IT201700034134A1 - Dispositivo di eiezione di fluido con elemento di riduzione del crosstalk, testina di stampa includente il dispositivo di eiezione, stampante includente la testina di stampa e procedimento di fabbricazione del dispositivo di eiezione - Google Patents

Dispositivo di eiezione di fluido con elemento di riduzione del crosstalk, testina di stampa includente il dispositivo di eiezione, stampante includente la testina di stampa e procedimento di fabbricazione del dispositivo di eiezione

Info

Publication number
IT201700034134A1
IT201700034134A1 IT102017000034134A IT201700034134A IT201700034134A1 IT 201700034134 A1 IT201700034134 A1 IT 201700034134A1 IT 102017000034134 A IT102017000034134 A IT 102017000034134A IT 201700034134 A IT201700034134 A IT 201700034134A IT 201700034134 A1 IT201700034134 A1 IT 201700034134A1
Authority
IT
Italy
Prior art keywords
print head
ejection device
fluid
manufacturing
reduction element
Prior art date
Application number
IT102017000034134A
Other languages
English (en)
Inventor
Domenico Giusti
Marco Ferrera
Carlo Luigi Prelini
Simon Dodd
Original Assignee
St Microelectronics Srl
St Microelectronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl, St Microelectronics Inc filed Critical St Microelectronics Srl
Priority to IT102017000034134A priority Critical patent/IT201700034134A1/it
Priority to EP17187830.9A priority patent/EP3381690B1/en
Priority to CN201710907948.9A priority patent/CN108656747B/zh
Priority to CN201721268995.5U priority patent/CN207481454U/zh
Priority to US15/884,186 priority patent/US10493758B2/en
Publication of IT201700034134A1 publication Critical patent/IT201700034134A1/it
Priority to US16/676,070 priority patent/US11084283B2/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14209Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/055Devices for absorbing or preventing back-pressure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/1609Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/18Ink recirculation systems
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14209Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B41J2002/14217Multi layer finger type piezoelectric element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14346Ejection by pressure produced by thermal deformation of ink chamber, e.g. buckling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14403Structure thereof only for on-demand ink jet heads including a filter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14419Manifold
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/12Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
IT102017000034134A 2017-03-28 2017-03-28 Dispositivo di eiezione di fluido con elemento di riduzione del crosstalk, testina di stampa includente il dispositivo di eiezione, stampante includente la testina di stampa e procedimento di fabbricazione del dispositivo di eiezione IT201700034134A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT102017000034134A IT201700034134A1 (it) 2017-03-28 2017-03-28 Dispositivo di eiezione di fluido con elemento di riduzione del crosstalk, testina di stampa includente il dispositivo di eiezione, stampante includente la testina di stampa e procedimento di fabbricazione del dispositivo di eiezione
EP17187830.9A EP3381690B1 (en) 2017-03-28 2017-08-24 Fluid ejection device having a crosstalk reduction element, printhead including the ejection device, printer including the printhead, and method for manufacturing the ejection device
CN201710907948.9A CN108656747B (zh) 2017-03-28 2017-09-29 流体喷射装置、打印头、打印机和用于制造喷射装置的方法
CN201721268995.5U CN207481454U (zh) 2017-03-28 2017-09-29 流体喷射装置、打印头和打印机
US15/884,186 US10493758B2 (en) 2017-03-28 2018-01-30 Fluid ejection device and printhead
US16/676,070 US11084283B2 (en) 2017-03-28 2019-11-06 Methods of forming and using fluid ejection devices and printheads

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000034134A IT201700034134A1 (it) 2017-03-28 2017-03-28 Dispositivo di eiezione di fluido con elemento di riduzione del crosstalk, testina di stampa includente il dispositivo di eiezione, stampante includente la testina di stampa e procedimento di fabbricazione del dispositivo di eiezione

Publications (1)

Publication Number Publication Date
IT201700034134A1 true IT201700034134A1 (it) 2018-09-28

Family

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IT102017000034134A IT201700034134A1 (it) 2017-03-28 2017-03-28 Dispositivo di eiezione di fluido con elemento di riduzione del crosstalk, testina di stampa includente il dispositivo di eiezione, stampante includente la testina di stampa e procedimento di fabbricazione del dispositivo di eiezione

Country Status (4)

Country Link
US (2) US10493758B2 (it)
EP (1) EP3381690B1 (it)
CN (2) CN108656747B (it)
IT (1) IT201700034134A1 (it)

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IT201700034134A1 (it) * 2017-03-28 2018-09-28 St Microelectronics Srl Dispositivo di eiezione di fluido con elemento di riduzione del crosstalk, testina di stampa includente il dispositivo di eiezione, stampante includente la testina di stampa e procedimento di fabbricazione del dispositivo di eiezione
JP7152136B2 (ja) * 2017-07-10 2022-10-12 エスアイアイ・プリンテック株式会社 流路部材、液体噴射ヘッド及び液体噴射装置
JP7008284B2 (ja) * 2018-03-30 2022-01-25 ブラザー工業株式会社 液体吐出装置
US11104128B2 (en) 2018-12-21 2021-08-31 Seiko Epson Corporation Liquid ejecting head and liquid ejecting system
JP7287042B2 (ja) * 2018-12-21 2023-06-06 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射システム
CN111347786B (zh) 2018-12-21 2022-09-13 精工爱普生株式会社 液体喷射头以及液体喷射装置
US11007789B2 (en) 2018-12-21 2021-05-18 Seiko Epson Corporation Liquid ejecting head and liquid ejecting apparatus
JP7167697B2 (ja) 2018-12-21 2022-11-09 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP7255181B2 (ja) * 2018-12-28 2023-04-11 セイコーエプソン株式会社 液体吐出装置
JP7247635B2 (ja) * 2019-02-15 2023-03-29 セイコーエプソン株式会社 液体噴射ヘッド、及び、液体噴射装置
IT201900005794A1 (it) 2019-04-15 2020-10-15 St Microelectronics Srl Dispositivo di eiezione di fluido con ridotto numero di componenti e metodo di fabbricazione del dispositivo di eiezione di fluido
IT201900007196A1 (it) * 2019-05-24 2020-11-24 St Microelectronics Srl Dispositivo microfluidico per l'espulsione continua di fluidi, in particolare per la stampa con inchiostri, e relativo procedimento di fabbricazione
DE102020115729A1 (de) * 2019-07-11 2021-01-14 Heidelberger Druckmaschinen Aktiengesellschaft Vorrichtung zur Versorgung eines Tinten-Druckkopfs einer Tinten-Druckmaschine mit flüssiger Tinte
JP2021041569A (ja) * 2019-09-09 2021-03-18 東芝テック株式会社 液体吐出ヘッド及び液体吐出記録装置
JP7434854B2 (ja) 2019-12-03 2024-02-21 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射システム
EP4078672A1 (en) * 2019-12-17 2022-10-26 Ecole Polytechnique Federale De Lausanne (Epfl) Integrated electronic device with embedded microchannels and a method for producing thereof

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US20040056937A1 (en) * 2002-09-19 2004-03-25 Brother Kogyo Kabushiki Kaisha Ink-jet printhead
US20040096964A1 (en) * 2000-02-11 2004-05-20 Stmicroelectronics S.R.1. Integrated device for amplification and other biological tests, and manufacturing process thereof
US20070052780A1 (en) * 2005-09-05 2007-03-08 Brother Kogyo Kabushiki Kaisha Ink-Jet Recording Apparatus
US20090102907A1 (en) * 2006-04-26 2009-04-23 Kunihiro Yamanaka Image forming apparatus
US7537319B2 (en) * 2005-02-17 2009-05-26 Samsung Electronics Co., Ltd. Piezoelectric inkjet printhead and method of manufacturing the same
JP2010188547A (ja) * 2009-02-16 2010-09-02 Ricoh Co Ltd 液滴吐出ヘッドならびにそれを備えた液滴吐出装置、画像形成装置
US20120018819A1 (en) * 2010-07-26 2012-01-26 Stmicroelectronics S.R.L. Process for manufacturing a micromechanical structure having a buried area provided with a filter
US20130115724A1 (en) * 2011-11-04 2013-05-09 Daniel A. Kearl Method of fabricating an integrated orifice plate and cap structure
US20140313264A1 (en) * 2013-04-18 2014-10-23 Stmicroelectronics S.R.L. Method for manufacturing a fluid ejection device and fluid ejection device
US20150077469A1 (en) * 2013-09-13 2015-03-19 Ricoh Company, Ltd. Droplet discharge head and image forming apparatus including same

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DE602004027597D1 (de) 2004-03-19 2010-07-22 St Microelectronics Srl Halbleiterdrucksensor und Verfahren zur Herstellung
JP4581600B2 (ja) * 2004-09-28 2010-11-17 ブラザー工業株式会社 インクジェットプリンタ用ヘッド
US7637601B2 (en) * 2006-08-18 2009-12-29 Seiko Epson Corporation Droplet discharging head, droplet discharging apparatus, method for manufacturing droplet discharging head and method for manufacturing droplet discharging apparatus
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IT201700034134A1 (it) * 2017-03-28 2018-09-28 St Microelectronics Srl Dispositivo di eiezione di fluido con elemento di riduzione del crosstalk, testina di stampa includente il dispositivo di eiezione, stampante includente la testina di stampa e procedimento di fabbricazione del dispositivo di eiezione

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US20040096964A1 (en) * 2000-02-11 2004-05-20 Stmicroelectronics S.R.1. Integrated device for amplification and other biological tests, and manufacturing process thereof
US20040056937A1 (en) * 2002-09-19 2004-03-25 Brother Kogyo Kabushiki Kaisha Ink-jet printhead
US7537319B2 (en) * 2005-02-17 2009-05-26 Samsung Electronics Co., Ltd. Piezoelectric inkjet printhead and method of manufacturing the same
US20070052780A1 (en) * 2005-09-05 2007-03-08 Brother Kogyo Kabushiki Kaisha Ink-Jet Recording Apparatus
US20090102907A1 (en) * 2006-04-26 2009-04-23 Kunihiro Yamanaka Image forming apparatus
JP2010188547A (ja) * 2009-02-16 2010-09-02 Ricoh Co Ltd 液滴吐出ヘッドならびにそれを備えた液滴吐出装置、画像形成装置
US20120018819A1 (en) * 2010-07-26 2012-01-26 Stmicroelectronics S.R.L. Process for manufacturing a micromechanical structure having a buried area provided with a filter
US20130115724A1 (en) * 2011-11-04 2013-05-09 Daniel A. Kearl Method of fabricating an integrated orifice plate and cap structure
US20140313264A1 (en) * 2013-04-18 2014-10-23 Stmicroelectronics S.R.L. Method for manufacturing a fluid ejection device and fluid ejection device
US20150077469A1 (en) * 2013-09-13 2015-03-19 Ricoh Company, Ltd. Droplet discharge head and image forming apparatus including same

Also Published As

Publication number Publication date
CN108656747B (zh) 2021-03-19
CN207481454U (zh) 2018-06-12
CN108656747A (zh) 2018-10-16
EP3381690B1 (en) 2022-04-20
US11084283B2 (en) 2021-08-10
US20200070511A1 (en) 2020-03-05
US10493758B2 (en) 2019-12-03
EP3381690A1 (en) 2018-10-03
US20180281402A1 (en) 2018-10-04

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