed winding core. A raw roll (24) is rolled in an unwinding / winding chamber (21) defined by a partition (12) having a slit (13) and a slit (13) in a vacuum chamber (11) of a thin film forming apparatus.
The original roll 24 is exchanged by rotating the unwinding turret 22 in which the film is set, and the film which is connected by the film connecting device 27 and comes back in contact with the main roll 32 of the film forming chamber 31 is set on the winding turret 42. The nip roll 27 is pressed against a winding core 47 which is a conductive rubber lining core, and the downstream side thereof is cut by a film cutting device 28 to form a winding core 4.
Take up to 7.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film winding device and a film winding method, and more particularly, to a method of forming a thin film on a film or automatically forming a thin film on a film by automatically exchanging a roll film under vacuum. The present invention relates to a film winding device and a film winding method capable of performing film processing such as etching of a thin film.

[0002]

2. Description of the Related Art Processes such as forming a thin film of a metal such as aluminum or an oxide such as indium oxide on a film, and etching or laser trimming the formed thin film of a metal or oxide are widely performed. In these film processes, the formation of a thin film is usually performed under vacuum, and the processing of the formed thin film is often performed under vacuum. For example, FIG. 11 shows a conventional thin film forming apparatus 100.
It is sectional drawing which shows notionally. That is, in the thin film forming apparatus 100, a main roll 132 that is internally cooled and is rotated in a direction indicated by an arrow is installed in a vacuum chamber 111 that is evacuated by a vacuum pump 119.
The film 171 is unwound from the material roll 124 wound around the main roll 13 and passed through the guide roll 151.
After being wound in contact with the outer peripheral surface of the guide roll 1, the guide roll 1
The processing film 172 on which the thin film is formed is guided to the winding core 147 and wound up as a processing counter roll. An evaporation source 133 for the thin film forming substance is arranged facing the outer peripheral side of the main roll 132, and the evaporated substance reaches the surface of the film 171 to be cooled and deposited.

When a thin film is formed on the film 171 by the thin film forming apparatus 100 as described above, the unwinding core 12
The film roll 171 wound from the material roll 124 is set on the main roll 1.
After passing through the film 171 so as to be wound around the winding core 147, the vacuum chamber 111 is
9 to evacuate and cool the main roll 132,
When a predetermined degree of vacuum and temperature are obtained, the raw roll 12
4, the film 171 is unwound and the running is started. Simultaneously, the shutter of the evaporation source 133 is opened to evaporate the thin film forming substance and deposit the film on the surface of the film 171. The obtained processing film 172 is wound around the winding core 147. Then, when the film 171 disappears from the raw roll 124,
After the shutter of the evaporation source 133 for the thin film forming material is closed and the running of the film 171 is stopped, the temperature of the main roll 132 is raised to room temperature or higher, and the vacuum chamber 111 is opened to the atmosphere. Then, on the unwinding side, the remaining unwinding core 123 is removed, the next material roll 124 is set, and on the winding side, the treated anti-roll wound on the winding core 147 is removed, and a new winding core is removed. 147 is set, the film is passed through as described above, and if necessary, operations such as adjusting the evaporation source 133 are performed to prepare for the next film formation.

At the time of the above-mentioned film passing, the starting end of the film 171 which has been unwound from the raw roll 124 and passed through the main roll 132 is wound around the winding core 147, as shown in FIG. A liquid material for adhesion, such as water, soapy water, alcohol, or glue, is applied to the winding core 147 in the width direction of the film 171, and the film 171 is stacked thereon, and at a predetermined position on the starting end side of the winding core 147. The film 171 is cut by the cutter 129. Then, as shown in FIG.
The part cut with 71 attached is cut with both hands 110 in the horizontal direction,
Stroke diagonally to expel air bubbles and excess liquid,
Next, the winding core 147 is rotated to wind the film 171 several times. Such manual operation of passing through a film requires skill and increases the production cost of a thin film-formed film.

[0005] Regarding the winding of the beginning of the film around the winding core, for example, in Japanese Utility Model Laid-Open Publication No. 5-67911, the water in the water tank is first contained in the water supply roller with respect to the hub of the winding shaft. There is disclosed a water application device in which an application roller is brought into contact with the application roller and the application amount is indirectly controlled from the application roller. Japanese Patent Application Laid-Open No. 6-124442 discloses a method of applying a surfactant or an aqueous solution containing a surfactant that is easier to wet than water to a winding core and winding the film. Further, JP-A-6-295
Japanese Patent Publication No. 436 relates to a winding core for winding a magnetic tape using a thermosetting binder, and has a coefficient of thermal expansion in which an outer portion on the winding surface side is made of glass fiber mixed with carbon, and an inner portion is made of glass fiber coated with an epoxy resin. A manufacturing method using a take-up core which is small and does not cause a difference in compressive stress between the inside and the outer edge of the take-up roll by a thermosetting treatment of a binder is disclosed. Further, Japanese Patent Application Laid-Open No. 10-27343 discloses a method and an apparatus for exchanging a tape winding hub capable of automatically cutting and winding a tape.

[0006]

When a time analysis is performed on the film forming operation in the thin film forming apparatus 100 shown in FIG. 11, the removal of the remaining unwound core 123, the setting of a new material roll 124, and the processing After removing the roll and setting a new take-up core, passing through the film, vacuum chamber 11
Approximately 50% of the time is spent on film formation preparation, such as evacuation, opening to the atmosphere, heating and cooling of the main roll 132, and approximately 50% of the remaining time is substantial film formation time. Thin film formation is an extremely low-productivity process. Above all, since evacuation of the vacuum chamber 111 requires time, in order to increase the productivity of thin film formation, it is necessary to prepare for film formation while maintaining the vacuum degree of the vacuum chamber 111.

The application of water by a water application device described in Japanese Utility Model Application Laid-Open No. 5-67911 and the application of a surfactant or an aqueous solution containing a surfactant described in Japanese Patent Application Laid-Open No. 6-124442 cannot be employed for operation under vacuum. . As an alternative to them, a method of attaching a double-sided adhesive tape to the winding core is to transfer the cross-sectional shape of the double-sided adhesive tape, which rises from the surface of the winding core, to the film to be wound, and to improve the flatness of the film. Spoil. Further, the winding core having a small coefficient of thermal expansion disclosed in JP-A-6-295436 does not suggest an apparatus or a method capable of unwinding and winding a film under vacuum. Further, the method and apparatus for exchanging a tape winding hub disclosed in Japanese Patent Application Laid-Open No. Hei 10-27343 is based on the premise that the hub is exchanged in the atmosphere. The removal and the setting of the new material roll 124, and the removal of the processing and the new material take-up core 147 cannot be diverted to a film winding device or a film winding method which can automatically perform under vacuum.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and preparations for performing film formation and other film processing can be performed in a vacuum, and the preparation time is short, and substantial film formation and other film processing are possible. It is an object of the present invention to provide a film winding device and a film winding method that can increase the time of the film formation and enable film formation and other film processing with high productivity.

[0009]

Means for Solving the Problems The above problems can be solved by the structure of claim 1 or claim 4. To solve the problem, the film winding device of claim 1 is a film winding device for forming a thin film on a film. In a film winding device in a vacuum chamber for performing film processing such as formation of a film or etching of a thin film on a film, an adhesive rubber lining core or a core to which a bias voltage is applied is used as a winding core for winding a film. Winding device. Such a film take-up device can take up the start end of the film around the take-up core by adhesion or electrostatic attraction without manual operation, and can exchange the raw material roll under vacuum. I do.

According to a second aspect of the present invention, there is provided a film winding device.
A vacuum chamber, a film processing chamber for film processing by a partition provided with a slit as a film passage,
The film of the raw roll is unwound, and is defined as an unwinding / winding chamber for winding the film from the raw roll returning through the film processing chamber. A cooling roll for cooling the film is provided, and a first unwinding core in which unwinding of the film of the first material roll among the plurality of material rolls is wound in the unwinding / winding chamber. An unwinding turret that swivels from the unwinding position to the unloading position and swivels the second web roll from the standby position to the unwinding position, and is wound on the first winding core among the plurality of winding cores. The first processing roll is pivotally moved from the winding position to the removal position, and the second film is wound to return the film coming into contact with the cooling roll from the second material roll.
A winding turret for rotating the winding core from the standby position to the winding position is provided. Further, near the unwinding position of the unwinding turret, the end of the film of the first material roll and the second unrolled turret are disposed. Means for connecting the anti-roll to the start end of the film are provided, and cutting means for winding the film from the second material roll onto the second winding core is provided near the winding position of the winding turret. Is what it is. With such a film winding device, it is possible to perform film processing by sequentially exchanging a plurality of material rolls while maintaining the vacuum state of the vacuum tank, and wind the processed film on the corresponding winding core. To

According to a third aspect of the present invention, there is provided a film winding device.
In the vacuum chamber, open the door provided by introducing the atmosphere to the unwinding / winding chamber with the slit vacuum-sealed,
The plurality of unwinding cores at the unwinding turret removal position are carried out to the atmosphere side, and a plurality of new fabric rolls are loaded from the atmosphere side and set at the standby position, and at the same time, at the unwinding turret removal position. After unloading a plurality of processing rolls to the atmosphere side and loading a plurality of new take-up cores from the atmosphere side and setting them at the standby position, the door is closed, the unwinding / winding chamber is evacuated, and then the slit is opened. And the film processing can be resumed by releasing the vacuum seal.
Such a film winding device opens a door of an unwinding / winding chamber while maintaining a vacuum state of a film processing chamber of a vacuum tank, and a plurality of unwinding cores that have been completely unwound on an unwinding turret side. The new take-up turret side exchanges the finished rolls with the new multiple take-up cores and replaces the finished multiple take-up rolls with the new take-up cores. It enables continuous film processing that repeats closing and evacuating and restarting film processing.

According to a fourth aspect of the present invention, there is provided a film winding method in a vacuum chamber for performing a film processing such as forming a thin film on a film or etching a thin film on the film. This method uses an adhesive rubber-lined core or a core to which a bias voltage is applied as a take-up core. In such a film winding method, the processing film can be wound by attaching the starting end of the film to the winding core by adhesion or electrostatic suction under vacuum without manual operation.

According to a fifth aspect of the present invention, there is provided a film winding method.
A vacuum chamber, a film processing chamber for film processing by a partition provided with a slit as a film passage,
A film is unwound from the material roll, and the film is unwound and wound up to take up the film from the material roll returning through the film processing chamber. The first unwinding core, in which the film is cooled by the roll during the film processing and the unwinding of the film of the first raw roll out of the plurality of raw rolls is completed by the unwinding turret provided in the unwinding / winding chamber. Is rotated from the unwinding position to the removal position, and the second material roll is rotated from the standby position to the unwinding position, and the first winding roll of the plurality of winding cores is wound by the winding turret provided in the same manner. The first processing anti-roll in which the film from the first material roll is wound on the take-up core is swiveled from the winding position to the removal position, and the film is returned from the second material roll in contact with the cooling roll. No. The take-up core is pivoted from the standby position to the take-up position, and furthermore, connection means provided near the unwinding position of the unwinding turret are used to connect the terminal end of the film of the first material roll and the second material roll. The film is connected to the start end of the film, and is cut from the second material roll by a cutting means provided near the winding position of the winding turret, and wound around a second winding core. Film winding method. In such a film winding method, while maintaining the vacuum state of the vacuum chamber, the film processing is performed by sequentially exchanging a plurality of material rolls, and the processed film is wound around a corresponding winding core. it can.

According to a sixth aspect of the present invention, there is provided a film winding method according to the fifth aspect.
In a state where the vacuum chamber is vacuum-sealed the slit,
Introduce the atmosphere into the unwinding / rewinding chamber, open the door provided, unload the unwinding cores at the removal position of the unwinding turret to the atmosphere side, and place a plurality of new material rolls on the atmosphere side. And then set it at the standby position, and simultaneously carried out the plurality of processing anti-rolls at the take-up turret removal position to the atmosphere side, and carried in a plurality of new winding cores from the atmosphere side and set them at the standby position. Thereafter, the film winding method is configured such that the door is closed, the unwinding / winding chamber is evacuated, and then the vacuum seal of the slit is released to restart the film processing. In such a film winding method, the film is unwound and wound while the vacuum state of the film processing chamber of the vacuum chamber is maintained.
Open the door of the take-up chamber, replace multiple unwound cores with new rolls on the unwinding turret, and process multiple completed rolls on the winding turret. Exchange of the anti-roll and a plurality of new winding cores, closing of the unwinding / winding chamber door, evacuating and restarting the film processing can be repeated, and continuous film processing can be performed.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION As described above, a film winding device and a winding method of the present invention can be used in a vacuum chamber for performing film processing such as forming a thin film on a film or etching a thin film on a film. , A film winding device and a film winding method in which an adhesive rubber-lined core or a core to which a bias voltage is applied is used as a winding core for winding a processed film. I will explain.

FIG. 1 is a perspective view of an adhesive rubber lining core 1 used as a winding core for winding a processing film in the present embodiment. The adhesive rubber lining core 1 is composed of a core body 2 made of a highly rigid pipe, for example, an iron pipe having an outer diameter of 3 inches or 6 inches, and an adhesive rubber 3 lined on the outer peripheral surface thereof. 3 has a thickness in the range of 0.1 to 30 mm.
The adhesive rubber is composed of natural rubber, styrene / butadiene rubber, butyl rubber, isobutylene rubber, silicon rubber, etc., 100 parts by weight of rubber, natural rosin as a tackifier, terpene, or a petroleum fraction with 5 carbon atoms, etc. Is prepared by adding 50 to 120 parts by weight depending on the required performance, and the kind and composition of the adhesive rubber of the adhesive rubber lining core 1 used in the present invention may be any. Not limited. In addition, carbon black or metal powder may be added as a compounding component to impart conductivity to the obtained adhesive rubber. For the adhesive rubber, for example, a primer containing the same kind of rubber as a component is applied to the outer peripheral surface of an iron pipe, and an adhesive rubber lining is applied thereon. Generally, a multilayer lining is configured to prevent the cohesive failure, so that the outer layer has a larger adhesive strength.

The adhesive strength of the surface of the adhesive rubber lining core 1 used in the present invention is JISK630.
It is desirable that the shear strength measured according to No. 1 is 5 hPa or more, and if the adhesive strength is less than 5 hPa, the adhesive strength of the film is not sufficient, and after the film is adhered, the film is easily peeled off when the winding of the film is started. I can not achieve my purpose. However, an adhesive force of 300 hPa or more is not necessary, and if the adhesive force is excessive, it becomes difficult to peel off the film from the adhesive rubber lining core 1. Further, the rubber hardness measured by a rubber hardness meter is desirably 70 degrees or less. That is, the adhesive strength and the rubber hardness are inversely correlated, and those having a large rubber hardness generally have a small adhesive strength, and those having a small rubber hardness have a large adhesive strength. However, those having a rubber hardness of less than 10 degrees are easily deformed by an external force and are not suitable as a material of a core for winding a treated film.

Further, a core to which a bias voltage is applied may be used as a winding core of the film winding device.
That is, the starting end of the film can be electrostatically attached to the surface of the take-up core under vacuum, and the film can be wound by automatically exchanging the take-up core under vacuum. As the core to which the bias voltage is applied, any type of metal core may be used as long as it has a predetermined diameter, but an iron core is the easiest to use in terms of price, mechanical strength, and the like. Needless to say, a core of stainless steel, aluminum or titanium may be used, and a metal core having a surface on which a synthetic resin film is formed may also be used. DC (+) voltage or (-) voltage is applied through the inner surface or end surface of the metal core or the chucking mechanism of the metal core,
An AC voltage may be applied. Normally, a voltage of 0.5 kV to 3 kV is applied, although it depends on the thickness of the film to be wound. After the winding is completed and the winding of the film is started, the application of the voltage may of course be stopped.

Since the adhesive rubber lining core and the core to which the bias voltage is applied can be used in exactly the same way as the winding core, the following embodiments will mainly describe the case where the adhesive rubber lining core is used.

(Embodiment 1) FIG. 2 is a schematic sectional view showing a thin film forming apparatus 10 in which the above-mentioned adhesive rubber lining core 1 is used. The inside of a metal box-shaped vacuum chamber 11 is divided into an unwinding / winding chamber 21 and a film forming chamber 31 by a partition wall 12 having slits 13a and 13b as film paths. Are provided with seal mechanisms 14a and 14b for vacuum sealing as required. The unwinding / winding chamber 21 is a vacuum pump 2
9 and the film forming chamber 31 are evacuated by a vacuum pump 39, and the film forming chamber 31 is maintained at a higher degree of vacuum than the unwinding / winding chamber 21 during a steady operation. In addition, unwinding
The winding chamber 21 is provided with a door 18. The film forming chamber 31 is provided with a metal main roll 32 that rotates around the rotation center Oc in the direction of arrow c, and the inside thereof is connected to a refrigerator (not shown) capable of cooling and heating. Have been. In addition, an ion source 33 including a target for sputtering a film forming material is provided around the main roll 32.

The unwinding / winding chamber 21 has an unwinding core 23A around which a raw roll 24A is wound at one end of an arm 22a of an unwinding turret 22 which is rotated around a rotation center Op.
On the other end, an unwinding core 23B around which a raw roll 24B is wound is chucked at both ends so as to be rotatable and detachable, and the raw roll 24A is positioned at the unwinding position of the unwinding turret 22. And the material roll 24B is at the standby position. Similarly, a take-up core 47A is provided at one end of the arm 42a of the take-up turret 42 rotated about the rotation center Ow, and a take-up core 47B is provided at the other end so as to be rotatable and detachable at both ends. The winding core 47A is positioned at the winding position of the winding turret 42,
B is in the standby position. Then, the unwinding / winding drive system for rotating the material roll 24A at the unwinding position, the main roll 32, and the winding core 47A at the winding position is driven synchronously. Winding core 47 of the system configured as described above
The adhesive rubber lining core 1 shown in FIG. 1 is used for A and the winding core 47B.

The film 71 unwound from the material roll 24A is guided to the guide roll 51, enters the film forming chamber 31 through the slit 13a of the partition wall 12, and enters the guide roll 51.
After passing through the main roll 32 and the main roll 32, the main roll 32 is wound around one round in contact with the outer peripheral surface of the main roll 32, and a thin film is formed on the surface of the film 71 by the film forming material from the ion source 33 provided on the way. You. The processing film 72 having the thin film formed thereon is further brought into contact with the main roll 32 and then guided to the guide rolls 54 and 55, where the slit 1
3b, return to the unwinding / winding chamber 21 and guide roll 5
6 and is wound around the winding core 47A. A film connecting device 26 is provided near the unwinding position of the unwinding turret 22, and a film cutting device 28 having a nip roll 27 is arranged near the winding position of the winding turret 42. Film connecting device 26
Any connection method may be used, such as a method using a double-sided adhesive tape, a high-frequency sealing method, an ultrasonic sealing method, or the like. The simplest method of cutting the film in the film cutting device 28 is to lower the cutter to one side end of the film and run it in the width direction. However, a method of fusing by heat may be used.

The thin film forming apparatus 10 using the adhesive rubber lining core 1 is configured as described above. Next, the operation thereof will be described with reference to FIGS. In a state as shown in FIG.
Thereby, the film forming chamber 31 is evacuated by the vacuum pump 39, and the main roll 32 is cooled. Further, the ion source 33 is activated. The degree of vacuum in the film forming chamber 31 is 1
When the surface temperature of the main roll 32 reaches -20 ° C to -40 ° C, the unwinding is performed.
Activate the winding drive system and roll 2 of the unwinding / winding chamber 21
4A, the film 71 is unwound, and the film 71 wound around the winding core 47A is started in the unwinding / winding chamber 21 via the main roll 32 rotated in the film forming chamber 31.
At the same time, a shutter (not shown) of the ion source 33 is opened to start forming a thin film. At this time, the seal mechanisms 14a and 14b of the partition 12 are open.

Then, as shown in FIG.
When the processing film 72 is wound around the winding core 47A, the shutter of the ion source 33 is closed, the unwinding / winding drive system is stopped, and the film 7 is wound.
1. Stop the running of the processing film 72 to interrupt the film formation,
Raise the nip roll 27 and the film cutting device 28,
The unwinding turret 22 is rotated clockwise and the winding turret 42 is rotated 180 degrees counterclockwise as shown by the dashed line, and during this time, the film 71 and the processing film 72 are not slackened, as shown in FIG. The unwinding core 23A, which has almost disappeared, is moved from the unwinding position of the unwinding turret 22 to the standby position, which is also the removal position, and the web roll 24B, which was at the standby position, is moved to the unwinding position. The processing anti-roll 48A wound around 47A is moved from the winding position of the winding turret 42 to a standby position which is also a removal position.
The winding core 47B located at the standby position is moved to the winding position.

Then, in the state shown in FIG.
The end of the film 71 of 4A and the start of the film 71 of the raw roll 24B are connected by the film connecting device 26, and the nip roll 27 is connected together with the film cutting device 28.
Is lowered, and the nip roll 27 is brought into contact with the film 71. Next, the unwinding / winding drive system is driven at a low speed, and the connecting point of the film 71 is stopped at a point when the connection point of the film 71 has passed around the main roll 32 and passed through the film cutting device 28.
The film is cut by the blade of the film cutting device 28 while being pressed by B. Since the starting end of the cut film 71 is pressed by the nip roll 27 and adhered to the surface of the winding core 47B, which is an adhesive rubber lining core, the unwinding / winding drive system is then slightly driven. The winding of the film roll 24B around the winding core 47B is completed without raising the film 71. Thereafter, the film is restarted by running the film 71 and opening the shutter of the ion source 33.

When the second film formation is started, the raw roll 2
FIG. 5 shows a state in which the processed film 72 on which the film 71 of 4B has almost disappeared and the film has been formed is wound around the winding core 47B. The arm 22a of the unwinding turret 22 includes the unwinding core 23A having no film 71 and the unwinding core 23A. The unwinding core 23B remains, and the arm 42a of the winding turret 42 is in a state where the processing anti-roll 44A and the processing anti-roll 44B are held. In this state, the operation of the ion source 33 is stopped, the unwinding / winding drive system, and the evacuation are stopped, and the temperature of the main roll 32 is raised to prevent dew condensation. 21, the atmosphere is introduced into the film forming chamber 31, and the pressure is adjusted to normal pressure, the door 18 is opened, and the unwinding cores 23A and 23B, the processing anti-roll 44A and the processing anti-roll 44B are taken out, and a new raw roll 24A ', 24B 'unwinding turret 2
2 and the new winding cores 47A 'and 47B' are set on the winding turret 42, and the state returns to the state shown in FIG.

(Embodiment 2) In addition to the batch operation as in Embodiment 1, continuous operation is also possible. That is, the shutter of the ion source 33 is closed to stop the film formation, and the driving of the unwinding / winding drive system is stopped from the state of FIG. And partition 1
Seal mechanisms 14a, 14 for the two slits 13a, 13b
b is closed, and the film forming chamber 31 is sealed with the film 71 and the processing film 72 interposed therebetween. The vacuum pump 39 keeps driving and maintains a vacuum state. Next, unwinding / winding room 2
Then, the vacuum pump 29 is stopped, the air is introduced into the unwinding / winding chamber 21, the pressure is adjusted to normal pressure, and the door 18 is opened. On the unwinding turret 22, the unwinding core 23A is replaced with a new raw roll 24A. When the winding counter turret 42 is replaced with a new winding core 47A 'on the winding turret 42 side and the turrets 22 and 42 are turned by 180 degrees, the state shown in FIG. 6 is obtained. Subsequently, as shown by the arrow, the unwinding turret 22
The unwinding core 23B on the side is replaced with a new web roll 24B ′, and the processing anti-roll 48A on the winding turret 42 side is replaced with a new winding core 47B ′.

Then, the new raw roll 24A 'is unwound by being sandwiched between the starting end of the film 71' and the sealing mechanism 14a.
The connection with the end of the preceding film 71 in the winding chamber 21 and the work of winding the end of the preceding film 71 in the unwinding / winding chamber 21 between the sealing mechanism 14b around the new winding core 47A 'are performed. After performing by hand, close the door 18,
The inside of the unwinding / winding chamber 21 is evacuated by the vacuum pump 29, and the sealing mechanism 14a, 14b is opened to be in the same state as the state in FIG. Therefore, the unwinding / rewinding drive system is activated, and the ion source 3
The film formation is restarted by opening the shutter 3.
Thereafter, film formation can be repeated in a similar manner. As a result, the film forming chamber 31 is continuously operated without being opened to the atmosphere until it is time to perform internal cleaning. In addition, since the film forming chamber 31 which requires time for evacuation from the atmospheric pressure is not opened to the atmosphere, the time required for the preparation is shortened, and accordingly, the film forming time can be lengthened in the total time. In addition, when the film is formed by the above-described sputtering, a trouble such as oxidizing the target can be avoided.

(Modification 1) FIG. 7 is a sectional view similar to FIG.
In this example, the winding turret 92 has three arms 92a at three intervals of 0 degrees. The material rolls 84A, 84B, 84C are set on the unwinding turret 82, and the winding cores 97A, 97B, 9 are mounted on the winding turret 92.
7C can be set, so that the vacuum chamber 11 for batch film processing or unwinding for continuous processing
The time until the winding chamber 21 is opened to the atmosphere is greatly extended, and the productivity can be improved.

(Modification 2) FIG. 8 is a cross-sectional view similar to FIG. 2. Instead of the ion source 33 of the first embodiment, an evaporation source 34 for evaporating metal, synthetic resin, etc. This is an example in which a beam generation source 38 is arranged. In addition to installing heaters such as electron guns and lasers, and performing various processes on films under vacuum, including dry etching, plasma etching, and laser trimming of the formed thin film. The film winding device and the film winding method of the present invention are effectively applied.

(Modification 3) FIG. 9 shows a film forming chamber 3 of a vacuum chamber 11.
The two main rolls 35 and 36 are installed in the 1, showing the case in the main roll 35 the ion source 33 _1, 33 _2, the main roll 36 which are disposed ion source 33 _3, 33 ₄ . FIG. 9 shows a case where the same or different film-forming materials can be formed on the film 71 in two to four layers.
By changing the way of passing the film 71, the film 7
The film winding device and the film winding method of the present invention can also be applied to such a case.

(Embodiment 3) FIG. 10 is a longitudinal sectional view of a thin film forming apparatus 10 using an iron core 47D to which a bias voltage is applied instead of the adhesive rubber lining core 1 used in FIG. It is. A voltage is applied to the normal iron core 47D by the bias power supply 19 provided outside the vacuum chamber 11, and the leading end of the film is attached to the surface of the iron core 47D and wound using the electrostatic attraction effect. Is the way. It works exactly the same as the adhesive rubber lining core 1 used in Example 1.

[0033]

The present invention is embodied in the form described above, and has the following effects.

According to the film winding device of the present invention, in the vacuum processing tank for performing film processing such as formation of a thin film and etching of the formed thin film, the winding core for winding the processed film has an adhesive property. Since a rubber lining core or a core to which a bias voltage is applied is used, the film can be adhered to the winding core without wrinkles without manual operation, and even if the film is cut in that state, the film is wound without peeling. Can be removed, and the material roll can be exchanged under vacuum. According to the film winding device of the present invention, a plurality of material rolls set in the unwinding turret of the unwinding / winding chamber of the vacuum chamber are exchanged, connected in order, and returned via the film processing chamber. Can be cut and taken up by a take-up core corresponding to each material roll, thereby substantially improving the operation rate of the film processing apparatus. According to the film winding device of the third aspect, the door of the unwinding / winding chamber is opened in a state where the film processing chamber of the vacuum chamber is vacuum-sealed, and the unwinding core having no film on the unwinding turret side is renewed. After replacing it with the original roll, the winding turret replaces the processed anti-roll with a new take-up core.
Since it is possible to repeat the process of closing the door of the winding chamber and evacuating and restarting the film processing, continuous film processing without opening the film processing chamber to the atmosphere is possible, and the operating rate of the film processing apparatus is greatly improved. Reduce processing costs.

According to the film winding method of the present invention, in a vacuum processing tank for performing film processing such as formation of a thin film and etching of the formed thin film, an adhesive is applied to a winding core for winding the processed film. Using a rubber-lined core or a core to which a bias voltage has been applied, the film can be adhered to the winding core without wrinkles without manual operation, and can be wound without peeling off even when the film is cut in that state. To enable the exchange of the raw roll under vacuum. According to the film winding method of claim 5, the film processing is performed by exchanging a plurality of material rolls set on the unwinding turret of the unwinding / winding chamber of the vacuum chamber and connecting them in order. Is cut and wound around a take-up core corresponding to each material roll, thereby substantially improving the operation rate of the film processing apparatus and reducing the film processing cost. According to the film winding method of the sixth aspect, the door of the unwinding / winding chamber is opened while the film processing chamber of the vacuum chamber is vacuum-sealed, and the unwinding core and the new unwinding film are removed on the unwinding turret side. Replace it with the original roll, and on the winding turret side, replace the wound anti-roll with a new winding core, close the unwinding / winding chamber door, evacuate, and resume film processing. Since the film processing is continuously performed without opening the film processing chamber to the atmosphere, the operation rate of the film processing apparatus is greatly improved, and the processing cost is reduced.

[Brief description of the drawings]

FIG. 1 is a perspective view of an adhesive rubber lining core.

FIG. 2 is a cross-sectional view of a thin film forming apparatus using a film winding device of Example 1 in which an adhesive rubber lining core is used as a winding core for winding, before a film is run.

FIG. 3 shows a state in which each turret is turned after the film of the first material roll is wound on a first winding core from the state of FIG. 2;

FIG. 4 shows a state in which the turret is turned 180 degrees from the state shown in FIG. 3 to connect the terminal end of the first material roll and the start end of the second material roll, and cut the film returned via the vacuum processing chamber. It is the state before.

FIG. 5 shows a state in which the film of the second material roll is wound on a second winding core from the state of FIG. 4, the unwinding core remains on the unwinding turret, and the winding turret is filled with the treated anti-roll. is there.

FIG. 6 shows a state in which the film forming chamber is vacuum-sealed from the state shown in FIG.
This is a state in which the door of the winding chamber is opened, the unwinding core is replaced with a raw roll, and the processing anti-roll is replaced with a winding core.

FIG. 7 is a cross-sectional view of a modified example corresponding to FIG. 2 in which the unwinding turret and the winding turret have three arms.

FIG. 8 is a cross-sectional view of a modified example corresponding to FIG. 2 in which an ion source in a film forming chamber is replaced with an evaporation source.

FIG. 9 is a cross-sectional view of a modification example corresponding to FIG. 2 in which two main rolls are provided in a film forming chamber.

FIG. 10 is a cross-sectional view corresponding to FIG. 2 of a thin film forming apparatus including a film winding device of Example 3 in which a core to which a bias voltage is applied is used as a winding core of a processing film.

FIG. 11 is a sectional view of a conventional thin film forming apparatus.

FIG. 12 is a view showing an operation of winding a film around a winding core, wherein 12A is a state in which the film is adhered to the winding core and cut with a knife, and 12B is a state where the film is cut and wound. FIG. 3 is a diagram in which air or the like is expelled by rubbing a portion attached to the core with both hands.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Adhesive rubber lining core, 10 ... Thin film forming apparatus, 11 ... Vacuum chamber, 12 ... Partition wall, 13a, 13b ...
... Slits, 14a and 14b ... Seal mechanism, 19 ...
Bias power supply, 21: unwinding / winding chamber, 22: unwinding turret, 23: unwinding core, 24: raw roll, 2
6 ... Film connecting device, 27 ... Nip roll, 28
……………………………………………………………………………………………………………………………………………… Film filming chamber, 31 …………………………………………………………………………………………………………
... Film, 72 ... Processed film.

Claims (6)

[Claims] 1. A film winding device in a vacuum chamber for performing a film treatment such as forming a thin film on a film or etching a thin film on a film, wherein a winding core for winding the film has an adhesive rubber lining core or A film winding device comprising a core to which a bias voltage is applied. 2. The vacuum chamber, wherein a partition provided with a slit as a film passage is used to unwind a film processing chamber for film processing and a film of a raw roll, and return via the film processing chamber. The film processing chamber is provided with a cooling roll for cooling the film at the time of film processing, and is provided with an unwinding / winding chamber for winding the film from the material roll. In the winding chamber, the first unwinding core of which the unwinding of the film of the first unrolled roll of the plurality of unrolled rolls is completed is rotated from the unwinding position to the unloading position, and the second unrolled roll is rotated. An unwinding turret for rotating the roll from the standby position to the unwinding position, and a first processing anti-roll wound on the first winding core of the plurality of winding cores from the winding position to the unwinding position. Move and A take-up turret is provided for turning a second take-up core for taking up a film coming back from the raw roll in contact with the cooling roll from a standby position to a take-up position, and a take-up position of the take-out turret. Near the end of the film of the first source roll and the start of the film of the second source roll, a second source roll is provided near the winding position of the winding turret. 2. The film winding device according to claim 1, further comprising cutting means for winding the film from the second winding core. 3. A plurality of vacuum tanks are provided at a position where the unwinding turret is removed by opening a door provided by introducing air into the unwinding / winding chamber while the slit is vacuum-sealed. The unwinding core is carried out to the atmosphere side, and a plurality of new fabric rolls are carried in from the atmosphere side and set at the standby position, and simultaneously, the plurality of processing rolls at the removal position of the winding turret are moved to the atmosphere side. With unloading, after loading a plurality of new winding cores from the atmosphere side and setting them at the standby position, the door is closed and the unwinding / winding chamber is evacuated,
3. The film winding device according to claim 2, wherein the vacuum seal of the slit is subsequently released so that film processing can be resumed. 4. A film winding method in a vacuum chamber for performing a film processing such as forming a thin film on a film or etching a thin film on a film, wherein an adhesive rubber lining core is provided on a winding core for winding the film. Alternatively, a film winding method using a core to which a bias voltage has been applied. 5. The vacuum chamber, wherein a partition provided with a slit as a film passage is used to unwind a film processing chamber for film processing and a film of a raw roll, and return via the film processing chamber. The film is cooled by a cooling roll provided in the film processing chamber, and the film is cooled by a cooling roll provided in the film processing chamber. The first unwinding core of which the unwinding of the film of the first web roll of the plurality of web rolls is completed by the provided unwinding turret is rotated from the unwinding position to the removal position, and the second unrolling turret is rotated. The anti-roll is pivoted from the standby position to the unwinding position, and the first processing anti-roll wound on the first winding core of the plurality of winding cores by the winding turret provided is moved from the winding position. Removal And a second take-up core for taking up a film that comes in contact with the cooling roll from the second material roll and revolves from a standby position to a take-up position. The end of the film of the first material roll and the beginning of the film of the second material roll are connected by connecting means provided in the vicinity of the turret, and the cutting provided in the vicinity of the winding position of the winding turret Cutting the film from the second material roll by means
The film winding method according to claim 4, wherein the film is wound around a winding core. 6. The vacuum chamber is in a position where the unwinding turret is removed by opening a door provided by introducing air into the unwinding / winding chamber while the slit is vacuum-sealed. A plurality of unwound cores are carried out to the atmosphere side, and a plurality of new material rolls are carried in from the atmosphere side and set at the standby position, and simultaneously, the plurality of processing counter rolls at the removal position of the winding turret are removed to the atmosphere side. After carrying out a new plurality of winding cores from the atmosphere and setting the standby position at the standby position, the door is closed and the unwinding / winding chamber is evacuated,
The film winding method according to claim 5, wherein the vacuum seal of the slit is subsequently released to restart the film processing.