IT960799B - Microscopio a scansione ad emissione di campo a bassa tensione - Google Patents
Microscopio a scansione ad emissione di campo a bassa tensioneInfo
- Publication number
- IT960799B IT960799B IT50582/72A IT5058272A IT960799B IT 960799 B IT960799 B IT 960799B IT 50582/72 A IT50582/72 A IT 50582/72A IT 5058272 A IT5058272 A IT 5058272A IT 960799 B IT960799 B IT 960799B
- Authority
- IT
- Italy
- Prior art keywords
- low voltage
- field emission
- scanning microscope
- emission scanning
- voltage field
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17181571A | 1971-08-16 | 1971-08-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT960799B true IT960799B (it) | 1973-11-30 |
Family
ID=22625237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT50582/72A IT960799B (it) | 1971-08-16 | 1972-05-29 | Microscopio a scansione ad emissione di campo a bassa tensione |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS568465B2 (enrdf_load_stackoverflow) |
| DD (1) | DD97977A5 (enrdf_load_stackoverflow) |
| IT (1) | IT960799B (enrdf_load_stackoverflow) |
| SE (1) | SE377861B (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5444552B2 (enrdf_load_stackoverflow) * | 1974-09-20 | 1979-12-26 | ||
| SE427738B (sv) * | 1981-02-11 | 1983-05-02 | Siporex Int Ab | Forfarande vid bortforslande av i vatten uppslamningsbart material fran en yta, jemte anordning for anvendnig vid forfarandet |
| JPS58169855A (ja) * | 1982-03-31 | 1983-10-06 | Jeol Ltd | イオン銃 |
-
1972
- 1972-05-29 IT IT50582/72A patent/IT960799B/it active
- 1972-07-04 JP JP6640672A patent/JPS568465B2/ja not_active Expired
- 1972-08-04 DD DD164863A patent/DD97977A5/xx unknown
- 1972-08-14 SE SE7210514A patent/SE377861B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SE377861B (enrdf_load_stackoverflow) | 1975-07-28 |
| JPS4829368A (enrdf_load_stackoverflow) | 1973-04-18 |
| JPS568465B2 (enrdf_load_stackoverflow) | 1981-02-24 |
| DD97977A5 (enrdf_load_stackoverflow) | 1973-05-20 |
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