GB2468177A8 - Optical surface measuring apparatus and method. - Google Patents

Optical surface measuring apparatus and method. Download PDF

Info

Publication number
GB2468177A8
GB2468177A8 GB0918220A GB0918220A GB2468177A8 GB 2468177 A8 GB2468177 A8 GB 2468177A8 GB 0918220 A GB0918220 A GB 0918220A GB 0918220 A GB0918220 A GB 0918220A GB 2468177 A8 GB2468177 A8 GB 2468177A8
Authority
GB
Grant status
Application
Patent type
Prior art keywords
method
measuring apparatus
optical surface
surface measuring
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0918220A
Other versions
GB0918220D0 (en )
GB2468177B (en )
GB2468177A (en )
Inventor
Kyu Man Cho
Jae Hyun Kim
Kyoung Up Kim
Seung-Yop Lee
Young Kyu Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sogang University Industry-University Cooperation Foundation
Original Assignee
Sogang University Industry-University Cooperation Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/24Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical means for measuring contours or curvatures using interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/02Measuring arrangements characterised by the use of optical means for measuring length, width or thickness
    • G01B11/026Measuring arrangements characterised by the use of optical means for measuring length, width or thickness by measuring distance between sensor and object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/02Measuring arrangements characterised by the use of optical means for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness, e.g. of sheet material
    • G01B11/0608Height gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/22Measuring arrangements characterised by the use of optical means for measuring depth
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/24Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/30Measuring arrangements characterised by the use of optical means for measuring roughness or irregularity of surfaces
GB0918220A 2009-02-27 2009-10-16 Optical surface measuring apparatus and method Active GB2468177B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR20090017175A KR101085014B1 (en) 2009-02-27 2009-02-27 Optical surface measuring apparatus and method
GB0918220A GB2468177B (en) 2009-02-27 2009-10-16 Optical surface measuring apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0918220A GB2468177B (en) 2009-02-27 2009-10-16 Optical surface measuring apparatus and method

Publications (4)

Publication Number Publication Date
GB0918220D0 GB0918220D0 (en) 2009-12-02
GB2468177A true GB2468177A (en) 2010-09-01
GB2468177A8 true true GB2468177A8 (en) 2010-09-22
GB2468177B GB2468177B (en) 2011-01-12

Family

ID=41462511

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0918220A Active GB2468177B (en) 2009-02-27 2009-10-16 Optical surface measuring apparatus and method

Country Status (1)

Country Link
GB (1) GB2468177B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105606036A (en) * 2014-11-20 2016-05-25 中国航空工业第六一八研究所 Surface error inspection method based on surface topography data

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013131036A1 (en) 2012-03-01 2013-09-06 H4 Engineering, Inc. Apparatus and method for automatic video recording

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2271590B1 (en) * 1974-01-15 1978-12-01 Thomson Brandt
GB8411592D0 (en) * 1984-05-05 1984-06-13 Spectron Dev Lab Inc Astigmatic non-contact optical probe
US7187630B2 (en) * 2001-06-11 2007-03-06 Mitutoyo Corporation Focusing servo device and focusing servo method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105606036A (en) * 2014-11-20 2016-05-25 中国航空工业第六一八研究所 Surface error inspection method based on surface topography data
CN105606036B (en) * 2014-11-20 2018-07-06 中国航空工业第六八研究所 Misalignments test methods based on surface shape of the surface topography data

Also Published As

Publication number Publication date Type
GB0918220D0 (en) 2009-12-02 grant
GB2468177B (en) 2011-01-12 grant
GB2468177A (en) 2010-09-01 application

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