GB923637A - A device for the variation of the spatial position of an article to be treated under thermally-insulating conditions - Google Patents

A device for the variation of the spatial position of an article to be treated under thermally-insulating conditions

Info

Publication number
GB923637A
GB923637A GB3082059A GB3082059A GB923637A GB 923637 A GB923637 A GB 923637A GB 3082059 A GB3082059 A GB 3082059A GB 3082059 A GB3082059 A GB 3082059A GB 923637 A GB923637 A GB 923637A
Authority
GB
United Kingdom
Prior art keywords
secured
mounting
support
spindles
pinion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3082059A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AT631058A external-priority patent/AT215495B/en
Application filed by Individual filed Critical Individual
Publication of GB923637A publication Critical patent/GB923637A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H35/00—Gearings or mechanisms with other special functional features
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21F—PROTECTION AGAINST X-RADIATION, GAMMA RADIATION, CORPUSCULAR RADIATION OR PARTICLE BOMBARDMENT; TREATING RADIOACTIVELY CONTAMINATED MATERIAL; DECONTAMINATION ARRANGEMENTS THEREFOR
    • G21F7/00—Shielded cells or rooms
    • G21F7/06—Structural combination with remotely-controlled apparatus, e.g. with manipulators
    • G21F7/063—Remotely manipulated measuring or controlling devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

923,637. Coating by vapour deposition. S. GESSNER, and F. GRASENICK. Sept. 9, 1959 [Sept. 9, 1958], No. 30820/59. Class 82. [Also in Group XX] In apparatus for coating metals or non-metals by vapour deposition or for treating articles with electrons, X-rays or ultraviolet rays, the position of the article to be treated is varied in a device comprising a mounting capable of " up and down " movement, a support capable of rotation about at least two axes and movably connected to the mounting and a mechanism for effecting the continuous movement and rotation, the device being at least partly enclosed in a thermally insulating jacket. Inside a double-walled insulating jacket E a rotatable support A carried on a mounting B is rotatably mounted in stirrup 11 by an axle 10 and stub axles 12, 12<SP>1</SP> are rotatably mounted in mounting B. A pinion 15 secured to axle 12 engages worm gear 16 secured to driving spindle D and a pinion 17 and pulley 18 are secured to axle 12<SP>1</SP>, the pinion 17 engaging with a worm gear 22 secured to driving spindle D<SP>1</SP>. A belt 19 passes over idler pulleys 20 and driving pulley 21 secured to support A. Spindles D, D<SP>1</SP> make sliding contact with mounting B via bushes 23, 23<SP>1</SP> and spindles C, D and D<SP>1</SP> rotatably mounted in holders 24, 25 are driven by motors M1, M2, M3. The spindles C have spiral threads meshing with threaded bushings 26 secured to B for raising and lowering B and the device permits movement of the support A in directions shown by arrows 1, 2 and 3. The insulating jacket E may be placed in an evacuated vessel and the annular space between the walls of jacket E may be evacuated or filled with a heating or cooling medium.
GB3082059A 1958-09-09 1959-09-09 A device for the variation of the spatial position of an article to be treated under thermally-insulating conditions Expired GB923637A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT631058A AT215495B (en) 1958-09-09 1958-09-09 Device for adjusting the spatial position of objects to be treated in a thermally insulating treatment chamber

Publications (1)

Publication Number Publication Date
GB923637A true GB923637A (en) 1963-04-18

Family

ID=3585009

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3082059A Expired GB923637A (en) 1958-09-09 1959-09-09 A device for the variation of the spatial position of an article to be treated under thermally-insulating conditions

Country Status (3)

Country Link
CH (1) CH380410A (en)
DE (1) DE1165900B (en)
GB (1) GB923637A (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE491601C (en) * 1926-09-18 1930-02-15 Karl Vossloh Furnace for the quenching and tempering of steel parts in continuous operation, in which tiltable bowls are led intermittently through a ring-shaped heating channel
DE869129C (en) * 1942-07-19 1953-03-02 Suerth Maschf Test cabinet
DE935637C (en) * 1953-09-02 1955-11-24 Heraeus Gmbh W C Temperature controller for immersion baths heated indirectly by means of a heating bath

Also Published As

Publication number Publication date
DE1165900B (en) 1964-03-19
CH380410A (en) 1964-07-31

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