JP2000246371A - Coated die - Google Patents

Coated die

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Publication number
JP2000246371A
JP2000246371A JP11047599A JP4759999A JP2000246371A JP 2000246371 A JP2000246371 A JP 2000246371A JP 11047599 A JP11047599 A JP 11047599A JP 4759999 A JP4759999 A JP 4759999A JP 2000246371 A JP2000246371 A JP 2000246371A
Authority
JP
Japan
Prior art keywords
nitrogen
mold
coating
carbon film
die
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11047599A
Other languages
Japanese (ja)
Inventor
Hisanori Ohara
久典 大原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP11047599A priority Critical patent/JP2000246371A/en
Publication of JP2000246371A publication Critical patent/JP2000246371A/en
Pending legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)
  • Mounting, Exchange, And Manufacturing Of Dies (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a coated die which can prevent deposition of a formed material onto a surface of the coated die, and smoothen sliding towards the formed material. SOLUTION: This die is mainly composed of ceramic, hard metal, high speed steel, preharden steel, or die steel. In this case, entire or one part of the die formed face is covered with an abrasion resistant film, and the outer surface layer of the abrasion resistant film is a nitrogen containing hard carbon film which includes carbon as a main component, nitrogen, and inevitable impurities. Here, the ratio of nitrogen against carbon is 2 atom % or more but 30 atom % or less.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、非鉄金属の曲げ、
絞り、打ち抜きなどのプレス成形やマグネシウム合金の
チクソ成形に用いられる金型のうち、金型の表面に耐摩
耗性被膜を形成した、被覆金型に関するものである。
The present invention relates to the bending of non-ferrous metals,
BACKGROUND OF THE INVENTION The present invention relates to a coating die having a wear-resistant coating formed on the surface of a die, among dies used for press forming such as drawing and punching and thixo forming of a magnesium alloy.

【0002】[0002]

【従来の技術】金型を用いた非鉄金属部品のプレス加工
や成形加工の高能率化、高精度化の要求を満たすため
に、新しい金型材料が次々と開発されている。このよう
な材料開発の流れの中で、各種金型素材上へのセラミッ
クスコーティング技術は、欠かせない金型製造技術の一
つとなっている。
2. Description of the Related Art New mold materials are being developed one after another in order to satisfy the demands for higher efficiency and higher precision in press working and molding of non-ferrous metal parts using molds. In such a flow of material development, ceramic coating technology on various mold materials has become one of the indispensable mold manufacturing technologies.

【0003】このような金型においては、被成形物の焼
き付きや摩耗が生じ、被成形物の仕上がり状態を悪くす
る問題や、金型自身の摩耗が生じるといった問題が起き
る。このような焼き付きや摩耗を抑えるために、セラミ
ックスコーティング膜の成分として、炭化チタン(Ti
C)、窒化チタン(TiN)、炭窒化チタン(TiC
N)といったチタン系セラミックスが現在最も広く使わ
れている。
[0003] In such a mold, there is a problem in that seizure and wear of the molded object occur, thereby deteriorating the finished state of the molded object, and a problem in that the mold itself is worn. In order to suppress such seizure and wear, titanium carbide (Ti) is used as a component of the ceramic coating film.
C), titanium nitride (TiN), titanium carbonitride (TiC)
N) and other titanium-based ceramics are currently most widely used.

【0004】しかし、このような膜構造を持った被膜
は、成形される材料(被成形物)が金型の成形面に溶着
し、被成形物の表面状態を悪くするという問題、いわゆ
る「溶着」の抑制効果が不十分であるという欠点があっ
た。この原因は、溶着物と耐摩耗性被膜との間の密着力
が高く、溶着物の成長を招き、結果として溶着物と被成
型物とのかじり等の現象を引き起こしているためである
と考えられる。
However, a film having such a film structure has a problem that a material to be molded (molded object) is welded to a molding surface of a mold and deteriorates the surface condition of the molded object, so-called “welding”. Is insufficient. The cause is considered to be that the adhesion between the welded material and the abrasion-resistant coating is high, causing the welded material to grow, and as a result, causing a phenomenon such as galling between the welded material and the molded object. Can be

【0005】このような被成形物の溶着を防いだり、被
成形物の型離れ抵抗(離型抵抗)を下げる一つの方法と
して、二流化モリブデンなどの層状化合物からなる潤滑
性皮膜を上述の硬質皮膜の上に積層した金型も提案さ
れ、市販されているが、二流化モリブデンなどの層状化
合物は、機械的強度が低いために摩耗しやすく、成形開
始直後には良好な特性を示すものの、潤滑性皮膜の損傷
に伴って溶着防止の効果が失われてしまうという欠点が
あった。
As one method of preventing the welding of such a molded article or reducing the mold release resistance (mold release resistance) of the molded article, a lubricating film made of a layered compound such as molybdenum disulfide is coated with the above-mentioned hard coating. A mold laminated on the film has also been proposed and marketed, but a layered compound such as difluidized molybdenum tends to wear due to its low mechanical strength, and exhibits good properties immediately after the start of molding. There is a disadvantage that the effect of preventing welding is lost with the damage of the lubricating film.

【0006】またダイヤモンドあるいはダイヤモンド状
炭素からなる硬質被膜を被覆した金型も提案され、一部
実用化が図られているが、金型母材との密着強度が低か
ったり不安定であったりするために剥離しやすく、性能
が不安定であるという問題があった。
A mold coated with a hard film made of diamond or diamond-like carbon has also been proposed and partially put to practical use, but the adhesion strength to the mold base material is low or unstable. Therefore, there was a problem that the film was easily peeled off and the performance was unstable.

【0007】このように、従来の金型材料、被覆膜材料
では、これらの要求を十分に満足することはできていな
かった。
As described above, conventional mold materials and coating film materials have not been able to sufficiently satisfy these requirements.

【0008】[0008]

【発明が解決しようとする課題】本発明は、かかる従来
の事情に鑑み、セラミックスコーティングの優れた点を
いかしながら、被覆金型の表面への被成形物の溶着を防
ぐと同時に、被成形物との滑りを良くすることができる
画期的な被覆金型を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention has been made in consideration of the above circumstances, and at the same time, while preventing the welding of a molded article on the surface of a coating mold while utilizing the advantages of a ceramic coating, the present invention has been made. It is an object of the present invention to provide a revolutionary coated mold capable of improving the sliding with the mold.

【0009】[0009]

【課題を解決するための手段】本発明の第1の特徴とす
るところは、セラミックス、超硬合金、高速度鋼、プリ
ハードン鋼、あるいはダイス鋼などを基材とした金型の
成形面の全部あるいは一部が窒素を含有する硬質炭素膜
で被覆されていることである。
SUMMARY OF THE INVENTION A first feature of the present invention resides in that the entire molding surface of a mold based on ceramics, cemented carbide, high-speed steel, pre-hardened steel, die steel or the like is used. Alternatively, it is partly covered with a hard carbon film containing nitrogen.

【0010】そしてこの窒素含有硬質炭素膜における炭
素に対する窒素の比率が2原子%以上30原子%以下で
あること、また不可避不純物の一つとして水素を含んで
いることを第2の特徴としている。
The second feature is that the ratio of nitrogen to carbon in the nitrogen-containing hard carbon film is not less than 2 atomic% and not more than 30 atomic%, and that hydrogen is included as one of the inevitable impurities.

【0011】また、この窒素含有硬質炭素膜が基材上に
直接被覆された単層構造、あるいは、基材に隣接して形
成された下地層の上に形成され、この下地層の成分が周
期律表のIVa、Va、VIa族元素の金属、炭化物、
窒化物、炭窒化物、並びにAl、AlN、Si、Si
C、Si34、B4C、BN及びこれらの化合物、混合
物、多層構造物からなることを特徴とする第3の特徴と
している。
Further, the nitrogen-containing hard carbon film is formed on a single-layer structure in which the substrate is directly coated on a base material or on a base layer formed adjacent to the base material. Metals, carbides of elements IVa, Va, VIa of the table
Nitride, carbonitride, and Al, AlN, Si, Si
A third feature is that it is composed of C, Si 3 N 4 , B 4 C, BN, a compound thereof, a mixture, and a multilayer structure.

【0012】このような被覆金型の用途としては、最も
一般的な鉄系合金の成型用としてはもちろんのこと、と
りわけアルミ合金や銅合金、はんだ被覆されたリードフ
レームのような軟質かつ焼き付きやすい材料の成形加工
に適しており、これは別の特徴の一つである。
The use of such a coating mold is not only for molding of the most common iron-based alloy, but also for soft and easy-to-seize such as an aluminum alloy, a copper alloy, and a lead frame coated with solder. Suitable for forming materials, which is another characteristic.

【0013】成形加工の種類としては、非鉄金属の曲
げ、絞り、打ち抜きなどのプレス成形や、マグネシウム
合金のチクソ成形に用いられる金型など、全ての成形加
工が対象となる。
The types of molding include all types of molding such as press molding such as bending, drawing, and punching of non-ferrous metals, and dies used for thixo molding of magnesium alloys.

【0014】[0014]

【作用】既に説明したように、金型においては、被成形
物と接触する部位における摩擦摩耗特性が、金型の性能
を左右する重要な因子となっている。
As described above, in the mold, the friction and wear characteristics of the portion in contact with the molding are important factors influencing the performance of the mold.

【0015】本発明者らは、各種セラミックスの持つ多
種多様な特徴を活かすことのできる被膜を検討する中か
ら、金型のうちの成形に関与する部位、則ち被成形物と
擦れる金型成形面のうちの全部あるいは一部が、窒素を
含有する硬質炭素膜で被覆されていれば、成形加工中の
溶着現象をなくすことができることを見いだした。ま
た、従来から用いられていたダイヤモンドやダイヤモン
ド状炭素膜におこりやすかった剥離現象もなくすことが
できることも見いだした。この理由は、窒素を添加した
ことで、ダイヤモンド状炭素膜に近い材質と構造を持っ
た硬質炭素膜が、圧縮内部応力の低減、膜自身の耐摩耗
性の向上、下地層との親和性(密着性)向上などの面で
改善され、剥離しにくく耐摩耗性も向上したためである
と考えられる。
The present inventors have been studying a coating film that can make use of the various characteristics of various ceramics, and have found that a portion of the mold that is involved in molding, that is, a mold that rubs against the molded object. It has been found that if all or part of the surface is coated with a nitrogen-containing hard carbon film, the welding phenomenon during molding can be eliminated. It has also been found that it is possible to eliminate the peeling phenomenon that tends to occur in the conventionally used diamond or diamond-like carbon film. The reason for this is that the addition of nitrogen allows a hard carbon film having a material and structure close to that of a diamond-like carbon film to reduce the internal compressive stress, improve the wear resistance of the film itself, and improve the affinity with the underlayer ( It is considered that this is because the adhesiveness was improved in terms of improvement and the abrasion resistance was improved.

【0016】本発明者らは硬質炭素膜への窒素添加が膜
の内部応力に与える影響を調査した結果、窒素を含まな
いダイヤモンド状炭素膜の残留圧縮応力を1とした時
に、炭素に対する窒素の比率を3原子%とした窒素含有
硬質炭素膜では残留圧縮応力が0.8となり、窒素を数
原子%添加することで、硬質炭素膜の残留圧縮応力がめ
ざましく低下することを見いだした。圧縮応力が高すぎ
ると、膜自身が圧壊するだけでなく、成形加工中の外部
応力なども加わって、膜の損壊が促進される傾向にあ
る。従って窒素を添加することが膜の圧縮損壊の抑制に
効果があることが推察される。
The present inventors have investigated the effect of the addition of nitrogen to the hard carbon film on the internal stress of the film. As a result, when the residual compressive stress of the diamond-like carbon film containing no nitrogen is set to 1, the ratio of nitrogen to carbon It has been found that the residual compressive stress of the nitrogen-containing hard carbon film having a ratio of 3 atomic% is 0.8, and that the residual compressive stress of the hard carbon film is remarkably reduced by adding several atomic% of nitrogen. If the compressive stress is too high, not only the film itself will be crushed, but also the external stress during the forming process will be applied, and the film tends to be damaged. Therefore, it is presumed that the addition of nitrogen is effective in suppressing the compression damage of the membrane.

【0017】次に本発明者らは、硬質炭素膜への窒素添
加が膜の耐摩耗性に与える影響を調査した結果、窒素を
含まないダイヤモンド状炭素膜の摩耗量を1とした時
に、炭素に対する窒素の比率を3原子%とした窒素含有
硬質炭素膜では摩耗量が0.6となり、窒素を数原子%
添加することで、硬質炭素膜の耐摩耗性がめざましく向
上することを見いだした。この試験では相手材を軸受け
鋼(JIS SUJ2)の鋼球とし、潤滑油を全く用い
ない条件でのボールオンディスク試験を用いた。このよ
うに耐摩耗性が著しく向上する理由は、一つには窒素添
加による残留圧縮応力の低減にあるものと思われるが、
もう一つは窒化炭素化合物が生成したことが考えられ
る。窒化炭素化合物とは、ダイヤモンドを越える硬質物
質として期待されている新材料であるが、窒化炭素とし
て完全な形で合成された例はない。本発明による窒素含
有硬質炭素膜の膜内部には、わずかな量の窒素しか存在
しないが、ダイヤモンド状炭素のマトリックス中に窒化
炭素の微細粒子が分散した構造を持っている可能性があ
り、この窒化炭素成分が耐摩耗性向上にも好影響を与え
たものと考えられる。
Next, the present inventors investigated the effect of addition of nitrogen to the hard carbon film on the wear resistance of the film. As a result, when the wear amount of the diamond-like carbon film containing no nitrogen was set to 1, the carbon content was reduced. In the case of a nitrogen-containing hard carbon film in which the ratio of nitrogen to nitrogen is 3 atomic%, the wear amount is 0.6, and nitrogen is several atomic%.
It has been found that the addition of the compound significantly improves the wear resistance of the hard carbon film. In this test, a partner material was a steel ball of bearing steel (JIS SUJ2), and a ball-on-disk test was performed under the condition that no lubricating oil was used. The reason that the wear resistance is remarkably improved in this way seems to be partly due to the reduction of residual compressive stress due to the addition of nitrogen.
The other is considered that a carbon nitride compound was generated. A carbon nitride compound is a new material expected as a hard substance exceeding diamond, but there is no example of a carbon nitride synthesized in perfect form. Although only a small amount of nitrogen is present inside the nitrogen-containing hard carbon film according to the present invention, it is possible that the nitrogen-containing hard carbon film has a structure in which fine particles of carbon nitride are dispersed in a matrix of diamond-like carbon. It is considered that the carbon nitride component also had a favorable effect on the improvement in wear resistance.

【0018】またダイヤモンド状炭素膜に窒素を添加す
ることが、膜の密着強度にも好影響を与えることが本発
明者らによって確認された。本発明では、窒素含有硬質
炭素膜を金型母材表面上に直接形成しても、優れた効果
が得られる。
The present inventors have also confirmed that the addition of nitrogen to the diamond-like carbon film has a favorable effect on the adhesion strength of the film. In the present invention, excellent effects can be obtained even if the nitrogen-containing hard carbon film is formed directly on the surface of the mold base material.

【0019】本発明のもう一つの特徴の一つに、周期律
表のIVa、Va、VIa族元素の金属、炭化物、窒化
物、炭窒化物、並びに、Al、AlN、Si、SiC、
Si3N4、B4C、BN及びこれらの化合物、混合物、
多層構造物からなる一つ以上の中間層を介して、窒素含
有硬質炭素膜を最外層に形成するという多層構造物とし
たことが挙げられるが、ここで用いられている周期律表
のIVa、Va、VIa族元素やAl、Si、Bといっ
た元素は、容易に窒素や炭素と反応することが知られて
いる。
Another feature of the present invention is that metals, carbides, nitrides, carbonitrides, and Al, AlN, Si, SiC, of the elements IVa, Va, and VIa of the periodic table.
Si 3 N 4, B 4 C, BN and their compounds, mixtures,
A multilayer structure in which a nitrogen-containing hard carbon film is formed as an outermost layer through one or more intermediate layers made of a multilayer structure is mentioned. It is known that elements such as Va, VIa group elements, Al, Si, and B easily react with nitrogen and carbon.

【0020】本発明者らは共同研究者らとともに、この
炭素と反応することを利用して、ダイヤモンドあるいは
ダイヤモンド状炭素膜を基材上に形成する際に、周期律
表のIVa、Va、VIa族元素やAl、Si、Bとい
った元素そのもの、あるいはこれらの炭化物、窒化物、
炭窒化物などを利用することを提案している(例えば特
開昭57−158372号公報、特開昭58−1269
72号公報、特開昭61−104078号公報、特開昭
62−116767号公報など)。しかしこれらの提案
では、いずれも最外層がダイヤモンドまたは硬質炭素膜
(ダイヤモンド状炭素膜)であるという点で、本発明と
は異なる。則ち既に述べたように、中間層材料と硬質炭
素膜との密着性を向上させるためには、硬質炭素膜に窒
素を少量でも添加することが極めて有効なのである。こ
れは、炭素は往々にして「低硬度の黒鉛質物質」に変化
し、材料中にこのような低硬度物質が生成することで、
界面や材料そのものの機械的強度を損ねるが、このよう
な場合に窒素が存在すると、黒鉛質の物質の生成を抑制
でき、また、中間層構成物質中の元素と窒化反応をおこ
すことでも密着強度向上に効果があるものと推定され
る。
The present inventors worked together with the co-workers to form a diamond or diamond-like carbon film on a substrate by utilizing the reaction with the carbon to form IVa, Va, VIa of the periodic table. Group elements and elements such as Al, Si, and B themselves, or carbides, nitrides,
It has been proposed to utilize carbonitrides and the like (for example, JP-A-57-158372, JP-A-58-1269).
72, JP-A-61-104078, JP-A-62-116767, etc.). However, these proposals differ from the present invention in that the outermost layer is a diamond or hard carbon film (diamond-like carbon film). That is, as described above, it is extremely effective to add even a small amount of nitrogen to the hard carbon film in order to improve the adhesion between the intermediate layer material and the hard carbon film. This is because carbon often turns into "low-hardness graphitic material" and such low-hardness material is generated in the material,
Although the mechanical strength of the interface and the material itself is impaired, the presence of nitrogen in such a case can suppress the production of graphitic substances, and can also cause the nitridation reaction with the elements in the constituent materials of the intermediate layer to produce an adhesive strength. It is estimated that this is effective for improvement.

【0021】硬質炭素膜への窒素添加量としては、炭素
に対する窒素の比率が2原子%以上、30原子%以下で
あることが好ましい。窒素の比率が2原子%を下回る
と、窒素添加の効果が得られない。また、窒素の比率が
30原子%を越えると、膜の硬度が極端に低下する傾向
を示し、好ましくないこともわかった。なお、窒素含有
硬質炭素膜は、不可避不純物以外に、炭素、窒素、水素
を主成分として含有する。膜合成時の原料によっては、
水素を全く含まない場合もある。いずれにしても、炭素
と窒素の比率が重要であり、窒素含有硬質炭素膜中の炭
素と窒素の組成比(含有率)をそれぞれA原子%、B原
子%とした時に、炭素に対する窒素の比率とは、炭素に
対する窒素の比率(原子%)=B÷(A+B)×100
で計算されるものとした。このような組成比の測定につ
いては、化学分析、物理分析などのあらゆる手法が適用
できるが、本発明者らはX線光電子分光分析法(XPS
法)を用いて分析を行った。分析においては、膜の最表
面における吸着不純物を物理的に除去するための「イオ
ンビームスパッタリング」を併用した。
The amount of nitrogen added to the hard carbon film is preferably such that the ratio of nitrogen to carbon is 2 atomic% or more and 30 atomic% or less. If the ratio of nitrogen is less than 2 atomic%, the effect of adding nitrogen cannot be obtained. Further, it has been found that when the nitrogen ratio exceeds 30 atomic%, the hardness of the film tends to extremely decrease, which is not preferable. The nitrogen-containing hard carbon film contains carbon, nitrogen, and hydrogen as main components in addition to inevitable impurities. Depending on the raw materials used during membrane synthesis,
It may not contain any hydrogen. In any case, the ratio of carbon to nitrogen is important. When the composition ratio (content) of carbon and nitrogen in the nitrogen-containing hard carbon film is A atomic% and B atomic%, respectively, the ratio of nitrogen to carbon is Is the ratio of nitrogen to carbon (atomic%) = B ÷ (A + B) × 100
It was assumed to be calculated by For the measurement of such a composition ratio, any technique such as chemical analysis and physical analysis can be applied. However, the present inventors have proposed X-ray photoelectron spectroscopy (XPS).
Method). In the analysis, "ion beam sputtering" for physically removing adsorbed impurities on the outermost surface of the film was used.

【0022】なお、本被覆金型の用途としては、アルミ
合金や銅合金、はんだ、マグネシウム合金などの軟質で
かつ金型表面に溶着を起こしやすい被成形物の加工が特
に好適である。
As a use of the present coating die, it is particularly preferable to process a soft material such as an aluminum alloy, a copper alloy, a solder, and a magnesium alloy, which is easily welded to the die surface.

【0023】本発明の具体的な内容については実施例に
よって説明する。なお、実施例では、はんだ被覆リード
フレームの曲げ加工とマグネシウムのチクソ成形加工に
ついての結果のみを説明しているが、これら以外の金
型、例えばアルミニウムや銅の成形加工であっても同様
の効果が得られることは言うまでもない。また、実施例
では高速度鋼と超硬合金製金型についてのみ説明してい
るが、これら以外のセラミックス、ダイス鋼、プリハー
ドン鋼といった各種の金型用素材においても同様の効果
が得られることは言うまでもない。
The specific contents of the present invention will be described with reference to embodiments. In the examples, only the results of the bending process of the solder-coated lead frame and the thixo-molding process of magnesium are described. However, the same effect can be obtained by molding other molds such as aluminum and copper. Needless to say, this is obtained. Further, although only the high-speed steel and the cemented carbide mold are described in the examples, the same effect can be obtained in various mold materials such as ceramics, die steel, and pre-hardened steel other than these. Needless to say.

【0024】[0024]

【発明の実施の形態】本発明の具体的な実施の形態につ
いては実施例で示す。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments of the present invention will be shown in Examples.

【0025】[0025]

【実施例】(実施例1)高周波電界中におけるプラズマ
CVD法によりダイヤモンド状炭素膜を形成する公知の
手法において、原料ガスであるメタンガスに窒素ガスを
添加することで、窒素含有硬質炭素膜を形成した。得ら
れた窒素含有硬質炭素膜の厚みは1μmであった。なお
原料ガス中への窒素ガスの添加比率を変化させること
で、0原子%から35原子%までの窒素比率の窒素添加
硬質炭素膜を得た。また本実施例において得られたダイ
ヤモンド状炭素膜中には、水素が約30原子%含有され
ていた。
(Example 1) In a known method of forming a diamond-like carbon film by a plasma CVD method in a high-frequency electric field, a nitrogen-containing hard carbon film is formed by adding nitrogen gas to methane gas as a raw material gas. did. The thickness of the obtained nitrogen-containing hard carbon film was 1 μm. By changing the addition ratio of nitrogen gas to the source gas, a nitrogen-added hard carbon film having a nitrogen ratio of 0 to 35 atomic% was obtained. The diamond-like carbon film obtained in this example contained about 30 atomic% of hydrogen.

【0026】この窒素添加硬質炭素膜を、JIS表記V
20に相当する超硬合金で構成された、はんだ被覆リー
ドフレーム曲げ金型の表面に被覆した。金型のサイズは
幅20mm×長さ40mm×高さ30mmであり、リー
ドフレームの曲げ加工を受け持つ幅20mm×長さ40
mmの面にコーティングを施した。また各種の中間層物
質をスパッタ法、アークイオンプレーティング法、中空
陰極放電イオンプレーティング法などを用いてこの金型
の表面に形成し、その上に窒素含有硬質炭素膜を形成し
た金型も作成した。
This nitrogen-added hard carbon film is referred to as JIS notation V
The surface of a solder-coated lead frame bending mold made of a cemented carbide equivalent to 20 was coated. The size of the mold is 20 mm wide x 40 mm long x 30 mm high, and is 20 mm wide x 40 mm long, which is responsible for lead frame bending.
mm was coated. Also, various intermediate layer materials are formed on the surface of this mold by using a sputtering method, an arc ion plating method, a hollow cathode discharge ion plating method, etc., and a nitrogen-containing hard carbon film is formed thereon. Created.

【0027】これらの金型に対して、はんだ被覆リード
フレームの曲げ加工を実施し、はんだの溶着防止効果や
耐摩耗性向上効果を評価した。はんだの成分は鉛とスズ
の重量比が8:2のものを用い、5万回形成毎の金型成
形面へのはんだ付着の様子及び、はんだが付着した時点
での被膜の剥離の有無を観察した。試験を行った実施例
である試料1〜22と比較例である試料23〜27につ
いて、それらの膜構造と試験結果を表1に示す。
The dies were subjected to bending of a solder-coated lead frame, and the effect of preventing solder welding and the effect of improving wear resistance were evaluated. The components of the solder used were those with a weight ratio of lead to tin of 8: 2. The state of solder adhesion to the mold forming surface every 50,000 times and the presence or absence of peeling of the coating at the time of solder adhesion Observed. Table 1 shows the film structures and test results of Samples 1 to 22, which are examples of the test, and Samples 23 to 27, which are comparative examples.

【0028】表1からわかるように、実施例の試料1〜
22は何れも比較例の試料23〜27に比し、溶着を生
じにくく、はんだ除去に至るまでのショット数も極めて
長く、且つ試験終了後も硬質炭素膜が完全な状態にある
ことがわかった。
As can be seen from Table 1, samples 1 to 5 of the embodiment
Sample No. 22 was found to be less susceptible to welding than Samples 23 to 27 of Comparative Examples, had an extremely long number of shots until solder removal, and showed that the hard carbon film was in a perfect state even after the test was completed. .

【0029】[0029]

【表1】 [Table 1]

【0030】(実施例2)低電圧アーク放電を利用した
アークイオンプレーティング法によりダイヤモンド状炭
素膜を形成する公知の手法において、被膜形成雰囲気中
に窒素ガスを添加することで、窒素含有硬質炭素膜を形
成した。得られた窒素含有硬質炭素膜の厚みは1μmで
あった。なお被膜形成雰囲気中での窒素ガス分圧を変化
させることで、0原子%から35原子%までの窒素比率
の窒素添加硬質炭素膜を得た。なお、本実施例において
得られたダイヤモンド状炭素膜中には水素は含まれてい
なかった。
Example 2 In a known method for forming a diamond-like carbon film by an arc ion plating method using a low-voltage arc discharge, a nitrogen-containing hard carbon is added to a film-forming atmosphere by adding nitrogen gas. A film was formed. The thickness of the obtained nitrogen-containing hard carbon film was 1 μm. Note that a nitrogen-added hard carbon film having a nitrogen ratio of 0 atomic% to 35 atomic% was obtained by changing the nitrogen gas partial pressure in the film forming atmosphere. In addition, hydrogen was not contained in the diamond-like carbon film obtained in this example.

【0031】なお基材はダイス鋼(JIS SKD6
1)からなるマグネシウム合金のチクソ成形用金型と
し、形状は、幅50mm×長さ60mm×高さ30mm
であった。被膜の形成は、この金型母材のうち、マグネ
シウム合金と触れる成形面である幅50mm×長さ60
mmの面と、その外周部の幅10mmの部位について実
施した。
The base material is die steel (JIS SKD6).
A mold for thixomolding of a magnesium alloy composed of 1), having a shape of width 50 mm × length 60 mm × height 30 mm
Met. The coating is formed by a molding surface that is in contact with the magnesium alloy and has a width of 50 mm and a length of 60 mm.
mm and a 10 mm wide portion of the outer periphery thereof.

【0032】これらの金型に対して、マグネシウム合金
(AZ91D)のチクソ成形加工を実施し、金型の性能
を評価した。成形条件は射出成形機の出口、則ち金型の
スプルー部での温度600℃、金型温度200℃、離型
材を最初の1ショット目のみ塗布とし、成型品の型離れ
性(型離れ性が低下した時点のショット数)と被膜の剥
離の状態(型離れ性が低下した時点)を観察した。試験
を行った試験を行った実施例である試料28〜49と比
較例である試料50〜54について、膜構造と試験結果
を表2に示す。
The dies were subjected to thixo molding of a magnesium alloy (AZ91D), and the performance of the dies was evaluated. The molding conditions were as follows: the temperature at the outlet of the injection molding machine, that is, the temperature at the sprue portion of the mold was 600 ° C., the mold temperature was 200 ° C., and the release material was applied only for the first shot. (The number of shots at the time when the temperature decreased) and the state of peeling of the coating film (at the time when the mold release property decreased). Table 2 shows the film structures and test results of Samples 28 to 49, which are the examples of the test, and Samples 50 to 54, which are the comparative examples.

【0033】表2からわかるように、実施例の試料28
〜49は何れも比較例の試料50〜54に比し、離型抵
抗が小さいために成型品に歪みが生じることがなく、寿
命も極めて長く、且つ試験終了後も硬質炭素膜が健全な
状態にあることが確認できた。
As can be seen from Table 2, the sample 28 of the embodiment
The samples No. 49 to No. 49 have a smaller release resistance than the samples 50 to 54 of the comparative example, so that no distortion occurs in the molded product, the life is extremely long, and the hard carbon film is in a healthy state even after the test is completed. Was confirmed.

【0034】[0034]

【表2】 [Table 2]

【0035】[0035]

【発明の効果】本発明によれば、金型の成形面における
被加工物の溶着を防ぐとともに型離れをスムーズにする
ことができ、金型の摩耗を穏やかに進行させることがで
きるだけでなく、美麗且つ歪みのない被成型物を得るこ
とができる。また本発明は、プレス加工、絞り加工、打
ち抜き加工ともに利用することができ、有用である。
According to the present invention, not only welding of the workpiece on the molding surface of the mold can be prevented, the mold can be separated smoothly, but also the wear of the mold can be progressed gently. A beautiful and distortion-free molded article can be obtained. Further, the present invention can be used for all of press working, drawing work and punching work, and is useful.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4E050 JA01 JA03 JA08 JB09 JB10 JD03 JD07 4K029 AA02 AA04 BA02 BA03 BA11 BA16 BA17 BA34 BA35 BA54 BA55 BA56 BA58 BA59 BA60 BA64 BB02 BC02 BD05 4K030 BA02 BA12 BA13 BA17 BA18 BA26 BA28 BA36 BA37 BA38 BA39 BA40 BA41 CA02 CA03 CA05 LA01 LA21  ──────────────────────────────────────────────────続 き Continued on front page F-term (reference) 4E050 JA01 JA03 JA08 JB09 JB10 JD03 JD07 4K029 AA02 AA04 BA02 BA03 BA11 BA16 BA17 BA34 BA35 BA54 BA55 BA56 BA58 BA59 BA60 BA64 BB02 BC02 BD05 4K030 BA02 BA12 BA13 BA17 BA18 BA26 BA28 BA38 BA39 BA40 BA41 CA02 CA03 CA05 LA01 LA21

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 セラミックス、超硬合金、高速度鋼、プ
リハードン鋼あるいはダイス鋼を基材とした金型におい
て、該金型の成形面の全部または一部が耐摩耗性被膜で
被覆されてなり、該耐摩耗性被膜の最外層は炭素を主成
分として炭素に対する窒素の比率が2原子%以上30原
子%以下であり、炭素と窒素以外の成分として不可避不
純物を含んだ窒素含有硬質炭素膜であることを特徴とす
る被覆金型。
1. A mold based on ceramics, cemented carbide, high speed steel, pre-hardened steel or die steel, wherein all or a part of the molding surface of the mold is coated with a wear-resistant coating. The outermost layer of the wear-resistant coating is a nitrogen-containing hard carbon film containing carbon as a main component and having a nitrogen to carbon ratio of 2 to 30 atomic% and containing unavoidable impurities as components other than carbon and nitrogen. A coated mold, characterized in that:
【請求項2】 不可避不純物の一つが水素であることを
特徴とする請求項1記載の被覆金型。
2. The coating mold according to claim 1, wherein one of the unavoidable impurities is hydrogen.
【請求項3】 窒素含有硬質炭素膜が金型基材表面に直
接被覆形成されてなることを特徴とする請求項1または
2記載の被覆金型。
3. The coating mold according to claim 1, wherein the nitrogen-containing hard carbon film is formed by directly coating the surface of the mold base material.
【請求項4】 窒素含有硬質炭素膜と金型基材との間に
は1層以上の中間層を設けた多層耐摩耗被覆構造である
ことを特徴とする請求項1または2記載の被覆金型。
4. The coating metal according to claim 1, wherein the coating metal has a multilayer wear-resistant coating structure in which one or more intermediate layers are provided between the nitrogen-containing hard carbon film and the mold base material. Type.
【請求項5】 窒素含有硬質炭素膜に接する中間層が、
周期律表IVa、Va、VIa族元素の金属、炭化物、
窒化物、炭窒化物、並びにAl、AlN、Si、Si
C、Si34、B4C、BN及びこれらの化合物、混合
物、多層構造物からなることを特徴とする請求項1、2
または4記載の被覆金型。
5. The intermediate layer in contact with the nitrogen-containing hard carbon film,
Metals, carbides of Group IVa, Va, VIa elements,
Nitride, carbonitride, and Al, AlN, Si, Si
3. The method according to claim 1, wherein the material comprises C, Si 3 N 4 , B 4 C, BN, a compound thereof, a mixture, or a multilayer structure.
Or the coated mold according to 4.
【請求項6】 金型は、非鉄金属のプレス成型用である
ことを特徴とする請求項1、2、3、4または5記載の
被覆金型。
6. The coating die according to claim 1, wherein the die is for press-molding a non-ferrous metal.
【請求項7】 金型は、マグネシウム合金のチクソ成形
用であることを特徴とする請求項1、2、3、4または
5記載の被覆金型。
7. The coated mold according to claim 1, wherein the mold is for thixo molding of a magnesium alloy.
JP11047599A 1999-02-25 1999-02-25 Coated die Pending JP2000246371A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11047599A JP2000246371A (en) 1999-02-25 1999-02-25 Coated die

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11047599A JP2000246371A (en) 1999-02-25 1999-02-25 Coated die

Publications (1)

Publication Number Publication Date
JP2000246371A true JP2000246371A (en) 2000-09-12

Family

ID=12779719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11047599A Pending JP2000246371A (en) 1999-02-25 1999-02-25 Coated die

Country Status (1)

Country Link
JP (1) JP2000246371A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008255448A (en) * 2007-04-06 2008-10-23 Osg Corp Hard coating film and tool coated with the hard coating film
WO2016042945A1 (en) * 2014-09-16 2016-03-24 株式会社リケン Coated slide member

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008255448A (en) * 2007-04-06 2008-10-23 Osg Corp Hard coating film and tool coated with the hard coating film
WO2016042945A1 (en) * 2014-09-16 2016-03-24 株式会社リケン Coated slide member
JP2016060921A (en) * 2014-09-16 2016-04-25 株式会社リケン Coating slide member
CN106661717A (en) * 2014-09-16 2017-05-10 株式会社理研 Coated slide member
CN106661717B (en) * 2014-09-16 2019-06-28 株式会社理研 Coating sliding component
US10392576B2 (en) 2014-09-16 2019-08-27 Kabushiki Kaisha Riken Coated sliding member

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