IL66295A - Interferometer system for measuring surface contours - Google Patents

Interferometer system for measuring surface contours

Info

Publication number
IL66295A
IL66295A IL66295A IL6629582A IL66295A IL 66295 A IL66295 A IL 66295A IL 66295 A IL66295 A IL 66295A IL 6629582 A IL6629582 A IL 6629582A IL 66295 A IL66295 A IL 66295A
Authority
IL
Israel
Prior art keywords
measuring surface
interferometer system
surface contours
contours
interferometer
Prior art date
Application number
IL66295A
Other languages
English (en)
Original Assignee
Itek Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Itek Corp filed Critical Itek Corp
Publication of IL66295A publication Critical patent/IL66295A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
IL66295A 1981-07-13 1982-07-12 Interferometer system for measuring surface contours IL66295A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/282,552 US4457625A (en) 1981-07-13 1981-07-13 Self calibrating contour measuring system using fringe counting interferometers

Publications (1)

Publication Number Publication Date
IL66295A true IL66295A (en) 1987-12-20

Family

ID=23082031

Family Applications (1)

Application Number Title Priority Date Filing Date
IL66295A IL66295A (en) 1981-07-13 1982-07-12 Interferometer system for measuring surface contours

Country Status (10)

Country Link
US (1) US4457625A (ja)
JP (1) JPS5866006A (ja)
BE (1) BE893811A (ja)
CA (1) CA1186893A (ja)
DE (1) DE3226005A1 (ja)
FR (1) FR2509458B1 (ja)
GB (1) GB2102574B (ja)
IL (1) IL66295A (ja)
IT (1) IT1151835B (ja)
SE (1) SE454539B (ja)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3205362A1 (de) * 1982-02-15 1983-08-25 Pfeifer, Tilo, Prof. Dr.-Ing. Raeumliches wegmesssystem
JPS60237307A (ja) * 1984-05-11 1985-11-26 Yokogawa Hewlett Packard Ltd レ−ザ測長器
US4627722A (en) * 1984-08-31 1986-12-09 Ball Corporation Method and apparatus for optically measuring three-dimensional coordinates
JPH061164B2 (ja) * 1985-01-31 1994-01-05 伍良 松本 立体形状測定装置
US4681448A (en) * 1985-03-25 1987-07-21 Ball Corporation Method and apparatus for stabilizing angle of acceptance of multiple-beam interferometer means in optical measuring system
DE3600346A1 (de) * 1986-01-08 1987-07-09 Fraunhofer Ges Forschung Verfahren zur abbildenden laserinterferometrie und laserinterferometer zur durchfuehrung des verfahrens
US4714339B2 (en) * 1986-02-28 2000-05-23 Us Commerce Three and five axis laser tracking systems
US4757379A (en) * 1986-04-14 1988-07-12 Contour Dynamics Apparatus and method for acquisition of 3D images
US4890921A (en) * 1986-08-11 1990-01-02 The Boeing Company Scanning interferometer
DE3700139A1 (de) * 1987-01-03 1988-07-14 Friedemann Stuetz Computergesteuerte koordinatenmesseinrichtung
WO1988006713A1 (en) * 1987-03-06 1988-09-07 Renishaw Plc Position determination apparatus
US5002396A (en) * 1987-03-31 1991-03-26 Kabushiki Kaisha Toshiba Displacement telemetering system
US5085502A (en) * 1987-04-30 1992-02-04 Eastman Kodak Company Method and apparatus for digital morie profilometry calibrated for accurate conversion of phase information into distance measurements in a plurality of directions
US4841460A (en) * 1987-09-08 1989-06-20 Perceptron, Inc. Method and apparatus for calibrating a non-contact gauging sensor with respect to an external coordinate system
US4866626A (en) * 1987-09-18 1989-09-12 Egli Werner H Navigation by a video-camera sensed ground array
US4790651A (en) * 1987-09-30 1988-12-13 Chesapeake Laser Systems, Inc. Tracking laser interferometer
US4840483A (en) * 1987-12-18 1989-06-20 Cincinnati Milacron Inc. Alignment tool for laser beam delivery systems and method of alignment
US4889409A (en) * 1988-02-16 1989-12-26 Ball Corporation Hemispherical retroreflector
US4902102A (en) * 1988-03-28 1990-02-20 Litton Systems, Inc. Aspheric optical test plate assembly
DE3833589C1 (en) * 1988-10-03 1990-03-15 Daimler-Benz Aktiengesellschaft, 7000 Stuttgart, De Multiple arrangement of simultaneously used laser interferometers for trilaterational determination of the position of a movable point
US4923155A (en) * 1988-12-16 1990-05-08 Andrew Dainis Target support device for calibration of cameras
US4943157A (en) * 1989-05-18 1990-07-24 Corning Incorporated Fiber optic triangulation gage
ATE119275T1 (de) * 1989-06-19 1995-03-15 Maier Kg Andreas Verfahren und einrichtung zum messen der konturen eines körpers.
DE3926438A1 (de) * 1989-08-10 1991-02-14 Fraunhofer Ges Forschung Verfahren und vorrichtung zur vermessung der bewegungsbahn eines eben oder raeumlich bewegten punktes
JPH0820228B2 (ja) * 1990-01-31 1996-03-04 住友ゴム工業株式会社 タイヤ外周面のプロファイル測定方法及びその装置
BE1003913A6 (fr) * 1990-10-29 1992-07-14 Centre Rech Metallurgique Dispositif pour mesurer la rugosite de la surface d'un produit metallique en mouvement.
DE9017069U1 (de) * 1990-12-18 1991-04-25 Köster, Gerhard, 8945 Legau Vorrichtung zum Vermessen eines Zweiradrahmens
US5221956A (en) * 1991-08-14 1993-06-22 Kustom Signals, Inc. Lidar device with combined optical sight
GB9201123D0 (en) * 1992-01-20 1992-03-11 Vernon Gauging Systems Limited Gauging apparatus
US5455670A (en) * 1993-05-27 1995-10-03 Associated Universities, Inc. Optical electronic distance measuring apparatus with movable mirror
GB9324218D0 (en) * 1993-11-25 1994-01-12 Renishaw Plc Position determination machines
US5530549A (en) * 1994-05-24 1996-06-25 Spatialmetrix Corp. Probing retroreflector and methods of measuring surfaces therewith
US5649849A (en) * 1995-03-24 1997-07-22 Eastman Kodak Company Method and apparatus for realtime monitoring and feedback control of the shape of a continuous planetary polishing surface
US7800758B1 (en) 1999-07-23 2010-09-21 Faro Laser Trackers, Llc Laser-based coordinate measuring device and laser-based method for measuring coordinates
US6299122B1 (en) 1999-09-28 2001-10-09 Northrup Grumman Corporation Spherically mounted retroreflector edge adapter
KR100365117B1 (ko) * 1999-11-10 2002-12-26 유태욱 자동차용 물체의 위치측정 방법과 장치
US6563569B2 (en) * 2000-09-25 2003-05-13 Agency Of Industrial Science & Technology, Ministry Of International Trade & Industry Laser tracking interferometric length measuring instrument and method of measuring length and coordinates using the same
DE10118392A1 (de) 2001-04-13 2002-11-07 Zeiss Carl System und Verfahren zum Bestimmen einer Position oder/und Orientierung zweier Objekte relativ zueinander sowie Strahlführungsanordnung, Interferometeranordnung und Vorrichtung zum Ändern einer optischen Weglänge zum Einsatz in einem solchen System und Verfahren
ATE519092T1 (de) 2002-01-16 2011-08-15 Faro Tech Inc Lasergestützte koordinatenmessapparatur und lasergestütztes koordinatenmessverfahren
JP4322155B2 (ja) * 2004-03-24 2009-08-26 株式会社リコー 可動物体又は静止物体の形状測定装置及び測定方法
US7835011B2 (en) * 2006-01-20 2010-11-16 General Electric Company Systems and methods for determining a position of a support
US9354043B2 (en) 2008-12-04 2016-05-31 Laura P. Solliday Methods for measuring and modeling the structural health of pressure vessels based on electronic distance measurements
US10203268B2 (en) 2008-12-04 2019-02-12 Laura P. Solliday Methods for measuring and modeling the process of prestressing concrete during tensioning/detensioning based on electronic distance measurements
DE102009015920B4 (de) 2009-03-25 2014-11-20 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
US9529083B2 (en) 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
DE102009057101A1 (de) 2009-11-20 2011-05-26 Faro Technologies, Inc., Lake Mary Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9210288B2 (en) 2009-11-20 2015-12-08 Faro Technologies, Inc. Three-dimensional scanner with dichroic beam splitters to capture a variety of signals
US9113023B2 (en) 2009-11-20 2015-08-18 Faro Technologies, Inc. Three-dimensional scanner with spectroscopic energy detector
US8630314B2 (en) * 2010-01-11 2014-01-14 Faro Technologies, Inc. Method and apparatus for synchronizing measurements taken by multiple metrology devices
US8832954B2 (en) 2010-01-20 2014-09-16 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US8898919B2 (en) 2010-01-20 2014-12-02 Faro Technologies, Inc. Coordinate measurement machine with distance meter used to establish frame of reference
WO2011090895A1 (en) * 2010-01-20 2011-07-28 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with multi-bus arm technology
US8677643B2 (en) 2010-01-20 2014-03-25 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US8875409B2 (en) 2010-01-20 2014-11-04 Faro Technologies, Inc. Coordinate measurement machines with removable accessories
US9879976B2 (en) 2010-01-20 2018-01-30 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
GB2489370B (en) 2010-01-20 2014-05-14 Faro Tech Inc Coordinate measuring machine having an illuminated probe end and method of operation
US8028432B2 (en) * 2010-01-20 2011-10-04 Faro Technologies, Inc. Mounting device for a coordinate measuring machine
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9163922B2 (en) 2010-01-20 2015-10-20 Faro Technologies, Inc. Coordinate measurement machine with distance meter and camera to determine dimensions within camera images
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US8615893B2 (en) 2010-01-20 2013-12-31 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine having integrated software controls
DE102010020925B4 (de) 2010-05-10 2014-02-27 Faro Technologies, Inc. Verfahren zum optischen Abtasten und Vermessen einer Umgebung
US9229106B2 (en) 2010-08-13 2016-01-05 Ryan Dotson Enhancement of range measurement resolution using imagery
CN103003713B (zh) 2010-09-08 2015-04-01 法罗技术股份有限公司 具有投影器的激光扫描器或激光跟踪器
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
DE102012100609A1 (de) 2012-01-25 2013-07-25 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
DE102012109481A1 (de) 2012-10-05 2014-04-10 Faro Technologies, Inc. Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
DE112014005532T5 (de) 2013-12-05 2016-08-18 Fisher & Paykel Healthcare Limited Oberflächengrössenbemessungshilfsmittel und -verfahren
US9983298B2 (en) 2015-02-05 2018-05-29 Associated Universities, LLC Fiber optic based laser range finder
DE102015122844A1 (de) 2015-12-27 2017-06-29 Faro Technologies, Inc. 3D-Messvorrichtung mit Batteriepack
JP6813765B2 (ja) * 2016-10-20 2021-01-13 高砂電気工業株式会社 灌流培養装置及び灌流培養方法
DE102017101580A1 (de) 2017-01-26 2018-07-26 Picofine GmbH Messkopf für ein Laserinterferometer und betreffendes Messverfahren
CN108468029B (zh) * 2018-02-12 2020-01-21 中国科学院国家天文台南京天文光学技术研究所 用于碳化硅光学镜面改性与面形提升的磁控溅射扫描方法
DE102019102063B4 (de) * 2019-01-28 2021-05-27 Bundesrepublik Deutschland, Vertreten Durch Das Bundesministerium Für Wirtschaft Und Energie, Dieses Vertreten Durch Den Präsidenten Der Physikalisch-Technischen Bundesanstalt Verfahren zum Vermessen einer Oberflächentopographie eines Prüflings und Oberflächentopographie-Messvorrichtung
DE102019116280B3 (de) * 2019-06-14 2020-12-17 Etalon Ag Verfahren und Vorrichtung zum Bestimmen einer Länge

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3601491A (en) * 1967-06-07 1971-08-24 William Reid Distance-measuring interferometer
US3633010A (en) * 1970-05-04 1972-01-04 Geosystems Inc Computer-aided laser-based measurement system
FR2093168A5 (ja) * 1970-06-04 1972-01-28 Commissariat Energie Atomique
JPS5117303B1 (ja) * 1970-12-30 1976-06-01
US3961851A (en) * 1974-10-03 1976-06-08 The United States Of America As Represented By The Secretary Of The Army Passive stereovision range finder
US4139304A (en) * 1977-02-10 1979-02-13 National Research Development Corporation Methods and apparatus for measuring variations in distance to a surface

Also Published As

Publication number Publication date
GB2102574A (en) 1983-02-02
JPS5866006A (ja) 1983-04-20
FR2509458B1 (fr) 1986-07-25
IT1151835B (it) 1986-12-24
SE454539B (sv) 1988-05-09
FR2509458A1 (fr) 1983-01-14
IT8222360A0 (it) 1982-07-12
SE8204293D0 (sv) 1982-07-12
US4457625A (en) 1984-07-03
BE893811A (fr) 1982-11-03
CA1186893A (en) 1985-05-14
DE3226005A1 (de) 1983-03-03
GB2102574B (en) 1985-05-09
SE8204293L (sv) 1983-01-14

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