ITUB20156035A1 - FLUID EJECTION DEVICE WITH RESTRING CLOG, AND METHOD OF MANUFACTURE OF THE SAME - Google Patents

FLUID EJECTION DEVICE WITH RESTRING CLOG, AND METHOD OF MANUFACTURE OF THE SAME

Info

Publication number
ITUB20156035A1
ITUB20156035A1 ITUB2015A006035A ITUB20156035A ITUB20156035A1 IT UB20156035 A1 ITUB20156035 A1 IT UB20156035A1 IT UB2015A006035 A ITUB2015A006035 A IT UB2015A006035A IT UB20156035 A ITUB20156035 A IT UB20156035A IT UB20156035 A1 ITUB20156035 A1 IT UB20156035A1
Authority
IT
Italy
Prior art keywords
restring
clog
manufacture
same
fluid ejection
Prior art date
Application number
ITUB2015A006035A
Other languages
English (en)
Inventor
Domenico Giusti
Lorenzo Colombo
Carlo Luigi Prelini
Mauro Cattaneo
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITUB2015A006035A priority Critical patent/ITUB20156035A1/it
Publication of ITUB20156035A1 publication Critical patent/ITUB20156035A1/it

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00Arrangements for controlling delivery; Arrangements for controlling the spray area
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1623Production of nozzles manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1626Production of nozzles manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1626Production of nozzles manufacturing processes etching
    • B41J2/1628Production of nozzles manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1626Production of nozzles manufacturing processes etching
    • B41J2/1629Production of nozzles manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1631Production of nozzles manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1642Production of nozzles manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14411Groove in the nozzle plate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/12Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
ITUB2015A006035A 2015-11-30 2015-11-30 FLUID EJECTION DEVICE WITH RESTRING CLOG, AND METHOD OF MANUFACTURE OF THE SAME ITUB20156035A1 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ITUB2015A006035A ITUB20156035A1 (it) 2015-11-30 2015-11-30 FLUID EJECTION DEVICE WITH RESTRING CLOG, AND METHOD OF MANUFACTURE OF THE SAME

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
ITUB2015A006035A ITUB20156035A1 (it) 2015-11-30 2015-11-30 FLUID EJECTION DEVICE WITH RESTRING CLOG, AND METHOD OF MANUFACTURE OF THE SAME
EP16175467.6A EP3173235B1 (en) 2015-11-30 2016-06-21 Fluid ejection device with restriction channel, and manufacturing method thereof
US15/191,154 US9744765B2 (en) 2015-11-30 2016-06-23 Fluid ejection device with restriction channel, and manufacturing method thereof
CN201610490850.3A CN106807568B (zh) 2015-11-30 2016-06-28 具有限制通道的流体喷射设备及其制造方法
CN201620658386.XU CN206121999U (zh) 2015-11-30 2016-06-28 流体喷射设备

Publications (1)

Publication Number Publication Date
ITUB20156035A1 true ITUB20156035A1 (it) 2017-05-30

Family

ID=55410134

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUB2015A006035A ITUB20156035A1 (it) 2015-11-30 2015-11-30 FLUID EJECTION DEVICE WITH RESTRING CLOG, AND METHOD OF MANUFACTURE OF THE SAME

Country Status (4)

Country Link
US (1) US9744765B2 (it)
EP (1) EP3173235B1 (it)
CN (2) CN106807568B (it)
IT (1) ITUB20156035A1 (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITUB20156035A1 (it) * 2015-11-30 2017-05-30 St Microelectronics Srl FLUID EJECTION DEVICE WITH RESTRING CLOG, AND METHOD OF MANUFACTURE OF THE SAME
IT201700019431A1 (it) 2017-02-21 2018-08-21 St Microelectronics Srl MICROFLUID MEMS PRINTING DEVICE FOR PIEZOELECTRIC IMPLEMENTATION
JP2019005988A (ja) * 2017-06-23 2019-01-17 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
IT201800001152A1 (it) 2018-01-17 2019-07-17 St Microelectronics Srl MANUFACTURING METHOD OF A FLUID EJECTION DEVICE WITH IMPROVED RESONANCE FREQUENCY AND FLUID EJECTION SPEED, AND FLUID EJECTION DEVICE
IT201800003552A1 (it) * 2018-03-14 2019-09-14 St Microelectronics Srl Modulo valvola piezoelettrico, metodo di fabbricazione del modulo valvola, metodo di funzionamento del modulo valvola e dispositivo di ausilio alla respirazione includente uno o piu' moduli valvola
JP2019166670A (ja) * 2018-03-22 2019-10-03 ブラザー工業株式会社 ヘッド
US20200369029A1 (en) * 2019-05-24 2020-11-26 Stmicroelectronics S.R.L. Method of manufacturing a stacked piezoelectric transducer, and piezoelectric transducer

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1070590A2 (en) * 1999-07-23 2001-01-24 Konica Corporation Ink jet head and production method of the same
US20020056698A1 (en) * 1997-05-14 2002-05-16 Tomohiro Makigaki Ejection device, inkjet head, method of forming nozzle for ejection device and method of manufacturing inkjet head
US20090009564A1 (en) * 2007-07-06 2009-01-08 Seiko Epson Corporation Electrostatic actuator, droplet discharge head, manufacturing method of electrostatic actuator and manufacturing method of droplet discharge head
US20130135395A1 (en) * 2011-11-30 2013-05-30 Samsung Electro-Mechanics Co., Ltd. Silicon substrate, method of manufacturing the same, and inkjet print head
US20140078224A1 (en) * 2012-09-20 2014-03-20 Samsung Electro-Mechanics Co., Ltd. Inkjet print head

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110050974A (ko) * 2009-11-09 2011-05-17 삼성전기주식회사 잉크젯 헤드
US8991954B2 (en) 2011-08-31 2015-03-31 Hewlett-Packard Development Company, L.P. Fluid ejection device with fluid displacement actuator and related methods
JP6056329B2 (ja) * 2012-09-27 2017-01-11 セイコーエプソン株式会社 液滴吐出ヘッド、印刷装置および液滴吐出ヘッドの製造方法
ITUB20156035A1 (it) * 2015-11-30 2017-05-30 St Microelectronics Srl FLUID EJECTION DEVICE WITH RESTRING CLOG, AND METHOD OF MANUFACTURE OF THE SAME

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020056698A1 (en) * 1997-05-14 2002-05-16 Tomohiro Makigaki Ejection device, inkjet head, method of forming nozzle for ejection device and method of manufacturing inkjet head
EP1070590A2 (en) * 1999-07-23 2001-01-24 Konica Corporation Ink jet head and production method of the same
US20090009564A1 (en) * 2007-07-06 2009-01-08 Seiko Epson Corporation Electrostatic actuator, droplet discharge head, manufacturing method of electrostatic actuator and manufacturing method of droplet discharge head
US20130135395A1 (en) * 2011-11-30 2013-05-30 Samsung Electro-Mechanics Co., Ltd. Silicon substrate, method of manufacturing the same, and inkjet print head
US20140078224A1 (en) * 2012-09-20 2014-03-20 Samsung Electro-Mechanics Co., Ltd. Inkjet print head

Also Published As

Publication number Publication date
US20170151784A1 (en) 2017-06-01
US9744765B2 (en) 2017-08-29
CN206121999U (zh) 2017-04-26
EP3173235A1 (en) 2017-05-31
CN106807568B (zh) 2019-11-22
EP3173235B1 (en) 2019-04-03
CN106807568A (zh) 2017-06-09

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