JP2000037745A - Method and apparatus for manufacture of thermosetting resin molded product, and mold assembly - Google Patents

Method and apparatus for manufacture of thermosetting resin molded product, and mold assembly

Info

Publication number
JP2000037745A
JP2000037745A JP20491598A JP20491598A JP2000037745A JP 2000037745 A JP2000037745 A JP 2000037745A JP 20491598 A JP20491598 A JP 20491598A JP 20491598 A JP20491598 A JP 20491598A JP 2000037745 A JP2000037745 A JP 2000037745A
Authority
JP
Japan
Prior art keywords
resin
cured
curing
semi
mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20491598A
Other languages
Japanese (ja)
Inventor
Koji Masui
浩司 増井
Tateo Sanemori
健郎 實盛
Zenichiro Tabuchi
善一郎 田渕
Tsugio Murayama
次雄 村山
Shoichi Tanaka
彰一 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP20491598A priority Critical patent/JP2000037745A/en
Publication of JP2000037745A publication Critical patent/JP2000037745A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To obtain a method and an apparatus for manufacturing a thermosetting resin molded product and its mold assembly wherein a cycle time of a resin sealing process is shortened, and a production capacity of the sealing process can be improved. SOLUTION: Molds 1, 2 wherein resin molding part 5a to 5d (5) in which a fluid state thermosetting resin is cast and molded, and resin curing part 6a to 6b (6) in which a curing reaction of the thermosetting resin is completed are formed by being adjacent to each other, are used. A semiconductor element 4 is cast into the resin molding part 5 in a state wherein the molds 1, 2 are open. A semicured sealing body 9a in the resin molding part 5 is transferred to the resin curing part 6. A resin sealing body 9b having completed curing in the resin curing part 6 is taken out, and a resin is molded onto the semiconductor element 4 cast into the resin molding part 5. Then, curing of the semicured sealing body 9a cast into the resin curing part 6, is completed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、半導体素子を搭
載したリードフレーム等に対して熱硬化性樹脂にて樹脂
封止を施すための熱硬化性樹脂成形品の製造方法と製造
装置および金型装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a thermosetting resin molded product for sealing a lead frame or the like on which a semiconductor element is mounted with a thermosetting resin. It concerns the device.

【0002】[0002]

【従来の技術】従来、図4に示すように、半導体素子を
搭載したリードフレーム33に対する熱硬化性樹脂によ
る樹脂封止工程は、それぞれ成形空間(以後キャビティ
と呼ぶ)を持ち、かつ一様に高温に保たれた上金型31
と下金型32を用いて行っていた。下金型32には樹脂
材料を装填するためのポットと呼ばれる窪みが施され、
その底には樹脂を押し込むためのプランジャと呼ばれる
押し出し棒が内蔵されている。通常、上金型31には、
下金型32のポットと合致する位置にカルと呼ばれる窪
みが施されている。さらに、ポットおよびカルからキャ
ビティへの樹脂の流路となるランナーと呼ばれる溝が上
下金型31,32にそれぞれ施されている。
2. Description of the Related Art Conventionally, as shown in FIG. 4, a resin sealing process for a lead frame 33 on which a semiconductor element is mounted with a thermosetting resin has a molding space (hereinafter referred to as a cavity) and is uniformly formed. Upper mold 31 kept at high temperature
And using the lower mold 32. The lower mold 32 is provided with a recess called a pot for loading a resin material,
An extrusion rod called a plunger for pushing resin is built in the bottom. Usually, the upper mold 31 has
A recess called a cull is provided at a position corresponding to the pot of the lower mold 32. Further, grooves called runners, which serve as flow paths for the resin from the pot and the cull to the cavity, are formed in the upper and lower dies 31, 32, respectively.

【0003】樹脂封止工程の手順としては、まず上記の
上下金型31,32にてリードフレーム33を挟み、次
に金型より加熱されて溶融した流動状態の熱硬化性樹脂
材料をプランジャにてキャビティ内部に注入し、そして
上下金型31,32による加熱作用により硬化反応を進
行させ、該樹脂材料の硬化反応が完結するまで上下金型
31,32を閉じたまま維持することで半導体素子の樹
脂封止が完了する。その後、上下金型31,32を開い
て樹脂封止を完了した樹脂封止体34を取り出してい
た。
The procedure of the resin sealing step is as follows. First, the lead frame 33 is sandwiched between the upper and lower dies 31, 32, and then the fluidized thermosetting resin material heated and melted by the dies is supplied to the plunger. The upper and lower dies 31, 32 are kept closed until the curing reaction of the resin material is completed, and the curing reaction is advanced by the heating action of the upper and lower dies 31, 32. Is completed. After that, the upper and lower molds 31 and 32 were opened to take out the resin sealing body 34 which completed the resin sealing.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、従来の
樹脂封止工程では、樹脂材料の硬化反応が完結するまで
の間、上下金型31,32を閉じたままにしておく必要
がある。通常、樹脂材料の硬化反応が完結するまで、3
0秒から2分程度の時間を要し、封止工程の生産能力を
低下させる大きな要因となっていた。
However, in the conventional resin sealing process, it is necessary to keep the upper and lower dies 31, 32 closed until the curing reaction of the resin material is completed. Usually, 3 hours until the curing reaction of the resin material is completed.
It took about 0 seconds to about 2 minutes, which was a major factor in reducing the production capacity in the sealing step.

【0005】この発明は、樹脂封止工程のサイクルタイ
ムを短縮して封止工程の生産能力を向上することができ
る熱硬化性樹脂成形品の製造方法と製造装置および金型
装置を提供するものである。
[0005] The present invention provides a method and apparatus for manufacturing a thermosetting resin molded product capable of shortening the cycle time of the resin sealing step and improving the productivity of the sealing step, and a mold apparatus. It is.

【0006】[0006]

【課題を解決するための手段】請求項1記載の熱硬化性
樹脂成型品の製造方法は、流動状態の熱硬化性樹脂を注
入して成形を行なう樹脂成形部と、熱硬化性樹脂の硬化
反応を完結させる樹脂硬化部とを隣接して形成した金型
を用いた方法であって、金型を開いた状態で、樹脂成形
部に被封止体を投入し、樹脂成形部で半硬化した半硬化
封止体を樹脂硬化部へ移動し、樹脂硬化部で硬化を完了
した樹脂封止体を取出し、金型を閉じた状態で、樹脂成
形部に投入した被封止体に樹脂成形し、樹脂硬化部に投
入した半硬化封止体の硬化を完了することを特徴とする
ものである。
According to a first aspect of the present invention, there is provided a method for manufacturing a thermosetting resin molded article, comprising: a resin molding section for injecting and molding a thermosetting resin in a flowing state; This is a method using a mold formed adjacent to a resin cured part that completes the reaction. With the mold opened, the sealed object is put into the resin molded part, and semi-cured in the resin molded part. The cured semi-cured body is moved to the cured resin section, the cured resin body is taken out of the cured resin section, and the mold is closed. Then, the curing of the semi-cured sealing body charged into the resin curing section is completed.

【0007】請求項2記載の熱硬化性樹脂成型品の製造
装置は、流動状態の熱硬化性樹脂を注入して成形を行な
う樹脂成形部と、熱硬化性樹脂の硬化反応を完結させる
樹脂硬化部とを隣接して形成した金型と、金型を開いた
状態で、樹脂成形部に被封止体を投入し、樹脂成形部で
半硬化した半硬化封止体を樹脂硬化部へ移動し、樹脂硬
化部で硬化を完了した樹脂封止体を取出す被封止体搬送
手段とを備えたものである。
According to a second aspect of the present invention, there is provided an apparatus for manufacturing a thermosetting resin molded article, comprising: a resin molding section for injecting and molding a thermosetting resin in a flowing state; and a resin curing section for completing a curing reaction of the thermosetting resin. With the mold formed adjacent to the part and the mold opened, the sealed object is put into the resin molding part, and the semi-cured sealed body semi-cured by the resin molding part is moved to the resin cured part And a sealed body conveying means for taking out the resin sealed body which has been completely cured in the resin cured section.

【0008】請求項13記載の金型装置は、流動状態の
熱硬化性樹脂を注入して成形を行なう樹脂成形部と、前
記熱硬化性樹脂の硬化反応を完結させる樹脂硬化部とを
隣接して形成してなるものである。請求項1または請求
項2または請求項13記載の熱硬化性樹脂成形品の製造
方法と製造装置および金型装置によると、金型を開いて
樹脂硬化部で硬化が完了した樹脂封止体を取出し、樹脂
成形部で半硬化した半硬化封止体を樹脂硬化部へ移動
し、新たに次の被封止体を樹脂成形部に投入する工程
と、金型を閉じて樹脂成形部に投入した被封止体に樹脂
成形し、樹脂硬化部に投入した半硬化封止体の硬化を完
了する工程からなる1サイクルの金型の開閉の間で樹脂
封止が行なえ、封止樹脂の注入開始から樹脂材料の硬化
が完了するまで金型を閉じたままにしていた従来例に比
べて、封止工程の生産能力を飛躍的に向上させることが
できる。
According to a thirteenth aspect of the present invention, in the mold apparatus, a resin molding section for injecting and molding a thermosetting resin in a flowing state and a resin curing section for completing a curing reaction of the thermosetting resin are adjacent to each other. It is formed by forming. According to the method for manufacturing a thermosetting resin molded product, the manufacturing apparatus, and the mold apparatus according to claim 1, claim 2, or claim 13, the mold is opened, and the resin sealing body that has been completely cured in the resin cured section is formed. Take out and move the semi-cured sealed body that has been semi-cured in the resin molding section to the resin cured section, and then put the next sealed object into the resin molding section, and close the mold and throw it into the resin molding section The resin is molded into the sealed body, and the resin is sealed during one cycle of opening and closing of the mold, which includes a step of completing the curing of the semi-cured sealed body charged into the resin cured portion, and injecting the sealing resin. As compared with the conventional example in which the mold is kept closed from the start until the curing of the resin material is completed, the production capacity in the sealing step can be dramatically improved.

【0009】請求項3記載の熱硬化性樹脂成形品の製造
方法は、流動状態の熱硬化性樹脂を注入して成形を行な
う樹脂成形部を有した樹脂成形用金型と、熱硬化性樹脂
の硬化反応を完結させる樹脂硬化部を有した樹脂硬化用
金型を、分離して隣り合う位置に配置し、各金型を開い
た状態で、樹脂成形部に被封止体を投入し、樹脂成形部
で半硬化した半硬化封止体を樹脂硬化部へ移動し、樹脂
硬化部で硬化を完了した樹脂封止体を取出し、各金型を
閉じた状態で、樹脂成形部に投入した被封止体に樹脂成
形し、樹脂硬化部に投入した半硬化封止体の硬化を完了
することを特徴とするものである。
According to a third aspect of the present invention, there is provided a method for producing a thermosetting resin molded article, comprising: a resin molding die having a resin molding portion for injecting and molding a thermosetting resin in a flowing state; A resin curing mold having a resin curing section that completes the curing reaction of the resin curing section is separated and arranged at a position adjacent to each other, and in a state where each mold is opened, the sealed body is put into the resin molding section, The semi-cured sealing body that was semi-cured in the resin molding section was moved to the resin curing section, and the resin sealing body that had been completely cured in the resin curing section was taken out and put into the resin molding section with each mold closed. The method is characterized in that the resin is molded into the object to be sealed, and the curing of the semi-cured member put into the resin cured portion is completed.

【0010】請求項4記載の熱硬化性樹脂成形品の製造
装置は、流動状態の熱硬化性樹脂を注入して成形を行な
う樹脂成形部を有した樹脂成形用金型と、樹脂成形用金
型の隣り合う位置に分離して配置し熱硬化性樹脂の硬化
反応を完結させる樹脂硬化部を有した樹脂硬化用金型
と、各金型を開いた状態で、樹脂成形部に被封止体を投
入し、樹脂成形部で半硬化した半硬化封止体を樹脂硬化
部へ移動し、樹脂硬化部で硬化を完了した樹脂封止体を
取出す被封止体搬送手段とを備えたものである。
According to a fourth aspect of the present invention, there is provided an apparatus for producing a thermosetting resin molded product, comprising: a resin molding die having a resin molding portion for injecting and molding a thermosetting resin in a flowing state; A resin curing mold that has a resin curing section that completes the curing reaction of the thermosetting resin by being separated and placed at adjacent positions of the mold, and sealed with the resin molding section with each mold open A body to be sealed, a semi-cured sealed body that has been semi-cured in the resin molding section is moved to the resin cured section, and a sealed body conveying means for taking out the resin sealed body that has been completely cured in the resin cured section. It is.

【0011】請求項14記載の金型装置は、流動状態の
熱硬化性樹脂を注入して成形を行なう樹脂成形部を有し
た樹脂成形用金型と、前記樹脂成形用金型の隣り合う位
置に分離して配置し前記熱硬化性樹脂の硬化反応を完結
させる樹脂硬化部を有した樹脂硬化用金型とを備えたも
のである。請求項3または請求項4または請求項14記
載の熱硬化性樹脂成形品の製造方法と製造装置および金
型装置によると、金型を開いて樹脂硬化部で硬化が完了
した樹脂封止体を取出し、樹脂成形部で半硬化した半硬
化封止体を樹脂硬化部へ移動し、新たに次の被封止体を
樹脂成形部に投入する工程と、金型を閉じて樹脂成形部
に投入した被封止体に樹脂成形し、樹脂硬化部に投入し
た半硬化封止体の硬化を完了する工程からなる1サイク
ルの金型の開閉の間で樹脂封止が行なえ、封止樹脂の注
入開始から樹脂材料の硬化が完了するまで金型を閉じた
ままにしていた従来例に比べて、封止工程の生産能力を
飛躍的に向上させることができる。
According to a fourteenth aspect of the present invention, there is provided a mold device having a resin molding part having a resin molding part for injecting and molding a thermosetting resin in a flowing state, and a position adjacent to the resin molding mold. And a resin curing mold having a resin curing portion for completing the curing reaction of the thermosetting resin. According to the manufacturing method, the manufacturing apparatus, and the mold apparatus of the thermosetting resin molded product according to claim 3, claim 4, or claim 14, the mold is opened, and the resin sealing body that has been completely cured in the resin cured section is formed. Take out and move the semi-cured sealed body that has been semi-cured in the resin molding section to the resin cured section, and then put the next sealed object into the resin molding section, and close the mold and throw it into the resin molding section The resin is molded into the sealed body, and the resin is sealed during one cycle of opening and closing of the mold, which includes a step of completing the curing of the semi-cured sealed body charged into the resin cured portion, and injecting the sealing resin. As compared with the conventional example in which the mold is kept closed from the start until the curing of the resin material is completed, the production capacity in the sealing step can be dramatically improved.

【0012】請求項5記載の熱硬化性樹脂成形品の製造
方法は、請求項1または請求項3において、金型のプラ
ンジャ内部およびカル接触部近傍に温度調整装置を内蔵
し、樹脂を温度調整しながら硬化,圧縮することを特徴
とするものである。請求項6記載の熱硬化性樹脂成形品
の製造装置は、請求項2または請求項4において、金型
のプランジャ内部およびカル接触部近傍に温度調整装置
を内蔵したものである。
According to a fifth aspect of the present invention, there is provided a method of manufacturing a thermosetting resin molded product according to the first or third aspect, wherein a temperature adjusting device is incorporated inside the plunger of the mold and near the cull contact portion to adjust the temperature of the resin. It is characterized by being cured and compressed while being cured. According to a sixth aspect of the present invention, there is provided an apparatus for manufacturing a thermosetting resin molded product according to the second or fourth aspect, wherein a temperature adjusting device is incorporated inside the plunger of the mold and near the cull contact portion.

【0013】請求項5または請求項6記載の熱硬化性樹
脂成形品の製造方法および製造装置によると、請求項1
ないし請求項4に記載の作用に加え、金型のプランジャ
内部およびカル接触部近傍に温度調整装置を内蔵するこ
とにより、樹脂を温度調整しながら硬化,圧縮するの
で、従来のように、樹脂の硬化の進行が他の充填部と比
較して遅れるカルおよびポット部の樹脂の硬化を促進す
ることが比較的容易となり、封止工程のサイクルタイム
が短縮され、生産能力のより一層の向上が図れる。
According to the method and the apparatus for manufacturing a thermosetting resin molded product according to the fifth or sixth aspect of the present invention,
In addition to the functions described in the fourth aspect, by incorporating a temperature adjusting device inside the plunger of the mold and near the cull contact portion, the resin is cured and compressed while adjusting the temperature. It is relatively easy to promote the curing of the resin in the cull and pot portions, where the progress of curing is delayed compared to other filling portions, shortening the cycle time of the sealing step, and further improving the production capacity .

【0014】請求項7記載の熱硬化性樹脂成形品の製造
方法は、請求項1または請求項3において、樹脂硬化部
に、半硬化封止体に接触し半硬化封止体の表面性状を維
持可能な剛性を有した高熱伝導性の接触部材と、接触部
材を半硬化封止体に接触させる高熱伝導性の弾性保持部
材を設け、接触部材が半硬化封止体の硬化反応促進に伴
う体積収縮に追従することを特徴とするものである。
According to a seventh aspect of the present invention, there is provided a method for manufacturing a thermosetting resin molded article according to the first or third aspect, wherein the resin cured portion is brought into contact with the semi-cured sealing body to change the surface properties of the semi-cured sealing body. A highly heat conductive contact member having a maintainable rigidity and a high heat conductive elastic holding member for bringing the contact member into contact with the semi-cured sealing body are provided, and the contact member accompanies the curing reaction of the semi-cured sealing body. It is characterized by following volume shrinkage.

【0015】請求項8記載の熱硬化性樹脂成形品の製造
装置は、請求項2または請求項4において、樹脂硬化部
に、半硬化封止体に接触し半硬化封止体の表面性状を維
持可能な剛性を有した高熱伝導性の接触部材と、半硬化
封止体の硬化反応促進に伴う体積収縮に追従しながら接
触部材を半硬化封止体に接触させる高熱伝導性の弾性保
持部材を設けたことを特徴とするものである。
According to an eighth aspect of the present invention, there is provided the apparatus for manufacturing a thermosetting resin molded product according to the second or fourth aspect, wherein the resin cured portion is brought into contact with the semi-cured sealing body to change the surface properties of the semi-cured sealing body. A highly thermally conductive contact member having a stiffness that can be maintained, and a highly thermally conductive elastic holding member that makes the contact member contact the semi-cured sealing body while following the volume shrinkage accompanying acceleration of the curing reaction of the semi-cured sealing body Is provided.

【0016】請求項7または請求項8記載の熱硬化性樹
脂成形品の製造方法および製造装置によると、請求項1
ないし請求項4に記載の作用に加え、半硬化封止体が硬
化反応進行に伴って体積収縮を起こしても、接触部材と
半硬化封止体の樹脂表面との間に空間を生ずることな
く、半硬化封止体を高熱伝導性を有する弾性保持部材,
接触部材に常に接触させることにより、半硬化封止体へ
の熱伝達をより高効率に行うことができ、しかも半硬化
封止体の表面性状を維持可能な剛性を有した接触部材で
支持するので、半硬化封止体の変形を防止できる。
According to the method and the apparatus for manufacturing a thermosetting resin molded product according to the present invention,
In addition to the function of claim 4, even if the semi-cured sealing body undergoes volume shrinkage with the progress of the curing reaction, there is no space between the contact member and the resin surface of the semi-cured sealing body. An elastic holding member having high thermal conductivity for the semi-cured sealing body,
By constantly contacting the contact member, heat transfer to the semi-cured sealing body can be performed with higher efficiency, and furthermore, the semi-cured sealing body is supported by a contact member having rigidity capable of maintaining the surface properties thereof. Therefore, deformation of the semi-cured sealing body can be prevented.

【0017】請求項9記載の熱硬化性樹脂成形品の製造
方法は、請求項1または請求項3において、被封止体の
設置間隔の倍数の送り量でリードフレームを搬送するこ
とを特徴とするものである。請求項10記載の熱硬化性
樹脂成形品の製造装置は、請求項2または請求項4にお
いて、隣り合う樹脂成形部と樹脂硬化部の距離を、リー
ドフレームの被封止体の設置間隔の倍数としたことを特
徴とするものである。
According to a ninth aspect of the present invention, there is provided a method for manufacturing a thermosetting resin molded product, wherein the lead frame is transported at a feed amount which is a multiple of an installation interval of the object to be sealed. Is what you do. According to a tenth aspect of the present invention, in the manufacturing apparatus for a thermosetting resin molded product according to the second or fourth aspect, the distance between the adjacent resin molded parts and the resin cured part is a multiple of the installation interval of the sealed body of the lead frame. It is characterized by having.

【0018】請求項9または請求項10記載の熱硬化性
樹脂成形品の製造方法および製造装置によると、請求項
1ないし請求項4に記載の作用に加え、隣り合う樹脂成
形部と樹脂硬化部の距離を、リードフレームの被封止体
の設置間隔の倍数にすることで、被封止体の設置間隔の
倍数の送り量でリードフレームが搬送され、被封止体の
樹脂成形部への投入、樹脂成形部から樹脂硬化部への被
封止体の移動、および樹脂硬化部からの樹脂封止体の取
出しのそれぞれの送りピッチが同一となる。すなわち、
それぞれの位置でのリードフレームの送り機構を統一し
て、送り動作を同時に行なうことで、リードフレームの
搬送時間の短縮化が図れる。
According to the method and the apparatus for manufacturing a thermosetting resin molded product according to the ninth or tenth aspect, in addition to the functions according to the first to fourth aspects, an adjacent resin molded part and a resin cured part are provided. Is set to a multiple of the installation interval of the object to be sealed of the lead frame, the lead frame is transported by a feed amount that is a multiple of the installation interval of the object to be sealed, and The feed pitches for the charging, the movement of the sealed body from the resin molding section to the resin cured section, and the removal of the resin sealed body from the resin cured section are the same. That is,
By unifying the lead frame feed mechanism at each position and performing the feed operation at the same time, it is possible to reduce the lead frame transport time.

【0019】請求項11記載の熱硬化性樹脂成形品の製
造方法は、請求項1または請求項3において、リードフ
レームをフープ送り機構により連続的に搬送するもので
ある。請求項12記載の熱硬化性樹脂成形品の製造装置
は、請求項2または請求項4において、リードフレーム
をフープ送り機構により連続的に搬送するものである。
According to the eleventh aspect of the present invention, there is provided a method for manufacturing a thermosetting resin molded product according to the first or third aspect, wherein the lead frame is continuously conveyed by a hoop feed mechanism. According to a twelfth aspect of the present invention, in the thermosetting resin molded product manufacturing apparatus according to the second or fourth aspect, the lead frame is continuously conveyed by a hoop feed mechanism.

【0020】請求項11または請求項12記載の熱硬化
性樹脂成形品の製造方法および製造装置によると、請求
項1ないし請求項4に記載の作用に加え、リードフレー
ムが送り方向に途切れることなく連続してフープ送り機
構により搬送されるので、連続するリードフレームに存
在する被封止体の数を増やすことによって、新たにリー
ドフレームの供給をすることなく、一度に生産できる熱
硬化性樹脂成形品の数を増大できる。
According to the method and the apparatus for manufacturing a thermosetting resin molded product according to the eleventh or twelfth aspect, in addition to the operation according to the first to fourth aspects, the lead frame is not interrupted in the feed direction. Since it is continuously conveyed by the hoop feed mechanism, thermosetting resin molding that can be produced at once without increasing the number of objects to be sealed existing in the continuous lead frame without supplying a new lead frame The number of articles can be increased.

【0021】[0021]

【発明の実施の形態】第1の実施の形態 この発明の第1の実施の形態を図1および図2を用いて
説明する。図1は被封止体となる半導体素子4に樹脂成
形し、加熱,硬化する樹脂封止金型の断面図を示してお
り、図2はそのII−II断面図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a cross-sectional view of a resin-sealing mold in which a semiconductor element 4 to be sealed is resin-molded, heated and cured, and FIG. 2 is a II-II cross-sectional view thereof.

【0022】図1および図2において、1は上金型、2
は下金型、3は半導体素子4を搭載したリードフレーム
である。上金型1と下金型2には、樹脂成形部5a,5
b,5c,5dと樹脂硬化部6a,6bが設けられてい
る。樹脂硬化部6a,6bには、各々高熱伝導性である
弾性保持体8a,8bを介して接触部材7a,7bが設
けられている。
1 and 2, reference numeral 1 denotes an upper mold, 2
Denotes a lower mold, and 3 denotes a lead frame on which the semiconductor element 4 is mounted. The upper mold 1 and the lower mold 2 have resin molded portions 5a, 5
b, 5c, 5d and resin cured portions 6a, 6b are provided. Contact members 7a and 7b are provided on the resin cured portions 6a and 6b via elastic holders 8a and 8b having high thermal conductivity, respectively.

【0023】リードフレーム3の樹脂封止経路は、樹脂
封止金型の左右にそれぞれ設けられている。21は樹脂
を金型内に押し込むプランジャであり、金型のプランジ
ャ21の内部およびカル接触部近傍には温度調整装置2
2,23,24が内蔵されている。温度調整装置22,
23,24を内蔵する位置は、例えば、上金型1,下金
型2,プランジャ21としたが、樹脂をより効果的に硬
化させることができれば、特に限定されるものではな
く、樹脂に比較的近距離に位置していればよい。さら
に、温度調整装置22,23,24と樹脂の間に位置す
る金型の材質については、温度調整装置22,23,2
4の熱量を効率よく樹脂に伝達できるものであれば、特
に限定されるものではない。
The resin sealing paths of the lead frame 3 are provided on the left and right sides of the resin sealing mold, respectively. Reference numeral 21 denotes a plunger for pushing the resin into the mold, and a temperature adjusting device 2 is provided inside the plunger 21 of the mold and near the cull contact portion.
2, 23 and 24 are built-in. Temperature control device 22,
The positions for incorporating the 23 and 24 are, for example, the upper mold 1, the lower mold 2, and the plunger 21, but are not particularly limited as long as the resin can be more effectively cured. It is only necessary to be located at a close distance. Further, regarding the material of the mold located between the temperature adjusting devices 22, 23, 24 and the resin, the temperature adjusting devices 22, 23, 2
No particular limitation is imposed as long as the heat amount of No. 4 can be efficiently transmitted to the resin.

【0024】図1の左方向から、被封止体搬送手段にて
リードフレーム3が上金型1と下金型2の間を通過する
際に、リードフレーム3に接合した半導体素子4が樹脂
封止され、樹脂封止体9bとなって図の右方向に取り出
される。すなわち、樹脂成形部5a,5b,5c,5d
において、流動状態の熱硬化性樹脂が供給された後、上
下金型1,2による加熱,圧縮作用によって半導体素子
4の周囲に半硬化封止体(硬化前の状態)9aが成形さ
れる。
When the lead frame 3 passes between the upper mold 1 and the lower mold 2 by the object-to-be-sealed conveying means from the left side in FIG. 1, the semiconductor element 4 bonded to the lead frame 3 is made of resin. After being sealed, it is taken out as a resin sealing body 9b in the right direction in the figure. That is, the resin molded parts 5a, 5b, 5c, 5d
After the thermosetting resin in the fluidized state is supplied, the semi-cured sealing body (state before curing) 9a is formed around the semiconductor element 4 by the heating and compressing actions of the upper and lower dies 1, 2.

【0025】その後、上金型1と下金型2が開き、リー
ドフレーム3がフレーム送り機構(図示せず)によって
図1の矢印の方向に送られる。リードフレーム3の送り
方向における隣り合う半導体素子4の距離をLと定め、
金型内の隣り合う樹脂成形部5a,5b,5c,5dあ
るいは樹脂硬化部6a,6bの距離もLとした。リード
フレーム3の送り量は、例えば本実施の形態の場合2L
である。なお、リードフレーム3の送り量は、金型のサ
イズや半導体素子4のリードフレーム3上でのピッチに
よって変更され、樹脂成形部5a,5b,5c,5dで
一度に成形された全ての半硬化封止体9aが、次の金型
の開閉で樹脂硬化部6a,6bに移動するように装置の
各部を最適に調整すれば、特に限定されるものではな
い。
Thereafter, the upper mold 1 and the lower mold 2 are opened, and the lead frame 3 is fed by a frame feed mechanism (not shown) in the direction of the arrow in FIG. The distance between adjacent semiconductor elements 4 in the feed direction of the lead frame 3 is defined as L,
The distance between the adjacent resin molded portions 5a, 5b, 5c, 5d or the cured resin portions 6a, 6b in the mold was also L. The feed amount of the lead frame 3 is, for example, 2 L in the case of the present embodiment.
It is. The feed amount of the lead frame 3 is changed according to the size of the mold and the pitch of the semiconductor element 4 on the lead frame 3, and all the semi-cured parts formed at one time by the resin molding parts 5a, 5b, 5c, 5d. There is no particular limitation as long as each part of the apparatus is optimally adjusted so that the sealing body 9a moves to the resin cured portions 6a and 6b by opening and closing the next mold.

【0026】樹脂硬化部6a,6bでは、上金型1と下
金型2が閉じ始めると、接触部材7a,7bが半硬化封
止体9aに接触する。さらに、上金型1と下金型2が完
全に閉じると、接触部材7a,7bが半硬化封止体9a
に接触した状態で、弾性保持体8a,8bが収縮する。
接触部材7a,7bは、半硬化封止体9aの表面形状を
維持する程度の所定の剛性を有し、かつ半硬化封止体9
aの硬化反応促進に伴う体積収縮に追従可能に構成され
ている。なお、接触部材7a,7bの材質および表面形
状、ならびに弾性保持体8a,8bの剛性を決定する材
質および断面積は、半硬化封止体9aの形状,特性およ
び表面形状を損なわないものであれば特に限定されるも
のではない。
In the cured resin portions 6a and 6b, when the upper mold 1 and the lower mold 2 start closing, the contact members 7a and 7b contact the semi-cured sealing body 9a. Further, when the upper mold 1 and the lower mold 2 are completely closed, the contact members 7a and 7b become semi-cured sealing bodies 9a.
The elastic holders 8a and 8b contract in a state where they are in contact with.
The contact members 7a and 7b have predetermined rigidity to maintain the surface shape of the semi-cured sealing body 9a, and
It is configured to be able to follow the volume shrinkage accompanying the acceleration of the curing reaction of a. Note that the material and surface shape of the contact members 7a and 7b and the material and cross-sectional area that determine the rigidity of the elastic holders 8a and 8b do not impair the shape, characteristics, and surface shape of the semi-cured sealing body 9a. It is not particularly limited.

【0027】そして、上金型1と下金型2が開き、樹脂
硬化部6a,6bにて硬化が完了した樹脂封止体9b
は、フレーム送り機構(図示せず)によって図1の矢印
の方向から取り出される。なお、リードフレーム3は、
金型挿入前後で連続したフープ送り機構によって、送り
方向に途切れることなる搬送される。ただし、リードフ
レーム3の送り方向の長さは、搬送および封止工程後の
製品の品質が規定内に収まっていれば、例えば、短冊状
のリードフレーム3を用いてもよく、特に限定されるも
のではない。
Then, the upper mold 1 and the lower mold 2 are opened, and the resin sealing body 9b which has been completely cured in the resin curing sections 6a and 6b.
Is taken out from the direction of the arrow in FIG. 1 by a frame feed mechanism (not shown). The lead frame 3 is
By a hoop feeding mechanism that is continuous before and after the mold is inserted, the paper is conveyed without interruption in the feeding direction. However, the length of the lead frame 3 in the feed direction may be, for example, a strip-shaped lead frame 3 as long as the quality of the product after the transportation and sealing steps is within the specified range, and is particularly limited. Not something.

【0028】このように構成された熱硬化性樹脂成形品
の製造方法と製造装置および金型装置によると、上金型
1と下金型2を開いて樹脂硬化部6a,6bで硬化が完
了した樹脂封止体9bを取出し、樹脂成形部5a,5
b,5c,5dで半硬化した半硬化封止体9aを樹脂硬
化部6a,6bへ移動し、新たに次の半導体素子4を樹
脂成形部5a,5b,5c,5dに投入する工程と、上
金型1と下金型2を閉じて樹脂成形部5a,5b,5
c,5dに投入した半導体素子4に樹脂成形し、樹脂硬
化部6a,6bに投入した半硬化封止体9aの硬化を完
了する工程からなる1サイクルの上金型1と下金型2の
開閉の間で樹脂封止が行なえ、封止樹脂の注入開始から
樹脂材料の硬化が完了するまで金型を閉じたままにして
いた従来例に比べて、封止工程の生産能力を飛躍的に向
上させることができる。
According to the manufacturing method, the manufacturing apparatus, and the mold apparatus for the thermosetting resin molded product thus configured, the upper mold 1 and the lower mold 2 are opened, and the curing is completed in the resin curing sections 6a and 6b. The removed resin sealing body 9b is taken out, and the resin molded portions 5a, 5
moving the semi-cured sealing body 9a semi-cured by b, 5c, 5d to the resin cured portions 6a, 6b, and newly charging the next semiconductor element 4 into the resin molded portions 5a, 5b, 5c, 5d; The upper mold 1 and the lower mold 2 are closed, and the resin molding portions 5a, 5b, 5
c and 5d, the resin molding is performed on the semiconductor element 4 and the curing of the semi-cured sealing body 9a charged into the resin cured portions 6a and 6b is completed. Resin sealing can be performed between opening and closing, dramatically increasing the production capacity of the sealing process compared to the conventional example where the mold is kept closed from the start of injection of the sealing resin until the curing of the resin material is completed. Can be improved.

【0029】また、上金型1と下金型2のプランジャ2
1内部およびカル接触部近傍に温度調整装置22,2
3,24を内蔵することにより、樹脂を温度調整しなが
ら硬化,圧縮するので、従来のように、樹脂の硬化の進
行が他の充填部と比較して遅れるカルおよびポット部の
樹脂の硬化を促進することが比較的容易となり、封止工
程のサイクルタイムが短縮され、生産能力のより一層の
向上が図れる。
The plunger 2 of the upper mold 1 and the lower mold 2
1 Temperature control devices 22 and 2 inside and near the cull contact part
By incorporating 3 and 24, the resin is cured and compressed while controlling the temperature, so that the curing of the resin in the cull and pot portions, where the progress of the curing of the resin is delayed as compared with other filling portions, as in the related art, is reduced. It is relatively easy to accelerate, the cycle time of the sealing step is shortened, and the production capacity can be further improved.

【0030】また、半硬化封止体9aが硬化反応進行に
伴って体積収縮を起こしても、接触部材7a,7bと半
硬化封止体9aの樹脂表面との間に空間を生ずることな
く、半硬化封止体9aを高熱伝導性を有する弾性保持部
材8a,8b,接触部材7a,7bに常に接触させるこ
とにより、半硬化封止体9aへの熱伝達をより高効率に
行うことができ、しかも半硬化封止体9aの表面性状を
維持可能な剛性を有した接触部材7a,7bで支持する
ので、半硬化封止体9aの変形を防止できる。
Further, even if the semi-cured sealing body 9a undergoes volume shrinkage as the curing reaction proceeds, there is no space between the contact members 7a and 7b and the resin surface of the semi-cured sealing body 9a. By constantly bringing the semi-cured sealing body 9a into contact with the elastic holding members 8a, 8b and the contact members 7a, 7b having high thermal conductivity, heat transfer to the semi-cured sealing body 9a can be performed with higher efficiency. Moreover, since the semi-cured sealing body 9a is supported by the contact members 7a and 7b having rigidity capable of maintaining the surface properties of the semi-cured sealing body 9a, the deformation of the semi-cured sealing body 9a can be prevented.

【0031】また、隣り合う樹脂成形部5a,5b,5
c,5dと樹脂硬化部6a,6bの距離、ならびにリー
ドフレーム3の半導体素子4の設置間隔をLとし、リー
ドフレーム3の送り量を2Lとしたので、半導体素子4
の樹脂成形部5a,5b,5c,5dへの投入、樹脂成
形部5a,5b,5c,5dから樹脂硬化部6a,6b
への半導体素子4の移動、および6a,6bからの樹脂
封止体9bの取出しのそれぞれの送りピッチが同一とな
る。すなわち、それぞれの位置でのリードフレーム3の
送り機構を統一して、送り動作を同時に行なうことで、
リードフレーム3の搬送時間の短縮化が図れる。ただ
し、金型開閉毎のリードフレーム3の送り量は、各樹脂
封止体9bが、同一の成形時間と硬化時間で生産される
ように設定することが重要であり、金型内の樹脂成形部
5a,5b,5c,5dや樹脂硬化部6a,6bの数,
距離は特に限定されるものではなく、熱硬化樹脂の硬化
促進を妨げない条件であればよい。
The adjacent resin molded parts 5a, 5b, 5
Since the distance between c and 5d and the resin cured portions 6a and 6b, the installation interval of the semiconductor element 4 on the lead frame 3 is L, and the feed amount of the lead frame 3 is 2L, the semiconductor element 4
Into the resin molding sections 5a, 5b, 5c, 5d, and from the resin molding sections 5a, 5b, 5c, 5d to the resin curing sections 6a, 6b.
Of the semiconductor element 4 and removal of the resin sealing body 9b from 6a and 6b. That is, by unifying the feed mechanism of the lead frame 3 at each position and performing the feed operation simultaneously,
The transport time of the lead frame 3 can be reduced. However, it is important to set the feed amount of the lead frame 3 each time the mold is opened and closed so that each resin sealing body 9b is produced in the same molding time and curing time. The number of the parts 5a, 5b, 5c, 5d and the resin cured parts 6a, 6b,
The distance is not particularly limited, and may be any condition as long as it does not hinder the promotion of curing of the thermosetting resin.

【0032】さらに、リードフレーム3が送り方向に途
切れることなく連続してフープ送り機構により搬送され
るので、連続するリードフレーム3に存在する半導体素
子4の数を増やすことによって、新たにリードフレーム
3の供給をすることなく、一度に生産できる熱硬化性樹
脂成形品の数を増大できる。なお、前記実施の形態で
は、上金型1,下金型2,プランジャ21内に温度調整
装置22,23,24を内蔵したが、温度調整装置2
2,23,24は設けなくてもよい。また、樹脂硬化部
6a,6bに接触部材7a,7bと弾性保持部材8a,
8bを設けたが、特になくてもよい。また、リードフレ
ーム3の送り量を半導体素子4の設置間隔の倍数としな
くてもよい。さらに、リードフレーム3はフープ送り機
構にて連続して搬送するものでなくてもよい。
Further, since the lead frame 3 is continuously conveyed by the hoop feed mechanism without interruption in the feed direction, the number of semiconductor elements 4 existing in the continuous lead frame 3 is increased, so that the lead frame 3 is newly added. The number of thermosetting resin molded articles that can be produced at one time can be increased without supplying the resin. In the above-described embodiment, the temperature adjustment devices 22, 23, and 24 are built in the upper mold 1, the lower mold 2, and the plunger 21.
2, 23 and 24 need not be provided. The contact members 7a, 7b and the elastic holding members 8a,
Although 8b is provided, it need not be particularly provided. Further, the feed amount of the lead frame 3 does not have to be a multiple of the installation interval of the semiconductor elements 4. Further, the lead frame 3 does not need to be continuously transported by the hoop feed mechanism.

【0033】第2の実施の形態 この発明の第2の実施の形態を図3を用いて説明する。
図3は樹脂封止金型の断面図であり、図1と同一部分は
同一符号を付してその説明を省略する。図3において、
11は樹脂成形用上金型11aと樹脂成形用下金型11
bからなる樹脂成形用金型、12は樹脂硬化用上金型1
2aと樹脂硬化用下金型12bからなる樹脂硬化用金型
であり、樹脂成形用金型11と樹脂硬化用金型12は分
離して隣り合う位置に配置してある。また、樹脂成形用
の上下金型11a,11bには樹脂成形部5a,5b,
5c,5dが設けられており、樹脂硬化用の上下金型1
2a,12bには樹脂硬化部6a,6bが設けられてい
る。
Second Embodiment A second embodiment of the present invention will be described with reference to FIG.
FIG. 3 is a cross-sectional view of the resin-sealing mold. The same parts as those in FIG. In FIG.
11 is an upper mold 11a for resin molding and a lower mold 11 for resin molding.
b, a resin molding die, 12 is an upper resin curing mold 1
This is a resin curing mold composed of 2a and a resin curing lower mold 12b, and the resin molding mold 11 and the resin curing mold 12 are separately arranged at adjacent positions. Also, resin molding portions 5a, 5b,
5c and 5d are provided, and upper and lower molds 1 for curing the resin.
Resin cured portions 6a and 6b are provided in 2a and 12b.

【0034】図3の左方向からリードフレーム3が樹脂
成形用上金型11aと樹脂成形用下金型11b、樹脂硬
化用上金型12aと樹脂硬化用下金型12bの間を通過
していく際に、リードフレーム3に接合した半導体素子
4が樹脂封止され、樹脂封止体9bとなって図の右方向
に取り出される。すなわち、樹脂成形部5a,5b,5
c,5dにおいては、流動状態の熱硬化性樹脂が供給さ
れた後、樹脂成形用上金型11aと樹脂成形用下金型1
1bによる加熱,圧縮作用を受けて、半導体素子4の周
囲に半硬化封止体9aが成形される。
3, the lead frame 3 passes between the upper mold 11a for resin molding and the lower mold 11b for resin molding, and the upper mold 12a for resin curing and the lower mold 12b for resin curing. At this time, the semiconductor element 4 bonded to the lead frame 3 is resin-sealed, and is taken out as a resin-sealed body 9b in the right direction in the drawing. That is, the resin molded portions 5a, 5b, 5
In c and 5d, after the thermosetting resin in the fluid state is supplied, the upper mold 11a for resin molding and the lower mold 1 for resin molding are supplied.
1b, the semi-cured sealing body 9a is molded around the semiconductor element 4.

【0035】その後、樹脂成形用上金型11aと樹脂成
形用下金型11bが開き、リードフレーム3がフレーム
送り機構(図示せず)によって図3の矢印の方向に送ら
れる。リードフレーム3の送り量は図1の例と同様であ
り、金型のサイズや半導体素子4のリードフレーム3上
でのピッチによって変更され、樹脂成形部5a,5b,
5c,5dで一度に成形された全ての半硬化封止体9a
が、次の金型の開閉で樹脂硬化部6a,6bに移動する
ように装置の各部を最適に調整すれば、特に限定される
ものではない。
Thereafter, the upper mold 11a for resin molding and the lower mold 11b for resin molding are opened, and the lead frame 3 is fed by a frame feed mechanism (not shown) in the direction of the arrow in FIG. The feed amount of the lead frame 3 is the same as that in the example of FIG. 1, and is changed by the size of the mold and the pitch of the semiconductor element 4 on the lead frame 3, and the resin molded portions 5a, 5b,
All semi-cured sealing bodies 9a formed at a time by 5c and 5d
However, there is no particular limitation as long as each unit of the apparatus is optimally adjusted so as to move to the resin cured portions 6a and 6b by opening and closing the next mold.

【0036】樹脂硬化部6a,6bでは、接触部材7
a,7bにて半硬化封止体9aが上下から保持され、加
熱,硬化された後、樹脂硬化用上金型12aと樹脂硬化
用下金型12bが開き、硬化が完了した樹脂封止体9b
はフレーム送り機構(図示せず)によって図3の矢印の
方向から取り出される。このように構成された熱硬化性
樹脂成形品の製造方法と製造装置および金型装置におい
ても、樹脂成形用金型11,樹脂硬化用金型12を開い
て樹脂硬化部6a,6bで硬化が完了した樹脂封止体9
bを取出し、樹脂成形部5a,5b,5c,5dで半硬
化した半硬化封止体9aを樹脂硬化部6a,6bへ移動
し、新たに次の半導体素子4を樹脂成形部5a,5b,
5c,5dに投入する工程と、樹脂成形用金型11,樹
脂硬化用金型12を閉じて樹脂成形部5a,5b,5
c,5dに投入した半導体素子4に樹脂成形し、樹脂硬
化部6a,6bに投入した半硬化封止体9aの硬化を完
了する工程からなる1サイクルの樹脂成形用金型11,
樹脂硬化用金型12の開閉の間で樹脂封止が行なえ、封
止樹脂の注入開始から樹脂材料の硬化が完了するまで金
型を閉じたままにしていた従来例に比べて、封止工程の
生産能力を飛躍的に向上させることができる。
In the resin cured portions 6a and 6b, the contact members 7
After the semi-cured sealing body 9a is held from above and below at a and 7b, heated and cured, the resin curing upper mold 12a and the resin curing lower mold 12b are opened, and the cured resin molding is completed. 9b
Is taken out from the direction of the arrow in FIG. 3 by a frame feed mechanism (not shown). In the method and apparatus for manufacturing a thermosetting resin molded product and the mold apparatus configured as described above, the resin molding mold 11 and the resin curing mold 12 are opened, and the resin is cured by the resin curing sections 6a and 6b. Completed resin seal 9
b, the semi-cured sealing body 9a semi-cured by the resin molding parts 5a, 5b, 5c, 5d is moved to the resin curing parts 6a, 6b, and the next semiconductor element 4 is newly formed by the resin molding parts 5a, 5b, 5d.
5c, 5d, and closing the resin molding die 11 and the resin curing die 12 to close the resin molding portions 5a, 5b, 5
c, resin molding on the semiconductor element 4 charged into 5d, and a one-cycle resin molding die 11, comprising a step of completing the curing of the semi-cured sealing body 9a charged into the resin cured portions 6a, 6b.
Resin sealing can be performed between opening and closing of the resin curing mold 12, and the sealing process can be performed in comparison with the conventional example in which the mold is kept closed from the start of injection of the sealing resin until the curing of the resin material is completed. Can dramatically improve the production capacity.

【0037】なお、樹脂成形用金型11のプランジャ内
部およびカル接触部近傍に、温度調整装置を内蔵しても
よい。また、リードフレーム3は、連続してフープ送り
機構により搬送されるものであってもよい。また、樹脂
硬化部6a,6bに接触部材7a,7bと弾性保持部材
8a,8bを設けたが、特になくてもよい。さらに、リ
ードフレーム3の送り量を半導体素子4の設置間隔の倍
数としなくてもよい。
A temperature adjusting device may be built in the plunger of the resin molding die 11 and in the vicinity of the cull contact portion. Further, the lead frame 3 may be continuously transported by the hoop feed mechanism. In addition, although the contact members 7a and 7b and the elastic holding members 8a and 8b are provided in the resin cured portions 6a and 6b, they are not particularly required. Furthermore, the feed amount of the lead frame 3 does not have to be a multiple of the installation interval of the semiconductor elements 4.

【0038】[0038]

【発明の効果】請求項1または請求項2または請求項1
3記載の熱硬化性樹脂成形品の製造方法と製造装置およ
び金型装置によると、金型を開いて樹脂硬化部で硬化が
完了した樹脂封止体を取出し、樹脂成形部で半硬化した
半硬化封止体を樹脂硬化部へ移動し、新たに次の被封止
体を樹脂成形部に投入する工程と、金型を閉じて樹脂成
形部に投入した被封止体に樹脂成形し、樹脂硬化部に投
入した半硬化封止体の硬化を完了する工程からなる1サ
イクルの金型の開閉の間で樹脂封止が行なえ、封止樹脂
の注入開始から樹脂材料の硬化が完了するまで金型を閉
じたままにしていた従来例に比べて、封止工程の生産能
力を飛躍的に向上させることができる。
According to the present invention, claim 1 or claim 2 or claim 1 is provided.
According to the method and apparatus for manufacturing a thermosetting resin molded product and the mold apparatus described in 3, the mold is opened to take out the resin sealed body that has been completely cured in the resin cured section, and the semi-cured half is cured in the resin molded section. Moving the cured encapsulant to the resin cured part, and newly adding the next encapsulant to the resin molding part, and closing the mold and performing resin molding on the encapsulant injected into the resin molding part; Resin sealing can be performed during one cycle of opening and closing of the mold, which includes a step of completing the curing of the semi-cured sealing body charged into the resin curing section, from the start of the injection of the sealing resin to the completion of the curing of the resin material. As compared with the conventional example in which the mold is kept closed, the production capacity in the sealing step can be dramatically improved.

【0039】請求項3または請求項4または請求項14
記載の熱硬化性樹脂成形品の製造方法と製造装置および
金型装置によると、金型を開いて樹脂硬化部で硬化が完
了した樹脂封止体を取出し、樹脂成形部で半硬化した半
硬化封止体を樹脂硬化部へ移動し、新たに次の被封止体
を樹脂成形部に投入する工程と、金型を閉じて樹脂成形
部に投入した被封止体に樹脂成形し、樹脂硬化部に投入
した半硬化封止体の硬化を完了する工程からなる1サイ
クルの金型の開閉の間で樹脂封止が行なえ、封止樹脂の
注入開始から樹脂材料の硬化が完了するまで金型を閉じ
たままにしていた従来例に比べて、封止工程の生産能力
を飛躍的に向上させることができる。
[0039] Claim 3 or Claim 4 or Claim 14
According to the method and apparatus for manufacturing a thermosetting resin molded article and the mold apparatus described in the above, the mold is opened, the resin sealed body that has been completely cured in the resin cured section is taken out, and the semi-cured article is semi-cured in the resin molded section. Moving the encapsulant to the resin-cured part and adding the next encapsulant to the resin molding part; and closing the mold and resin-molding the encapsulant to the resin molding part. Resin sealing can be performed during the opening and closing of the mold in one cycle consisting of the step of completing the curing of the semi-cured sealing body charged into the curing section. As compared with the conventional example in which the mold is kept closed, the production capacity in the sealing step can be dramatically improved.

【0040】請求項5または請求項6記載の熱硬化性樹
脂成形品の製造方法および製造装置によると、請求項1
ないし請求項4に記載の効果に加え、金型のプランジャ
内部およびカル接触部近傍に温度調整装置を内蔵するこ
とにより、樹脂を温度調整しながら硬化,圧縮するの
で、従来のように、樹脂の硬化の進行が他の充填部と比
較して遅れるカルおよびポット部の樹脂の硬化を促進す
ることが比較的容易となり、封止工程のサイクルタイム
が短縮され、生産能力のより一層の向上が図れる。
According to the method and the apparatus for manufacturing a thermosetting resin molded product according to the fifth or sixth aspect of the present invention,
In addition to the effects described in claim 4, by incorporating a temperature adjusting device inside the plunger of the mold and in the vicinity of the cull contact portion, the resin is cured and compressed while adjusting the temperature. It is relatively easy to promote the curing of the resin in the cull and pot portions, where the progress of curing is delayed compared to other filling portions, shortening the cycle time of the sealing step, and further improving the production capacity .

【0041】請求項7または請求項8記載の熱硬化性樹
脂成形品の製造方法および製造装置によると、請求項1
ないし請求項4に記載の効果に加え、半硬化封止体が硬
化反応進行に伴って体積収縮を起こしても、接触部材と
半硬化封止体の樹脂表面との間に空間を生ずることな
く、半硬化封止体を高熱伝導性を有する弾性保持部材,
接触部材に常に接触させることにより、半硬化封止体へ
の熱伝達をより高効率に行うことができ、しかも半硬化
封止体の表面性状を維持可能な剛性を有した接触部材で
支持するので、半硬化封止体の変形を防止できる。
According to the method and the apparatus for manufacturing a thermosetting resin molded product according to the seventh or eighth aspect of the present invention,
In addition to the effects of claim 4, even if the semi-cured sealing body undergoes volume shrinkage with the progress of the curing reaction, no space is created between the contact member and the resin surface of the semi-cured sealing body. An elastic holding member having high thermal conductivity for the semi-cured sealing body,
By constantly contacting the contact member, heat transfer to the semi-cured sealing body can be performed with higher efficiency, and furthermore, the semi-cured sealing body is supported by a contact member having rigidity capable of maintaining the surface properties thereof. Therefore, deformation of the semi-cured sealing body can be prevented.

【0042】請求項9または請求項10記載の熱硬化性
樹脂成形品の製造方法および製造装置によると、請求項
1ないし請求項4に記載の効果に加え、隣り合う樹脂成
形部と樹脂硬化部の距離を、リードフレームの被封止体
の設置間隔の倍数にすることで、被封止体の設置間隔の
倍数の送り量でリードフレームが搬送され、被封止体の
樹脂成形部への投入、樹脂成形部から樹脂硬化部への被
封止体の移動、および樹脂硬化部からの樹脂封止体の取
出しのそれぞれの送りピッチが同一となる。すなわち、
それぞれの位置でのリードフレームの送り機構を統一し
て、送り動作を同時に行なうことで、リードフレームの
搬送時間の短縮化が図れる。
According to the method and the apparatus for manufacturing a thermosetting resin molded product according to the ninth or tenth aspect, in addition to the effects according to the first to fourth aspects, an adjacent resin molded part and a resin cured part are provided. Is set to a multiple of the installation interval of the object to be sealed of the lead frame, the lead frame is transported by a feed amount that is a multiple of the installation interval of the object to be sealed, and The feed pitches for the charging, the movement of the sealed body from the resin molding section to the resin cured section, and the removal of the resin sealed body from the resin cured section are the same. That is,
By unifying the lead frame feed mechanism at each position and performing the feed operation at the same time, it is possible to reduce the lead frame transport time.

【0043】請求項11または請求項12記載の熱硬化
性樹脂成形品の製造方法および製造装置によると、請求
項1ないし請求項4に記載の効果に加え、リードフレー
ムが送り方向に途切れることなく連続してフープ送り機
構により搬送されるので、連続するリードフレームに存
在する被封止体の数を増やすことによって、新たにリー
ドフレームの供給をすることなく、一度に生産できる熱
硬化性樹脂成形品の数を増大できる。
According to the method and the apparatus for manufacturing a thermosetting resin molded product according to the eleventh or twelfth aspect, in addition to the effects according to the first to fourth aspects, the lead frame is not interrupted in the feed direction. Since it is continuously conveyed by the hoop feed mechanism, thermosetting resin molding that can be produced at once without increasing the number of objects to be sealed existing in the continuous lead frame without supplying a new lead frame The number of articles can be increased.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の一実施の形態における熱硬化性樹脂
成形品の製造装置に用いる樹脂封止金型の断面図であ
る。
FIG. 1 is a cross-sectional view of a resin sealing mold used in a thermosetting resin molded product manufacturing apparatus according to an embodiment of the present invention.

【図2】図1のII−II断面図である。FIG. 2 is a sectional view taken along line II-II of FIG.

【図3】この発明の他の実施の形態における熱硬化性樹
脂成形品の製造装置に用いる樹脂封止金型の断面図であ
る。
FIG. 3 is a cross-sectional view of a resin sealing mold used in an apparatus for manufacturing a thermosetting resin molded product according to another embodiment of the present invention.

【図4】従来例の熱硬化性樹脂成形品の製造装置に用い
る樹脂封止金型の断面図である。
FIG. 4 is a cross-sectional view of a resin sealing mold used in a conventional thermosetting resin molded product manufacturing apparatus.

【符号の説明】[Explanation of symbols]

1 上金型 2 下金型 3 リードフレーム 4 半導体素子(被封止体) 5a,5b,5c,5d 樹脂成形部 6a,6b 樹脂硬化部 7a,7b 接触部材 8a,8b 弾性保持部材 9a 半硬化封止体 9b 樹脂封止体 11 樹脂成形用金型 11a 樹脂成形用上金型 11b 樹脂成形用下金型 12 樹脂硬化用金型 12a 樹脂硬化用上金型 12b 樹脂硬化用下金型 21 プランジャー 22,23,24 温度調整装置 L 樹脂封止体間隔 DESCRIPTION OF SYMBOLS 1 Upper mold 2 Lower mold 3 Lead frame 4 Semiconductor element (encapsulated body) 5a, 5b, 5c, 5d Resin molded part 6a, 6b Resin cured part 7a, 7b Contact member 8a, 8b Elastic holding member 9a Semi-cured Sealing body 9b Resin sealing body 11 Mold for resin molding 11a Upper mold for resin molding 11b Lower mold for resin molding 12 Mold for resin curing 12a Upper mold for resin curing 12b Lower mold for resin curing 21 Plan Jar 22, 23, 24 Temperature control device L Resin sealing body interval

フロントページの続き (72)発明者 田渕 善一郎 大阪府高槻市幸町1番1号 松下電子工業 株式会社内 (72)発明者 村山 次雄 大阪府高槻市幸町1番1号 松下電子工業 株式会社内 (72)発明者 田中 彰一 大阪府高槻市幸町1番1号 松下電子工業 株式会社内 Fターム(参考) 4F202 AA36 AD08 AD19 AH33 CA12 CB01 CB12 CN01 CN17 CN30 4F206 AA36 AD08 AD19 AH37 JA02 JB17 JF05 JF23 JN33 JN43 JQ81 5F061 AA01 BA01 CA21 DA01 DA03 DA06 DA12 DA16 DD02 DD04Continuation of the front page (72) Inventor Zenichiro Tabuchi 1-1, Yukicho, Takatsuki-shi, Osaka, Japan Inside Matsushita Electronics Industrial Co., Ltd. (72) Inventor Tsugio Murayama 1-1-1, Yukicho, Takatsuki-shi, Osaka, Matsushita Electronics Corporation (72) Inventor Shoichi Tanaka 1-1, Kochi-cho, Takatsuki-shi, Osaka Matsushita Electronics Co., Ltd.F-term (reference) JN43 JQ81 5F061 AA01 BA01 CA21 DA01 DA03 DA06 DA12 DA16 DD02 DD04

Claims (14)

【特許請求の範囲】[Claims] 【請求項1】 流動状態の熱硬化性樹脂を注入して成形
を行なう樹脂成形部と、前記熱硬化性樹脂の硬化反応を
完結させる樹脂硬化部とを隣接して形成した金型を用い
た熱硬化性樹脂成形品の製造方法であって、 前記金型を開いた状態で、前記樹脂成形部に被封止体を
投入し、前記樹脂成形部で半硬化した半硬化封止体を樹
脂硬化部へ移動し、前記樹脂硬化部で硬化を完了した樹
脂封止体を取出し、 前記金型を閉じた状態で、前記樹脂成形部に投入した被
封止体に樹脂成形し、前記樹脂硬化部に投入した半硬化
封止体の硬化を完了することを特徴とする熱硬化性樹脂
成型品の製造方法。
1. A mold in which a resin molding section for injecting and molding a thermosetting resin in a flowing state and a resin curing section for completing a curing reaction of the thermosetting resin are used adjacently. A method for manufacturing a thermosetting resin molded product, wherein a sealed object is put into the resin molded portion while the mold is opened, and a semi-cured sealed material semi-cured by the resin molded portion is formed of a resin. Moved to the curing section, take out the resin sealed body that has been cured in the resin cured section, and in a state in which the mold is closed, perform resin molding on the sealed body put in the resin molded section, and cure the resin. A method for producing a thermosetting resin molded product, wherein the curing of the semi-cured sealing body put into the section is completed.
【請求項2】 流動状態の熱硬化性樹脂を注入して成形
を行なう樹脂成形部と、前記熱硬化性樹脂の硬化反応を
完結させる樹脂硬化部とを隣接して形成した金型と、 前記金型を開いた状態で、前記樹脂成形部に被封止体を
投入し、前記樹脂成形部で半硬化した半硬化封止体を樹
脂硬化部へ移動し、前記樹脂硬化部で硬化を完了した樹
脂封止体を取出す被封止体搬送手段とを備えた熱硬化性
樹脂成型品の製造装置。
2. A mold in which a resin molding part for injecting and molding a thermosetting resin in a flowing state and a resin curing part for completing a curing reaction of the thermosetting resin are formed adjacent to each other; With the mold open, the sealed object is put into the resin molded part, the semi-cured sealed body that has been semi-cured by the resin molded part is moved to the resin cured part, and curing is completed by the resin cured part. A device for manufacturing a thermosetting resin molded article, comprising: a sealed object conveying means for extracting a sealed resin sealed body.
【請求項3】 流動状態の熱硬化性樹脂を注入して成形
を行なう樹脂成形部を有した樹脂成形用金型と、前記熱
硬化性樹脂の硬化反応を完結させる樹脂硬化部を有した
樹脂硬化用金型を、分離して隣り合う位置に配置し、 前記各金型を開いた状態で、前記樹脂成形部に被封止体
を投入し、前記樹脂成形部で半硬化した半硬化封止体を
前記樹脂硬化部へ移動し、前記樹脂硬化部で硬化を完了
した樹脂封止体を取出し、 前記各金型を閉じた状態で、前記樹脂成形部に投入した
被封止体に樹脂成形し、前記樹脂硬化部に投入した半硬
化封止体の硬化を完了することを特徴とする熱硬化性樹
脂成形品の製造方法。
3. A resin molding die having a resin molding portion for injecting and molding a thermosetting resin in a flowing state, and a resin having a resin curing portion for completing a curing reaction of the thermosetting resin. The curing molds are separated and arranged at adjacent positions, and in a state where the respective molds are opened, an object to be sealed is put into the resin molding portion, and a semi-cured seal semi-cured in the resin molding portion. The stopper is moved to the resin-cured portion, and the resin-encapsulated body that has been completely cured at the resin-cured portion is taken out. A method for producing a thermosetting resin molded product, which comprises molding and curing the semi-cured sealing body put into the resin curing section.
【請求項4】 流動状態の熱硬化性樹脂を注入して成形
を行なう樹脂成形部を有した樹脂成形用金型と、 前記樹脂成形用金型の隣り合う位置に分離して配置し前
記熱硬化性樹脂の硬化反応を完結させる樹脂硬化部を有
した樹脂硬化用金型と、 前記各金型を開いた状態で、前記樹脂成形部に被封止体
を投入し、前記樹脂成形部で半硬化した半硬化封止体を
前記樹脂硬化部へ移動し、前記樹脂硬化部で硬化を完了
した樹脂封止体を取出す被封止体搬送手段とを備えた熱
硬化性樹脂成形品の製造装置。
4. A resin molding die having a resin molding portion for injecting and molding a thermosetting resin in a flowing state, and a thermosetting resin which is separately arranged at a position adjacent to the resin molding die. A resin curing mold having a resin curing section that completes the curing reaction of the curable resin, and in a state where each of the molds is opened, an object to be sealed is put into the resin molding section, and the resin molding section Production of a thermosetting resin molded article comprising: a semi-cured semi-cured sealed body that is moved to the resin cured section, and a sealed body transporting unit that takes out the resin sealed body that has been completely cured in the resin cured section. apparatus.
【請求項5】 金型のプランジャ内部およびカル接触部
近傍に温度調整装置を内蔵し、樹脂を温度調整しながら
硬化,圧縮することを特徴とする請求項1または請求項
3記載の熱硬化性樹脂成形品の製造方法。
5. The thermosetting resin according to claim 1, wherein a temperature adjusting device is incorporated inside the plunger of the mold and in the vicinity of the cull contact portion, and the resin is cured and compressed while adjusting the temperature. Manufacturing method of resin molded product.
【請求項6】 金型のプランジャ内部およびカル接触部
近傍に温度調整装置を内蔵した請求項2または請求項4
記載の熱硬化性樹脂成形品の製造装置。
6. A temperature adjusting device built in the plunger of the mold and near the cull contact portion.
An apparatus for manufacturing a thermosetting resin molded product according to the above.
【請求項7】 樹脂硬化部に、半硬化封止体に接触し前
記半硬化封止体の表面性状を維持可能な剛性を有した高
熱伝導性の接触部材と、前記接触部材を前記半硬化封止
体に接触させる高熱伝導性の弾性保持部材を設け、前記
接触部材が前記半硬化封止体の硬化反応促進に伴う体積
収縮に追従することを特徴とする請求項1または請求項
3記載の熱硬化性樹脂成形品の製造方法。
7. A highly heat-conductive contact member having a rigidity capable of contacting the semi-cured sealing body and maintaining the surface properties of the semi-cured sealing body, and the semi-cured resin member. The elastic holding member having high thermal conductivity to be brought into contact with the sealing body is provided, and the contact member follows volume shrinkage accompanying acceleration of a curing reaction of the semi-cured sealing body. Method for producing a thermosetting resin molded article.
【請求項8】 樹脂硬化部に、半硬化封止体に接触し前
記半硬化封止体の表面性状を維持可能な剛性を有した高
熱伝導性の接触部材と、前記半硬化封止体の硬化反応促
進に伴う体積収縮に追従しながら前記接触部材を前記半
硬化封止体に接触させる高熱伝導性の弾性保持部材を設
けたことを特徴とする請求項2または請求項4記載の熱
硬化性樹脂成形品の製造装置。
8. A highly heat-conductive contact member having rigidity capable of contacting the semi-cured sealing body and maintaining the surface properties of the semi-cured sealing body, 5. The thermosetting device according to claim 2, further comprising a highly heat-conductive elastic holding member for bringing the contact member into contact with the semi-cured sealing body while following the volume contraction accompanying the acceleration of the curing reaction. Manufacturing equipment for conductive resin molded products.
【請求項9】 被封止体の設置間隔の倍数の送り量でリ
ードフレームを搬送することを特徴とする請求項1また
は請求項3記載の熱硬化性樹脂成形品の製造方法。
9. The method for producing a thermosetting resin molded product according to claim 1, wherein the lead frame is transported by a feed amount that is a multiple of an installation interval of the object to be sealed.
【請求項10】 隣り合う樹脂成形部と樹脂硬化部の距
離を、リードフレームの被封止体の設置間隔の倍数とし
たことを特徴とする請求項2または請求項4記載の熱硬
化性樹脂成形品の製造装置。
10. The thermosetting resin according to claim 2, wherein the distance between the adjacent resin molded portion and the cured resin portion is a multiple of the installation interval of the sealed body of the lead frame. Equipment for manufacturing molded products.
【請求項11】 リードフレームがフープ送り機構によ
り連続的に搬送されることを特徴とする請求項1または
請求項3記載の熱硬化性樹脂成形品の製造方法。
11. The method for producing a thermosetting resin molded product according to claim 1, wherein the lead frame is continuously conveyed by a hoop feed mechanism.
【請求項12】 リードフレームがフープ送り機構によ
り連続的に搬送されることを特徴とする請求項2または
請求項4記載の熱硬化性樹脂成形品の製造装置。
12. The thermosetting resin molded product manufacturing apparatus according to claim 2, wherein the lead frame is continuously conveyed by a hoop feed mechanism.
【請求項13】 流動状態の熱硬化性樹脂を注入して成
形を行なう樹脂成形部と、前記熱硬化性樹脂の硬化反応
を完結させる樹脂硬化部とを隣接して形成してなる金型
装置。
13. A mold apparatus in which a resin molding section for injecting and molding a thermosetting resin in a flowing state and a resin curing section for completing a curing reaction of the thermosetting resin are formed adjacent to each other. .
【請求項14】 流動状態の熱硬化性樹脂を注入して成
形を行なう樹脂成形部を有した樹脂成形用金型と、前記
樹脂成形用金型の隣り合う位置に分離して配置し前記熱
硬化性樹脂の硬化反応を完結させる樹脂硬化部を有した
樹脂硬化用金型とを備えた金型装置。
14. A resin molding die having a resin molding portion for injecting and molding a thermosetting resin in a fluid state, and the thermosetting resin which is separately arranged at a position adjacent to the resin molding die. A mold apparatus comprising: a resin curing mold having a resin curing section for completing a curing reaction of a curable resin.
JP20491598A 1998-07-21 1998-07-21 Method and apparatus for manufacture of thermosetting resin molded product, and mold assembly Pending JP2000037745A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20491598A JP2000037745A (en) 1998-07-21 1998-07-21 Method and apparatus for manufacture of thermosetting resin molded product, and mold assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20491598A JP2000037745A (en) 1998-07-21 1998-07-21 Method and apparatus for manufacture of thermosetting resin molded product, and mold assembly

Publications (1)

Publication Number Publication Date
JP2000037745A true JP2000037745A (en) 2000-02-08

Family

ID=16498494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20491598A Pending JP2000037745A (en) 1998-07-21 1998-07-21 Method and apparatus for manufacture of thermosetting resin molded product, and mold assembly

Country Status (1)

Country Link
JP (1) JP2000037745A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101583475B (en) * 2006-12-05 2014-09-10 贝斯荷兰有限公司 Method and device for encapsulating electronic components, wherein the encapsulating material is cooled
KR20190015091A (en) * 2017-08-04 2019-02-13 토와 가부시기가이샤 Resin molding apparatus and method for manufacturing resin molded article

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101583475B (en) * 2006-12-05 2014-09-10 贝斯荷兰有限公司 Method and device for encapsulating electronic components, wherein the encapsulating material is cooled
KR20190015091A (en) * 2017-08-04 2019-02-13 토와 가부시기가이샤 Resin molding apparatus and method for manufacturing resin molded article
KR102266607B1 (en) 2017-08-04 2021-06-18 토와 가부시기가이샤 Resin molding apparatus and method for manufacturing resin molded article

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