HK1048280A1 - 脆性基板的製造方法及其製造裝置 - Google Patents
脆性基板的製造方法及其製造裝置Info
- Publication number
- HK1048280A1 HK1048280A1 HK02108249.0A HK02108249A HK1048280A1 HK 1048280 A1 HK1048280 A1 HK 1048280A1 HK 02108249 A HK02108249 A HK 02108249A HK 1048280 A1 HK1048280 A1 HK 1048280A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- making
- brittle substrate
- brittle
- substrate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000302059A JP3787489B2 (ja) | 2000-10-02 | 2000-10-02 | 脆性基板のブレイク方法及び装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1048280A1 true HK1048280A1 (zh) | 2003-03-28 |
Family
ID=18783487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK02108249.0A HK1048280A1 (zh) | 2000-10-02 | 2002-11-14 | 脆性基板的製造方法及其製造裝置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP3787489B2 (zh) |
KR (1) | KR100573207B1 (zh) |
CN (1) | CN1238167C (zh) |
HK (1) | HK1048280A1 (zh) |
TW (1) | TW527328B (zh) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4169565B2 (ja) * | 2002-10-11 | 2008-10-22 | 三星ダイヤモンド工業株式会社 | 脆性材料基板のブレーク方法及びその装置並びに加工装置 |
KR100724474B1 (ko) | 2002-10-22 | 2007-06-04 | 엘지.필립스 엘시디 주식회사 | 액정 표시패널의 절단 장치 및 이를 이용한 절단방법 |
AU2003268668A1 (en) * | 2002-11-22 | 2004-06-18 | Mitsuboshi Diamond Industrial Co., Ltd. | Substrate-cutting system, substrate-producing apparatus, substrate-scribing method, and substrate-cutting method |
CN100382941C (zh) * | 2003-04-18 | 2008-04-23 | 鸿富锦精密工业(深圳)有限公司 | 光学元件的切割方法 |
WO2004096721A1 (ja) * | 2003-04-28 | 2004-11-11 | Mitsuboshi Diamond Industrial Co., Ltd. | 脆性基板分断システムおよび脆性基板分断方法 |
JP4839007B2 (ja) * | 2005-03-17 | 2011-12-14 | 株式会社尼崎工作所 | 合せガラス切断装置 |
JP2010232603A (ja) * | 2009-03-30 | 2010-10-14 | Mitsuboshi Diamond Industrial Co Ltd | 基板固定装置 |
JP5308892B2 (ja) * | 2009-04-01 | 2013-10-09 | 三星ダイヤモンド工業株式会社 | 集積型薄膜太陽電池の製造装置 |
JP5583478B2 (ja) * | 2010-05-25 | 2014-09-03 | 株式会社シライテック | パネルの折割装置 |
JP5210408B2 (ja) * | 2011-04-06 | 2013-06-12 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の分断装置 |
JP5210409B2 (ja) * | 2011-04-06 | 2013-06-12 | 三星ダイヤモンド工業株式会社 | ブレイク装置 |
JP5210407B2 (ja) * | 2011-04-06 | 2013-06-12 | 三星ダイヤモンド工業株式会社 | ブレイク装置およびブレイク方法 |
KR101329819B1 (ko) * | 2012-01-31 | 2013-11-15 | 주식회사 티이에스 | 기판 분단 시스템 및 기판 분단 방법 |
JP5981791B2 (ja) * | 2012-07-18 | 2016-08-31 | 三星ダイヤモンド工業株式会社 | 脆性材料基板のブレイク装置 |
CN103586985A (zh) * | 2012-08-17 | 2014-02-19 | 佳友科技有限公司 | 脆性材料加工方法与系统 |
JP2015003513A (ja) | 2013-05-24 | 2015-01-08 | 三星ダイヤモンド工業株式会社 | カッターホイール並びにその製造方法 |
JP6140012B2 (ja) | 2013-07-08 | 2017-05-31 | 三星ダイヤモンド工業株式会社 | 貼り合わせ基板のブレイク方法 |
JP6115438B2 (ja) * | 2013-10-16 | 2017-04-19 | 三星ダイヤモンド工業株式会社 | 破断装置及び分断方法 |
JP6213134B2 (ja) * | 2013-10-16 | 2017-10-18 | 三星ダイヤモンド工業株式会社 | 弾性支持板、破断装置及び分断方法 |
JP2015140289A (ja) * | 2014-01-29 | 2015-08-03 | 三星ダイヤモンド工業株式会社 | ブレイク装置 |
JP6387695B2 (ja) | 2014-06-13 | 2018-09-12 | 三星ダイヤモンド工業株式会社 | 脆性材料基板のブレイク装置 |
FR3024136B1 (fr) * | 2014-07-24 | 2021-04-30 | Saint Gobain | Procede de rompage d'une feuille de verre |
JP6005708B2 (ja) * | 2014-10-23 | 2016-10-12 | 三星ダイヤモンド工業株式会社 | イメージセンサ用ウエハ積層体の分断方法及び分断装置 |
JP3195489U (ja) * | 2014-11-05 | 2015-01-22 | 株式会社シライテック | パネルの折割装置 |
FR3031102B1 (fr) * | 2014-12-31 | 2017-01-27 | Saint Gobain | Procede de rompage d'une forme interieure dans une feuille de verre |
KR102509143B1 (ko) | 2015-06-30 | 2023-03-13 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | 커터 휠 및 그 제조방법 |
JP6740606B2 (ja) | 2015-07-31 | 2020-08-19 | 三星ダイヤモンド工業株式会社 | カッターホイール |
JP6716900B2 (ja) * | 2015-12-04 | 2020-07-01 | 三星ダイヤモンド工業株式会社 | 分断装置 |
JP2017112265A (ja) * | 2015-12-17 | 2017-06-22 | 株式会社ディスコ | ウエーハの加工方法 |
JP6746128B2 (ja) | 2016-05-24 | 2020-08-26 | 三星ダイヤモンド工業株式会社 | カッターホイール |
JP6897950B2 (ja) | 2016-12-28 | 2021-07-07 | 三星ダイヤモンド工業株式会社 | カッターホイール |
JP6897951B2 (ja) | 2016-12-28 | 2021-07-07 | 三星ダイヤモンド工業株式会社 | カッターホイール |
JP2019038238A (ja) | 2017-08-29 | 2019-03-14 | 三星ダイヤモンド工業株式会社 | ブレイク装置 |
JP2019038237A (ja) | 2017-08-29 | 2019-03-14 | 三星ダイヤモンド工業株式会社 | ブレイク装置 |
CN108423981B (zh) * | 2018-05-21 | 2020-12-25 | 武汉华星光电半导体显示技术有限公司 | 一种玻璃基板裂片的方法及装置 |
JP2020083668A (ja) | 2018-11-16 | 2020-06-04 | 三星ダイヤモンド工業株式会社 | ガラスフリット膜付きガラス基板のスクライブ方法 |
-
2000
- 2000-10-02 JP JP2000302059A patent/JP3787489B2/ja not_active Expired - Fee Related
-
2001
- 2001-09-24 KR KR1020010059010A patent/KR100573207B1/ko not_active IP Right Cessation
- 2001-09-25 TW TW090123554A patent/TW527328B/zh not_active IP Right Cessation
- 2001-09-28 CN CNB011354437A patent/CN1238167C/zh not_active Expired - Fee Related
-
2002
- 2002-11-14 HK HK02108249.0A patent/HK1048280A1/zh unknown
Also Published As
Publication number | Publication date |
---|---|
KR100573207B1 (ko) | 2006-04-24 |
JP3787489B2 (ja) | 2006-06-21 |
TW527328B (en) | 2003-04-11 |
KR20020026815A (ko) | 2002-04-12 |
JP2002103295A (ja) | 2002-04-09 |
CN1238167C (zh) | 2006-01-25 |
CN1348850A (zh) | 2002-05-15 |
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