GB9425250D0 - Silicon capacitive pressure sensor designed for manufacturability and low long term drift - Google Patents

Silicon capacitive pressure sensor designed for manufacturability and low long term drift

Info

Publication number
GB9425250D0
GB9425250D0 GBGB9425250.9A GB9425250A GB9425250D0 GB 9425250 D0 GB9425250 D0 GB 9425250D0 GB 9425250 A GB9425250 A GB 9425250A GB 9425250 D0 GB9425250 D0 GB 9425250D0
Authority
GB
United Kingdom
Prior art keywords
manufacturability
pressure sensor
long term
capacitive pressure
sensor designed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9425250.9A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Otter Controls Ltd
Original Assignee
Otter Controls Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Otter Controls Ltd filed Critical Otter Controls Ltd
Priority to GBGB9425250.9A priority Critical patent/GB9425250D0/en
Publication of GB9425250D0 publication Critical patent/GB9425250D0/en
Priority to PCT/GB1995/002923 priority patent/WO1996018872A1/en
Pending legal-status Critical Current

Links

GBGB9425250.9A 1994-12-14 1994-12-14 Silicon capacitive pressure sensor designed for manufacturability and low long term drift Pending GB9425250D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB9425250.9A GB9425250D0 (en) 1994-12-14 1994-12-14 Silicon capacitive pressure sensor designed for manufacturability and low long term drift
PCT/GB1995/002923 WO1996018872A1 (en) 1994-12-14 1995-12-14 Capacitive pressure transducer and fabrication method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9425250.9A GB9425250D0 (en) 1994-12-14 1994-12-14 Silicon capacitive pressure sensor designed for manufacturability and low long term drift

Publications (1)

Publication Number Publication Date
GB9425250D0 true GB9425250D0 (en) 1995-02-08

Family

ID=10765942

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9425250.9A Pending GB9425250D0 (en) 1994-12-14 1994-12-14 Silicon capacitive pressure sensor designed for manufacturability and low long term drift

Country Status (2)

Country Link
GB (1) GB9425250D0 (en)
WO (1) WO1996018872A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6518084B1 (en) * 1998-12-15 2003-02-11 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method of producing a micromechanical structure for a micro-electromechanical element
WO2000036387A1 (en) 1998-12-15 2000-06-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method of producing a micro-electromechanical element

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4206675C2 (en) * 1992-02-28 1995-04-27 Siemens Ag Method for manufacturing pressure difference sensors
US5317922A (en) * 1992-04-30 1994-06-07 Ford Motor Company Capacitance transducer article and method of fabrication
US5448444A (en) * 1994-01-28 1995-09-05 United Technologies Corporation Capacitive pressure sensor having a reduced area dielectric spacer

Also Published As

Publication number Publication date
WO1996018872A1 (en) 1996-06-20

Similar Documents

Publication Publication Date Title
DE59508560D1 (en) Capacitive pressure sensor
EP0714505A4 (en) Capacitive pressure sensor
EP0818046A4 (en) Capacitive absolute pressure sensor and method
GB2168160B (en) Silicon capacitive pressure sensor
DE59700172D1 (en) Capacitive force sensor
GB9511576D0 (en) Electrostatic capacitance-type sensor
GB2314631B (en) Composite capacitive sensor device
EP0717836A4 (en) Media-isolated differential pressure sensor
GB2293242B (en) Capacitive touch detection
EP0716290A3 (en) Capacitance-type displacement measuring device
DK0735353T3 (en) pressure sensor
GB2314632B (en) Integrated capacitive sensor device
DE69521890D1 (en) STABILIZED PRESSURE SENSOR
GB9405899D0 (en) Gas sensor and sensing device
DE59403558D1 (en) Capacitive pressure sensor or capacitive differential pressure sensor
DE69310447D1 (en) Pressure sensor device
GB2297045B (en) Sensor drift correction
GB2295897B (en) Capacitive measuring device
DE59506697D1 (en) PRESSURE SENSOR
FI943048A (en) Capacitive type differential pressure sensor
DE59505227D1 (en) PRESSURE SENSOR
GB9425250D0 (en) Silicon capacitive pressure sensor designed for manufacturability and low long term drift
GB2281126B (en) Semiconductor capacitive acceleration sensor
GB9509840D0 (en) Pressure sensing devices
DE9406625U1 (en) Pressure sensor