IT1392990B1 - Sistema di inversione substrato - Google Patents

Sistema di inversione substrato

Info

Publication number
IT1392990B1
IT1392990B1 ITUD2009A000041A ITUD20090041A IT1392990B1 IT 1392990 B1 IT1392990 B1 IT 1392990B1 IT UD2009A000041 A ITUD2009A000041 A IT UD2009A000041A IT UD20090041 A ITUD20090041 A IT UD20090041A IT 1392990 B1 IT1392990 B1 IT 1392990B1
Authority
IT
Italy
Prior art keywords
inversion system
substrate inversion
substrate
inversion
Prior art date
Application number
ITUD2009A000041A
Other languages
English (en)
Inventor
Andrea Baccini
Marco Galiazzo
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to ITUD2009A000041A priority Critical patent/IT1392990B1/it
Priority to US13/202,956 priority patent/US20120037475A1/en
Priority to PCT/EP2009/056328 priority patent/WO2010094346A1/en
Priority to CN2009801575963A priority patent/CN102325709A/zh
Priority to EP09779537A priority patent/EP2398722A1/en
Priority to TW099105058A priority patent/TW201036097A/zh
Publication of ITUD20090041A1 publication Critical patent/ITUD20090041A1/it
Application granted granted Critical
Publication of IT1392990B1 publication Critical patent/IT1392990B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Photovoltaic Devices (AREA)
  • Bipolar Transistors (AREA)
ITUD2009A000041A 2009-02-23 2009-02-23 Sistema di inversione substrato IT1392990B1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
ITUD2009A000041A IT1392990B1 (it) 2009-02-23 2009-02-23 Sistema di inversione substrato
US13/202,956 US20120037475A1 (en) 2009-02-23 2009-05-25 Substrate inverting system
PCT/EP2009/056328 WO2010094346A1 (en) 2009-02-23 2009-05-25 Substrate inverting system
CN2009801575963A CN102325709A (zh) 2009-02-23 2009-05-25 基材反转系统
EP09779537A EP2398722A1 (en) 2009-02-23 2009-05-25 Substrate inverting system
TW099105058A TW201036097A (en) 2009-02-23 2010-02-22 Substrate inverting system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUD2009A000041A IT1392990B1 (it) 2009-02-23 2009-02-23 Sistema di inversione substrato

Publications (2)

Publication Number Publication Date
ITUD20090041A1 ITUD20090041A1 (it) 2010-08-23
IT1392990B1 true IT1392990B1 (it) 2012-04-02

Family

ID=41395043

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUD2009A000041A IT1392990B1 (it) 2009-02-23 2009-02-23 Sistema di inversione substrato

Country Status (6)

Country Link
US (1) US20120037475A1 (it)
EP (1) EP2398722A1 (it)
CN (1) CN102325709A (it)
IT (1) IT1392990B1 (it)
TW (1) TW201036097A (it)
WO (1) WO2010094346A1 (it)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104040732A (zh) * 2012-01-03 2014-09-10 应用材料公司 钝化结晶硅太阳能电池的先进平台
GB2507057A (en) * 2012-10-17 2014-04-23 Dtg Int Gmbh Apparatus for and method of inverting workpieces
DE102013101148B4 (de) * 2013-02-05 2020-06-18 Windmöller & Hölscher Kg Vorrichtung zum Wenden eines Gegenstandes
DE102013101149A1 (de) * 2013-02-05 2014-08-21 Windmöller & Hölscher Kg Vorrichtung zum Wenden und Befördern eines Gegenstandes
BE1021860B1 (fr) * 2013-03-26 2016-01-22 Wächter Packautomatik GmbH & Co. KG Dispositif de retournement pour produit en forme de plaque, ainsi que procede de retournement
JP6244111B2 (ja) * 2013-06-04 2017-12-06 三星ダイヤモンド工業株式会社 反転装置
CN106915491B (zh) * 2015-12-28 2020-01-03 广东科达洁能股份有限公司 一种瓷砖泡沫保护板整理和包装装置
CN106276195B (zh) * 2016-08-16 2018-10-02 湖南国盛石墨科技有限公司 一种石墨烯玻璃输送带运转装置
CN106628982A (zh) * 2017-03-06 2017-05-10 常州亿晶光电科技有限公司 太阳能电池板翻转装置
JP6350714B2 (ja) * 2017-05-11 2018-07-04 三星ダイヤモンド工業株式会社 反転装置
WO2019073976A1 (ja) * 2017-10-10 2019-04-18 アイダエンジニアリング株式会社 ワーク反転装置及びプレス搬送ライン並びにワーク反転方法
CN107946224B (zh) * 2017-11-29 2019-11-29 乐山新天源太阳能科技有限公司 硅片湿刻自动上片机
CN108820885A (zh) * 2018-07-09 2018-11-16 武汉轻工大学 用于陶瓷衬垫组自动化生产的负压翻转装置及方法
TWI809155B (zh) * 2018-09-28 2023-07-21 日商三星鑽石工業股份有限公司 晶圓分斷裝置、反轉裝置及搬運系統
CN109625967B (zh) * 2018-12-28 2020-09-01 海安明光光学玻璃科技有限公司 一种玻璃生产线上玻璃片回流装置
KR20200093721A (ko) * 2019-01-28 2020-08-06 삼성디스플레이 주식회사 기판 반전 장치
WO2020178786A1 (en) * 2019-03-06 2020-09-10 Kennedy Technologies Limited Apparatus and method for inverting items
CN113874995A (zh) 2019-03-27 2021-12-31 亞斯卡瓦歐洲科技有限公司 半导体翻转器
DE102019120631A1 (de) * 2019-07-31 2021-02-04 Carl Zeiss Optotechnik GmbH Reifenwender
FR3114579B1 (fr) 2020-09-28 2022-09-23 Commissariat Energie Atomique Dispositif de retournement de plaquettes
CN112320294A (zh) * 2020-11-11 2021-02-05 中山市拓电电子科技有限公司 一种用于烟叶箱体翻转的输送装置
CN115847625B (zh) * 2022-12-16 2023-08-29 江苏迪丞光电材料有限公司 一种陶瓷自动成型生产线
CN116952947B (zh) * 2023-06-01 2024-02-23 东莞市冠超光电科技有限公司 一种手机面板瑕疵检测装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7062845B2 (en) * 1996-06-05 2006-06-20 Laservia Corporation Conveyorized blind microvia laser drilling system
EP0836370A1 (en) * 1996-10-08 1998-04-15 Takanori Tsubaki Method and system for etching substrates for printed circuit boards
JP2000263367A (ja) * 1999-03-19 2000-09-26 Sekisui Chem Co Ltd 加工装置
US20040027413A1 (en) * 2002-08-09 2004-02-12 Agfa Corporation Tractor feed imaging system and method for platesetter
US6848566B2 (en) * 2003-06-30 2005-02-01 The Procter & Gamble Company Continuously adjustable apparatus for repositioning discrete articles
EP1741525A1 (de) * 2005-07-06 2007-01-10 Trumpf Werkzeugmaschinen GmbH + Co. KG Vorrichtung zur Aufnahme von plattenförmigen Materialien
ITUD20050196A1 (it) * 2005-11-17 2007-05-18 Gisulfo Baccini Apparecchiatura per la produzione di celle fotovoltaiche sottili in silicio e di circuiti elettronici in materiale rigido e flessibile
WO2007074798A1 (ja) * 2005-12-27 2007-07-05 Sharp Kabushiki Kaisha 基板処理装置への基板搬送方法
US7572334B2 (en) * 2006-01-03 2009-08-11 Applied Materials, Inc. Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
WO2008130389A1 (en) * 2007-04-18 2008-10-30 Aquest Systems Corporation Integrated overhead transport system with stationary drive
US20110008947A1 (en) * 2009-07-13 2011-01-13 Applied Materials, Inc. Apparatus and method for performing multifunction laser processes

Also Published As

Publication number Publication date
WO2010094346A1 (en) 2010-08-26
EP2398722A1 (en) 2011-12-28
CN102325709A (zh) 2012-01-18
US20120037475A1 (en) 2012-02-16
ITUD20090041A1 (it) 2010-08-23
TW201036097A (en) 2010-10-01

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