IL247580D0 - System and method for reducing the bandwidth of a laser and an inspection system and method using a laser - Google Patents

System and method for reducing the bandwidth of a laser and an inspection system and method using a laser

Info

Publication number
IL247580D0
IL247580D0 IL247580A IL24758016A IL247580D0 IL 247580 D0 IL247580 D0 IL 247580D0 IL 247580 A IL247580 A IL 247580A IL 24758016 A IL24758016 A IL 24758016A IL 247580 D0 IL247580 D0 IL 247580D0
Authority
IL
Israel
Prior art keywords
laser
bandwidth
inspection
reducing
Prior art date
Application number
IL247580A
Other languages
Hebrew (he)
Other versions
IL247580A (en
Original Assignee
Kla Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US201461955792P priority Critical
Priority to US14/300,227 priority patent/US9804101B2/en
Priority to PCT/US2015/021462 priority patent/WO2015143152A1/en
Application filed by Kla Tencor Corp filed Critical Kla Tencor Corp
Publication of IL247580D0 publication Critical patent/IL247580D0/en
Publication of IL247580A publication Critical patent/IL247580A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501Semiconductor wafers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/35Non-linear optics
    • G02F1/39Non-linear optics for parametric generation or amplification of light, infra-red, or ultra-violet waves
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094003Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre
    • H01S3/094015Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre with pump light recycling, i.e. with reinjection of the unused pump light back into the fiber, e.g. by reflectors or circulators
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/35Non-linear optics
    • G02F1/353Frequency conversion, i.e. wherein a light beam with frequency components different from those of the incident light beams is generated
    • G02F1/3534Three-wave interaction, e.g. sum-difference frequency generation
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0078Frequency filtering
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0092Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
IL247580A 2014-03-20 2016-08-31 System and method for reducing the bandwidth of a laser and an inspection system and method using a laser IL247580A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US201461955792P true 2014-03-20 2014-03-20
US14/300,227 US9804101B2 (en) 2014-03-20 2014-06-09 System and method for reducing the bandwidth of a laser and an inspection system and method using a laser
PCT/US2015/021462 WO2015143152A1 (en) 2014-03-20 2015-03-19 System and method for reducing the bandwidth of a laser and an inspection system and method using a laser

Publications (2)

Publication Number Publication Date
IL247580D0 true IL247580D0 (en) 2016-11-30
IL247580A IL247580A (en) 2020-05-31

Family

ID=54141852

Family Applications (2)

Application Number Title Priority Date Filing Date
IL247580A IL247580A (en) 2014-03-20 2016-08-31 System and method for reducing the bandwidth of a laser and an inspection system and method using a laser
IL273328A IL273328D0 (en) 2014-03-20 2020-03-16 System and method for reducing the bandwidth of a laser and an inspection system and method using a laser

Family Applications After (1)

Application Number Title Priority Date Filing Date
IL273328A IL273328D0 (en) 2014-03-20 2020-03-16 System and method for reducing the bandwidth of a laser and an inspection system and method using a laser

Country Status (8)

Country Link
US (2) US9804101B2 (en)
EP (1) EP3120427B1 (en)
JP (1) JP6529511B2 (en)
KR (1) KR20160135790A (en)
CN (1) CN106134019B (en)
IL (2) IL247580A (en)
TW (1) TWI658662B (en)
WO (1) WO2015143152A1 (en)

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