IL99823D0 - Optical inspection method and apparatus - Google Patents

Optical inspection method and apparatus

Info

Publication number
IL99823D0
IL99823D0 IL9982391A IL9982391A IL99823D0 IL 99823 D0 IL99823 D0 IL 99823D0 IL 9982391 A IL9982391 A IL 9982391A IL 9982391 A IL9982391 A IL 9982391A IL 99823 D0 IL99823 D0 IL 99823D0
Authority
IL
Israel
Prior art keywords
apparatus
inspection method
optical inspection
optical
method
Prior art date
Application number
IL9982391A
Original Assignee
Orbot Instr Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
Priority to IL9636290A priority Critical patent/IL96362A/en
Application filed by Orbot Instr Ltd filed Critical Orbot Instr Ltd
Priority to IL9982391A priority patent/IL99823D0/en
Publication of IL99823D0 publication Critical patent/IL99823D0/en
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26322164&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IL99823(D0) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

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IL9982391A 1990-11-16 1991-10-23 Optical inspection method and apparatus IL99823D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IL9636290A IL96362A (en) 1990-11-16 1990-11-16 Optic inspection method and apparatus
IL9982391A IL99823D0 (en) 1990-11-16 1991-10-23 Optical inspection method and apparatus

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
IL9982391A IL99823D0 (en) 1990-11-16 1991-10-23 Optical inspection method and apparatus
US07/790,871 US5699447A (en) 1990-11-16 1991-11-12 Two-phase optical inspection method and apparatus for defect detection
US08/984,558 US5982921A (en) 1990-11-16 1997-12-03 Optical inspection method and apparatus
US09/298,501 US6178257B1 (en) 1990-11-16 1999-04-23 Substrate inspection method and apparatus
US09/765,995 US6952491B2 (en) 1990-11-16 2001-01-19 Optical inspection apparatus for substrate defect detection
US10/852,798 US20040263834A1 (en) 1990-11-16 2004-05-24 Optical inspection apparatus for substrate defect detection
US10/852,996 US7499583B2 (en) 1990-11-16 2004-05-24 Optical inspection method for substrate defect detection
US12/354,555 US7796807B2 (en) 1990-11-16 2009-01-15 Optical inspection apparatus for substrate defect detection

Publications (1)

Publication Number Publication Date
IL99823D0 true IL99823D0 (en) 1992-08-18

Family

ID=26322164

Family Applications (1)

Application Number Title Priority Date Filing Date
IL9982391A IL99823D0 (en) 1990-11-16 1991-10-23 Optical inspection method and apparatus

Country Status (2)

Country Link
US (7) US5699447A (en)
IL (1) IL99823D0 (en)

Families Citing this family (243)

* Cited by examiner, † Cited by third party
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