HK1163262A1 - Pellicle container - Google Patents
Pellicle containerInfo
- Publication number
- HK1163262A1 HK1163262A1 HK12103709.2A HK12103709A HK1163262A1 HK 1163262 A1 HK1163262 A1 HK 1163262A1 HK 12103709 A HK12103709 A HK 12103709A HK 1163262 A1 HK1163262 A1 HK 1163262A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- pellicle container
- pellicle
- container
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D43/00—Lids or covers for rigid or semi-rigid containers
- B65D43/02—Removable lids or covers
- B65D43/08—Removable lids or covers having a peripheral flange fitting over the rim of the container
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
- B65D85/40—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus for watches or clocks; for components thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
- H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/611—Specific applications or type of materials patterned objects; electronic devices
- G01N2223/6116—Specific applications or type of materials patterned objects; electronic devices semiconductor wafer
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packages (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010099895A JP5528190B2 (ja) | 2010-04-23 | 2010-04-23 | ペリクル収納容器 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1163262A1 true HK1163262A1 (en) | 2012-09-07 |
Family
ID=44887033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK12103709.2A HK1163262A1 (en) | 2010-04-23 | 2012-04-16 | Pellicle container |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5528190B2 (zh) |
KR (1) | KR101754835B1 (zh) |
CN (1) | CN102236249B (zh) |
HK (1) | HK1163262A1 (zh) |
TW (1) | TWI423907B (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5822401B2 (ja) * | 2012-12-25 | 2015-11-24 | 信越化学工業株式会社 | リソグラフィ用ペリクル |
JP6308676B2 (ja) * | 2014-12-18 | 2018-04-11 | 信越化学工業株式会社 | リソグラフィ用ペリクル容器。 |
JP6320309B2 (ja) * | 2015-01-19 | 2018-05-09 | 信越化学工業株式会社 | ペリクル収納容器 |
JP2016151633A (ja) * | 2015-02-17 | 2016-08-22 | 信越化学工業株式会社 | ペリクル収納容器 |
JP6275067B2 (ja) * | 2015-02-24 | 2018-02-07 | 信越化学工業株式会社 | ペリクル収納容器 |
JP6376601B2 (ja) * | 2015-05-18 | 2018-08-22 | 信越化学工業株式会社 | ペリクル支持手段及びこれを用いたペリクル支持装置とペリクル装着方法 |
JP6351178B2 (ja) * | 2015-07-13 | 2018-07-04 | 信越化学工業株式会社 | ペリクル収納容器およびペリクルの取り出し方法 |
JP6494111B2 (ja) * | 2015-11-09 | 2019-04-03 | 信越化学工業株式会社 | ペリクル収納容器の包装構造体及びその包装方法 |
US10416575B2 (en) * | 2016-11-16 | 2019-09-17 | Suss Microtec Photomask Equipment Gmbh & Co. Kg | Apparatus and method for cleaning a partial area of a substrate |
JP2020033060A (ja) * | 2018-08-30 | 2020-03-05 | 株式会社吉野工業所 | チューブ容器 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3157664B2 (ja) * | 1993-11-22 | 2001-04-16 | 信越化学工業株式会社 | ペリクル収納容器 |
JP3356897B2 (ja) * | 1994-12-16 | 2002-12-16 | 信越化学工業株式会社 | ペリクル収納容器 |
JP2001201847A (ja) * | 2000-01-19 | 2001-07-27 | Shin Etsu Chem Co Ltd | ペリクル容器 |
JP2005107085A (ja) * | 2003-09-30 | 2005-04-21 | Asahi Kasei Electronics Co Ltd | 大型ペリクル収納容器の開封方法および蓋開閉治具および大型ペリクル収納容器 |
JP4391435B2 (ja) * | 2005-03-22 | 2009-12-24 | 信越化学工業株式会社 | ペリクル収納容器 |
JP2007057624A (ja) * | 2005-08-23 | 2007-03-08 | Matsushita Electric Ind Co Ltd | レチクル収納ケース |
JP2007128030A (ja) * | 2005-10-07 | 2007-05-24 | Shin Etsu Polymer Co Ltd | ペリクル用収納容器 |
JP4796946B2 (ja) * | 2006-11-30 | 2011-10-19 | 信越化学工業株式会社 | ペリクル収納容器 |
JP2008216846A (ja) * | 2007-03-07 | 2008-09-18 | Asahi Kasei Electronics Co Ltd | ペリクル収納容器 |
JP5269438B2 (ja) * | 2007-03-13 | 2013-08-21 | 旭化成イーマテリアルズ株式会社 | 大型ペリクルの保護フィルム及び大型ペリクルの収納方法 |
JP4955449B2 (ja) * | 2007-05-10 | 2012-06-20 | 信越化学工業株式会社 | ペリクル収納容器 |
JP5051840B2 (ja) * | 2007-11-22 | 2012-10-17 | 信越化学工業株式会社 | ペリクル収納容器内にペリクルを保管する方法 |
JP2010060992A (ja) * | 2008-09-05 | 2010-03-18 | Asahi Kasei E-Materials Corp | 大型ペリクル構造体及び大型ペリクル収納構造体 |
JP4493711B2 (ja) * | 2008-11-20 | 2010-06-30 | 旭化成イーマテリアルズ株式会社 | 大型ペリクル収納容器及びその製造方法 |
JP4776721B2 (ja) * | 2009-09-18 | 2011-09-21 | 旭化成イーマテリアルズ株式会社 | 大型ペリクル収納容器及びその製造方法 |
-
2010
- 2010-04-23 JP JP2010099895A patent/JP5528190B2/ja active Active
- 2010-12-28 KR KR1020100136595A patent/KR101754835B1/ko active IP Right Grant
-
2011
- 2011-04-20 TW TW100113696A patent/TWI423907B/zh active
- 2011-04-25 CN CN2011101041518A patent/CN102236249B/zh active Active
-
2012
- 2012-04-16 HK HK12103709.2A patent/HK1163262A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN102236249A (zh) | 2011-11-09 |
JP2011232388A (ja) | 2011-11-17 |
CN102236249B (zh) | 2013-03-13 |
KR101754835B1 (ko) | 2017-07-06 |
JP5528190B2 (ja) | 2014-06-25 |
KR20110118558A (ko) | 2011-10-31 |
TW201139233A (en) | 2011-11-16 |
TWI423907B (zh) | 2014-01-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20220425 |