GB2266960B - Capacitive differential pressure detector - Google Patents

Capacitive differential pressure detector

Info

Publication number
GB2266960B
GB2266960B GB9314964A GB9314964A GB2266960B GB 2266960 B GB2266960 B GB 2266960B GB 9314964 A GB9314964 A GB 9314964A GB 9314964 A GB9314964 A GB 9314964A GB 2266960 B GB2266960 B GB 2266960B
Authority
GB
United Kingdom
Prior art keywords
differential pressure
pressure detector
capacitive differential
capacitive
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9314964A
Other versions
GB2266960A (en
GB9314964D0 (en
Inventor
Mitsura Tamai
Tadanori Yuhara
Kimihiro Nakamura
Kazuaki Kitamura
Toshiyuki Takano
Teizo Takahama
Mikihiko Matsuda
Shinichi Souma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB9008565A external-priority patent/GB2231159B/en
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Publication of GB9314964D0 publication Critical patent/GB9314964D0/en
Publication of GB2266960A publication Critical patent/GB2266960A/en
Application granted granted Critical
Publication of GB2266960B publication Critical patent/GB2266960B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
GB9314964A 1989-04-14 1993-07-29 Capacitive differential pressure detector Expired - Fee Related GB2266960B (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP9480489 1989-04-14
JP9480589 1989-04-14
JP20526789 1989-08-08
JP20526689 1989-08-08
JP20526589 1989-08-08
GB9008565A GB2231159B (en) 1989-04-14 1990-04-17 Capacitive differential pressure detector

Publications (3)

Publication Number Publication Date
GB9314964D0 GB9314964D0 (en) 1993-09-01
GB2266960A GB2266960A (en) 1993-11-17
GB2266960B true GB2266960B (en) 1994-02-02

Family

ID=27547083

Family Applications (4)

Application Number Title Priority Date Filing Date
GB9315065A Expired - Fee Related GB2266963B (en) 1989-04-14 1993-07-20 Capacitive differential pressure detector
GB9315064A Expired - Fee Related GB2266962B (en) 1989-04-14 1993-07-20 Capacitive differential pressure detector
GB9314965A Expired - Fee Related GB2266961B (en) 1989-04-14 1993-07-20 Capacitive differential pressure detector
GB9314964A Expired - Fee Related GB2266960B (en) 1989-04-14 1993-07-29 Capacitive differential pressure detector

Family Applications Before (3)

Application Number Title Priority Date Filing Date
GB9315065A Expired - Fee Related GB2266963B (en) 1989-04-14 1993-07-20 Capacitive differential pressure detector
GB9315064A Expired - Fee Related GB2266962B (en) 1989-04-14 1993-07-20 Capacitive differential pressure detector
GB9314965A Expired - Fee Related GB2266961B (en) 1989-04-14 1993-07-20 Capacitive differential pressure detector

Country Status (1)

Country Link
GB (4) GB2266963B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113120849B (en) * 2020-01-16 2024-02-23 京东方科技集团股份有限公司 Transducer element, preparation method thereof and transducer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4322775A (en) * 1979-10-29 1982-03-30 Delatorre Leroy C Capacitive pressure sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2124770B (en) * 1982-08-05 1985-12-11 Airflow Dev Ltd Differential capacitance pressure transducer
US4754365A (en) * 1987-06-15 1988-06-28 Fischer & Porter Company Differential pressure transducer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4322775A (en) * 1979-10-29 1982-03-30 Delatorre Leroy C Capacitive pressure sensor

Also Published As

Publication number Publication date
GB2266963B (en) 1994-02-02
GB2266963A (en) 1993-11-17
GB2266960A (en) 1993-11-17
GB2266962B (en) 1994-02-02
GB9314964D0 (en) 1993-09-01
GB9315065D0 (en) 1993-09-01
GB9315064D0 (en) 1993-09-01
GB2266961B (en) 1994-02-02
GB2266962A (en) 1993-11-17
GB2266961A (en) 1993-11-17
GB9314965D0 (en) 1993-09-01

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20020417