JP2000150711A - Manufacture of hermetic terminal - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing a subminiature hermetic terminal by the use of an inner lead whose tip is formed, where a formed part can be accurately positioned. SOLUTION: Forming leads 1, a metal body 2, and a powdered sintered glass 3 are collectively arranged in a space partitioned with heat resistant jig middle boards A4 and B5, and a lead forming part 1a is covered with a lead forming part insertion guide plate 6. Furthermore, heat-resistant jig base boards A7 and B10 are successively placed thereon, the assembly is turned upside down, and the metal body 2 and the powdered sintered glass 3 are pressed with the thickness of the lead forming part insertion guide plate 6 and given mechanical vibrations. The lead forming part 1a is freely rotated within the thickness range of the lead forming part insertion guide plate 6 to get into an angle control slit 7b and a position control hole 7a. Then, the lead forming part insertion guide plate 6 is dismounted, then the assembly is heated to melt the powdered sintered glass 3, and thus a hermetic terminal is formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for manufacturing a hermetic terminal, and more particularly to the manufacture of an ultra-small hermetic terminal using a forming lead whose one end is formed in a predetermined shape in advance.

[0002]

2. Description of the Related Art A quartz oscillator is used for a clock function of an electronic device.

Although not shown, the crystal resonator is formed by sealing a crystal blank with a cap after covering the lead forming portion 1a of an airtight terminal as shown in a perspective view in FIG. Electronic components.

In particular, recently, in view of miniaturization of equipment, ultra-compact quartz oscillators having a diameter of, for example, 3 mm or less have been required as components.

Incidentally, such a hermetic terminal is one in which a metal body 2 and two forming leads 1, 1 are insulated and hermetically sealed via a sintered glass powder 3.

[0006] One end of the forming leads 1 and 1 on the inner side is generally formed into a U-shape or a slit shape so as to support a crystal blank.

Conventionally, such a hermetic terminal has been manufactured by a manufacturing method as shown in the process chart of FIG. FIG. 5 is a cross-sectional view also showing a state in which important parts of the process are completed.

In FIG. 4 and FIG. 5, first, a metal body 2 and a powder sintered glass 3 are inserted into a predetermined recess of a heat-resistant jig middle plate 8.
Is inserted and set thereon, and a heat-resistant jig bottom plate A9 is placed thereon, and then the lead insertion through hole 9a of the jig bottom plate A9 is inserted.
The forming leads 1 and 1 are passed from the side of the other end 1b where the forming leads 1 and 1 are not formed, and the two forming leads 1 and 1 are inserted into the two through holes of the powdered sintered glass 3. Is done. FIG. 5A is a cross-sectional view showing a state in which the forming leads 1 and 1 are ready just before being inserted.

Since the lead forming portion 1a at the tip of the inner side of the forming leads 1 and 1 is very difficult to form after forming an airtight terminal,
One end is previously formed at the time of material.

Next, the lead forming portion 1a is dropped into the angle regulating slit portion 9b of the bottom plate A9, the heat-resistant jig bottom plate B10 is placed, and the assembly is inverted.
This in-process state is shown in a sectional view in FIG.

The unformed lead wire diameter portion 1c and the lead forming portion 1a are connected to the jig bottom plate A.
FIG. 5C shows a state where the lead insertion through-hole 9a and the angle regulating slit 9b are inserted and set in FIG.
X is shown in a cross-sectional view.

Thereafter, the assembly is heated through a nitrogen atmosphere furnace set to the melting temperature of the glass, and the powder sintered glass 3 is heated.
Is melted to insulate and air-tightly seal the forming leads 1 and 1 and the metal body 2.

The jig middle plate 8 and the jig bottom plate A9 are
Usually, it is usually formed in a multi-cavity structure so that hundreds of hermetic terminals can be manufactured at one time.

The forming leads 1 and 1 and the metal body 2 are both made of an Fe--Ni--Co alloy, and their surfaces are preliminarily oxidized with metal so that glass and metal are well-sealed and can be hermetically sealed. It is common that a coating is formed.

The material of the powdered sintered glass 3 is as follows.
Borosilicate glass that matches the thermal expansion coefficient of the forming leads 1 and 1 and the metal body 2 is used.
It is usually made in the form of a button-type tablet with a through hole for a book.

[0016]

In the conventional method of manufacturing a hermetic terminal as described above, the hermetic terminal is very small, so that the angle deviation of the lead forming portion 1a as shown in FIG. E and a misalignment F of the lead forming portion 1a with respect to the metal body as shown in FIG. 6B often occurs.

For this reason, two forming leads 1,
It is very difficult to manufacture a large number of highly accurate hermetic terminals at one time, in which the position of one lead forming portion 1a is regulated in a certain direction.

An airtight terminal with poor position accuracy of the lead forming part 1a is treated as a fatal defect in the market because the crystal blank cannot be fixed accurately and efficiently.

Therefore, when the cause of the deviation was analyzed, the angle deviation was restricted by the angle restriction slit portion of the heat-resistant jig bottom plate A9, but the angle restriction slit portion restricting the lead forming thickness direction. 9b intersects with a lead insertion through hole 9a for inserting the other end of the lead that has not been formed, so that the length of the angle regulating slit where the lead forming thick portion actually contacts is reduced, and A corner is formed at the intersection of the processing with the slit 9b, and the corner is easily worn. When the manufacturing is repeated, the wear of the angle regulating slit 9b proceeds from the corner, and the angle regulating slit 9b is lead-formed. It has been found that the role of regulation in the thickness direction is not fulfilled, and an angle shift occurs. Also, regarding the positional deviation of the lead forming portion 1a with respect to the shell-shaped metal body 2, it was found that the lead insertion through hole 9a did not play a role of position regulation due to the wear of the intersection portion, and a positional deviation occurred. .

Therefore, the present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a position where the angle deviation E and the position deviation F of the lead forming portion 1a do not occur. It is an object of the present invention to provide a method for manufacturing an ultra-small hermetic terminal capable of manufacturing a large number of highly accurate hermetic terminals at once.

[0021]

A method for manufacturing a hermetic terminal according to the present invention is characterized in that a forming lead 1, a metal body 2, and a powder sintered glass 3 each having one end formed in a predetermined shape are combined with each other by powder sintering. In a method for manufacturing a hermetic terminal in which glass 3 is melted to form and seal the forming leads 1 and 1 and the metal body 2 in an insulating and airtight manner,
1, the metal body 2, and the powdered sintered glass 3 are put together and placed in a space formed by a heat-resistant jig middle plate A4 and a heat-resistant jig middle plate B5. A lead forming part insertion guide plate 6 for assisting insertion of the lead forming part 1a into the angle regulating slit part 7b and the position regulating hole 7a of the heat resistant jig bottom plate A7 is placed thereon, and the heat resistant jig bottom plate A7 is further placed thereon. Then, the heat-resistant jig bottom plate B10 is placed in this order, and then the assembly is turned over to form a heat-resistant jig middle plate A4 and a heat-resistant jig middle plate B5 with the thickness of the lead forming portion insertion guide plate 6. Metal body 2 arranged in the space,
And presses the sintered glass powder 3 to apply mechanical vibration in a state where no load is applied to the lead forming portion 1a. The lead forming portion 1a freely rotates within the thickness range of the lead forming portion insertion guide plate 6, and Ingredient bottom plate A
7, and then the lead forming part insertion guide plate 6 is removed. Then, the assembly is passed through a heating furnace to melt the powder sintered glass 3 and seal the airtight terminal. This is a method for manufacturing a hermetic terminal for forming the above.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the method for manufacturing a hermetic terminal according to the present invention will be specifically described with reference to examples.

FIG. 1 is a manufacturing process diagram of one embodiment of a method for manufacturing a hermetic terminal of the present invention.

FIG. 2 is a cross-sectional view for explaining the state of the in-process in the manufacturing process. FIG. 2A shows the forming lead 1, the metal body 2, and the powdered sintered glass 3 in a heat-resistant jig. FIG. 11 is a cross-sectional view of a state in which a plate A4, a heat-resistant jig middle plate B5, and a lead forming part insertion guide plate 6, a heat-resistant jig bottom plate A7, and a heat-resistant jig bottom plate B10 are placed thereon; FIG. 2 (b) shows an assembly obtained by inverting the assembly of FIG. 2 (a) and applying mechanical vibration to move the lead forming portion 1a within the thickness range of the lead forming portion insertion guide plate 6 to the angle of the jig bottom plate A7. FIG. 2C is a cross-sectional view showing a state in which the lead forming portion 1a is dropped into the position regulating hole 7a of the lead forming portion 1a with respect to the regulating slit portion 7b and the metal body 2. FIG. Immediately before A rear view, FIG. 2 (d), 2
It is a YY transverse sectional view of heat resistant jig bottom plate A7 in (c).

The method for manufacturing the hermetic terminal according to the present embodiment will be described in detail with reference to FIGS.

FIG. 3 in which one end is previously formed into a U-shape
A forming lead 1 and a metal body 2 as shown in FIG.
And a method of manufacturing a hermetic terminal in which the powdered sintered glass 3 is melted, and the forming lead 1 and the metal body 2 are insulated and hermetically sealed.
The forming lead 1, the metal body 2, and the powdered sintered glass 3 are combined and arranged in a conical space formed by a graphite heat-resistant jig middle plate A4 and a graphite heat-resistant jig middle plate B5. Then, a comb-shaped lead forming portion which helps to insert the lead forming portion 1a into the angle regulating slit portion 7b and the position regulating hole 7a of the heat resistant jig bottom plate A7 on the graphite heat resistant jig middle plate B5. The insertion guide plate 6 is placed, and a heat-resistant jig bottom plate A7 made of graphite and a heat-resistant jig bottom plate B10 made of graphite are further placed thereon.
Metal body disposed in a conical space formed by a graphite heat-resistant jig middle plate A4 and a graphite heat-resistant jig middle plate B5 with the thickness of the lead forming portion insertion guide plate 6 2, and presses the sintered glass powder 3 to apply mechanical vibration in a state where a load is not applied to the lead forming portion 1a, and the lead forming portion 1a freely rotates within the thickness range of the lead forming portion insertion guide plate 6, It is dropped into the angle regulating slit 7b of the graphite heat resistant jig bottom plate A7, and further dropped into the position regulating hole 7a. Next, the lead forming portion insertion guide plate 6 is pulled out and removed. At this time, a weight is applied to the other end of the lead that is not formed using the graphite heat-resistant jig upper plate 11 so that the forming lead 1 is not lifted. Next, mechanical vibration is applied to slide the metal body 2, the powdered sintered glass 3, the graphite heat-resistant jig middle plate A4, and the graphite heat-resistant jig middle plate B5 downward on the forming lead 1. And set it in the correct position. Next, the assembly is passed through a heating furnace in a nitrogen atmosphere, and the powdered sintered glass 3 is melted to form an airtight terminal.
When the thickness of the lead forming portion insertion guide plate 6 is E and the height of the lead forming portion 1a is F,
> F.

The heat-resistant jig made of graphite is about 50 at a time.
It is made into a multi-cavity structure so that zero airtight terminals can be made.

In the method of manufacturing a hermetic terminal according to the present embodiment, the heat-resistant jig bottom plate A7 made of graphite is provided with a lead for inserting the other end where no lead is formed because of the manufacturing process as shown in FIG. Since there is no insertion through-hole, the angle regulating slit 7b regulates the thickness direction of the lead forming.
Restricting slit portion 7b at which the lead forming thick portion is actually in contact with the lead insertion through hole without intersecting with the lead insertion through hole.
And the length of the angle regulating slit portion 7b is increased.
And the lead insertion through-hole are not formed at the intersection between the processing and the lead insertion through-hole. Therefore, even when manufacturing is repeated, the wear of the angle restriction slit 7b does not progress from the corner and the angle restriction slit 7b is Since the role of regulating the thickness direction of the lead forming can be sufficiently fulfilled, the occurrence of the angular deviation becomes difficult.

Also, regarding the displacement of the lead forming portion 1a with respect to the metal body 2, since there is no intersection, the lead forming portion 1a is hardly worn, and the lead forming portion position regulating hole 7a is not provided.
2D, the lead forming portion 1a is regulated at a position in a certain direction with respect to the metal body 2 by the heat-resistant jig bottom plate A7. As a result, it is possible to sufficiently fulfill the role of position regulation, and it is difficult to cause positional deviation.

As described above, it is easy to manufacture a large number of hermetic terminals with good positional accuracy, in which the angular and positional deviations of the lead forming portion 1a are less likely to occur.

In the present embodiment, the case where the forming portion of the forming lead is a U-shaped forming lead has been described. However, as shown in FIG. Any one having a similar forming structure, such as a forming lead with a slit, can be applied.

[0032]

As described above, the method for manufacturing a hermetic terminal according to the present invention comprises a heat-resistant jig middle plate A and a heat-resistant jig middle plate by combining a forming lead, a metal body, and powdered sintered glass. B, and a lead forming portion which assists in inserting the lead forming portion into the angle regulating slit portion and the position regulating hole of the heat resistant jig bottom plate A on the heat resistant jig middle plate B. The insertion guide plate is placed, and further, the heat-resistant jig bottom plate A and the heat-resistant jig bottom plate B are placed thereon in that order. Then, the assembly is inverted, and the thickness of the lead forming portion insertion guide plate is changed to the space portion. Holds the placed metal body and powder sintered glass and applies mechanical vibration without applying load to the lead forming part, and the lead forming part rotates freely within the thickness range of the lead forming part insertion guide plate After dropping the jig bottom plate A into the angle restricting slit portion and the position restricting hole, and then removing the lead forming portion insertion guide plate, the assembly is passed through a heating furnace to melt the powder sintered glass and position. A large number of highly accurate hermetic terminals can be easily manufactured.

For this reason, the hermetic terminal obtained by the manufacturing method of the present invention has an advantageous effect that the crystal blank can be fixed accurately and efficiently.

[Brief description of the drawings]

FIG. 1 is a manufacturing process diagram of one embodiment of a method for manufacturing a hermetic terminal of the present invention.

FIGS. 2A and 2B are cross-sectional views showing a state in process in a manufacturing process according to the present invention; FIG. Sectional view of the state where the bottom plate A and the jig bottom plate B are placed. (B) The assembly is turned over and a vibration is applied to set the lead forming portion of the jig bottom plate A within the thickness range of the lead forming portion insertion guide plate. Sectional view of the state where it is dropped into the angle regulating slit and the position regulating hole. (C) Pull out the lead forming part insertion guide plate,
Sectional view just before melting of furnace glass (d) YY transverse sectional view of heat-resistant jig bottom plate A in FIG. 2 (c)

FIGS. 3A and 3B are views for explaining a hermetic terminal of the present invention; FIG. 3A is a perspective view of a hermetic terminal; FIG. 3B is a perspective view of a U-shaped forming lead; FIG. Perspective view of another forming lead

FIG. 4 is a manufacturing process diagram of a conventional hermetic terminal.

FIG. 5 is a cross-sectional view showing a state of a key portion of a conventional manufacturing process in progress, wherein (a) a metal body and powder sintered glass are arranged on a jig middle plate, and a jig bottom plate A is placed thereon; 5B is a cross-sectional view of the state immediately before the forming lead is inserted and the forming lead is inserted. (B) A cross-sectional view of the state in which the lead forming part is inverted and set in the lead restriction through-hole and the angle restriction slit part of the jig bottom plate A. XX cross-sectional view of the heat-resistant jig bottom plate A in (b)

6A and 6B are views for explaining an angle shift and a position shift of a lead forming unit, and FIG. 6A is an explanatory view of an angle shift, and FIG. 6B is an explanatory view of a position shift.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Forming lead 1a Lead forming part 1b The other end of unformed lead 1c Lead wire diameter part 2 Metal body 3 Powder sintered glass 4 Heat resistant jig middle plate A 5 Heat resistant jig middle plate B 6 Lead forming part insertion Guide plate 7 Heat-resistant jig bottom plate A 7a Position regulating hole 7b Angle regulating slit 10 Heat-resistant jig bottom plate B 11 Heat-resistant jig top plate

Claims (2)

[Claims] An end is formed by combining a forming lead, a metal body, and a powdered sintered glass having one end formed in a predetermined shape in advance, and melting the powdered sintered glass to insulate and airtightly seal the forming lead and the metal body. In the method for manufacturing a hermetically sealed terminal, first, a forming lead, a metal body, and powdered sintered glass are combined and arranged in a space formed by a heat-resistant jig middle plate A and a heat-resistant jig middle plate B. Then, on the heat-resistant jig intermediate plate B, a lead-forming portion insertion guide plate is mounted on the heat-resistant jig bottom plate A to help insert the lead forming portion into the angle-regulating slit portion and the position-regulating hole of the heat-resistant jig bottom plate A. After placing the heat-resistant jig bottom plate A thereon and the heat-resistant jig bottom plate B thereon, the entire assembly is turned over and placed in the space with the thickness of the lead forming portion insertion guide plate. Pressing the metal body and the powdered sintered glass, and applying mechanical vibration in a state where a load is not applied to the lead forming part, freely rotating the lead forming part within the thickness range of the lead forming part insertion guide plate, Drop it into the angle regulating slit and position regulating hole of the jig bottom plate A, then remove the lead forming part insertion guide plate, pass this assembly through a heating furnace, and melt the powder sintered glass to form an airtight terminal. A method for manufacturing a hermetic terminal, comprising: 2. The method for manufacturing an airtight terminal according to claim 1, wherein the airtight terminal is manufactured using a forming lead having a forming portion formed in a U-shape.