IL144001A - Gas injection system for plasma processing - Google Patents
Gas injection system for plasma processingInfo
- Publication number
- IL144001A IL144001A IL14400199A IL14400199A IL144001A IL 144001 A IL144001 A IL 144001A IL 14400199 A IL14400199 A IL 14400199A IL 14400199 A IL14400199 A IL 14400199A IL 144001 A IL144001 A IL 144001A
- Authority
- IL
- Israel
- Prior art keywords
- plasma processing
- gas injection
- injection system
- gas
- plasma
- Prior art date
Links
- 238000002347 injection Methods 0.000 title 1
- 239000007924 injection Substances 0.000 title 1
Classifications
-
- H01L21/205—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/223,273 US6230651B1 (en) | 1998-12-30 | 1998-12-30 | Gas injection system for plasma processing |
PCT/US1999/027917 WO2000041212A1 (en) | 1998-12-30 | 1999-12-07 | Gas injection system for plasma processing |
Publications (2)
Publication Number | Publication Date |
---|---|
IL144001A0 IL144001A0 (en) | 2002-04-21 |
IL144001A true IL144001A (en) | 2005-12-18 |
Family
ID=22835796
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL14400199A IL144001A (en) | 1998-12-30 | 1999-12-07 | Gas injection system for plasma processing |
Country Status (7)
Country | Link |
---|---|
US (3) | US6230651B1 (xx) |
EP (1) | EP1145277B1 (xx) |
JP (1) | JP4588885B2 (xx) |
KR (1) | KR100665646B1 (xx) |
IL (1) | IL144001A (xx) |
TW (1) | TW548680B (xx) |
WO (1) | WO2000041212A1 (xx) |
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-
1998
- 1998-12-30 US US09/223,273 patent/US6230651B1/en not_active Expired - Lifetime
-
1999
- 1999-12-07 KR KR1020017008435A patent/KR100665646B1/ko active IP Right Grant
- 1999-12-07 IL IL14400199A patent/IL144001A/xx not_active IP Right Cessation
- 1999-12-07 EP EP99967134A patent/EP1145277B1/en not_active Expired - Lifetime
- 1999-12-07 WO PCT/US1999/027917 patent/WO2000041212A1/en active IP Right Grant
- 1999-12-07 JP JP2000592857A patent/JP4588885B2/ja not_active Expired - Lifetime
-
2000
- 2000-01-28 TW TW088123167A patent/TW548680B/zh not_active IP Right Cessation
-
2001
- 2001-02-21 US US09/788,365 patent/US7785417B2/en not_active Expired - Fee Related
-
2010
- 2010-08-20 US US12/805,865 patent/US8025731B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2000041212A1 (en) | 2000-07-13 |
US20010010257A1 (en) | 2001-08-02 |
TW548680B (en) | 2003-08-21 |
KR20010101359A (ko) | 2001-11-14 |
EP1145277B1 (en) | 2012-02-08 |
JP2002534797A (ja) | 2002-10-15 |
US8025731B2 (en) | 2011-09-27 |
KR100665646B1 (ko) | 2007-01-09 |
IL144001A0 (en) | 2002-04-21 |
US7785417B2 (en) | 2010-08-31 |
US20100327085A1 (en) | 2010-12-30 |
US6230651B1 (en) | 2001-05-15 |
EP1145277A1 (en) | 2001-10-17 |
JP4588885B2 (ja) | 2010-12-01 |
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