GB2513075A - Device for supporting mechanical seal faces - Google Patents
Device for supporting mechanical seal faces Download PDFInfo
- Publication number
- GB2513075A GB2513075A GB1413993.5A GB201413993A GB2513075A GB 2513075 A GB2513075 A GB 2513075A GB 201413993 A GB201413993 A GB 201413993A GB 2513075 A GB2513075 A GB 2513075A
- Authority
- GB
- United Kingdom
- Prior art keywords
- mechanical seal
- seal faces
- supporting mechanical
- supporting
- support means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/3496—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member use of special materials
Abstract
A device is for supporting within a coating chamber a mechanical seal face (8) having an annular sealing surface. The device includes a frame (1 ) housing first support means (9) for supporting the seal face when the device is in a first orientation with the annular sealing surface resting on a surface of said first support means. Second support means (2) within the frame supports the seal face when the device is in a second orientation.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB1202262.0A GB201202262D0 (en) | 2012-02-09 | 2012-02-09 | Mechanical seal faces synthetic diamond coating fixture |
PCT/GB2013/000049 WO2013117885A1 (en) | 2012-02-09 | 2013-02-08 | Device for supporting mechanical seal faces |
Publications (3)
Publication Number | Publication Date |
---|---|
GB201413993D0 GB201413993D0 (en) | 2014-09-24 |
GB2513075A true GB2513075A (en) | 2014-10-15 |
GB2513075B GB2513075B (en) | 2018-10-03 |
Family
ID=45929882
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB1202262.0A Ceased GB201202262D0 (en) | 2012-02-09 | 2012-02-09 | Mechanical seal faces synthetic diamond coating fixture |
GB1413993.5A Active GB2513075B (en) | 2012-02-09 | 2013-02-08 | Mechanical seal faces |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB1202262.0A Ceased GB201202262D0 (en) | 2012-02-09 | 2012-02-09 | Mechanical seal faces synthetic diamond coating fixture |
Country Status (3)
Country | Link |
---|---|
US (1) | US9856982B2 (en) |
GB (2) | GB201202262D0 (en) |
WO (1) | WO2013117885A1 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10017120C1 (en) * | 2000-04-06 | 2002-02-07 | Jostra Ag | Surface exposure device for supporting annular object in material or energy particle stream uses fixing hoop for suspension of object attached to rotatable bolt |
EP1482545A1 (en) * | 2002-02-25 | 2004-12-01 | Tokyo Electron Limited | Substrate support mechanism for semiconductor processing system |
US20090067954A1 (en) * | 2007-09-07 | 2009-03-12 | Khamsidi Lanee | Automated systems and methods for adapting semiconductor fabrication tools to process wafers of different diameters |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1247764B (en) * | 1990-10-22 | 1994-12-30 | Cselt Centro Studi Lab Telecom | SYSTEM FOR MEASURING THE PROFILE OF THE REFRACTIVE INDEX OF OPTICAL COMPONENTS |
JP4824590B2 (en) * | 2007-01-31 | 2011-11-30 | 東京エレクトロン株式会社 | Substrate processing equipment |
-
2012
- 2012-02-09 GB GBGB1202262.0A patent/GB201202262D0/en not_active Ceased
-
2013
- 2013-02-08 WO PCT/GB2013/000049 patent/WO2013117885A1/en active Application Filing
- 2013-02-08 GB GB1413993.5A patent/GB2513075B/en active Active
- 2013-02-08 US US14/377,620 patent/US9856982B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10017120C1 (en) * | 2000-04-06 | 2002-02-07 | Jostra Ag | Surface exposure device for supporting annular object in material or energy particle stream uses fixing hoop for suspension of object attached to rotatable bolt |
EP1482545A1 (en) * | 2002-02-25 | 2004-12-01 | Tokyo Electron Limited | Substrate support mechanism for semiconductor processing system |
US20090067954A1 (en) * | 2007-09-07 | 2009-03-12 | Khamsidi Lanee | Automated systems and methods for adapting semiconductor fabrication tools to process wafers of different diameters |
Also Published As
Publication number | Publication date |
---|---|
US20140346736A1 (en) | 2014-11-27 |
GB2513075B (en) | 2018-10-03 |
US9856982B2 (en) | 2018-01-02 |
WO2013117885A1 (en) | 2013-08-15 |
GB201202262D0 (en) | 2012-03-28 |
GB201413993D0 (en) | 2014-09-24 |
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