JP2000109372A - Metal-ceramics composite material and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a metal-ceramics composite material having many perforated holes with small diameter and a to provide the method for producing the material. SOLUTION: This metal-ceramics composite material is a plate-like composite material having at least 100 pieces of perforated holes with small diameter per 100 cm2. The method for producing the composite material is comprised of making holes by required pieces in such a manner that the diameter of the holes is slightly larger than the required diameter, in a metal plate having the same shape as that of a preform, then pouring liquid silicon rubber into a vessel arranged with the metal plate having holes, after degassing under reduced pressure, curing to form a forming mold, forming the preform using thus obtained forming mold, further, impregnating aluminum alloy into the preform and making at least 100 pieces of holes per 100 cm2 by drilling the metal parts of the impregnated preform.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal-ceramic composite material in which a metal is combined with a reinforcing material and a method for producing the same, and more particularly, to a metal-ceramic composite material having a large number of through holes and a method for producing the same.

[0002]

2. Description of the Related Art A ceramic-metal composite material reinforced with ceramic fibers or particles has both characteristics of ceramic and metal. For example, this composite material has high rigidity, low thermal expansion property, abrasion resistance, etc. It has the excellent properties of metal such as ductility, high toughness, and high thermal conductivity. As described above, since it has both the characteristics of ceramics and metal, which have been considered difficult, it has been drawing attention as a next-generation material from industries such as mechanical device manufacturers.

As a method for producing this composite material, particularly a composite material using aluminum as a matrix as a metal, methods such as powder metallurgy, high pressure casting, and vacuum casting have been conventionally known. However, all of these methods are not capable of increasing the content of ceramics as a reinforcing material, require a large-sized pressurizing device, are difficult to form near nets, and are extremely expensive. It was not satisfactory.

Accordingly, recently, a non-pressurized metal infiltration method developed by Rankside Company of the United States has attracted particular attention as a manufacturing method for solving the above problem. This method uses SiC or A
An aluminum ingot containing Mg is brought into contact with a preform formed of a ceramic powder such as l ₂ O ₃ ,
This is a method in which the molten aluminum alloy is heated to 700 to 900 ° C. in an N ₂ atmosphere to penetrate the preform. This is an excellent method for improving the wettability of the molten metal to the ceramic powder by utilizing the chemical reaction between Mg and N ₂ , so that the metal can penetrate into the preform without applying pressure.

Further, according to this method, the content of ceramics can be varied as wide as 30 to 85 vol% and a high range, and the preform formed by this method has a high degree of freedom in its shape. It is also possible to make quite complex shapes with near nets. As described above, this method does not require a pressurizing device, can increase the content of ceramics, and enables near-net molding. Therefore, this method is an excellent method that solves the above-described problem. .

A composite material produced by this method is used, for example, in a CVD (chemical vapor deposition) device used in a semiconductor manufacturing apparatus.
For example, there is a so-called shower member having a large number of small-diameter through holes for allowing a reaction gas to pass therethrough, and a material used for this member is required to have a light weight and low thermal expansion, so that it is suitable for such a member. Is attracting attention as a material.

[0007]

However, although this composite material contains a metal, it has the same structure as a grindstone in which hard ceramics coexist, so it is very difficult to machine like ceramics. Therefore, drilling is very difficult, and even if it can be done, the number of holes that can be drilled with a single tool is limited because the tools used for drilling are severely worn. There was a problem that it was extremely difficult to open.

The present invention has been made in view of the above-mentioned problems of the metal-ceramic composite material, and has as its object to provide a metal-ceramic composite material having a large number of small-diameter through holes, and a method of manufacturing the same. Is also to provide.

[0009]

Means for Solving the Problems The inventors of the present invention have conducted intensive studies to achieve the above object, and as a result, if a preform having a large number of small-diameter holes can be formed, metal is allowed to penetrate the preform. As a result, the present inventors have found that a hole is filled with a metal portion, and that a composite material having a large number of small-diameter through holes can be obtained by forming a hole in the metal portion, thereby completing the present invention.

That is, the present invention provides (1) a metal-ceramic composite material in which a preform is formed by using ceramic fibers or particles as a reinforcing material, and a metal as a base material is impregnated in the preform. A metal-ceramic composite material (Claim 1) characterized in that it is a plate-shaped composite material having at least 100 small-diameter through holes per 100 cm ² , and (2) a ceramic fiber or particle as a reinforcing material. In a method for producing a metal-ceramic composite material in which a preform is formed and a metal serving as a base material is impregnated into the preform, the method of forming the preform comprises the steps of: (a) having the same shape as the preform to be formed first; Drill a required number of holes larger than the required hole diameter in advance in a metal plate and bury it in the container. (B) S of # 500 to the vessel
A liquid silicone rubber premixed with iC powder is poured, the whole is degassed under a reduced pressure of about 0.1 atm, and then cured to produce a rubber mold. (c) Obtained It is a method of pouring a slurry composed of a reinforcing material into a rubber mold, sedimentation molding, and then firing.After infiltrating the formed preform with an aluminum alloy without pressure, grinding the surface of the obtained composite material, A gist of the present invention is a method for producing a metal-ceramic composite material (claim 2), characterized in that at least 100 small-diameter through holes are drilled in a portion filled with only an aluminum alloy per 100 cm ² with a drill. . This will be described in more detail below.

As described above, the composite material of the present invention has a small-diameter through hole at least 1 per 100 cm ^2.
A plate-shaped composite material having at least 00 pieces was set (claim 1).
Although it is easy to form a small number of through holes in a composite material, it is extremely difficult to form a large number of through holes with a small diameter,
Furthermore, the small through hole is 100 per 100 cm ²
There has never been a case where more than one is formed, and it is a novel composite material.

As a method of manufacturing the composite material, a method of forming a preform includes the steps of (a) first forming a hole larger than a hole diameter required by a drill in a metal plate having the same shape as the preform to be formed; Open the required number and bury it in the container. (B) # 500 Si in the container
A liquid silicone rubber pre-mixed with C powder is poured, the whole is degassed under reduced pressure of about 0.1 atm, and then cured to produce a rubber mold. (C) Obtained A method of pouring a slurry composed of a reinforcing material into a rubber mold, sedimentation molding, and then firing, infiltrating the formed preform with an aluminum alloy without pressure, grinding the surface of the obtained composite material, grinding the aluminum According to a ^{second aspect} of the present invention, there is provided a manufacturing method in which at least 100 small diameter through holes are drilled in a portion filled with only the alloy per 100 cm ² .

Since the number of through holes formed in the composite material is small and as many as 100 or more per 100 cm ² , it is extremely difficult to produce the composite material. In order to obtain a molding die having 100 or more thin rod-shaped protrusions per 100 cm ² for forming a reform, it is important to make this die under reduced pressure, and thereby the master A mold having a large number of protrusions obtained by completely transferring the through hole of the mold can be manufactured, and a preform having a large number of deep holes can be obtained by pouring a slurry made of a reinforcing material into the mold. , By infiltrating the aluminum alloy into the preform,
A composite material in which the hole of the preform is a metal is obtained.
A composite material having as small as 100 or more through holes per 0 cm ² can be obtained.

The procedure will be described in more detail. First, a master mold for forming a preform having a small diameter and a large number of holes is prepared. This requires, for example, preparing a metal plate such as SUS that is larger than the size of the final product in consideration of shrinkage up to the final product and allowance for surface grinding, and requires a hole with the required diameter for the metal plate. You can get it by opening as many as you want. The hole to be formed in the master mold may be penetrated, but if it is penetrated, it is difficult to remove the preform, so it is desirable not to penetrate the preform.

[0015] The hole diameter is 2 to 2 of the hole diameter required for the final product.
Although it may be set as a rule of thumb, at least 2 mm or more is necessary even when the hole diameter of the final product is very small. This is because the liquid mold material (silicone rubber) used when obtaining the molding die for forming the preform by reversing the master mold is obstructed by the air remaining in the holes, resulting in insufficient filling. In addition, the hole of the master mold becomes a rod-shaped projection in the molding die, but if the diameter of the rod-shaped projection is too small, inconveniences such as bending during molding may occur. That's also to prevent it.

The master mold is buried in a sealable container of an appropriate size, and a liquid silicone rubber premixed with about # 500 SiC powder is poured therein, and the rubber is cured while the pressure in the container is immediately reduced. Thereby, a mold for molding is produced. The reason why the SiC powder is mixed into the silicone rubber in advance is to reduce the deformation such as the bending of the protrusions described above by increasing the rigidity of the cured rubber. And it is particularly necessary to reduce the pressure in order to completely fill the rubber in the hole of the master mold and completely transfer the hole, and if the pressure is reduced to about 0.1 atm and degassed for about 10 minutes, Even if there are a large number of small through holes, bubbles remaining in the rubber can be removed and completely filled. Decompression has no effect after curing has started, so it must be carried out as soon as possible after pouring the rubber.

The preform is molded using the molding die obtained, which is performed by a sedimentation molding method. The method is
For example, after adding an appropriate amount of a binder and a dispersing medium, generally water to a ceramic powder to be a reinforcing material, and pouring a slurry obtained by wet mixing into a molding die to precipitate a solid content, the resultant mixture is heated at −30 ° C. After freezing, demolding, and drying / firing as needed, usually sintering is performed because the binder to be added is an inorganic binder such as colloidal silica which gives considerable strength only by drying. It is possible to provide the preform with sufficient strength and shape retention that can withstand handling only by firing at a temperature that does not progress. Thus, a preform having the same hole diameter and the same number of holes as the master mold can be formed.

The subsequent infiltration of the aluminum alloy into the preform may be performed by a conventional method. However, in order to completely fill the hole portion of the preform with the aluminum alloy, it is preferable to previously fill the hole with Al-Mg alloy powder or Al powder mixed with Mg powder. Others without regard in conventional, for example, combining the preform and the aluminum alloy via an Al-Mg alloy powder or Mg powder is impregnated promoting material, putting it into an electric furnace, in an N ₂ stream 700-900 By heating at a temperature of ° C. for a predetermined time and allowing the aluminum alloy to permeate without pressure, a composite material in which the holes of the preform are sufficiently filled with the aluminum alloy is obtained.

The obtained composite material is brought into a state where the metal filled in the hole is exposed from both sides of the surface where the aluminum alloy is filled and the back surface. Grind the surface until it is. A through hole having a predetermined size is formed in the metal part using a drill. The part to be drilled is of course made of aluminum alloy only, so it is very easy to drill.

When a metal-ceramic composite material is produced by the above method, a metal-ceramic composite material having a large number of small-diameter through holes can be obtained.

[0021]

EXAMPLES Hereinafter, the present invention will be described in more detail by giving specific examples of the present invention.

(Example) (1) Formation of preform An SU of 500 × 600 × 20 mm thick as a master mold
Prepare a flat plate made of S and drill 8000 φ3
mm holes were drilled in place. This master type is SUS
Liquid silicone rubber (manufactured by Toshiba Silicon Co., Ltd.) mixed with SiC powder (manufactured by Shinano Electric Seiraku Co., Ltd., GP # 500) is poured into the container, and the inside of the container is immediately filled with a vacuum pump using a vacuum pump. After reducing the pressure to 1 atm and holding it for 10 minutes, it was cured and demolded to produce a molding die.

In the obtained mold, a # 320 Al ₂ O ₃ powder 70
A colloidal silica liquid was added as a binder to a mixed powder of 30 parts by weight of the Al ₂ O ₃ powder of # 600 and 30 parts by weight of # 600 so that the silica solid content was 2 parts by weight, and 30 parts by weight of ion-exchanged water was added thereto. Furthermore, an antifoaming agent (Fourmaster V
L, manufactured by Sannobuco) was added in an amount of 0.15 parts by weight, and mixed with a pot mill for 16 hours. The obtained slurry was poured into the former mold, subjected to sedimentation molding, frozen at −30 ° C., demolded, and fired at 700 ° C. for 5 hours to obtain a preform having 8,000 φ3 mm holes. Formed.

(2) Preparation of a composite material having a large number of through holes The preform obtained is placed in a heat-resistant container with the surface of the hole facing upward, and Al powder and Al-Mg powder are placed in the hole. the mixed powder was packed with loaded aluminum alloy Al-7 mg composition thereon, put it in an electric furnace, N ₂
Non-pressurized infiltration was performed at 825 ° C. for 72 hours in an air stream, followed by cooling. After surface grinding the upper and lower surfaces of the obtained composite material,
Drill φ1 at the part filled with aluminum alloy
A composite material having 8000 through holes (266 per 100 cm ² ) was produced by forming a through hole of mm.

[0025]

As described above, according to the metal-ceramic composite material of the present invention, it is possible to obtain a composite material having a large number of small-diameter through holes, which has never been seen before, and it can be produced very easily. became. Because of this, CV
The shower, which is a component having a large number of small-diameter through holes used for D, can be easily provided at low cost with a metal-ceramic composite material.

 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Heishiro Takahashi 314-1 Matsudo Nitta, Matsudo-shi, Chiba (72) Inventor Takeshi Higuchi 1-3-9 Hikawadai, Higashi-Kurume-shi, Tokyo (72) Inventor Tomi Koyama Sum 1-3-1-805 Ukima, Kita-ku, Tokyo F-term (reference) 3C060 AA16 AA20 BA05 BF01 4K020 AA05 AA22 AC01 BA02 BB02 BB22 BC03

Claims (2)

[Claims] 1. A metal-ceramic composite material in which a preform is formed by using ceramic fibers or particles as a reinforcing material and a metal as a base material is impregnated in the preform, wherein the composite material has at least a small through hole. 100
A metal-ceramic composite material, which is a plate-like composite material having 100 or more pieces per cm ² . 2. A method for producing a metal-ceramic composite material in which a preform is formed using ceramic fibers or particles as a reinforcing material and a metal as a base material is penetrated into the preform, the method for forming the preform comprises:
(A) First, a required number of holes larger than the required hole diameter are drilled in advance in a metal plate having the same shape as the preform to be formed, and the holes are buried in a container. (B) # 500 in the container The liquid silicone rubber previously mixed with the SiC powder is poured, and the whole is filled with 0.1%.
After degassing under reduced pressure of about 1 atm, a rubber mold is produced by curing it. (C) A method of pouring a slurry comprising a reinforcing material into the obtained rubber mold, sedimentation molding, and firing. Then, after infiltrating the formed preform with the aluminum alloy without applying pressure, the surface of the obtained composite material is ground, and a small-diameter through hole is formed in a portion filled with only the aluminum alloy with at least 1 per 100 cm ^2.
A method for producing a metal-ceramic composite material, characterized in that at least 00 pieces are drilled.