GB2177080B - Superpurifier for nitrogen and process for purifying same - Google Patents

Superpurifier for nitrogen and process for purifying same

Info

Publication number
GB2177080B
GB2177080B GB8615619A GB8615619A GB2177080B GB 2177080 B GB2177080 B GB 2177080B GB 8615619 A GB8615619 A GB 8615619A GB 8615619 A GB8615619 A GB 8615619A GB 2177080 B GB2177080 B GB 2177080B
Authority
GB
United Kingdom
Prior art keywords
superpurifier
nitrogen
purifying same
purifying
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8615619A
Other languages
English (en)
Other versions
GB8615619D0 (en
GB2177080A (en
Inventor
Kiyoshi Nagai
Claudio Boffito
Fabrizio Doni
Marco Succi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Taiyo Sanso Co Ltd
Original Assignee
SAES Getters SpA
Taiyo Sanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA, Taiyo Sanso Co Ltd filed Critical SAES Getters SpA
Publication of GB8615619D0 publication Critical patent/GB8615619D0/en
Publication of GB2177080A publication Critical patent/GB2177080A/en
Application granted granted Critical
Publication of GB2177080B publication Critical patent/GB2177080B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0494—Combined chemical and physical processing
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0433—Physical processing only
    • C01B21/045—Physical processing only by adsorption in solids
    • C01B21/0483—Physical processing only by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0003—Chemical processing
    • C01B2210/0004—Chemical processing by oxidation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C01B2210/0023—Physical processing by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0042—Making ultrapure specific gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Gas Separation By Absorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Treating Waste Gases (AREA)
GB8615619A 1985-06-28 1986-06-26 Superpurifier for nitrogen and process for purifying same Expired GB2177080B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140628A JPS623006A (ja) 1985-06-28 1985-06-28 窒素の超精製装置、並びに精製方法

Publications (3)

Publication Number Publication Date
GB8615619D0 GB8615619D0 (en) 1986-07-30
GB2177080A GB2177080A (en) 1987-01-14
GB2177080B true GB2177080B (en) 1989-08-31

Family

ID=15273115

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8615619A Expired GB2177080B (en) 1985-06-28 1986-06-26 Superpurifier for nitrogen and process for purifying same

Country Status (10)

Country Link
JP (1) JPS623006A (enrdf_load_stackoverflow)
KR (1) KR930006690B1 (enrdf_load_stackoverflow)
BE (1) BE904998A (enrdf_load_stackoverflow)
CA (1) CA1300346C (enrdf_load_stackoverflow)
DE (1) DE3621013C2 (enrdf_load_stackoverflow)
FR (1) FR2584062B1 (enrdf_load_stackoverflow)
GB (1) GB2177080B (enrdf_load_stackoverflow)
IT (1) IT1204420B (enrdf_load_stackoverflow)
NL (1) NL192104C (enrdf_load_stackoverflow)
SE (1) SE463149B (enrdf_load_stackoverflow)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1227219B (it) * 1988-09-26 1991-03-27 Getters Spa Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno
DE3835825C1 (enrdf_load_stackoverflow) * 1988-10-21 1990-03-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De
FR2642678A1 (fr) * 1989-02-07 1990-08-10 Air Liquide Procede d'elaboration d'une atmosphere gazeuse en contact avec un metal a haute temperature
DE3926015A1 (de) * 1989-08-05 1991-02-07 Messer Griesheim Gmbh Verfahren zur feinreinigung von gasen
IT1237944B (it) * 1990-01-05 1993-06-19 Getters Spa Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura
IT1246358B (it) * 1990-07-12 1994-11-17 Getters Spa Processo per eliminare impurita' da un gas idruro
IT1244006B (it) * 1990-11-02 1994-06-28 Getters Spa Procedimento di purificazione dell'ammoniaca.
IT1270875B (it) * 1993-04-29 1997-05-13 Getters Spa Procedimento di purificazione dell'idrogeno e purificatore relativo
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
US6436352B1 (en) 1993-04-29 2002-08-20 Saes Getter, S.P.A. Hydrogen purification
JPH1157371A (ja) * 1997-08-11 1999-03-02 Taiyo Toyo Sanso Co Ltd 超清浄空気の製造方法
KR100492943B1 (ko) 1997-10-15 2005-06-02 사이스 푸어 가스 인코포레이티드 안전장치를 구비한 가스정화시스템 및 가스정화방법
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
US6299670B1 (en) * 1999-06-10 2001-10-09 Saes Pure Gas, Inc. Integrated heated getter purifier system
KR100356611B1 (ko) * 2000-08-10 2002-10-18 주식회사 아토 질소 정제 방법 및 정제 장치
ITMI20010930A1 (it) 2001-05-07 2002-11-07 Getters Spa Metodo per la misura della concentrazione di idrogeno e metano in azoto mediante spetroscopia di mobilita' ionica
ITMI20011193A1 (it) 2001-06-06 2002-12-06 Getters Spa Metodo per la misura mediante spettroscopia di mobilita' ionica dellaconcentrazione di acqua in argon, idrogeno, azoto e elio
JP4918255B2 (ja) * 2005-12-22 2012-04-18 ウチヤ・サーモスタット株式会社 窒素ガス発生装置
CN110759323A (zh) * 2018-07-27 2020-02-07 隆基绿能科技股份有限公司 一种气体纯化反应器及气体纯化方法
CN112978692B (zh) * 2021-03-04 2022-08-05 北京高麦克仪器科技有限公司 780氦气纯化器
JP7210803B1 (ja) * 2022-10-04 2023-01-23 レール・リキード－ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード ガス精製装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2047950A (en) * 1979-04-06 1980-12-03 Getters Spa Zr-fe alloys as hydrogen sorber at low temperatures

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535074A (en) * 1965-10-29 1970-10-20 Hitachi Ltd Method and apparatus for purifying crude inert gases
BE792561A (en) * 1972-12-11 1973-03-30 Getters Spa Gas purifier - esp for rare gases and hydrogen with regeneration system for absorber cartridges
DE3137569A1 (de) * 1981-09-22 1983-04-21 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zur herstellung von hochreinem stickstoff
JPS6020323A (ja) * 1983-07-15 1985-02-01 Toshiba Corp デイスク装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2047950A (en) * 1979-04-06 1980-12-03 Getters Spa Zr-fe alloys as hydrogen sorber at low temperatures

Also Published As

Publication number Publication date
KR870000237A (ko) 1987-02-17
KR930006690B1 (ko) 1993-07-22
FR2584062B1 (fr) 1990-12-21
BE904998A (fr) 1986-10-16
IT8620963A0 (it) 1986-06-27
SE463149B (sv) 1990-10-15
FR2584062A1 (fr) 1987-01-02
NL192104C (nl) 1997-02-04
NL192104B (nl) 1996-10-01
NL8601692A (nl) 1987-01-16
CA1300346C (en) 1992-05-12
DE3621013A1 (de) 1987-01-08
JPH0456763B2 (enrdf_load_stackoverflow) 1992-09-09
GB8615619D0 (en) 1986-07-30
SE8602870L (sv) 1986-12-29
JPS623006A (ja) 1987-01-09
GB2177080A (en) 1987-01-14
SE8602870D0 (sv) 1986-06-27
DE3621013C2 (de) 1996-02-15
IT1204420B (it) 1989-03-01

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20060625