JP2000214066A5 - - Google Patents
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- Publication number
- JP2000214066A5 JP2000214066A5 JP1999014003A JP1400399A JP2000214066A5 JP 2000214066 A5 JP2000214066 A5 JP 2000214066A5 JP 1999014003 A JP1999014003 A JP 1999014003A JP 1400399 A JP1400399 A JP 1400399A JP 2000214066 A5 JP2000214066 A5 JP 2000214066A5
- Authority
- JP
- Japan
- Prior art keywords
- probe
- protrusions
- scanning
- deterioration determination
- deterioration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims 20
- 230000015556 catabolic process Effects 0.000 claims 3
- 230000004059 degradation Effects 0.000 claims 3
- 238000006731 degradation reaction Methods 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP01400399A JP4218107B2 (ja) | 1999-01-22 | 1999-01-22 | 走査型プローブ顕微鏡 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP01400399A JP4218107B2 (ja) | 1999-01-22 | 1999-01-22 | 走査型プローブ顕微鏡 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000214066A JP2000214066A (ja) | 2000-08-04 |
JP2000214066A5 true JP2000214066A5 (ko) | 2005-09-15 |
JP4218107B2 JP4218107B2 (ja) | 2009-02-04 |
Family
ID=11849051
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP01400399A Expired - Lifetime JP4218107B2 (ja) | 1999-01-22 | 1999-01-22 | 走査型プローブ顕微鏡 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4218107B2 (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1326225C (zh) * | 2004-11-05 | 2007-07-11 | 中国科学院上海微系统与信息技术研究所 | 微机械芯片测试探卡及制造方法 |
JP2006308313A (ja) * | 2005-04-26 | 2006-11-09 | Hitachi Kenki Fine Tech Co Ltd | 走査型プローブ顕微鏡およびその探針評価方法 |
JP6515873B2 (ja) * | 2016-06-09 | 2019-05-22 | 住友金属鉱山株式会社 | 原子間力顕微鏡用探針の評価方法 |
CN114088979A (zh) * | 2021-12-20 | 2022-02-25 | 百及纳米科技(上海)有限公司 | 探针校准方法、表面测量方法以及探针控制设备 |
CN114754713B (zh) * | 2022-06-13 | 2022-09-20 | 广州粤芯半导体技术有限公司 | 用于原子力显微镜的探针损伤检测方法 |
-
1999
- 1999-01-22 JP JP01400399A patent/JP4218107B2/ja not_active Expired - Lifetime
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