IL258526D0 - Droplet generation for a laser produced plasma light source - Google Patents

Droplet generation for a laser produced plasma light source

Info

Publication number
IL258526D0
IL258526D0 IL258526A IL25852618A IL258526D0 IL 258526 D0 IL258526 D0 IL 258526D0 IL 258526 A IL258526 A IL 258526A IL 25852618 A IL25852618 A IL 25852618A IL 258526 D0 IL258526 D0 IL 258526D0
Authority
IL
Israel
Prior art keywords
plasma light
droplet generation
produced plasma
laser produced
light source
Prior art date
Application number
IL258526A
Other languages
Hebrew (he)
Other versions
IL258526A (en
Original Assignee
Kla Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US201562253631P priority Critical
Priority to US15/261,639 priority patent/US10880979B2/en
Priority to PCT/US2016/061408 priority patent/WO2017083569A1/en
Application filed by Kla Tencor Corp filed Critical Kla Tencor Corp
Publication of IL258526D0 publication Critical patent/IL258526D0/en
Publication of IL258526A publication Critical patent/IL258526A/en

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05GX-RAY TECHNIQUE
    • H05G2/00Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001X-ray radiation generated from plasma
    • H05G2/003X-ray radiation generated from plasma being produced from a liquid or gas
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70008Production of exposure light, i.e. light sources
    • G03F7/70033Production of exposure light, i.e. light sources by plasma EUV sources
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05GX-RAY TECHNIQUE
    • H05G2/00Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001X-ray radiation generated from plasma
    • H05G2/003X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/006X-ray radiation generated from plasma being produced from a liquid or gas details of the ejection system, e.g. constructional details of the nozzle
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05GX-RAY TECHNIQUE
    • H05G2/00Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001X-ray radiation generated from plasma
    • H05G2/008X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2240/00Testing
IL258526A 2015-11-10 2018-04-08 Droplet generation for a laser produced plasma light source IL258526A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US201562253631P true 2015-11-10 2015-11-10
US15/261,639 US10880979B2 (en) 2015-11-10 2016-09-09 Droplet generation for a laser produced plasma light source
PCT/US2016/061408 WO2017083569A1 (en) 2015-11-10 2016-11-10 Droplet generation for a laser produced plasma light source

Publications (2)

Publication Number Publication Date
IL258526D0 true IL258526D0 (en) 2018-05-31
IL258526A IL258526A (en) 2022-04-01

Family

ID=58667570

Family Applications (2)

Application Number Title Priority Date Filing Date
IL258526A IL258526A (en) 2015-11-10 2018-04-08 Droplet generation for a laser produced plasma light source
IL290793A IL290793D0 (en) 2015-11-10 2022-02-22 Droplet generation for a laser produced plasma light source

Family Applications After (1)

Application Number Title Priority Date Filing Date
IL290793A IL290793D0 (en) 2015-11-10 2022-02-22 Droplet generation for a laser produced plasma light source

Country Status (7)

Country Link
US (2) US10880979B2 (en)
JP (2) JP6929842B2 (en)
KR (1) KR20180067709A (en)
CN (1) CN108432349A (en)
IL (2) IL258526A (en)
TW (2) TWI739680B (en)
WO (1) WO2017083569A1 (en)

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US11317500B2 (en) 2017-08-30 2022-04-26 Kla-Tencor Corporation Bright and clean x-ray source for x-ray based metrology
US10824083B2 (en) 2017-09-28 2020-11-03 Taiwan Semiconductor Manufacturing Co., Ltd. Light source, EUV lithography system, and method for generating EUV radiation
US10959318B2 (en) 2018-01-10 2021-03-23 Kla-Tencor Corporation X-ray metrology system with broadband laser produced plasma illuminator
US10779387B2 (en) 2018-11-26 2020-09-15 Taiwan Semiconductor Manufacturing Co., Ltd. Extreme ultraviolet photolithography system and method
US11259394B2 (en) 2019-11-01 2022-02-22 Kla Corporation Laser produced plasma illuminator with liquid sheet jet target
US11272607B2 (en) 2019-11-01 2022-03-08 Kla Corporation Laser produced plasma illuminator with low atomic number cryogenic target
US11143604B1 (en) 2020-04-06 2021-10-12 Kla Corporation Soft x-ray optics with improved filtering

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Also Published As

Publication number Publication date
IL290793D0 (en) 2022-04-01
WO2017083569A1 (en) 2017-05-18
TW202112183A (en) 2021-03-16
TWI739680B (en) 2021-09-11
JP2019501410A (en) 2019-01-17
TWI738669B (en) 2021-09-11
US10880979B2 (en) 2020-12-29
US20210105886A1 (en) 2021-04-08
CN108432349A (en) 2018-08-21
JP2021113992A (en) 2021-08-05
US20170131129A1 (en) 2017-05-11
TW201739321A (en) 2017-11-01
KR20180067709A (en) 2018-06-20
JP6929842B2 (en) 2021-09-01
IL258526A (en) 2022-04-01

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