JP1648531S - - Google Patents
Info
- Publication number
- JP1648531S JP1648531S JPD2019-1458F JP2019001458F JP1648531S JP 1648531 S JP1648531 S JP 1648531S JP 2019001458 F JP2019001458 F JP 2019001458F JP 1648531 S JP1648531 S JP 1648531S
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2019-1458F JP1648531S (ko) | 2019-01-28 | 2019-01-28 | |
| TW108303614F TWD203444S (zh) | 2019-01-28 | 2019-06-19 | 基板處理裝置用氣體導入管 |
| US29/699,539 USD901564S1 (en) | 2019-01-28 | 2019-07-26 | Gas inlet attachment for wafer processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2019-1458F JP1648531S (ko) | 2019-01-28 | 2019-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1648531S true JP1648531S (ko) | 2019-12-23 |
Family
ID=68916739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JPD2019-1458F Active JP1648531S (ko) | 2019-01-28 | 2019-01-28 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD901564S1 (ko) |
| JP (1) | JP1648531S (ko) |
| TW (1) | TWD203444S (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD964443S1 (en) | 2020-08-18 | 2022-09-20 | Kokusai Electric Corporation | Gas inlet attachment for wafer processing apparatus |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1624352S (ko) * | 2018-07-19 | 2019-02-12 | ||
| JP1651622S (ko) * | 2019-07-17 | 2020-01-27 | ||
| JP1672083S (ko) * | 2019-11-13 | 2020-11-09 | ||
| JP1672164S (ko) * | 2020-03-25 | 2020-11-09 | ||
| JP1684258S (ko) | 2020-07-27 | 2021-04-26 | ||
| USD983151S1 (en) * | 2020-09-09 | 2023-04-11 | Kokusai Electric Corporation | Exhaust liner for reaction tube |
| JP1700780S (ko) | 2021-03-22 | 2021-11-29 | ||
| TWD223988S (zh) | 2022-03-03 | 2023-03-01 | 家登精密工業股份有限公司 | 氣匣 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD326272S (en) * | 1988-07-25 | 1992-05-19 | Tel Sagami Limited | Heat insulating cylinder for thermal treatment of semiconductor wafers |
| USD326273S (en) * | 1988-07-25 | 1992-05-19 | Tel Sagami Limited | Heat insulating cylinder for thermal treatment of semiconductor wafers |
| KR100500246B1 (ko) * | 2003-04-09 | 2005-07-11 | 삼성전자주식회사 | 가스공급장치 |
| JP5044931B2 (ja) * | 2005-10-31 | 2012-10-10 | 東京エレクトロン株式会社 | ガス供給装置及び基板処理装置 |
| CN100451163C (zh) * | 2006-10-18 | 2009-01-14 | 中微半导体设备(上海)有限公司 | 用于半导体工艺件处理反应器的气体分布装置及其反应器 |
| JP2009239082A (ja) * | 2008-03-27 | 2009-10-15 | Tokyo Electron Ltd | ガス供給装置、処理装置及び処理方法 |
| JP5292160B2 (ja) * | 2009-03-31 | 2013-09-18 | 東京エレクトロン株式会社 | ガス流路構造体及び基板処理装置 |
| US10683571B2 (en) * | 2014-02-25 | 2020-06-16 | Asm Ip Holding B.V. | Gas supply manifold and method of supplying gases to chamber using same |
| US20150348755A1 (en) * | 2014-05-29 | 2015-12-03 | Charm Engineering Co., Ltd. | Gas distribution apparatus and substrate processing apparatus including same |
| JP6578243B2 (ja) * | 2015-07-17 | 2019-09-18 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | ガス供給ノズル、基板処理装置、半導体装置の製造方法およびプログラム |
| TWD177995S (zh) * | 2015-11-18 | 2016-09-01 | Ａｓｍ知識產權私人控股有限公司 | 用於半導體製造設備之氣體供應板 |
| TWD178424S (zh) * | 2016-01-08 | 2016-09-21 | Ａｓｍ知識產權私人控股有限公司 | 用於半導體製造設備的氣流控制板 |
| KR102613349B1 (ko) * | 2016-08-25 | 2023-12-14 | 에이에스엠 아이피 홀딩 비.브이. | 배기 장치 및 이를 이용한 기판 가공 장치와 박막 제조 방법 |
| JP6710134B2 (ja) * | 2016-09-27 | 2020-06-17 | 東京エレクトロン株式会社 | ガス導入機構及び処理装置 |
| JP6550029B2 (ja) | 2016-09-28 | 2019-07-24 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板処理装置、ノズル基部および半導体装置の製造方法 |
| JP6737139B2 (ja) * | 2016-11-14 | 2020-08-05 | 東京エレクトロン株式会社 | ガスインジェクタ、及び縦型熱処理装置 |
| KR102546317B1 (ko) * | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기체 공급 유닛 및 이를 포함하는 기판 처리 장치 |
-
2019
- 2019-01-28 JP JPD2019-1458F patent/JP1648531S/ja active Active
- 2019-06-19 TW TW108303614F patent/TWD203444S/zh unknown
- 2019-07-26 US US29/699,539 patent/USD901564S1/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD964443S1 (en) | 2020-08-18 | 2022-09-20 | Kokusai Electric Corporation | Gas inlet attachment for wafer processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| USD901564S1 (en) | 2020-11-10 |
| TWD203444S (zh) | 2020-03-21 |