GR1008114B - Thermal gas flow meter with pressure and temperature correction and method for producing the same - Google Patents

Thermal gas flow meter with pressure and temperature correction and method for producing the same

Info

Publication number
GR1008114B
GR1008114B GR20130100115A GR20130100115A GR1008114B GR 1008114 B GR1008114 B GR 1008114B GR 20130100115 A GR20130100115 A GR 20130100115A GR 20130100115 A GR20130100115 A GR 20130100115A GR 1008114 B GR1008114 B GR 1008114B
Authority
GR
Greece
Prior art keywords
gas
flow
meter
measuring
pressure
Prior art date
Application number
GR20130100115A
Other languages
Greek (el)
Inventor
Βασιλειος Ηλια Γραμματικακης
Γεωργιος Αλεξανδρου Γενναδιος
Θεοδωρος Ηλια Αθανασοπουλος
Αναστασιος Ικαρου Πετροπουλος
Original Assignee
Θεων Αισθητηρες Α.Ε.Β.Ε.,
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Θεων Αισθητηρες Α.Ε.Β.Ε., filed Critical Θεων Αισθητηρες Α.Ε.Β.Ε.,
Priority to GR20130100115A priority Critical patent/GR1008114B/en
Publication of GR1008114B publication Critical patent/GR1008114B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/18—Supports or connecting means for meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/18—Supports or connecting means for meters
    • G01F15/185—Connecting means, e.g. bypass conduits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G01F5/005—Measuring a proportion of the volume flow by measuring pressure or differential pressure, created by the use of flow constriction

Abstract

The invention refers to a thermal gas mass flow meter that is used for measuring gas flowing into pipes by placing the meter between two sections of the pipe. The meter comprises of a housing (1) covered with a lid (2) with flow being able to run from both directions (3) (4) along the length of the device. The meter features digital, analogue or mixed signal output. The gas flow meter utilizes a miniature MEMS flow sensing element (9) measuring 7.1 mm x 3.1 mm that is manufactured of silicon on a standard MOS process. It also features a MEMS pressure sensing element (10) measuring 2 x 2 mm and is made also on a planar silicon fabrication process. The flow element operates on a thermal principle utilizing heated (35) (36) and reference resistors (33) (34) placed on two individual 2 μm thick membranes (32) (40) that make possible good thermal isolation and response. The resistors are connected into constant temperature mode and due to their symmetrical layout can be used for measuring bidirectional flow. The presence of the reference resistors (33) (34) allows by special electronic conditioning for measurement of the temperature of the gas. The pressure sensing element (10) converts pressure variations into capacitance. These are in turn converted to digital values by a Capacitance to Digital Converter (CDC) (46). Having knowledge of the current pressure and temperature of the gas makes it possible to correct for variations in gas density and improve the final gas mass calculation.
GR20130100115A 2013-02-28 2013-02-28 Thermal gas flow meter with pressure and temperature correction and method for producing the same GR1008114B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GR20130100115A GR1008114B (en) 2013-02-28 2013-02-28 Thermal gas flow meter with pressure and temperature correction and method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GR20130100115A GR1008114B (en) 2013-02-28 2013-02-28 Thermal gas flow meter with pressure and temperature correction and method for producing the same

Publications (1)

Publication Number Publication Date
GR1008114B true GR1008114B (en) 2014-02-11

Family

ID=48986160

Family Applications (1)

Application Number Title Priority Date Filing Date
GR20130100115A GR1008114B (en) 2013-02-28 2013-02-28 Thermal gas flow meter with pressure and temperature correction and method for producing the same

Country Status (1)

Country Link
GR (1) GR1008114B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3869162A1 (en) * 2020-02-24 2021-08-25 Seyonic SA Fluid flow rate measurement device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US20050183500A1 (en) * 2004-02-19 2005-08-25 Souhei Kanouda Split-flow-type flow sensor device
US20070107511A1 (en) * 2003-09-29 2007-05-17 Manfred Strohrmann Printed-circuit board having a plastic part for accommodating a measuring device
US20090095069A1 (en) * 2006-03-03 2009-04-16 Mann+Hummel Gmbh Arrangement of an Air Mass Meter at a Flow Channel
EP2482043A1 (en) * 2011-01-31 2012-08-01 Honeywell International, Inc. Flow sensor assembly with integral bypass channel

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US20070107511A1 (en) * 2003-09-29 2007-05-17 Manfred Strohrmann Printed-circuit board having a plastic part for accommodating a measuring device
US20050183500A1 (en) * 2004-02-19 2005-08-25 Souhei Kanouda Split-flow-type flow sensor device
US20090095069A1 (en) * 2006-03-03 2009-04-16 Mann+Hummel Gmbh Arrangement of an Air Mass Meter at a Flow Channel
EP2482043A1 (en) * 2011-01-31 2012-08-01 Honeywell International, Inc. Flow sensor assembly with integral bypass channel

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3869162A1 (en) * 2020-02-24 2021-08-25 Seyonic SA Fluid flow rate measurement device
US11709081B2 (en) 2020-02-24 2023-07-25 Seyonic S.A. Fluid flow rate measurement device

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PG Patent granted

Effective date: 20140317