GB9009319D0 - Gaseous radical source - Google Patents

Gaseous radical source

Info

Publication number
GB9009319D0
GB9009319D0 GB9009319A GB9009319A GB9009319D0 GB 9009319 D0 GB9009319 D0 GB 9009319D0 GB 9009319 A GB9009319 A GB 9009319A GB 9009319 A GB9009319 A GB 9009319A GB 9009319 D0 GB9009319 D0 GB 9009319D0
Authority
GB
Grant status
Grant
Patent type
Prior art keywords
radical source
gaseous radical
gaseous
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB9009319A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SECR DEFENCE
United Kingdom Secretary of State for Defence
Original Assignee
SECR DEFENCE
United Kingdom Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

GB9009319A 1990-04-25 1990-04-25 Gaseous radical source Pending GB9009319D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9009319A GB9009319D0 (en) 1990-04-25 1990-04-25 Gaseous radical source

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB9009319A GB9009319D0 (en) 1990-04-25 1990-04-25 Gaseous radical source
EP19910907769 EP0526491A1 (en) 1990-04-25 1991-04-23 Gaseous radical producing apparatus
JP50698691A JPH05506328A (en) 1990-04-25 1991-04-23
PCT/GB1991/000556 WO1991016723A1 (en) 1990-04-25 1991-04-23 Gaseous radical producing apparatus
GB9221198A GB2261986B (en) 1990-04-25 1992-10-08 Gaseous radical producing apparatus

Publications (1)

Publication Number Publication Date
GB9009319D0 true GB9009319D0 (en) 1990-06-20

Family

ID=10674987

Family Applications (2)

Application Number Title Priority Date Filing Date
GB9009319A Pending GB9009319D0 (en) 1990-04-25 1990-04-25 Gaseous radical source
GB9221198A Expired - Fee Related GB2261986B (en) 1990-04-25 1992-10-08 Gaseous radical producing apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB9221198A Expired - Fee Related GB2261986B (en) 1990-04-25 1992-10-08 Gaseous radical producing apparatus

Country Status (4)

Country Link
EP (1) EP0526491A1 (en)
JP (1) JPH05506328A (en)
GB (2) GB9009319D0 (en)
WO (1) WO1991016723A1 (en)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0228881B2 (en) * 1983-04-19 1990-06-27 Nippon Shinku Gijutsu Kk
FR2546358B1 (en) * 1983-05-20 1985-07-05 Commissariat Energie Atomique ion cyclotron resonance source of electrons
JPH0616384B2 (en) * 1984-06-11 1994-03-02 日本電信電話株式会社 Microwave ion source
JPS6113626A (en) * 1984-06-29 1986-01-21 Hitachi Ltd Plasma processor
JPH0531260B2 (en) * 1984-10-30 1993-05-12 Hitachi Ltd
JPH0654644B2 (en) * 1985-10-04 1994-07-20 株式会社日立製作所 Ion source
US4788473A (en) * 1986-06-20 1988-11-29 Fujitsu Limited Plasma generating device with stepped waveguide transition
JPH01225041A (en) * 1988-03-03 1989-09-07 Mitsubishi Electric Corp Ion source device
JP2805009B2 (en) * 1988-05-11 1998-09-30 株式会社日立製作所 Plasma generating apparatus and plasma elemental analyzer
US4883968A (en) * 1988-06-03 1989-11-28 Eaton Corporation Electron cyclotron resonance ion source
JPH10225041A (en) * 1997-02-05 1998-08-21 Toshiba Corp Motor

Also Published As

Publication number Publication date Type
GB9221198D0 (en) 1993-01-06 grant
JPH05506328A (en) 1993-09-16 application
GB2261986A (en) 1993-06-02 application
GB2261986B (en) 1994-08-24 grant
EP0526491A1 (en) 1993-02-10 application
WO1991016723A1 (en) 1991-10-31 application

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