GB2201832A - A device for providing an energy filtered charged particle image - Google Patents

A device for providing an energy filtered charged particle image

Info

Publication number
GB2201832A
GB2201832A GB08726674A GB8726674A GB2201832A GB 2201832 A GB2201832 A GB 2201832A GB 08726674 A GB08726674 A GB 08726674A GB 8726674 A GB8726674 A GB 8726674A GB 2201832 A GB2201832 A GB 2201832A
Authority
GB
United Kingdom
Prior art keywords
providing
charged particle
particle image
energy filtered
filtered charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08726674A
Other versions
GB8726674D0 (en
GB2201832B (en
Inventor
David Warren Turner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kratos Analytical Ltd
Original Assignee
Kratos Analytical Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB858513821A external-priority patent/GB8513821D0/en
Application filed by Kratos Analytical Ltd filed Critical Kratos Analytical Ltd
Publication of GB8726674D0 publication Critical patent/GB8726674D0/en
Publication of GB2201832A publication Critical patent/GB2201832A/en
Application granted granted Critical
Publication of GB2201832B publication Critical patent/GB2201832B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB8726674A 1985-05-31 1986-05-30 A device for providing an energy filtered charged particle image Expired GB2201832B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB858513821A GB8513821D0 (en) 1985-05-31 1985-05-31 Electron energy bandpass filter
GB858530011A GB8530011D0 (en) 1985-05-31 1985-12-05 Imaging band-pass electron analyser
PCT/GB1986/000298 WO1986007188A1 (en) 1985-05-31 1986-05-30 A device for providing an energy filtered charged particle image

Publications (3)

Publication Number Publication Date
GB8726674D0 GB8726674D0 (en) 1987-12-16
GB2201832A true GB2201832A (en) 1988-09-07
GB2201832B GB2201832B (en) 1989-11-15

Family

ID=26289311

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8726674A Expired GB2201832B (en) 1985-05-31 1986-05-30 A device for providing an energy filtered charged particle image

Country Status (4)

Country Link
US (1) US4810883A (en)
EP (1) EP0262129A1 (en)
GB (1) GB2201832B (en)
WO (1) WO1986007188A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8816403D0 (en) * 1988-07-09 1988-08-17 Turner D W Device for providing energy filtered electron image
US5583336A (en) * 1995-10-30 1996-12-10 Kelly; Michael A. High throughput electron energy analyzer
EP1063677B1 (en) 1999-06-23 2005-03-16 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device
US6633034B1 (en) * 2000-05-04 2003-10-14 Applied Materials, Inc. Method and apparatus for imaging a specimen using low profile electron detector for charged particle beam imaging apparatus including electrostatic mirrors
GB0225791D0 (en) * 2002-11-05 2002-12-11 Kratos Analytical Ltd Charged particle spectrometer and detector therefor
EP1657736B1 (en) * 2004-11-15 2016-12-14 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH High current density particle beam system
CN112604916B (en) * 2020-12-14 2022-05-10 天津商业大学 Method for Determining Baseline of Spray Coating Deposition Based on Statistics and PIV Images

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3437805A (en) * 1966-02-21 1969-04-08 Varian Associates Matched electric and magnetic field homogeneity for optimum resolution cycloidal mass spectrometers
SU522690A1 (en) * 1975-01-23 1981-10-23 Институт Ядерной Физики Ан Казахской Сср Prizm mass-spestrometer
DE3524536A1 (en) * 1985-07-10 1987-01-22 Bruker Analytische Messtechnik FLIGHT TIME MASS SPECTROMETER WITH AN ION REFLECTOR

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF PHYSICS E; SCIENTIFIC INSTRUMENTS, VOL. 10, NO. 5, MAY 1977, PAGES 458-463, *
JOURNAL OF PHYSICS E; SCIENTIFIC INSTRUMENTS, VOL. 8, NO. 212, DECEMBER 1975, PAGES 1033-1037 *
REVIEW OF SCIENTIFIC INSTRUMENTS, VOL. 50, NO. 3, MARCH 1979, PAGES 302-307, *

Also Published As

Publication number Publication date
GB8726674D0 (en) 1987-12-16
EP0262129A1 (en) 1988-04-06
US4810883A (en) 1989-03-07
GB2201832B (en) 1989-11-15
WO1986007188A1 (en) 1986-12-04

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950530