IL214294D0 - Surface micro-machined switching device - Google Patents

Surface micro-machined switching device

Info

Publication number
IL214294D0
IL214294D0 IL21429411A IL21429411A IL214294D0 IL 214294 D0 IL214294 D0 IL 214294D0 IL 21429411 A IL21429411 A IL 21429411A IL 21429411 A IL21429411 A IL 21429411A IL 214294 D0 IL214294 D0 IL 214294D0
Authority
IL
Israel
Prior art keywords
proof mass
metal
switching device
made
surface micro
Prior art date
Application number
IL21429411A
Original Assignee
Rafael Advanced Defense Sys
Lior Kogut
Ohana Avihay
Nepomnyashchy Boris
Pernat Nir
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rafael Advanced Defense Sys, Lior Kogut, Ohana Avihay, Nepomnyashchy Boris, Pernat Nir filed Critical Rafael Advanced Defense Sys
Priority to IL21429411A priority Critical patent/IL214294D0/en
Publication of IL214294D0 publication Critical patent/IL214294D0/en

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0036Switches making use of microelectromechanical systems [MEMS]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00Switches operated by change of a physical condition
    • H01H35/14Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
    • H01H35/141Details
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00Switches operated by change of a physical condition
    • H01H35/14Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
    • H01H35/144Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch operated by vibration
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00Switches operated by change of a physical condition
    • H01H35/14Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch

Abstract

An acceleration responsive switching device formed as a micro- electromechanical systems (MEMS) device in which components are deposited and etched on and or above a substrate, comprising: a proof mass module comprising: at least one proof mass made of metal; at least three resilient suspending members made of metal, for suspending the proof mass; a lingule made of metal, connected to the proof mass; at least two contact pads to which at least one of the three resilient suspending members is permanently attached thereby allowing current to flow from the at least two pads to the proof mass module; and at least one additional contact pad, which is set against the lingule.
IL21429411A 2011-07-26 2011-07-26 Surface micro-machined switching device IL214294D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL21429411A IL214294D0 (en) 2011-07-26 2011-07-26 Surface micro-machined switching device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL21429411A IL214294D0 (en) 2011-07-26 2011-07-26 Surface micro-machined switching device
US14/235,367 US20140251770A1 (en) 2011-07-26 2012-07-26 Switching device
PCT/IB2012/053808 WO2013014634A1 (en) 2011-07-26 2012-07-26 Switching device

Publications (1)

Publication Number Publication Date
IL214294D0 true IL214294D0 (en) 2011-09-27

Family

ID=45773708

Family Applications (1)

Application Number Title Priority Date Filing Date
IL21429411A IL214294D0 (en) 2011-07-26 2011-07-26 Surface micro-machined switching device

Country Status (3)

Country Link
US (1) US20140251770A1 (en)
IL (1) IL214294D0 (en)
WO (1) WO2013014634A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108630489A (en) * 2018-05-31 2018-10-09 湖北三江航天红林探控有限公司 Locking type inertia switch

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
WO1999052006A2 (en) * 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6367786B1 (en) * 1999-06-07 2002-04-09 California Institute Of Technology Micromachined double resonator
US6301965B1 (en) * 1999-12-14 2001-10-16 Sandia Corporation Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
US6494095B1 (en) * 2000-03-28 2002-12-17 Opticnet, Inc. Micro electromechanical switch for detecting acceleration or decelaration
US20020066317A1 (en) * 2000-12-06 2002-06-06 Gang Lin Micro yaw rate sensors
US6598475B2 (en) * 2001-09-20 2003-07-29 Honeywell International Inc. Micromechanical inertial sensor having increased pickoff resonance damping
US6715353B2 (en) * 2002-04-25 2004-04-06 Honeywell International, Inc. MEMS gyroscope with parametric gain
US6765160B1 (en) * 2002-08-21 2004-07-20 The United States Of America As Represented By The Secetary Of The Army Omnidirectional microscale impact switch
US7005193B2 (en) * 2003-04-29 2006-02-28 Motorola, Inc. Method of adding mass to MEMS structures
US7267005B1 (en) * 2005-03-02 2007-09-11 United States Of America As Represented By The Secretary Of The Army SOI-MEMS gyroscope having three-fold symmetry
WO2006121321A1 (en) * 2005-05-10 2006-11-16 Sensata Technologies Holland B.V. Sensor module package
US8076893B2 (en) * 2008-09-04 2011-12-13 The Board Of Trustees Of The University Of Illinois Displacement actuation and sensing for an electrostatic drive
US8146424B2 (en) * 2008-12-16 2012-04-03 Honeywell International Inc. Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
US8507813B2 (en) * 2011-02-23 2013-08-13 Ht Microanalytical, Inc. Integrating impact switch
JP5897822B2 (en) * 2011-06-01 2016-03-30 エスアイアイ・セミコンダクタ株式会社 Acceleration switch

Also Published As

Publication number Publication date
US20140251770A1 (en) 2014-09-11
WO2013014634A1 (en) 2013-01-31

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