GB785878A - A method of carrying out industrial processes in a glow discharge - Google Patents
A method of carrying out industrial processes in a glow dischargeInfo
- Publication number
- GB785878A GB785878A GB4499/54A GB449954A GB785878A GB 785878 A GB785878 A GB 785878A GB 4499/54 A GB4499/54 A GB 4499/54A GB 449954 A GB449954 A GB 449954A GB 785878 A GB785878 A GB 785878A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathodes
- glow
- discharge
- fringes
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title 1
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- 239000007789 gas Substances 0.000 abstract 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 2
- 229910052721 tungsten Inorganic materials 0.000 abstract 2
- 239000010937 tungsten Substances 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 229910021529 ammonia Inorganic materials 0.000 abstract 1
- 238000000137 annealing Methods 0.000 abstract 1
- 238000005255 carburizing Methods 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 238000005121 nitriding Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/34—Methods of heating
- C21D1/38—Heating by cathodic discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH785878X | 1953-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB785878A true GB785878A (en) | 1957-11-06 |
Family
ID=4536581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB4499/54A Expired GB785878A (en) | 1953-02-17 | 1954-02-16 | A method of carrying out industrial processes in a glow discharge |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US2955998A (forum.php) |
| BE (1) | BE526527A (forum.php) |
| CH (1) | CH314340A (forum.php) |
| DE (1) | DE976529C (forum.php) |
| FR (1) | FR1097674A (forum.php) |
| GB (1) | GB785878A (forum.php) |
| NL (2) | NL83318C (forum.php) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3256818A (en) * | 1955-11-26 | 1966-06-21 | Berghaus Bernhard | Method of reducing barrel wear |
| DE3029339A1 (de) * | 1979-09-14 | 1981-03-26 | Hitachi, Ltd., Tokio/Tokyo | Verfahren und vorrichtung zur behandlung elektrisch leitenden materials durch glimmentladung |
| US4394234A (en) | 1979-02-02 | 1983-07-19 | Hitachi, Ltd. | Method of processing electrically conductive material by glow discharge |
| GB2170350A (en) * | 1984-12-13 | 1986-07-30 | Stc Plc | Plasma reactor vessel and process |
| US4749589A (en) * | 1984-12-13 | 1988-06-07 | Stc Plc | Method of surface treatment |
| US9212416B2 (en) | 2009-08-07 | 2015-12-15 | Swagelok Company | Low temperature carburization under soft vacuum |
| US9617632B2 (en) | 2012-01-20 | 2017-04-11 | Swagelok Company | Concurrent flow of activating gas in low temperature carburization |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3231484A (en) * | 1956-10-27 | 1966-01-25 | Berghaus Elektrophysik Anst | Method of sustaining a glow discharge in a high pressure area |
| CH404010A (de) * | 1961-03-30 | 1965-12-15 | Berghaus Elektrophysik Anst | Verfahren und Vorrichtung zur Durchführung technischer Prozesse unter Einwirkung einer elektrischen Glimmentladung |
| DE1271267B (de) * | 1961-04-14 | 1968-06-27 | Litton Systems Inc | Niederdruck-Quecksilberdampfentladungsroehre |
| US3239368A (en) * | 1962-04-26 | 1966-03-08 | Nra Inc | Method of preparing thin films on substrates by an electrical discharge |
| NL298098A (forum.php) * | 1962-09-20 | |||
| US3314873A (en) * | 1962-11-28 | 1967-04-18 | Western Electric Co | Method and apparatus for cathode sputtering using a cylindrical cathode |
| US3423562A (en) * | 1965-06-24 | 1969-01-21 | Gen Electric | Glow discharge apparatus |
| CH551496A (de) * | 1970-09-21 | 1974-07-15 | Berghaus Bernhard Elektrophysi | Verfahren zur verfestigung der oberflaeche von werkstuecken aus eisen und stahl. |
| FR2119930B1 (forum.php) * | 1970-12-31 | 1974-08-19 | Ibm | |
| US3723289A (en) * | 1971-08-12 | 1973-03-27 | Celanese Corp | Method and apparatus for plasma treatment of substrates |
| DE2811942C2 (de) * | 1977-03-23 | 1986-09-18 | Vide et Traitement S.A., Neuilly-en-Thelle | Ofen zur ionischen Nitrierbehandlung von metallischen Werkstücken |
| CH659346A5 (de) * | 1983-05-10 | 1987-01-15 | Balzers Hochvakuum | Vorrichtung zum behandeln der innenwand eines rohres. |
| DE19652633A1 (de) * | 1996-09-13 | 1998-03-19 | Euromat Gmbh | Verfahren und Vorrichtung zum Innenbeschichten metallischer Bauteile |
| DE19722056A1 (de) * | 1997-05-27 | 1998-12-03 | Roland Dr Gesche | Verfahren und Anordnung zum Herstellen dünner Schichten mittels Niederdruck-Gasentladung in einer Hohlkathode |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1162149A (en) * | 1914-10-22 | 1915-11-30 | Engelhardt A Eckhardt | Process of making wear-withstanding coat. |
| US2164595A (en) * | 1936-12-07 | 1939-07-04 | Siemens Ag | Method of coating electrodes |
| DE722131C (de) * | 1937-08-15 | 1942-07-01 | Bernhard Berghaus | Anordnung und Verfahren zum Metallisieren von Gegenstaenden mittels Kathodenzerstaeubung |
| FR841904A (fr) * | 1937-08-26 | 1939-06-01 | Procédé pour métalliser ou revêtir des articles d'une matière vaporisée thermiquement | |
| US2237328A (en) * | 1938-02-19 | 1941-04-08 | Birdseye Electric Corp | Metal-coating bulbs or the like |
| US2438561A (en) * | 1942-04-30 | 1948-03-30 | Gen Electric | Electrothermal deposition apparatus |
| US2434931A (en) * | 1944-12-01 | 1948-01-27 | Bell Telephone Labor Inc | Method and apparatus for ionic discharge coating |
| NL163085B (nl) * | 1950-08-03 | Siemens Ag | Schakelinrichting voor het overdragen van berichten over een uit verscheidene parallel geschakelde lijnen bestaande overdrachtsweg. |
-
0
- NL NLAANVRAGE7312098,A patent/NL178001B/xx unknown
- BE BE526527D patent/BE526527A/xx unknown
- NL NL83318D patent/NL83318C/xx active
-
1953
- 1953-02-17 CH CH314340D patent/CH314340A/de unknown
-
1954
- 1954-02-11 DE DEE8555A patent/DE976529C/de not_active Expired
- 1954-02-15 FR FR1097674D patent/FR1097674A/fr not_active Expired
- 1954-02-16 GB GB4499/54A patent/GB785878A/en not_active Expired
- 1954-02-17 US US410933A patent/US2955998A/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3256818A (en) * | 1955-11-26 | 1966-06-21 | Berghaus Bernhard | Method of reducing barrel wear |
| US4394234A (en) | 1979-02-02 | 1983-07-19 | Hitachi, Ltd. | Method of processing electrically conductive material by glow discharge |
| DE3029339A1 (de) * | 1979-09-14 | 1981-03-26 | Hitachi, Ltd., Tokio/Tokyo | Verfahren und vorrichtung zur behandlung elektrisch leitenden materials durch glimmentladung |
| GB2170350A (en) * | 1984-12-13 | 1986-07-30 | Stc Plc | Plasma reactor vessel and process |
| US4749589A (en) * | 1984-12-13 | 1988-06-07 | Stc Plc | Method of surface treatment |
| US9212416B2 (en) | 2009-08-07 | 2015-12-15 | Swagelok Company | Low temperature carburization under soft vacuum |
| US10156006B2 (en) | 2009-08-07 | 2018-12-18 | Swagelok Company | Low temperature carburization under soft vacuum |
| US10934611B2 (en) | 2009-08-07 | 2021-03-02 | Swagelok Company | Low temperature carburization under soft vacuum |
| US9617632B2 (en) | 2012-01-20 | 2017-04-11 | Swagelok Company | Concurrent flow of activating gas in low temperature carburization |
| US10246766B2 (en) | 2012-01-20 | 2019-04-02 | Swagelok Company | Concurrent flow of activating gas in low temperature carburization |
| US11035032B2 (en) | 2012-01-20 | 2021-06-15 | Swagelok Company | Concurrent flow of activating gas in low temperature carburization |
Also Published As
| Publication number | Publication date |
|---|---|
| NL83318C (forum.php) | |
| US2955998A (en) | 1960-10-11 |
| NL178001B (nl) | |
| BE526527A (forum.php) | |
| FR1097674A (fr) | 1955-07-08 |
| CH314340A (de) | 1956-06-15 |
| DE976529C (de) | 1963-10-24 |
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