GB2513075A - Device for supporting mechanical seal faces - Google Patents

Device for supporting mechanical seal faces Download PDF

Info

Publication number
GB2513075A
GB2513075A GB1413993.5A GB201413993A GB2513075A GB 2513075 A GB2513075 A GB 2513075A GB 201413993 A GB201413993 A GB 201413993A GB 2513075 A GB2513075 A GB 2513075A
Authority
GB
United Kingdom
Prior art keywords
mechanical seal
seal faces
supporting mechanical
supporting
support means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB1413993.5A
Other versions
GB2513075B (en
GB201413993D0 (en
Inventor
Christopher James Iveson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
A E S ENGINEERING Ltd
AES Engineering Ltd
Original Assignee
A E S ENGINEERING Ltd
AES Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by A E S ENGINEERING Ltd, AES Engineering Ltd filed Critical A E S ENGINEERING Ltd
Publication of GB201413993D0 publication Critical patent/GB201413993D0/en
Publication of GB2513075A publication Critical patent/GB2513075A/en
Application granted granted Critical
Publication of GB2513075B publication Critical patent/GB2513075B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/16Sealings between relatively-moving surfaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/16Sealings between relatively-moving surfaces
    • F16J15/34Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
    • F16J15/3496Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member use of special materials

Abstract

A device is for supporting within a coating chamber a mechanical seal face (8) having an annular sealing surface. The device includes a frame (1 ) housing first support means (9) for supporting the seal face when the device is in a first orientation with the annular sealing surface resting on a surface of said first support means. Second support means (2) within the frame supports the seal face when the device is in a second orientation.
GB1413993.5A 2012-02-09 2013-02-08 Mechanical seal faces Active GB2513075B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB1202262.0A GB201202262D0 (en) 2012-02-09 2012-02-09 Mechanical seal faces synthetic diamond coating fixture
PCT/GB2013/000049 WO2013117885A1 (en) 2012-02-09 2013-02-08 Device for supporting mechanical seal faces

Publications (3)

Publication Number Publication Date
GB201413993D0 GB201413993D0 (en) 2014-09-24
GB2513075A true GB2513075A (en) 2014-10-15
GB2513075B GB2513075B (en) 2018-10-03

Family

ID=45929882

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB1202262.0A Ceased GB201202262D0 (en) 2012-02-09 2012-02-09 Mechanical seal faces synthetic diamond coating fixture
GB1413993.5A Active GB2513075B (en) 2012-02-09 2013-02-08 Mechanical seal faces

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB1202262.0A Ceased GB201202262D0 (en) 2012-02-09 2012-02-09 Mechanical seal faces synthetic diamond coating fixture

Country Status (3)

Country Link
US (1) US9856982B2 (en)
GB (2) GB201202262D0 (en)
WO (1) WO2013117885A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10017120C1 (en) * 2000-04-06 2002-02-07 Jostra Ag Surface exposure device for supporting annular object in material or energy particle stream uses fixing hoop for suspension of object attached to rotatable bolt
EP1482545A1 (en) * 2002-02-25 2004-12-01 Tokyo Electron Limited Substrate support mechanism for semiconductor processing system
US20090067954A1 (en) * 2007-09-07 2009-03-12 Khamsidi Lanee Automated systems and methods for adapting semiconductor fabrication tools to process wafers of different diameters

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1247764B (en) * 1990-10-22 1994-12-30 Cselt Centro Studi Lab Telecom SYSTEM FOR MEASURING THE PROFILE OF THE REFRACTIVE INDEX OF OPTICAL COMPONENTS
JP4824590B2 (en) * 2007-01-31 2011-11-30 東京エレクトロン株式会社 Substrate processing equipment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10017120C1 (en) * 2000-04-06 2002-02-07 Jostra Ag Surface exposure device for supporting annular object in material or energy particle stream uses fixing hoop for suspension of object attached to rotatable bolt
EP1482545A1 (en) * 2002-02-25 2004-12-01 Tokyo Electron Limited Substrate support mechanism for semiconductor processing system
US20090067954A1 (en) * 2007-09-07 2009-03-12 Khamsidi Lanee Automated systems and methods for adapting semiconductor fabrication tools to process wafers of different diameters

Also Published As

Publication number Publication date
US20140346736A1 (en) 2014-11-27
GB2513075B (en) 2018-10-03
US9856982B2 (en) 2018-01-02
WO2013117885A1 (en) 2013-08-15
GB201202262D0 (en) 2012-03-28
GB201413993D0 (en) 2014-09-24

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