JP2000210785A - Laser beam machine with plural beams - Google Patents

Laser beam machine with plural beams

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Publication number
JP2000210785A
JP2000210785A JP11016522A JP1652299A JP2000210785A JP 2000210785 A JP2000210785 A JP 2000210785A JP 11016522 A JP11016522 A JP 11016522A JP 1652299 A JP1652299 A JP 1652299A JP 2000210785 A JP2000210785 A JP 2000210785A
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Japan
Prior art keywords
lens
beam
laser beam
laser
optical axis
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Withdrawn
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JP11016522A
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Japanese (ja)
Inventor
Yoshio Hashimoto
Takashi Ishide
Yasumi Nagura
Risuke Nayama
Koji Okimura
保身 名倉
理介 名山
義男 橋本
浩司 沖村
孝 石出
Original Assignee
Mitsubishi Heavy Ind Ltd
三菱重工業株式会社
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Priority to JP11016522A priority Critical patent/JP2000210785A/en
Publication of JP2000210785A publication Critical patent/JP2000210785A/en
Application status is Withdrawn legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams

Abstract

PROBLEM TO BE SOLVED: To make a laser beam machine having high functions such as the cutting and the welding of a thick plate, etc., by providing a variable focus lens making a part of laser beam a focus position different from other parts along an optical axis so that the variable focus lens is adjustable to put in and out to the optical axis in the inside of an optical system. SOLUTION: An optical system has an optical fiber 10, a collimator lens 11 making an outgoing light beam from the optical fiber 10 a parallel light beam, and a variable focus lens (semicircular notched lens) 12 for making a part of a beam from the collimator lens 11, for instance a half S, a short focus along an optical axis and making the remainder half L a long focus. The beam which has passed through the collimator lens 11, is deformed slenderly along the laser beam machining direction by a cylinder lens 13 whose cross-section is a semicylinderical type, and is allowed to surely reach inside a melting hole which is a weld portion on a work. A variable power lens 14 is movably arranged along the optical axis in the poststage of the cylinder lens 13, and the focus position of a laser beam is allowed to change by the movement of the variable power lens 14. By image-forming the beam which has passed through the variable power lens 14 by an image-formation lens 15, the beam waists of two focuses are formed in the optical axis direction.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【発明の属する技術分野】本発明は、レーザ加工能力を向上させた複数ビームレーザ加工装置に関する。 The present invention relates to relates to multiple-beam laser processing apparatus with improved laser processing capability.

【0002】 [0002]

【従来の技術】例えば、レーザによる切断や溶接を行なうレーザ加工装置においては、加工対象となるワークの厚さ等も多様化しており、板切断を行なうにしても薄板のみならず100mm〜200mmといった厚板の切断も行なわれる。 BACKGROUND ART For example, in the laser processing apparatus for performing cutting and welding by laser, thickness, etc. of the workpiece to be processed are also diversified, such 100mm~200mm not only thin even to carry out the plate cut cutting of the plank is also performed.

【0003】この場合、切断能力あるいは溶接能力を向上させるため加工上での焦点深度が深い長焦点レンズが用いられているのであるが、Helmholtz-Lagrangeの不変量より、ビームウエストの大きさと集光エネルギとの積が一定となることから、焦点距離が長くなると集光ビーム径は大きくなり、集光エネルギ密度が低下してしまい、切断や溶接のためのワークの活性化が極めて遅れたりあるいはできなかったりして、長焦点化にも限界がある。 [0003] In this case, although the depth of focus on working to improve the cutting ability or weldability deep long focus lens is used, than the invariant Helmholtz-to Lagrange, the beam waist size and the condenser since the product of the energy is constant, the focused beam diameter is increased when the focal length becomes longer, would be reduced condensing energy density, activation of the work for cutting or welding is extremely delayed or alternatively can and no or, there is a limit to the long-focus. つまり、厚板加工の能力には限界を有している。 That is, a limit to the capacity of the plank processing.

【0004】かかる課題に着目して本発明者らは、2重焦点化ということに着眼したのであるが、図5,図6に示すように2重焦点化については類似の技術があり、例えば図5においては、ファイバFからのレーザ光01の光路内にクサビプリズム02を入れて光束を同一平面内にて2点に分離させて集光させ、管体03の外側壁上端と内側壁上端とを同時に溶融することで溶接時間が短時間で済む等の効果をもたらしている。 [0004] Such challenges interest to the present inventors, but than it was focusing on the fact that the double-focus, 5, there is a similar technique for double focusing, as shown in FIG. 6, for example in FIG. 5, put the wedge prism 02 in the optical path of the laser beam 01 from the fiber F to separate the light beam into two points in the same plane by condensing, the outer walls top and inner side wall upper end of the tubular body 03 has resulted in effects such as welding time requires only a short time to melt bets simultaneously.

【0005】また、図6においては、レンズ05の屈折率を部分的に変え、中心に高屈折率の短焦点レンズ05 Further, in FIG. 6, changing the refractive index of the lens 05 partially short focal lens having a high refractive index at the center 05
Sとそのまわりに低屈折率の長焦点レンズ05Lとを一体化して備え、レーザビーム01について2重焦点とした構造が開示されている。 Provided by integrating the long focal lens 05L of S and low refractive index around which is a structure with double focal discloses a laser beam 01.

【0006】 [0006]

【発明が解決しようとする課題】しかしながら、上述の先行技術においても、図5に示す管体03の上面溶融に用いられる同一平面内での異なる位置での集光や図6に示す固定屈折率による光軸方向の2重焦点化はそれ自体効果を有するとしても、本発明者らが目指すレーザ加工装置の高機能化には未だ及ばない。 [0007] However, in the above prior art, a fixed refractive index shown in the condenser and 6 at different positions in the same plane to be used on the upper surface melting of the tubular body 03 shown in FIG. 5 double focusing of the optical axis direction due to the even have its own effect, still falls short of sophistication of the laser processing apparatus to which the present inventors aim. また、この図5,図6の構造によったとしても例えば前述した厚板切断や溶接を都合良く行なうことができない。 Further, FIG. 5, it can not be performed conveniently be for example the above-mentioned thick plate cutting or welding as was due to the structure of FIG.

【0007】本発明は、上述の問題に鑑み、例えば厚板の切断や溶接を行なうなど、高機能化を図った複数ビームレーザ加工装置の提供を目的とする。 [0007] The present invention has been made in view of the above problems, for example, to cut and weld the plank, and an object thereof is to provide a multiple-beam laser processing apparatus which attained high performance.

【0008】 [0008]

【課題を解決するための手段】上述の目的を達成する本発明は、次の発明特定事項を有する。 Means for Solving the Problems The present invention to achieve the above object has the following subject matter. 第1の発明は、レーザ光を光学系を介してワークに照射するレーザ加工装置において、上記レーザ光の光束の一部分を光軸に沿って上記レーザ光の他の部分と異なる焦点位置とする変焦点レンズを上記光学系内にて上記光軸に対し出し入れ調整可能に配置したことを特徴とする。 The first invention is a laser processing apparatus for irradiating the workpiece through the optical system of the laser beam, varying to other portions different from the focal position of the laser beam a portion of the light flux of the laser beam along the optical axis the focusing lens characterized by being out adjustably positioned relative the optical axis in the above optical system.

【0009】第2の発明は、第1の発明において、上記レーザ光の少なくとも長焦点位置側の光学系に上記レーザ光による加工方向に沿って細いレーザ光とするシリンドリカルレンズを配置したことを特徴とする。 [0009] The second invention is characterized in the first aspect, in that a cylindrical lens to a narrow laser beam along the processing direction of the laser beam in at least the long focal position side of the optical system of the laser beam to.

【0010】第3の発明は、第1の発明において、上記レーザ光の光束の少なくとも一部分の光学系に焦点位置を変える変倍レンズを光軸方向に沿って移動可能に配置したことを特徴とする。 A third aspect based on the first aspect, and characterized in that disposed movably along the optical axis zooming lens changing at least focal position in the optical system of a portion of the light flux of the laser beam to.

【0011】第4の発明は、第1の発明において、上記レーザ光の光束の一部分及び他の部分それぞれの集光エネルギ密度に応じて変焦点レンズが光束を通す割合を変えたことを特徴とする。 [0011] A fourth aspect based on the first aspect, and characterized in that variable focus lens according to each of the condensing energy density portion and the other portion of the light flux of the laser light is changing the ratio passing light beam to.

【0012】第5の発明は、第4の発明において、レーザ光の光束を周方向に複数分割するように複数個の変焦点レンズを備えたことを特徴とする。 [0012] A fifth aspect based on the fourth aspect, characterized by comprising a plurality of variable focus lens to multiple split the light flux of the laser beam in the circumferential direction.

【0013】第6の発明は、第5の発明において、複数個の変焦点レンズに応じて複数個の変倍レンズを備えたことを特徴とする。 [0013] A sixth aspect of the fifth invention, characterized by comprising a plurality of variable magnification lens in accordance with a plurality of variable focus lens.

【0014】 [0014]

【発明の実施の形態】ここで、図1〜図4を参照して本発明の実施の形態の一例を説明する。 BEST MODE FOR CARRYING OUT THE INVENTION Here will be described an example of an embodiment of the present invention with reference to FIGS. 図1は、光学系全体の概要を示しており、構造上光学系としては光ファイバ10、光ファイバ10からの出射光を平行光とするコリメータレンズ11、コリメータレンズ11からの光束の一部Sを光軸に沿って短焦点とするための変焦点レンズ(切り欠きレンズ)12を有する。 Figure 1 shows an overview of the entire optical system, the optical fiber 10 as a structural optical system, a collimator lens 11 into parallel light light emitted from the optical fiber 10, part of the light beam from the collimator lens 11 S having a variable focus lens (notch lens) 12 for a short focal along the optical axis. この場合、図1の例では光束の半分Sを短焦点に、残りの半分Lを長焦点としており、このため変焦点レンズ12は半円形状の切り欠きレンズにより構成される。 In this case, the short focal half S of the light beam in the example of FIG. 1, the other half L has a long focal, Thus variable focus lens 12 is composed of a cutout lens semicircular.

【0015】光学系の光軸に沿って変焦点レンズ12の後段には、断面かまぼこ型のシリンダレンズ13が配置されている。 [0015] The subsequent stage of the optical axis variable focus lens 12 along the optical system, a cylindrical lens 13 of the cross-section semicylindrical is disposed. このシリンダレンズ13は、コリメータレンズ11を通った光束をこのレーザ光によるワークの加工方向に沿って細長く変形させるもので、ワーク上の溶接部位である溶融穴内に的確にレーザ光を到達させるために光束の変形をするものである。 The cylindrical lens 13, a light beam passing through the collimator lens 11 as it is deformed elongated along the machining direction of the workpiece by the laser beam, in order to reach a properly laser beam to melt the hole is welded part on the workpiece it is to a deformation of the light beam. このことは特に厚板の切断等の加工にあって穴内にレーザ光を集光するためには非常に有用な手段である。 This is a very useful means for condensing the laser beam in the bore in particular be in working such as cutting of thick plates.

【0016】光学系にあってシリンダレンズ13の後段には、変倍レンズ14が光軸に沿って移動可能に配置されている。 [0016] The subsequent stage of the cylindrical lens 13 with the optical system, zoom lens 14 is movably disposed along the optical axis. この変倍レンズ14は、その光軸上での移動によりレーザ光の焦点位置を変更させる機能を有し、例えば図2(a)に示すように変倍レンズ14を変焦点レンズ12側に近づけた場合には、レーザ光全体が短焦点となり、図2(b)に示すように結像レンズ15側に近づけた場合には、レーザ光全体が長焦点となる。 The variable power lens 14, its has a function of changing the focal position of the laser beam by movement on the optical axis, for example close as the variator lens 14 to the variable-focus lens 12 side shown in FIG. 2 (a) If the, the entire laser beam becomes short focus, when close to the imaging lens 15 side as shown in FIG. 2 (b), the entire laser light becomes long focus. なお、 It should be noted that,
変焦点レンズ12を通った光束Sと通らない光束Lとはそれらの結像焦点が異なることになるが、この焦点間距離も変倍レンズ14の移動により拡大されたり、縮んだりすることになる。 The light beam L does not pass through the light beam S having passed through the variable focus lens 12 is made in their image focus can vary, the focal distance or even be enlarged by the movement of the variator lens 14, will shrink .

【0017】変倍レンズ14を通った光束は結像レンズ15により結像され、光軸方向に二焦点のビームウエストが形成されることになる。 The light beam passing through the zoom lens 14 is imaged by the imaging lens 15, so that the beam waist of the bifocal optical axis direction is formed.

【0018】さて、本発明の実施の形態の概要は上述のとおりであるが、ワークの溶接や切断を行なうに当たっては、更に考慮しなければならないことが多くある。 [0018] Now, overview of embodiments of the invention are as described above, when the perform welding and cutting of the workpiece, there often must be further considered. すなわち、例えば図3に示すようにレーザ照射装置20より射出されて結像されるレーザ光は、本例では短焦点と長焦点との2種類あり、それぞれに独自の役目を持つものである。 That is, for example, a laser beam is emitted from the laser irradiation device 20 is imaged as shown in FIG. 3, in this example there are two types of short focal point and the long focal are those each with its own role. 例えばSUS材を切断するに当たり図3 For example Figure 3 Upon cutting the SUS material
(a)の如く薄い板材21TNの下部に熱的性質の異なる加工に必要なレーザエネルギーが少なくてすむ材料2 Fewer laser energy required for different processing of thermal properties in the lower portion of the thin plate 21TN as (a) Materials 2
2を有する場合には、切断方向に沿い先行する短焦点レーザ光Sのビーム強度を大きくし材料22に到達する後続の長焦点レーザ光Lのビーム強度を相対的に小さくすることで、材質や板厚に合った好適な切断が可能になる。 When having 2, by relatively decreasing the beam intensity of the subsequent long focal laser beam L reaching the increased beam intensity at the short focal laser beam S that precedes along the cutting direction material 22, the material Ya allowing a suitable cut to suit the thickness.

【0019】また、図3(b)の如く厚い板材21TK [0019] In addition, the thick plate 21TK as shown in FIG. 3 (b)
を切断する場合には先行する短焦点レーザ光Sのビーム強度を小さくし後続の長焦点レーザ光Lのビーム強度を相対的に大きくすることにより、厚板の好適な切断と残滓物発生の抑制に効果的である。 By the relatively large beam intensity of the subsequent long focal laser beam L to reduce the beam intensity at the short focal laser beam S that precedes when cutting, suppression of suitable cutting and residue materials generated plank it is effective in.

【0020】上述の図3の例は、一例を示したものであるが、ワークの厚さや熱的性質等の材質に合わせて短焦点のレーザ光Sのビーム強度や長焦点のレーザ光Lのビーム強度を調整することができる。 [0020] The above 3 examples are intended to show an example of the laser beam S at the short focal in accordance with the material of such thickness and thermal properties of the work beam intensity and long focal point of the laser beam L it is possible to adjust the beam intensity. この調整の仕方によりワークの厚さや材質に合ったビーム強度の組合せを行なうことができ、切断又は溶接に最適な加工強度状態を採ることができる。 This combination of beam intensity that matches the thickness and material of the workpiece by way of the adjustment can be performed, it is possible to adopt optimum processing intensity state to the cutting or welding. 換言すれば2焦点ビームにて焦点位置やビーム強度を種々変化できることによりいかようなワーク材料にも対処することができる。 Also the focal position and the beam intensity at two focal points beam in other words the work material, such as squid By be variously changed can be addressed.

【0021】上述の説明にあっては切欠きレンズである変焦点レンズ12を半円形状としたのであるが、光束の円周方向に複数個例えば90°ずつ4個とか120°ずつ3個レンズ曲率を変えて配置することにより、4焦点とから焦点のレンズを得ることもできる。 [0021] Although In the above description is of a variable-focus lens 12 is a cutout lens was semicircular, four in the circumferential direction of the light beam by a plurality example 90 ° Toka three lens by 120 ° by arranging by changing the curvature, it is also possible to obtain the focal point of the lens and a 4 focus. あるいは、変焦点レンズ12を半円(180°)でなく3/4円(2 Alternatively, the variable focus lens 12 semicircular (180 °) is not 3/4 yen (2
70°)とし残りをレンズが無い状態とする等の変形例も種々考えられる。 Modification, such as the state and the remaining lens is not set to 70 °) also are various.

【0022】また、シリンダレンズ14はレーザ光をワークの加工方向に沿って細長くするために備えたものであるが、短焦点の場合にはレーザ光を絞る必要も少ないので、光束の一部S側にはシリンダレンズを備えない方が良い場合もある。 Further, although the cylindrical lens 14 are those provided to elongated along the laser beam machining direction of the workpiece, so less needs to narrow the laser beam in the case of short focus, part of the light beam S the side is sometimes better without a cylindrical lens.

【0023】更に、変倍レンズ14を複数分割することにより、レーザ光の焦点位置を複数点に変更することができる。 Furthermore, by dividing into plural zooming lens 14 can change the focus position of the laser beam into a plurality of points. したがって、この結果、変焦点レンズ12や変倍レンズ14の形状や個数によりあるいは有無によってレーザ光の焦点の個数や位置あるいは焦点の相互距離、 Therefore, this result, the focus of the number and position or focal mutual distance of the laser beam by the or whether the shape and the number of variable-focus lens 12 and zoom lens 14,
更にはビーム強度など種々変更することができる。 Furthermore it can be variously changed such as beam intensity.

【0024】図4は炭素鋼をワークとしてYAGレーザによる厚板分離切断例を示すものであり、横軸に切断速度、縦軸に板厚を採った場合の特性であり、下段の場合従来の1ビームによる切断、上段は本例での2ビームでの切断特性を示すものである。 [0024] FIG. 4 shows the planks separation cleavage example by YAG laser carbon steel as a workpiece, the cutting speed on the horizontal axis, a characteristic when taken with thickness on the vertical axis, the lower case of the conventional cleavage by one beam, the upper part shows the cleavage properties of a two-beam in the present embodiment.

【0025】 [0025]

【発明の効果】以上説明したように本発明によれば、次の効果を有する。 According to the present invention as described in the foregoing has the following advantages. レーザ光を光学系を介してワークに照射するレーザ加工装置において、上記レーザ光の光束の一部分を光軸に沿って上記レーザ光の他の部分と異なる焦点位置とする変焦点レンズを上記光学系内にて上記光軸に対し出し入れ調整可能に配置したことにより、レーザ加工能力を向上させることができる。 In the laser processing apparatus for irradiating the workpiece through the optical system of the laser beam, the optical system variable focus lens of different focal positions and other portions of the laser beam along an optical axis of a portion of the light flux of the laser beam by the out adjustably positioned relative the optical axis at the inner, it is possible to improve the laser processing capability.

【0026】また、上記レーザ光の少なくとも長焦点位置側の光学系に上記レーザ光による加工方向に沿って細いレーザ光とするシリンドリカルレンズを配置したことにより、ワークの加工に合わせて細長いビーム形状としたことにより、細かな加工に対処することができる。 Further, by disposing the cylindrical lens to a narrow laser beam along the processing direction of the laser beam in at least the long focal position side of the optical system of the laser beam, an elongated beam shape in accordance with the machining of the workpiece by the can address fine machining.

【0027】上記レーザ光の光束の少なくとも一部分の光学系に焦点位置を変える変倍レンズを光軸方向に沿って移動可能に配置したことにより、焦点位置を変更することができる。 [0027] By disposing movably zoom lens for changing a focal position to at least a portion of the optical system of the light flux of the laser beam along the optical axis direction, it is possible to change the focal position.

【0028】上記レーザ光の光束の一部分及び他の部分それぞれの集光エネルギ密度に応じて変焦点レンズが光束を通す割合を変えたことにより、ワークの材質や厚さに応じた適切な加工をすることができる。 [0028] By the laser beam of variable focus lens according to each of the condensing energy density portion and the other portion of the light flux is changing the ratio through a light beam, an appropriate processing in accordance with the material and thickness of the workpiece can do.

【0029】変焦点レンズや変倍レンズをそれぞれ複数分割して備えたことにより、種々な加工に対処することができる。 [0029] By the variable focus lens or zoom lens each with a plurality division, it is possible to deal with various processing.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の実施形態の一例の構成図。 Block diagram of an example of embodiment of the invention; FIG.

【図2】変倍レンズを移動させた場合の状態図。 [2] state diagram of the case of moving the zoom lens.

【図3】材質や厚さに対応したレーザ光の状態を示す図。 FIG. 3 is a diagram showing a state of the laser beam corresponding to the material and thickness.

【図4】厚板分離切断例の特性線図。 [4] characteristic diagram of plank separation cut examples.

【図5】2重焦点の場合の先行技術の一例の構成図。 [5] a configuration diagram of an example of a prior art in the case of bifocal.

【図6】2重焦点の従来例の構成図。 [6] conventional configuration diagram of a double focus.

【符号の説明】 DESCRIPTION OF SYMBOLS

12 変焦点レンズ 13 シリンダレンズ 14 変倍レンズ 12 variable-focus lens 13 cylindrical lens 14 variable power lens

───────────────────────────────────────────────────── フロントページの続き (72)発明者 名倉 保身 兵庫県高砂市荒井町新浜2丁目1番1号 三菱重工業株式会社高砂研究所内 (72)発明者 橋本 義男 兵庫県高砂市荒井町新浜2丁目1番1号 三菱重工業株式会社高砂研究所内 (72)発明者 沖村 浩司 兵庫県神戸市兵庫区和田崎町一丁目1番1 号 三菱重工業株式会社神戸造船所内 Fターム(参考) 2H087 KA26 RA07 SA00 SA86 4E068 CA11 CD04 CD14 CE07 5F072 AB01 KK30 MM03 YY06 ────────────────────────────────────────────────── ─── of the front page continued (72) inventor Nagura entrenchment, Hyogo Prefecture Takasago Araichoshinhama 2 chome No. 1 Mitsubishi Heavy Industries, Ltd. Takasago Research Institute (72) inventor Yoshio Hashimoto, Hyogo Prefecture Takasago Araichoshinhama 2-chome No. 1 Mitsubishi Heavy Industries, Ltd. Takasago Research Institute (72) inventor Okimura Koji, Hyogo Prefecture, Kobe, Hyogo-ku, Wadasaki-cho, 1 chome, Mitsubishi Heavy Industries, Ltd. Kobe Shipyard & Machinery Works in the F-term (reference) 2H087 KA26 RA07 SA00 SA86 4E068 CA11 CD04 CD14 CE07 5F072 AB01 KK30 MM03 YY06

Claims (6)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 レーザ光を光学系を介してワークに照射するレーザ加工装置において、 上記レーザ光の光束の一部分を光軸に沿って上記レーザ光の他の部分と異なる焦点位置とする変焦点レンズを上記光学系内にて上記光軸に対し出し入れ調整可能に配置したことを特徴とする複数ビームレーザ加工装置。 1. A laser processing apparatus for irradiating the workpiece through the laser beam optical system, variable focus to other parts with different focal position of the laser beam a portion of the light flux of the laser beam along the optical axis lens multibeam laser processing apparatus characterized by being out adjustably positioned relative the optical axis in the above optical system.
  2. 【請求項2】 請求項1において、上記レーザ光の少なくとも長焦点位置側の光学系に上記レーザ光による加工方向に沿って細いレーザ光とするシリンドリカルレンズを配置したことを特徴とする複数ビームレーザ加工装置。 2. The method of claim 1, the plurality beam laser, characterized in that a cylindrical lens to a narrow laser beam along the processing direction of the laser beam in at least the long focal position side of the optical system of the laser beam processing equipment.
  3. 【請求項3】 請求項1において、上記レーザ光の光束の少なくとも一部分の光学系に焦点位置を変える変倍レンズを光軸方向に沿って移動可能に配置したことを特徴とする複数ビームレーザ加工装置。 3. The method of claim 1, a plurality of beams laser processing, characterized in that disposed movably along the optical axis zooming lens changing at least focal position in the optical system of a portion of the light flux of the laser beam apparatus.
  4. 【請求項4】 請求項1において、上記レーザ光の光束の一部分及び他の部分それぞれの集光エネルギ密度に応じて変焦点レンズが光束を通す割合を変えたことを特徴とする複数ビームレーザ加工装置。 4. The method of claim 1, a plurality of beams laser processing, characterized in that the laser beam of the light beam portion and other portions varying focal lens according to each of the condensing energy density is changing the ratio passing light beam apparatus.
  5. 【請求項5】 請求項4において、レーザ光の光束を周方向に複数分割するように複数個の変焦点レンズを備えたことを特徴とする複数ビームレーザ加工装置。 5. The method of claim 4, multiple-beam laser processing apparatus characterized by comprising a plurality of variable focus lens to multiple split the light flux of the laser beam in the circumferential direction.
  6. 【請求項6】 請求項5において、複数個の変焦点レンズに応じて複数個の変倍レンズを備えたことを特徴とする複数ビームレーザ加工装置。 6. The method of claim 5, multiple-beam laser processing apparatus characterized by comprising a plurality of variable magnification lens in accordance with a plurality of variable focus lens.
JP11016522A 1999-01-26 1999-01-26 Laser beam machine with plural beams Withdrawn JP2000210785A (en)

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