IL116536D0 - Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems - Google Patents

Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems


Publication number
IL116536D0 IL11653695A IL11653695A IL116536D0 IL 116536 D0 IL116536 D0 IL 116536D0 IL 11653695 A IL11653695 A IL 11653695A IL 11653695 A IL11653695 A IL 11653695A IL 116536 D0 IL116536 D0 IL 116536D0
Prior art keywords
single crystal
sensing mechanisms
crystal based
based micro
Prior art date
Application number
Original Assignee
Harunian Dan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harunian Dan filed Critical Harunian Dan
Priority to IL11653695A priority Critical patent/IL116536D0/en
Publication of IL116536D0 publication Critical patent/IL116536D0/en


IL11653695A 1995-12-24 1995-12-24 Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems IL116536D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL11653695A IL116536D0 (en) 1995-12-24 1995-12-24 Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
IL11653695A IL116536D0 (en) 1995-12-24 1995-12-24 Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems
PCT/IL1996/000190 WO1997024915A2 (en) 1995-12-24 1996-12-24 Micro-electro-mechanics systems (mems)
AU10716/97A AU1071697A (en) 1995-12-24 1996-12-24 Micro-electro-mechanics systems (mems)
US09/101,014 US6128961A (en) 1995-12-24 1996-12-24 Micro-electro-mechanics systems (MEMS)
EP96940717A EP0870170A4 (en) 1995-12-24 1996-12-24 Micro-electro-mechanics systems (mems)

Publications (1)

Publication Number Publication Date
IL116536D0 true IL116536D0 (en) 1996-03-31



Family Applications (1)

Application Number Title Priority Date Filing Date
IL11653695A IL116536D0 (en) 1995-12-24 1995-12-24 Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems

Country Status (5)

Country Link
US (1) US6128961A (en)
EP (1) EP0870170A4 (en)
AU (1) AU1071697A (en)
IL (1) IL116536D0 (en)
WO (1) WO1997024915A2 (en)

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Also Published As

Publication number Publication date
AU1071697A (en) 1997-08-01
EP0870170A4 (en) 2000-01-12
US6128961A (en) 2000-10-10
WO1997024915A2 (en) 1997-07-17
EP0870170A2 (en) 1998-10-14

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