IL139730D0 - Silicon capacitive accelerometer - Google Patents

Silicon capacitive accelerometer

Info

Publication number
IL139730D0
IL139730D0 IL13973000A IL13973000A IL139730D0 IL 139730 D0 IL139730 D0 IL 139730D0 IL 13973000 A IL13973000 A IL 13973000A IL 13973000 A IL13973000 A IL 13973000A IL 139730 D0 IL139730 D0 IL 139730D0
Authority
IL
Israel
Prior art keywords
capacitive accelerometer
silicon capacitive
silicon
accelerometer
Prior art date
Application number
IL13973000A
Original Assignee
Micma Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micma Engineering Ltd filed Critical Micma Engineering Ltd
Priority to IL13973000A priority Critical patent/IL139730D0/en
Publication of IL139730D0 publication Critical patent/IL139730D0/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
IL13973000A 2000-11-16 2000-11-16 Silicon capacitive accelerometer IL139730D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL13973000A IL139730D0 (en) 2000-11-16 2000-11-16 Silicon capacitive accelerometer

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL13973000A IL139730D0 (en) 2000-11-16 2000-11-16 Silicon capacitive accelerometer
PCT/IL2001/001046 WO2002041006A2 (en) 2000-11-16 2001-11-12 Silicon capacitive accelerometer
AU2399102A AU2399102A (en) 2000-11-16 2001-11-12 Silicon capacitive accelerometer

Publications (1)

Publication Number Publication Date
IL139730D0 true IL139730D0 (en) 2002-02-10

Family

ID=11074827

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13973000A IL139730D0 (en) 2000-11-16 2000-11-16 Silicon capacitive accelerometer

Country Status (3)

Country Link
AU (1) AU2399102A (en)
IL (1) IL139730D0 (en)
WO (1) WO2002041006A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7397097B2 (en) 2003-11-25 2008-07-08 Stmicroelectronics, Inc. Integrated released beam layer structure fabricated in trenches and manufacturing method thereof
US7179674B2 (en) * 2004-12-28 2007-02-20 Stmicroelectronics, Inc. Bi-directional released-beam sensor
US7353706B2 (en) 2004-12-28 2008-04-08 Stmicroelectronics, Inc. Weighted released-beam sensor
CN100401071C (en) * 2006-08-03 2008-07-09 上海交通大学 Flexible vertical column seesaw type double-layer structural micro-accelerometer
CN103910323B (en) * 2013-01-09 2017-04-12 先技股份有限公司 Micro Electro Mechanical System (mems) Device
JP5330620B1 (en) * 2013-04-17 2013-10-30 リオン株式会社 Servo type acceleration sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH077012B2 (en) * 1987-08-18 1995-01-30 富士通株式会社 Acceleration sensor
JPH04121630A (en) * 1990-09-13 1992-04-22 Nissan Motor Co Ltd Dynamics quantity detection device
EP0937985B1 (en) * 1997-09-10 2007-11-14 Matsushita Electric Industrial Co., Ltd. A method of producing an acceleration sensor

Also Published As

Publication number Publication date
WO2002041006A2 (en) 2002-05-23
AU2399102A (en) 2002-05-27
WO2002041006A3 (en) 2002-08-01

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