GB9425250D0 - Silicon capacitive pressure sensor designed for manufacturability and low long term drift - Google Patents
Silicon capacitive pressure sensor designed for manufacturability and low long term driftInfo
- Publication number
- GB9425250D0 GB9425250D0 GBGB9425250.9A GB9425250A GB9425250D0 GB 9425250 D0 GB9425250 D0 GB 9425250D0 GB 9425250 A GB9425250 A GB 9425250A GB 9425250 D0 GB9425250 D0 GB 9425250D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- manufacturability
- pressure sensor
- long term
- capacitive pressure
- sensor designed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9425250.9A GB9425250D0 (en) | 1994-12-14 | 1994-12-14 | Silicon capacitive pressure sensor designed for manufacturability and low long term drift |
PCT/GB1995/002923 WO1996018872A1 (en) | 1994-12-14 | 1995-12-14 | Capacitive pressure transducer and fabrication method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9425250.9A GB9425250D0 (en) | 1994-12-14 | 1994-12-14 | Silicon capacitive pressure sensor designed for manufacturability and low long term drift |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9425250D0 true GB9425250D0 (en) | 1995-02-08 |
Family
ID=10765942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9425250.9A Pending GB9425250D0 (en) | 1994-12-14 | 1994-12-14 | Silicon capacitive pressure sensor designed for manufacturability and low long term drift |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB9425250D0 (en) |
WO (1) | WO1996018872A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6518084B1 (en) * | 1998-12-15 | 2003-02-11 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Method of producing a micromechanical structure for a micro-electromechanical element |
WO2000036387A1 (en) | 1998-12-15 | 2000-06-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method of producing a micro-electromechanical element |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4206675C2 (en) * | 1992-02-28 | 1995-04-27 | Siemens Ag | Method for manufacturing pressure difference sensors |
US5317922A (en) * | 1992-04-30 | 1994-06-07 | Ford Motor Company | Capacitance transducer article and method of fabrication |
US5448444A (en) * | 1994-01-28 | 1995-09-05 | United Technologies Corporation | Capacitive pressure sensor having a reduced area dielectric spacer |
-
1994
- 1994-12-14 GB GBGB9425250.9A patent/GB9425250D0/en active Pending
-
1995
- 1995-12-14 WO PCT/GB1995/002923 patent/WO1996018872A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO1996018872A1 (en) | 1996-06-20 |
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