IL108553A - Imaging method for detection of irregular regions - Google Patents

Imaging method for detection of irregular regions

Info

Publication number
IL108553A
IL108553A IL108553A IL10855394A IL108553A IL 108553 A IL108553 A IL 108553A IL 108553 A IL108553 A IL 108553A IL 10855394 A IL10855394 A IL 10855394A IL 108553 A IL108553 A IL 108553A
Authority
IL
Israel
Prior art keywords
defective
normal
interest
area
pixel
Prior art date
Application number
IL108553A
Other languages
English (en)
Other versions
IL108553A0 (cs
Inventor
Nabutovsky Dan
Goresnic Cornel
Gayer Arie
Original Assignee
Israel Atomic Energy Comm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Israel Atomic Energy Comm filed Critical Israel Atomic Energy Comm
Priority to IL108553A priority Critical patent/IL108553A/xx
Publication of IL108553A0 publication Critical patent/IL108553A0/xx
Publication of IL108553A publication Critical patent/IL108553A/xx

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  • Image Analysis (AREA)
  • Image Processing (AREA)
IL108553A 1994-02-04 1994-02-04 Imaging method for detection of irregular regions IL108553A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL108553A IL108553A (en) 1994-02-04 1994-02-04 Imaging method for detection of irregular regions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL108553A IL108553A (en) 1994-02-04 1994-02-04 Imaging method for detection of irregular regions

Publications (2)

Publication Number Publication Date
IL108553A0 IL108553A0 (cs) 1994-05-30
IL108553A true IL108553A (en) 1997-04-15

Family

ID=11065781

Family Applications (1)

Application Number Title Priority Date Filing Date
IL108553A IL108553A (en) 1994-02-04 1994-02-04 Imaging method for detection of irregular regions

Country Status (1)

Country Link
IL (1) IL108553A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022111889A1 (de) * 2020-11-26 2022-06-02 Carl Zeiss Smt Gmbh VERFAHREN UND VORRICHTUNG ZUR INSPEKTION EINER SCHWEIßNAHT IN EINER BAUGRUPPE EINES OPTISCHEN SYSTEMS FÜR DIE MIKROLITHOGRAPHIE

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112686831B (zh) * 2019-10-17 2024-06-14 神讯电脑(昆山)有限公司 基于人工神经网络的物件表面型态的检测方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022111889A1 (de) * 2020-11-26 2022-06-02 Carl Zeiss Smt Gmbh VERFAHREN UND VORRICHTUNG ZUR INSPEKTION EINER SCHWEIßNAHT IN EINER BAUGRUPPE EINES OPTISCHEN SYSTEMS FÜR DIE MIKROLITHOGRAPHIE

Also Published As

Publication number Publication date
IL108553A0 (cs) 1994-05-30

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