IL116536D0 - Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems - Google Patents

Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems

Info

Publication number
IL116536D0
IL116536D0 IL11653695A IL11653695A IL116536D0 IL 116536 D0 IL116536 D0 IL 116536D0 IL 11653695 A IL11653695 A IL 11653695A IL 11653695 A IL11653695 A IL 11653695A IL 116536 D0 IL116536 D0 IL 116536D0
Authority
IL
Israel
Prior art keywords
electric
single crystal
sensing mechanisms
crystal based
based micro
Prior art date
Application number
IL11653695A
Original Assignee
Harunian Dan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harunian Dan filed Critical Harunian Dan
Priority to IL11653695A priority Critical patent/IL116536D0/en
Publication of IL116536D0 publication Critical patent/IL116536D0/en

Links

IL11653695A 1995-12-24 1995-12-24 Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems IL116536D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL11653695A IL116536D0 (en) 1995-12-24 1995-12-24 Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
IL11653695A IL116536D0 (en) 1995-12-24 1995-12-24 Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems
PCT/IL1996/000190 WO1997024915A2 (en) 1995-12-24 1996-12-24 Micro-electro-mechanics systems (mems)
AU10716/97A AU1071697A (en) 1995-12-24 1996-12-24 Micro-electro-mechanics systems (mems)
US09/101,014 US6128961A (en) 1995-12-24 1996-12-24 Micro-electro-mechanics systems (MEMS)
EP96940717A EP0870170A4 (en) 1995-12-24 1996-12-24 Micro-electro-mechanics systems (mems)

Publications (1)

Publication Number Publication Date
IL116536D0 true IL116536D0 (en) 1996-03-31

Family

ID=11068350

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11653695A IL116536D0 (en) 1995-12-24 1995-12-24 Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems

Country Status (5)

Country Link
US (1) US6128961A (en)
EP (1) EP0870170A4 (en)
AU (1) AU1071697A (en)
IL (1) IL116536D0 (en)
WO (1) WO1997024915A2 (en)

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US7694610B2 (en) * 2007-06-27 2010-04-13 Siemens Medical Solutions Usa, Inc. Photo-multiplier tube removal tool
US8132468B2 (en) * 2008-05-29 2012-03-13 Zoran Radivojevic Flexural deformation sensing device and a user interface using the same
US8733176B2 (en) * 2009-09-02 2014-05-27 Kontel Data System Limited MEMS stress concentrating structure for MEMS sensors
US8567246B2 (en) 2010-10-12 2013-10-29 Invensense, Inc. Integrated MEMS device and method of use
US8947081B2 (en) 2011-01-11 2015-02-03 Invensense, Inc. Micromachined resonant magnetic field sensors
US8860409B2 (en) 2011-01-11 2014-10-14 Invensense, Inc. Micromachined resonant magnetic field sensors
US9664750B2 (en) 2011-01-11 2017-05-30 Invensense, Inc. In-plane sensing Lorentz force magnetometer
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Also Published As

Publication number Publication date
AU1071697A (en) 1997-08-01
EP0870170A4 (en) 2000-01-12
US6128961A (en) 2000-10-10
WO1997024915A2 (en) 1997-07-17
EP0870170A2 (en) 1998-10-14

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