JP2000199779A - Control method of test hand, recording medium and instrumentation and control system thereof - Google Patents

Control method of test hand, recording medium and instrumentation and control system thereof

Info

Publication number
JP2000199779A
JP2000199779A JP10378549A JP37854998A JP2000199779A JP 2000199779 A JP2000199779 A JP 2000199779A JP 10378549 A JP10378549 A JP 10378549A JP 37854998 A JP37854998 A JP 37854998A JP 2000199779 A JP2000199779 A JP 2000199779A
Authority
JP
Japan
Prior art keywords
hand
displacement
socket
sensor
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10378549A
Other languages
Japanese (ja)
Other versions
JP3407192B2 (en
Inventor
Tomonori Ono
友則 大野
Mitsugi Kurihara
貢 栗原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daito KK
Original Assignee
Daito KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP37854998A priority Critical patent/JP3407192B2/en
Application filed by Daito KK filed Critical Daito KK
Priority to CNB998034843A priority patent/CN1170166C/en
Priority to CA002321868A priority patent/CA2321868C/en
Priority to PCT/JP1999/007413 priority patent/WO2000040983A1/en
Priority to AT99962509T priority patent/ATE292805T1/en
Priority to SG200202957A priority patent/SG98053A1/en
Priority to DE69924604T priority patent/DE69924604T2/en
Priority to KR10-2000-7009282A priority patent/KR100394215B1/en
Priority to EP99962509A priority patent/EP1069437B1/en
Priority to TW088123263A priority patent/TW484014B/en
Publication of JP2000199779A publication Critical patent/JP2000199779A/en
Priority to US09/651,572 priority patent/US6384734B1/en
Priority to HK01105358A priority patent/HK1035402A1/en
Priority to US10/084,500 priority patent/US6690284B2/en
Application granted granted Critical
Publication of JP3407192B2 publication Critical patent/JP3407192B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2893Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]

Abstract

PROBLEM TO BE SOLVED: To obtain a control method capable of confirming whether or not the pressure of test hand of handler, operation speed and displacement are proper according to the kinds of an IC a socket and correcting in improper cases, a recording medium and a instrumentation and control system. SOLUTION: An instrumentation and control system is constituted of a load sensor 9 detecting the pressure P to IC 5 in a test hand 1, an acceleration sensor 10 detecting the operation speed or the acceleration A of the hand 1, a displacement sensor 11 detecting the forcing displacement D from the contacting of the hand 1 to the IC until stopping, and a control means 14 calculating a composite spring constant K of the IC and the socket 2 based on the data from each sensor, monitoring whether or not the shock operating on the IC is lower than a tolerable value Pa and which is such a pressure that the speed and displacement make the operation speed of the hand the highest and controlling the drive of the hand 1 based on each data.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ICハンドラーに
おいてソケット上のICデバイス(以下ICという)を
押圧するテストハンドの動作をIC及びソケットの種別
に応じて適正に制御するための方法、記録媒体及びこれ
を用いた計測制御システムに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and a recording medium for appropriately controlling the operation of a test hand for pressing an IC device (hereinafter referred to as an IC) on a socket in an IC handler according to the type of the IC and the socket. And a measurement control system using the same.

【0002】[0002]

【従来の技術】ICハンドラーは、ローダから測定部の
ソケットに送り込まれたICをテストハンドのプッシャ
で押圧してICリードをソケットのコンタクタに接触さ
せることにより、テスタでIC特性の良否を判別した
後、アンローダでICを分類収容する装置である。しか
しながら、最近では検査対象となるICやこれに対応す
べきソケットの種類が多様化しているため、種別に応じ
てテストハンドの動作特性を変化させる必要がある。ハ
ンドラーはできるだけICを高速処理するのが望ましい
が、高速化するほどICへの衝撃が発生増大し、またI
Cリードやソケットコンタクタの寿命が低下する難点が
ある。
2. Description of the Related Art An IC handler presses an IC sent from a loader to a socket of a measuring section with a pusher of a test hand to contact an IC lead with a contactor of the socket. Then, it is a device that sorts and accommodates ICs with an unloader. However, recently, the types of ICs to be inspected and the types of sockets corresponding to the ICs have been diversified, and it is necessary to change the operation characteristics of the test hand according to the types. It is desirable for the handler to process the IC as fast as possible, but the higher the speed, the greater the impact on the IC, and
There is a disadvantage that the life of the C lead and the socket contactor is reduced.

【0003】この解決方法として、特開平9−8998
3号のハンドラーでは、各種ICの適正な接触圧を予め
FDに入力しておき、作業員がICの種別を指定すると
CPUがFDからのデータに基づいて制御弁に信号を送
り、ハンドを駆動するシリンダ圧が調整されるようにな
っている。また、特開平10−227834号には、テ
ストハンドをパルスモータで駆動する際、IC品種に応
じて適正な押圧力、速度、IC押し込み変位を微調整で
きる機構が示されている。
As a solution to this problem, Japanese Patent Application Laid-Open No. 9-8998 discloses
In the handler of No. 3, the appropriate contact pressure of various ICs is input to the FD in advance, and when the operator specifies the type of the IC, the CPU sends a signal to the control valve based on data from the FD to drive the hand. The cylinder pressure to be adjusted is adjusted. Japanese Patent Application Laid-Open No. Hei 10-227834 discloses a mechanism capable of finely adjusting an appropriate pressing force, speed, and IC pushing displacement according to an IC type when a test hand is driven by a pulse motor.

【0004】[0004]

【発明が解決しようとする課題】しかし、上記従来品で
は、いずれもIC種別毎のデータを予めコンピュータに
入力しておく必要があり、またそのデータもICに表示
されている1本当たりのピン圧、ピン数、ソケットコン
タクタの許容変位量を基にした経験値に依存している。
However, in each of the above-mentioned conventional products, it is necessary to input data for each IC type to a computer in advance, and that data is also displayed on a single IC pin. It depends on empirical values based on pressure, number of pins, and allowable displacement of socket contactors.

【0005】ところが、実際のハンドラーでは、ソケッ
トにICが挿入された状態でテストハンドが押圧するた
め、規定のデータによる値が必ずしも適正であるという
保証がない。例えば、ICを高速処理するためにハンド
の速度を上げれば、ICパッケージに対する衝撃が予想
以上に増大したり、またICリードやソケットコンタク
タの弾性限度を超える可能性もある。
However, in an actual handler, since the test hand presses the IC with the IC inserted into the socket, there is no guarantee that the value according to the specified data is always appropriate. For example, if the speed of the hand is increased to process the IC at high speed, the impact on the IC package may be increased more than expected, or the elasticity of the IC lead or the socket contactor may be exceeded.

【0006】本発明は、このような事情に鑑みてなされ
たものであり、その目的は、IC及びソケットの種別に
応じてテストハンドの押圧力、動作速度及び変位を適正
に制御できる制御方法及び計測制御システムを提供する
ことにある。
The present invention has been made in view of such circumstances, and a purpose thereof is to provide a control method and a control method capable of appropriately controlling the pressing force, operating speed, and displacement of a test hand according to the type of an IC and a socket. An object of the present invention is to provide a measurement control system.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するた
め、請求項1の発明では、ICハンドラーのソケットに
送り込まれたICを押圧するテストハンドの制御方法に
おいて、まず前記ハンドでソケット上のICを複数回押
圧して、その荷重P、加速度Aまたは速度V、ICの押
し込み変位量Dを各センサを用いて検出し、次いで各検
出データからIC及びソケットの合成ばね定数Kを求
め、ICに対する衝撃力が許容値Pa以下となるように
ハンドの動作を決定している。請求項2の記録媒体に
は、請求項1の制御方法で決定されたテストハンドの適
正な押圧力、速度及び変位の各データが記録されてい
る。
According to a first aspect of the present invention, there is provided a method of controlling a test hand for pressing an IC sent to a socket of an IC handler, the method comprising: Is pressed several times to detect the load P, the acceleration A or the speed V, and the pushing displacement amount D of the IC using each sensor. Then, the combined spring constant K of the IC and the socket is obtained from each detection data, The operation of the hand is determined so that the impact force is equal to or less than the allowable value Pa. In the recording medium of the second aspect, each data of the proper pressing force, speed and displacement of the test hand determined by the control method of the first aspect is recorded.

【0008】また、請求項3の計測制御システムは、テ
ストハンドのICに対する押圧力Pを検出する荷重セン
サと、前記ハンドの動作速度または加速度Aを検出する
加速度センサと、前記ハンドがICに接触してから停止
するまでの押し込み変位量Dを検出する変位センサと、
各センサからのデータに基づいてIC及びソケットの合
成ばね定数Kを求め、ICに作用する衝撃力が許容値P
a以下でかつハンドの動作が最速となるような押圧力、
速度及び変位かどうかをモニターすると共に各データに
基づいてハンドの駆動を制御する制御手段と、から構成
されている。
According to a third aspect of the present invention, there is provided a measurement control system, comprising: a load sensor for detecting a pressing force P of the test hand against the IC; an acceleration sensor for detecting an operation speed or acceleration A of the hand; A displacement sensor that detects the amount of pushing displacement D from when it is stopped until it stops.
The combined spring constant K of the IC and the socket is obtained based on the data from each sensor, and the impact force acting on the IC is set to an allowable value
a that is less than or equal to a and at which the hand moves fastest,
Control means for monitoring the speed and displacement and controlling the driving of the hand based on each data.

【0009】[0009]

【発明の実施の形態】図1はテストハンド1及びソケッ
ト2の概略と計測制御システムのブロック図を示したも
のである。テストハンド1は下端のプッシャ8でIC5
を吸着したままパルスモータ3により上下動され、下方
のソケット2のIC受容部には、ICリードと接触する
コンタクタ4が配置されている。また、テストハンド1
は、パルスモータ3の回転数や回転速度を制御すること
により、IC及びソケット2に対する押圧力、動作速度
及びICの押し込み変位量が調整可能であり、後述のよ
うにソケット2に接触する直前に減速されてICとソケ
ット2に対する衝撃が緩和されるようになっている。
FIG. 1 is a schematic diagram of a test hand 1 and a socket 2 and a block diagram of a measurement control system. Test hand 1 is IC5 with pusher 8 at the lower end.
The contactor 4 is moved up and down by the pulse motor 3 while adsorbing the contactor and is in contact with the IC lead in the IC receiving portion of the socket 2 below. Also, test hand 1
By controlling the number of rotations and the rotation speed of the pulse motor 3, the pressing force on the IC and the socket 2, the operating speed and the amount of displacement of the IC can be adjusted, and immediately before the contact with the socket 2 as described later. The speed is reduced, and the impact on the IC and the socket 2 is reduced.

【0010】本発明の計測制御システムは、荷重センサ
9、加速度センサ10、変位センサ11、増幅器12、
A/D変換器13、コンピュータ14、演算回路15、
D/A変換器16及び駆動回路17から構成されてい
る。
The measurement control system of the present invention comprises a load sensor 9, an acceleration sensor 10, a displacement sensor 11, an amplifier 12,
A / D converter 13, computer 14, arithmetic circuit 15,
It comprises a D / A converter 16 and a drive circuit 17.

【0011】荷重センサ9は、IC及びソケット2に対
するハンド1の押圧力を検出するもので、この実施例で
はプッシャ8の上方に歪ゲージ式荷重変換器(ロードセ
ル)が取り付けられている。加速度センサ10は、主と
してハンド1が下降する際の加速度または速度変化を検
出し、歪ゲージ式や圧電式が使用される。加速度センサ
の代わりに速度センサを用いてもよい。変位センサ11
は、プッシャ8に吸着されたIC5がソケット2のコン
タクタ4に接触する直前の位置から、接触後に押し込ま
れて停止するまでの変位量を検出するもので、この実施
例では渦電流式非接触変位計が用いられている。
The load sensor 9 detects the pressing force of the hand 1 against the IC and the socket 2. In this embodiment, a strain gauge type load converter (load cell) is mounted above the pusher 8. The acceleration sensor 10 mainly detects a change in acceleration or speed when the hand 1 descends, and a strain gauge type or a piezoelectric type is used. A speed sensor may be used instead of the acceleration sensor. Displacement sensor 11
Detects the amount of displacement from the position immediately before the IC 5 attracted by the pusher 8 contacts the contactor 4 of the socket 2 until the IC 5 is pushed in and stopped after the contact. In this embodiment, the eddy current type non-contact displacement Meter is used.

【0012】増幅器12は、各センサ9〜11からの微
小電気信号を増幅して出力し、A/D変換器13は増幅
されたアナログ信号をデジタル化してコンピュータ14
に送り込む。コンピュータ14のCPUは、検出データ
とメモリM内の格納データを設定プログラムに従って演
算回路15で演算処理し、ハンド1がIC及びソケット
2の種別に応じて最適動作するように指令を出し、作業
員が逐次画面をモニタできるようになっている。D/A
変換器16は、CPUからのデジタル信号をアナログ信
号に変換し、駆動回路17はパルスモータ3に駆動信号
を送る。
An amplifier 12 amplifies and outputs a minute electric signal from each of the sensors 9 to 11, and an A / D converter 13 digitizes the amplified analog signal and converts the signal into a computer 14.
Send to The CPU of the computer 14 processes the detected data and the data stored in the memory M in the arithmetic circuit 15 in accordance with the setting program, and issues a command so that the hand 1 operates optimally according to the type of the IC and the socket 2. Can monitor the screen sequentially. D / A
The converter 16 converts a digital signal from the CPU into an analog signal, and the drive circuit 17 sends a drive signal to the pulse motor 3.

【0013】CPUでは各センサ9〜11からのデータ
を用いて次のようにテストハンド1の適性押圧力、衝撃
力、動作速度、押し込み変位量を決定する。
The CPU uses the data from the sensors 9 to 11 to determine the appropriate pressing force, impact force, operating speed and pushing displacement of the test hand 1 as follows.

【0014】押圧力 ICリードのはね定数をK1、ソ
ケット2のばね定数をK2とすると、ICとソケット2
を合わせた合成ばね定数Kは、 K=(K1+K2)/K1・K2 で求められる。Kの値は、荷重センサ9で測定された押
圧荷重Pと変位センサ11によるICの押し込み変位量
δから、 K=P/δ で与えられる。このときプッシャ8の押し込み変位量δ
は、ICリードの縮み量δ1とソケット2(主にコンタ
クタ4)の変位量δ2との和(δ=δ1+δ2)であ
る。δ1,δ2の大きさは、それぞれのばね定数K1,
K2によって定まる。
Assuming that the spring constant of the pressing force IC lead is K1 and the spring constant of the socket 2 is K2, the IC and the socket 2
Is obtained by the following equation: K = (K1 + K2) / K1 · K2. The value of K is given by K = P / δ based on the pressing load P measured by the load sensor 9 and the amount δ of the IC pushing by the displacement sensor 11. At this time, the pushing displacement amount δ of the pusher 8
Is the sum (δ = δ1 + δ2) of the shrinkage amount δ1 of the IC lead and the displacement amount δ2 of the socket 2 (mainly the contactor 4). The magnitude of δ1, δ2 is determined by the respective spring constants K1,
Determined by K2.

【0015】衝撃力 ICがコンタクタ4と接触する際
に生じる衝撃は、接触直前と直後の時間△tにおける降
下速度の変化量(△V=V1−V0)によって求められ
る。ここに衝撃力Fは、 F=m・(△V/△t) で与えられる。上式から分かるように、接触前のプッシ
ャ8の降下速度V0がハンド1の動作速度Vに対して十
分に減速されており、しかもICに接触する前後で一定
速度が保持されれば、接触時の衝撃力は極めて小さいか
0になる。ここで、△V/△tは加速度であり、加速度
センサ10を用いて検出できる。一方、ICとソケット
コンタクタ4との接触によって発生する反力は、プッシ
ャ8によってICに加えられる押圧力と等しい。この押
圧力は、プッシャ8上方に設置された荷重センサ9(ロ
ードセル)によって検出される。また、テストハンド先
端のプッシャ8の質量をmとすれば、衝撃力Fはmと加
速度の積として上式から求めることができる。
The impact generated when the impact force IC comes into contact with the contactor 4 is determined by the amount of change in the descending speed (ΔV = V1−V0) at the time Δt immediately before and immediately after the contact. Here, the impact force F is given by F = mm (△ V / △ t). As can be seen from the above equation, if the descending speed V0 of the pusher 8 before contact is sufficiently reduced with respect to the operating speed V of the hand 1, and if a constant speed is maintained before and after contact with the IC, the Impact force is extremely small or zero. Here, △ V / △ t is an acceleration, which can be detected by using the acceleration sensor 10. On the other hand, the reaction force generated by the contact between the IC and the socket contactor 4 is equal to the pressing force applied to the IC by the pusher 8. This pressing force is detected by a load sensor 9 (load cell) installed above the pusher 8. Further, assuming that the mass of the pusher 8 at the tip of the test hand is m, the impact force F can be obtained from the above equation as the product of m and acceleration.

【0016】動作速度 任意の時刻tにおけるテストハ
ンド1の動作速度V(t)は、センサ11による変位デ
ータD(t)またはセンサ10による加速度データA
(t)を用いて次のように求めることができる。 V(t)={D(t)−D(t−△t)}/△t V(t)=V(t−△t)+A(t)・△t
The operating speed V of the test hand 1 in the operation speed arbitrary time t (t) is the acceleration data A by displacement data D (t) or sensor 10 by the sensor 11
It can be obtained as follows using (t). V (t) = {D (t) −D (t−Δt)} / Δt V (t) = V (t−Δt) + A (t) · Δt

【0017】押し込み変位量 押し込み変位量δ(t)
は、変位センサ11によるデータD(t)から、次式で
求める。 δ(t)=D(t)−D(t−△t)
Indentation displacement Indentation displacement δ (t)
Is obtained from the data D (t) by the displacement sensor 11 by the following equation. δ (t) = D (t) −D (t−Δt)

【0018】一方、コンピュータ14のメモリMには、
予め次のデータが入力されている。 (1)テストハンド1の動作速度V(PM3の駆動回転
数及び回転速度) (2)ハンド1の制動位置HB及び停止位置HS(図1
参照) (3)制動後の下降速度V0(PM3の駆動回転数及び
回転速度) (4)許容押し込み変位量δa(ICと接触してから停
止するまでの変位量) (5)許容押圧力Pa(δと合成はね定数Kから定ま
る)
On the other hand, in the memory M of the computer 14,
The following data is input in advance. (1) The operating speed V of the test hand 1 (the driving rotational speed and the rotational speed of the PM 3) (2) The braking position HB and the stopping position HS of the hand 1 (FIG. 1)
(3) Lowering speed V0 after braking (drive speed and rotation speed of PM3) (4) Allowable pushing displacement δa (displacement from contact with IC to stop) (5) Allowable pressing force Pa (Determined from δ and the composite spring constant K)

【0019】次にCPUによるデータ処理過程及び演算
工程を図2のフローチャートに従って説明する。まずハ
ンドのプッシャ8でICをソケットのコンタクタ4上に
複数回押圧して荷重Pと変位Dを計測し、ICとソケッ
トの合成ばね定数Kを前式に基づいて算出する(S
0)。この場合の押圧力は、ICやソケットに表示され
た範囲に設定し、複数回押圧するのは誤差を少なくして
正確なデータを得るためである。
Next, a data processing process and a calculation process by the CPU will be described with reference to a flowchart of FIG. First, the IC is pressed a plurality of times on the contactor 4 of the socket by the pusher 8 of the hand to measure the load P and the displacement D, and the combined spring constant K of the IC and the socket is calculated based on the above equation (S
0). The pressing force in this case is set in the range displayed on the IC or the socket, and the pressing is performed a plurality of times in order to reduce errors and obtain accurate data.

【0020】プッシャ8が制動位置HBに達するとコン
ピュータ14からの指令でV0まで減速されるので、こ
こで変位データ(S5)や加速度データ(S4)を用い
てハンド1の動作速度Vを求め(S7,S8)、メモリ
Mに設定されたV0と一致するかどうかを確認する。ス
テップS9,S10は、ハンド1が設定値通りに動作し
ているか(正常)を確かめる工程で、正常ならば次のス
テップに進み、VがV0と一致しない場合は制動位置H
Bを変更して(S11)ステップS2に戻る。
When the pusher 8 reaches the braking position HB, the speed is reduced to V0 by a command from the computer 14, so that the operating speed V of the hand 1 is obtained using the displacement data (S5) and the acceleration data (S4). S7, S8), it is confirmed whether or not it matches V0 set in the memory M. Steps S9 and S10 are steps for checking whether the hand 1 is operating as set (normal). If the hand 1 is normal, the process proceeds to the next step. If V does not match V0, the braking position H is set.
B is changed (S11), and the process returns to step S2.

【0021】次にICとの接触圧力(衝撃力)P(t)
を荷重センサ9で直接求めるか(S3)、プッシャ8の
質量mと加速度A(t)から算出し(S6)、この荷重
とメモリM内の許容押圧力Paとを比較する(S1
3)。P(t)≦Pa、すなわち衝撃力が許容値内であ
れば次のステップに進み、P(t)がPaより大きけれ
ばパルスモータ3の回転数または回転速度を変えて(S
14)再びステップS2に戻る。
Next, the contact pressure (impact force) P (t) with the IC
Is directly obtained by the load sensor 9 (S3), or is calculated from the mass m of the pusher 8 and the acceleration A (t) (S6), and this load is compared with the allowable pressing force Pa in the memory M (S1).
3). If P (t) ≦ Pa, that is, if the impact force is within the allowable value, proceed to the next step. If P (t) is greater than Pa, change the rotation speed or rotation speed of the pulse motor 3 (S
14) Return to step S2 again.

【0022】ステップS15では、ICの押し込み変位
D(t)がメモリM内の許容値δaと比較され、D
(t)がδa値を超える場合、Hs(ハンド停止位置)
を変更して(S16)ステップS2に戻る。Hsはハン
ド1のストロークつまりパルスモータ3の回転数を変え
ればよい。
In step S15, the pushing displacement D (t) of the IC is compared with an allowable value δa in the memory M, and
If (t) exceeds the δa value, Hs (hand stop position)
Is changed (S16), and the process returns to step S2. Hs may be changed by changing the stroke of the hand 1, that is, the rotation speed of the pulse motor 3.

【0023】ステップS10でのハンド動作の良否やス
テップS13,S15の判別は、作業員がモニタで確認
できるので、最初の設定値が適正であればそのまま使用
され、不適性の場合は正しく修正される。また、ステッ
プS13,S15を満たす範囲でハンド1の動作速度V
を大きくとることにより、テストハンドのIC処理能力
を最大にすることができ、ハンド1の降下直前でV0ま
で減速されるため、Vを少々大きくしても衝撃はかなり
抑えられる。
In step S10, the quality of the hand operation and the discrimination in steps S13 and S15 can be confirmed by the operator on the monitor. Therefore, if the initial set value is appropriate, it is used as it is, and if it is inappropriate, it is correctly corrected. You. In addition, the operation speed V of the hand 1 is within a range that satisfies steps S13 and S15.
Is large, the IC processing capacity of the test hand can be maximized, and the speed is reduced to V0 immediately before the hand 1 descends. Therefore, even if V is slightly increased, the impact is considerably suppressed.

【0024】[0024]

【発明の効果】以上のように本発明の制御方法及び計測
制御システムをハンドラーに組み込むことにより、異な
る種別のIC及びソケットに対しても短時間でテストハ
ンドを適正に動作させることができる。また、本件のシ
ステムで得られたデータをフロッピーディスク等の記録
媒体に一旦記録し、既成のハンドラーに入力してテスト
ハンドを動作させれば、本件システムを直接組み込まな
くても同様の効果が得られる。
As described above, by incorporating the control method and the measurement control system of the present invention into the handler, the test hand can be properly operated in a short time even for different types of ICs and sockets. In addition, once the data obtained by the system of the present invention is once recorded on a recording medium such as a floppy disk, and input to an existing handler to operate the test hand, the same effect can be obtained without directly incorporating the present system. Can be

【図面の簡単な説明】[Brief description of the drawings]

【図1】テストハンド計測制御システムのブロック図で
ある。
FIG. 1 is a block diagram of a test hand measurement control system.

【図2】コンピュータのフローチャートである。FIG. 2 is a flowchart of a computer.

【符号の説明】[Explanation of symbols]

1 テストハンド 2 ソケット 3 パルスモータ 4 コンタクタ 5 ICデバイス 6 変位センサ用ターゲット 7 取り付けアーム 8 プッシャ 9 荷重センサ 10 加速度センサ 11 変位センサ 12 増幅器 13 A/D変換器 14 コンピュータ 15 演算回路 16 D/A変換器 17 駆動回路 M メモリ HB ハンドの制動位置 Hs ハンドの停止位置 δa 許容変位 K 合成ばね定数 DESCRIPTION OF SYMBOLS 1 Test hand 2 Socket 3 Pulse motor 4 Contactor 5 IC device 6 Target for displacement sensor 7 Mounting arm 8 Pusher 9 Load sensor 10 Acceleration sensor 11 Displacement sensor 12 Amplifier 13 A / D converter 14 Computer 15 Arithmetic circuit 16 D / A conversion Unit 17 Drive circuit M Memory HB Hand braking position Hs Hand stopping position δa Allowable displacement K Composite spring constant

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】ICハンドラーのソケット2に送り込まれ
たICを押圧するテストハンド1の制御方法において、 まず前記ハンド1でソケット2上のIC5を複数回押圧
して、その荷重P、加速度Aまたは速度V、ICの押し
込み変位量Dを各センサを用いて検出し、次いで各検出
データからIC及びソケット2の合成ばね定数Kを求
め、ICに対する衝撃力が許容値Pa以下となるように
ハンド1の動作を決定する制御方法。
1. A control method of a test hand 1 for pressing an IC sent to a socket 2 of an IC handler. First, the hand 1 presses an IC 5 on the socket 2 a plurality of times, and the load P, acceleration A or The speed V and the displacement amount D of the pushing of the IC are detected by using the respective sensors. Then, the combined spring constant K of the IC and the socket 2 is obtained from the respective detection data. Control method that determines the operation of
【請求項2】請求項1の制御方法で決定されたテストハ
ンドの適正な押圧力、速度及び変位の各データを記録し
た記録媒体。
2. A recording medium in which data of an appropriate pressing force, speed and displacement of the test hand determined by the control method according to claim 1 is recorded.
【請求項3】テストハンド1のIC5に対する押圧力P
を検出する荷重センサ9と、前記ハンド1の動作速度ま
たは加速度Aを検出する加速度センサ10と、前記ハン
ド1がICに接触してから停止するまでの押し込み変位
量Dを検出する変位センサ11と、各センサからのデー
タに基づいてIC及びソケット2の合成ばね定数Kを求
め、ICに作用する衝撃力が許容値Pa以下でかつハン
ドの動作が最速となるような押圧力、速度及び変位かど
うかをモニターすると共に各データに基づいてハンド1
の駆動を制御する制御手段14と、から成るテストハン
ドの計測制御システム。
3. The pressing force P of the test hand 1 against the IC5.
, A load sensor 9 for detecting the operating speed or acceleration A of the hand 1, a displacement sensor 11 for detecting a push-in displacement D from when the hand 1 comes into contact with the IC until it stops. The combined spring constant K of the IC and the socket 2 is determined based on the data from each sensor. Monitor whether the hand 1 based on each data
And control means 14 for controlling the driving of the test hand.
JP37854998A 1998-12-31 1998-12-31 Test hand control method and measurement control system Expired - Lifetime JP3407192B2 (en)

Priority Applications (13)

Application Number Priority Date Filing Date Title
JP37854998A JP3407192B2 (en) 1998-12-31 1998-12-31 Test hand control method and measurement control system
KR10-2000-7009282A KR100394215B1 (en) 1998-12-31 1999-12-28 Method for Controlling IC Handler and Control System Using the Same
PCT/JP1999/007413 WO2000040983A1 (en) 1998-12-31 1999-12-28 Method for controlling ic handler and control system using the same
AT99962509T ATE292805T1 (en) 1998-12-31 1999-12-28 METHOD FOR CONTROLLING AN IC TREATMENT DEVICE AND CONTROL SYSTEM USING THE SAME
SG200202957A SG98053A1 (en) 1998-12-31 1999-12-28 Method of controlling ic handler and control system using the same
DE69924604T DE69924604T2 (en) 1998-12-31 1999-12-28 METHOD FOR CONTROLLING AN IC TREATMENT DEVICE AND CONTROL SYSTEM USING THEREOF
CNB998034843A CN1170166C (en) 1998-12-31 1999-12-28 Method for controlling IC handler and control system using same
EP99962509A EP1069437B1 (en) 1998-12-31 1999-12-28 Method for controlling ic handler and control system using the same
CA002321868A CA2321868C (en) 1998-12-31 1999-12-28 Method for controlling ic handler and control system using the same
TW088123263A TW484014B (en) 1998-12-31 1999-12-30 Method of controlling an IC processor
US09/651,572 US6384734B1 (en) 1998-12-31 2000-08-28 Method of controlling IC handler and control system using the same
HK01105358A HK1035402A1 (en) 1998-12-31 2001-08-01 Method of controlling ic handler and control system using the same.
US10/084,500 US6690284B2 (en) 1998-12-31 2002-02-28 Method of controlling IC handler and control system using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP37854998A JP3407192B2 (en) 1998-12-31 1998-12-31 Test hand control method and measurement control system

Publications (2)

Publication Number Publication Date
JP2000199779A true JP2000199779A (en) 2000-07-18
JP3407192B2 JP3407192B2 (en) 2003-05-19

Family

ID=18509776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP37854998A Expired - Lifetime JP3407192B2 (en) 1998-12-31 1998-12-31 Test hand control method and measurement control system

Country Status (12)

Country Link
US (1) US6384734B1 (en)
EP (1) EP1069437B1 (en)
JP (1) JP3407192B2 (en)
KR (1) KR100394215B1 (en)
CN (1) CN1170166C (en)
AT (1) ATE292805T1 (en)
CA (1) CA2321868C (en)
DE (1) DE69924604T2 (en)
HK (1) HK1035402A1 (en)
SG (1) SG98053A1 (en)
TW (1) TW484014B (en)
WO (1) WO2000040983A1 (en)

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KR101375159B1 (en) 2012-09-28 2014-03-27 주식회사 아이디이오 Pusher tool including load cell and semiconductor test system

Also Published As

Publication number Publication date
EP1069437B1 (en) 2005-04-06
DE69924604T2 (en) 2006-02-09
WO2000040983A1 (en) 2000-07-13
DE69924604D1 (en) 2005-05-12
KR100394215B1 (en) 2003-08-06
CA2321868A1 (en) 2000-07-13
SG98053A1 (en) 2003-08-20
ATE292805T1 (en) 2005-04-15
JP3407192B2 (en) 2003-05-19
CA2321868C (en) 2003-05-06
KR20010085197A (en) 2001-09-07
TW484014B (en) 2002-04-21
EP1069437A4 (en) 2003-04-23
HK1035402A1 (en) 2001-11-23
EP1069437A1 (en) 2001-01-17
US6384734B1 (en) 2002-05-07
CN1292092A (en) 2001-04-18
CN1170166C (en) 2004-10-06

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