GB9701965D0 - Method of fabricating a capacitor structure for a semiconductor memory device - Google Patents

Method of fabricating a capacitor structure for a semiconductor memory device

Info

Publication number
GB9701965D0
GB9701965D0 GBGB9701965.7A GB9701965A GB9701965D0 GB 9701965 D0 GB9701965 D0 GB 9701965D0 GB 9701965 A GB9701965 A GB 9701965A GB 9701965 D0 GB9701965 D0 GB 9701965D0
Authority
GB
United Kingdom
Prior art keywords
fabricating
memory device
semiconductor memory
capacitor structure
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9701965.7A
Other versions
GB2321776A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United Microelectronics Corp
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from TW085109995A external-priority patent/TW306064B/en
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to GB9701965A priority Critical patent/GB2321776A/en
Publication of GB9701965D0 publication Critical patent/GB9701965D0/en
Priority to JP9091179A priority patent/JPH1079476A/en
Priority to FR9705122A priority patent/FR2752486A1/en
Priority to DE19720202A priority patent/DE19720202C2/en
Publication of GB2321776A publication Critical patent/GB2321776A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
    • H10B12/318—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor the storage electrode having multiple segments
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
GB9701965A 1996-08-16 1997-01-30 Method of fabricating a stacked capacitor Withdrawn GB2321776A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB9701965A GB2321776A (en) 1996-08-16 1997-01-30 Method of fabricating a stacked capacitor
JP9091179A JPH1079476A (en) 1996-08-16 1997-04-09 Manufacture of capacitor structure of semiconductor memory device
FR9705122A FR2752486A1 (en) 1996-08-16 1997-04-25 METHOD FOR MANUFACTURING A CAPACITOR STRUCTURE FOR A SEMICONDUCTOR MEMORY DEVICE
DE19720202A DE19720202C2 (en) 1996-08-16 1997-05-14 Method of manufacturing a semiconductor memory device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW085109995A TW306064B (en) 1996-08-16 1996-08-16 Semiconductor memory device with capacitor (part 6)
GB9701965A GB2321776A (en) 1996-08-16 1997-01-30 Method of fabricating a stacked capacitor

Publications (2)

Publication Number Publication Date
GB9701965D0 true GB9701965D0 (en) 1997-03-19
GB2321776A GB2321776A (en) 1998-08-05

Family

ID=26310903

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9701965A Withdrawn GB2321776A (en) 1996-08-16 1997-01-30 Method of fabricating a stacked capacitor

Country Status (4)

Country Link
JP (1) JPH1079476A (en)
DE (1) DE19720202C2 (en)
FR (1) FR2752486A1 (en)
GB (1) GB2321776A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100327123B1 (en) * 1998-03-30 2002-08-24 삼성전자 주식회사 A method of fabricating dram cell capacitor
DE19942680A1 (en) * 1999-09-07 2001-04-05 Infineon Technologies Ag Integrated circuit arrangement with at least one capacitor and method for its production
US9490373B2 (en) 2012-02-02 2016-11-08 Sony Corporation Solid-state imaging device and electronic apparatus with improved storage portion
JP6007499B2 (en) * 2012-02-06 2016-10-12 ソニー株式会社 Solid-state imaging device, method for manufacturing solid-state imaging device, and electronic apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5192703A (en) * 1991-10-31 1993-03-09 Micron Technology, Inc. Method of making tungsten contact core stack capacitor
KR960008865B1 (en) * 1992-07-15 1996-07-05 Samsung Electronics Co Ltd Method for manufacturing a capacitor in semiconductor memory device
KR960006718B1 (en) * 1992-12-31 1996-05-22 현대전자산업주식회사 Memory capacitor in semiconductor device and the method for fabricating the same
JP3085831B2 (en) * 1993-09-17 2000-09-11 沖電気工業株式会社 Method for manufacturing semiconductor device
KR0140644B1 (en) * 1994-01-12 1998-06-01 문정환 Semiconductor memory device
JPH0846154A (en) * 1994-08-03 1996-02-16 Oki Electric Ind Co Ltd Method of forming storage electrode for capacitor of semiconductor memory
US5429980A (en) * 1994-10-05 1995-07-04 United Microelectronics Corporation Method of forming a stacked capacitor using sidewall spacers and local oxidation
JP2820065B2 (en) * 1995-04-27 1998-11-05 日本電気株式会社 Method for manufacturing semiconductor device

Also Published As

Publication number Publication date
JPH1079476A (en) 1998-03-24
GB2321776A (en) 1998-08-05
DE19720202C2 (en) 2001-07-26
DE19720202A1 (en) 1998-02-19
FR2752486A1 (en) 1998-02-20

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)