GB992451A - High vacuum apparatus - Google Patents
High vacuum apparatusInfo
- Publication number
- GB992451A GB992451A GB5120263A GB5120263A GB992451A GB 992451 A GB992451 A GB 992451A GB 5120263 A GB5120263 A GB 5120263A GB 5120263 A GB5120263 A GB 5120263A GB 992451 A GB992451 A GB 992451A
- Authority
- GB
- United Kingdom
- Prior art keywords
- flange
- coils
- sealed
- chamber
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 230000007704 transition Effects 0.000 abstract 2
- 239000001307 helium Substances 0.000 abstract 1
- 229910052734 helium Inorganic materials 0.000 abstract 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 238000011144 upstream manufacturing Methods 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F9/00—Diffusion pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
Abstract
992,451. High vacuum apparatus. NATIONAL RESEARCH CORPORATION. Dec. 30, 1963, No. 51202/63. Heading FIN. In a vacuum apparatus wherein a cryogenically cooled inner vacuum chamber 12 is contained in an outer chamber 34 evacuated by a pump 36, a vacuum tight middle wall 18 is disposed therebetween to define with the cooled walls 10 of the inner chamber 12 an evacuation flow path 20 which communicates upstream with the interior of the inner chamber through a baffled opening 26 and downstream with diffusion pumps 30, 64. The middle wall 18 is provided with a flange 38 which sealingly engages a flange 40 on the outer chamber wall 32 and a flange 52 carried by a transition section 42 to which is sealed by means of flanges 66, 68 a tubular member 44 cooled by water in coils 45 and liquid nitrogen in coils 43. The tubular member 44 supports the inner chamber 12 and has sealed thereto a surrounding annular wall 46 sealed to the flange 38 by springs 39. The space between the annular wall 46 and the transition section 42 is evacuated by diffusion pumps 50, 62 communicating with the space through openings 48. The evacuation flow path 20 has disposed therein coils 14 supplied with gaseous helium, and radiant heaters 56. The diffusion pumps 36, 62, 64 are backed by mechanical pumps, not shown.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5120263A GB992451A (en) | 1963-12-30 | 1963-12-30 | High vacuum apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5120263A GB992451A (en) | 1963-12-30 | 1963-12-30 | High vacuum apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB992451A true GB992451A (en) | 1965-05-19 |
Family
ID=10459050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5120263A Expired GB992451A (en) | 1963-12-30 | 1963-12-30 | High vacuum apparatus |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB992451A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111378952A (en) * | 2020-04-29 | 2020-07-07 | 义乌市森煌科技有限公司 | Winding type film coating machine |
-
1963
- 1963-12-30 GB GB5120263A patent/GB992451A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111378952A (en) * | 2020-04-29 | 2020-07-07 | 义乌市森煌科技有限公司 | Winding type film coating machine |
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