GB2389811B - Ultraviolet laser ablative patterning of microstructures in semiconductors - Google Patents

Ultraviolet laser ablative patterning of microstructures in semiconductors

Info

Publication number
GB2389811B
GB2389811B GB0317853A GB0317853A GB2389811B GB 2389811 B GB2389811 B GB 2389811B GB 0317853 A GB0317853 A GB 0317853A GB 0317853 A GB0317853 A GB 0317853A GB 2389811 B GB2389811 B GB 2389811B
Authority
GB
United Kingdom
Prior art keywords
microstructures
semiconductors
ultraviolet laser
laser ablative
ablative patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0317853A
Other versions
GB2389811A (en
GB0317853D0 (en
Inventor
Brian W Baird
Michael J Wolfe
Richard J Harris
Kevin P Fahey
Thomas R Mcneil
Lain-Cheng Zou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electro Scientific Industries Inc
Original Assignee
Electro Scientific Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/803,382 external-priority patent/US20020033558A1/en
Application filed by Electro Scientific Industries Inc filed Critical Electro Scientific Industries Inc
Publication of GB0317853D0 publication Critical patent/GB0317853D0/en
Publication of GB2389811A publication Critical patent/GB2389811A/en
Application granted granted Critical
Publication of GB2389811B publication Critical patent/GB2389811B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/52—Ceramics
GB0317853A 2001-01-31 2002-01-10 Ultraviolet laser ablative patterning of microstructures in semiconductors Expired - Fee Related GB2389811B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US26555601P 2001-01-31 2001-01-31
US09/803,382 US20020033558A1 (en) 2000-09-20 2001-03-09 UV laser cutting or shape modification of brittle, high melting temperature target materials such as ceramics or glasses
PCT/US2002/000867 WO2002060636A1 (en) 2001-01-31 2002-01-10 Ultraviolet laser ablative patterning of microstructures in semiconductors

Publications (3)

Publication Number Publication Date
GB0317853D0 GB0317853D0 (en) 2003-09-03
GB2389811A GB2389811A (en) 2003-12-24
GB2389811B true GB2389811B (en) 2004-10-27

Family

ID=26951292

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0317853A Expired - Fee Related GB2389811B (en) 2001-01-31 2002-01-10 Ultraviolet laser ablative patterning of microstructures in semiconductors

Country Status (7)

Country Link
EP (1) EP1365880A4 (en)
JP (1) JP4634692B2 (en)
CN (1) CN1301178C (en)
CA (1) CA2436736A1 (en)
GB (1) GB2389811B (en)
TW (1) TW525240B (en)
WO (1) WO2002060636A1 (en)

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US6676878B2 (en) 2001-01-31 2004-01-13 Electro Scientific Industries, Inc. Laser segmented cutting
US6949449B2 (en) 2003-07-11 2005-09-27 Electro Scientific Industries, Inc. Method of forming a scribe line on a ceramic substrate
US7985942B2 (en) * 2004-05-28 2011-07-26 Electro Scientific Industries, Inc. Method of providing consistent quality of target material removal by lasers having different output performance characteristics
US20060108327A1 (en) * 2004-11-23 2006-05-25 Chng Kiong C Method of manufacturing a microstructure
DE102005042072A1 (en) * 2005-06-01 2006-12-14 Forschungsverbund Berlin E.V. Vertical electrical contact connections e.g. micro-vias, producing method for silicon carbide-wafer, involves laser boring of passage holes through wafer and active layers and applying antiwetting layer in area of openings of holes
JP2007067082A (en) * 2005-08-30 2007-03-15 Disco Abrasive Syst Ltd Perforation method of wafer
DE102005042074A1 (en) 2005-08-31 2007-03-08 Forschungsverbund Berlin E.V. Method for producing plated-through holes in semiconductor wafers
US7767595B2 (en) * 2006-10-26 2010-08-03 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device
CN101041415B (en) * 2006-11-07 2010-08-11 东南大学 Method for making nano hole on silicon chip
JP2008155274A (en) * 2006-12-26 2008-07-10 Disco Abrasive Syst Ltd Method of machining wafer
KR101041140B1 (en) * 2009-03-25 2011-06-13 삼성모바일디스플레이주식회사 Method for cutting substrate using the same
CN101850981A (en) * 2010-06-23 2010-10-06 东北林业大学 Method ablating and preparing silicon dioxide nanometer foam with laser
JP5860219B2 (en) * 2011-03-10 2016-02-16 株式会社ディスコ Laser processing equipment
TW201716167A (en) * 2011-08-18 2017-05-16 奧寶科技有限公司 Inspection/repair/reinspection system for electrical circuits and laser writing system
CN102956239A (en) * 2011-08-29 2013-03-06 新科实业有限公司 Magnetic head, magnetic head fold-fin combination and disk drive unit
CN103567642B (en) * 2012-08-08 2017-07-11 赛恩倍吉科技顾问（深圳）有限公司 Sapphire cutter sweep
CN103962727B (en) * 2013-01-28 2018-03-02 深圳市裕展精密科技有限公司 Sapphire cutter device
US10118250B1 (en) 2017-09-15 2018-11-06 International Business Machines Corporation In-situ laser beam position and spot size sensor and high speed scanner calibration, wafer debonding method
CN108326435B (en) * 2017-12-29 2022-08-30 大族激光科技产业集团股份有限公司 Laser marking method for die steel
CN108637472B (en) * 2018-06-05 2023-12-08 昆山宝锦激光拼焊有限公司 Skylight laser welding line platform
CN108637473B (en) * 2018-06-05 2023-12-08 昆山宝锦激光拼焊有限公司 One-time positioning welding forming device for skylight plate

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US4534804A (en) * 1984-06-14 1985-08-13 International Business Machines Corporation Laser process for forming identically positioned alignment marks on the opposite sides of a semiconductor wafer
US5751585A (en) * 1995-03-20 1998-05-12 Electro Scientific Industries, Inc. High speed, high accuracy multi-stage tool positioning system
US5841099A (en) * 1994-07-18 1998-11-24 Electro Scientific Industries, Inc. Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
US5963364A (en) * 1994-02-18 1999-10-05 New Wave Research Multi-wavelength variable attenuator and half wave plate
US6032997A (en) * 1998-04-16 2000-03-07 Excimer Laser Systems Vacuum chuck
US6057180A (en) * 1998-06-05 2000-05-02 Electro Scientific Industries, Inc. Method of severing electrically conductive links with ultraviolet laser output
US6063695A (en) * 1998-11-16 2000-05-16 Taiwan Semiconductor Manufacturing Company Simplified process for the fabrication of deep clear laser marks using a photoresist mask
US6255621B1 (en) * 2000-01-31 2001-07-03 International Business Machines Corporation Laser cutting method for forming magnetic recording head sliders
US6536337B2 (en) * 2000-05-25 2003-03-25 Deere & Company Bale wrapping supply roll handling arrangement

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US5847960A (en) * 1995-03-20 1998-12-08 Electro Scientific Industries, Inc. Multi-tool positioning system
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TW482705B (en) * 1999-05-28 2002-04-11 Electro Scient Ind Inc Beam shaping and projection imaging with solid state UV Gaussian beam to form blind vias
US6472295B1 (en) * 1999-08-27 2002-10-29 Jmar Research, Inc. Method and apparatus for laser ablation of a target material
US6356337B1 (en) * 2000-03-08 2002-03-12 Anvik Corporation Two-sided substrate imaging using single-approach projection optics

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534804A (en) * 1984-06-14 1985-08-13 International Business Machines Corporation Laser process for forming identically positioned alignment marks on the opposite sides of a semiconductor wafer
US5963364A (en) * 1994-02-18 1999-10-05 New Wave Research Multi-wavelength variable attenuator and half wave plate
US5841099A (en) * 1994-07-18 1998-11-24 Electro Scientific Industries, Inc. Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
US5751585A (en) * 1995-03-20 1998-05-12 Electro Scientific Industries, Inc. High speed, high accuracy multi-stage tool positioning system
US6032997A (en) * 1998-04-16 2000-03-07 Excimer Laser Systems Vacuum chuck
US6057180A (en) * 1998-06-05 2000-05-02 Electro Scientific Industries, Inc. Method of severing electrically conductive links with ultraviolet laser output
US6063695A (en) * 1998-11-16 2000-05-16 Taiwan Semiconductor Manufacturing Company Simplified process for the fabrication of deep clear laser marks using a photoresist mask
US6255621B1 (en) * 2000-01-31 2001-07-03 International Business Machines Corporation Laser cutting method for forming magnetic recording head sliders
US6536337B2 (en) * 2000-05-25 2003-03-25 Deere & Company Bale wrapping supply roll handling arrangement

Also Published As

Publication number Publication date
TW525240B (en) 2003-03-21
EP1365880A4 (en) 2008-04-16
GB2389811A (en) 2003-12-24
JP4634692B2 (en) 2011-02-16
WO2002060636A1 (en) 2002-08-08
GB0317853D0 (en) 2003-09-03
JP2004526575A (en) 2004-09-02
CN1301178C (en) 2007-02-21
CN1527754A (en) 2004-09-08
EP1365880A1 (en) 2003-12-03
CA2436736A1 (en) 2002-08-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20100110