IL100655A - Profile gauge for interferometric laser - Google Patents

Profile gauge for interferometric laser

Info

Publication number
IL100655A
IL100655A IL10065592A IL10065592A IL100655A IL 100655 A IL100655 A IL 100655A IL 10065592 A IL10065592 A IL 10065592A IL 10065592 A IL10065592 A IL 10065592A IL 100655 A IL100655 A IL 100655A
Authority
IL
Israel
Prior art keywords
set forth
measurement beam
wavelength
output
beams
Prior art date
Application number
IL10065592A
Other languages
English (en)
Hebrew (he)
Other versions
IL100655A0 (en
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of IL100655A0 publication Critical patent/IL100655A0/xx
Publication of IL100655A publication Critical patent/IL100655A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
IL10065592A 1991-02-08 1992-01-14 Profile gauge for interferometric laser IL100655A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US65269891A 1991-02-08 1991-02-08

Publications (2)

Publication Number Publication Date
IL100655A0 IL100655A0 (en) 1992-09-06
IL100655A true IL100655A (en) 1994-11-28

Family

ID=24617801

Family Applications (1)

Application Number Title Priority Date Filing Date
IL10065592A IL100655A (en) 1991-02-08 1992-01-14 Profile gauge for interferometric laser

Country Status (5)

Country Link
US (1) US5349440A (de)
EP (1) EP0498541A1 (de)
JP (1) JPH0830651B2 (de)
KR (1) KR920016823A (de)
IL (1) IL100655A (de)

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DE29715904U1 (de) * 1997-09-01 1997-10-23 OMECA Messtechnik GmbH, 14513 Teltow Interferenzoptische Meßeinrichtung
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US6949462B1 (en) 2002-04-04 2005-09-27 Nanometrics Incorporated Measuring an alignment target with multiple polarization states
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KR102221714B1 (ko) * 2016-08-23 2021-03-03 에이에스엠엘 네델란즈 비.브이. 리소그래피 공정에 의해 기판 상에 형성된 구조체를 측정하는 메트롤로지 장치, 리소그래피 시스템, 및 리소그래피 공정에 의해 기판 상에 형성된 구조체를 측정하는 방법
RU2650840C1 (ru) * 2016-12-27 2018-04-17 Общество с ограниченной ответственностью "Спецдортехника" Лазерный профилометр для определения геометрических параметров профиля поверхности
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Also Published As

Publication number Publication date
JPH0830651B2 (ja) 1996-03-27
JPH0552540A (ja) 1993-03-02
EP0498541A1 (de) 1992-08-12
US5349440A (en) 1994-09-20
IL100655A0 (en) 1992-09-06
KR920016823A (ko) 1992-09-25

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