GB2123554A - Elastic surface wave accelerometers - Google Patents
Elastic surface wave accelerometers Download PDFInfo
- Publication number
- GB2123554A GB2123554A GB08315576A GB8315576A GB2123554A GB 2123554 A GB2123554 A GB 2123554A GB 08315576 A GB08315576 A GB 08315576A GB 8315576 A GB8315576 A GB 8315576A GB 2123554 A GB2123554 A GB 2123554A
- Authority
- GB
- United Kingdom
- Prior art keywords
- accelerometer
- plate
- bending
- elastic surface
- surface wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005452 bending Methods 0.000 claims abstract description 51
- 210000002105 tongue Anatomy 0.000 claims description 27
- 230000001133 acceleration Effects 0.000 claims description 25
- 230000010355 oscillation Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 230000002787 reinforcement Effects 0.000 claims 1
- 230000035882 stress Effects 0.000 claims 1
- 239000000725 suspension Substances 0.000 claims 1
- 230000008646 thermal stress Effects 0.000 claims 1
- 239000003351 stiffener Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 244000045947 parasite Species 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
- G01P15/0975—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements by acoustic surface wave resonators or delay lines
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Electrophonic Musical Instruments (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Geophysics And Detection Of Objects (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8209952A FR2528183A1 (fr) | 1982-06-08 | 1982-06-08 | Accelerometre a ondes elastiques de surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB8315576D0 GB8315576D0 (en) | 1983-07-13 |
| GB2123554A true GB2123554A (en) | 1984-02-01 |
Family
ID=9274748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB08315576A Withdrawn GB2123554A (en) | 1982-06-08 | 1983-06-07 | Elastic surface wave accelerometers |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5910855A (enrdf_load_stackoverflow) |
| DE (1) | DE3320659A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2528183A1 (enrdf_load_stackoverflow) |
| GB (1) | GB2123554A (enrdf_load_stackoverflow) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2140161A (en) * | 1983-05-20 | 1984-11-21 | Thomson Csf | Elastic surface wave force sensor |
| GB2156523A (en) * | 1984-03-19 | 1985-10-09 | Draper Lab Charles S | Planar inertial sensor |
| US4566329A (en) * | 1984-01-27 | 1986-01-28 | Thomson Csf | Vectorial force sensor with elastic surface waves |
| US4676104A (en) * | 1985-08-06 | 1987-06-30 | United Technologies Corporation | Surface skimming bulk acoustic wave accelerometer |
| GB2186085A (en) * | 1986-02-04 | 1987-08-05 | Draper Lab Charles S | Vibratory digital integrating accelerometer |
| US5373739A (en) * | 1991-03-22 | 1994-12-20 | Aisin Seiki Kabushiki Kaisha | Acceleration detector |
| US6803698B2 (en) * | 2000-10-12 | 2004-10-12 | Murata Manufacturing Co., Ltd | Acceleration sensor |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2739190B1 (fr) * | 1995-09-26 | 1997-11-28 | Onera (Off Nat Aerospatiale) | Transducteur monolithique d'acceleration |
| US5962786A (en) * | 1995-09-26 | 1999-10-05 | Onera (Office National D'eudes Et De Recheres Aerospatiales) | Monolithic accelerometric transducer |
| US20070079656A1 (en) * | 2005-10-11 | 2007-04-12 | Honeywell International Inc. | Micro-machined acoustic wave accelerometer |
| US7380454B2 (en) | 2005-12-20 | 2008-06-03 | Honeywell International Inc. | Load beam for surface acoustic wave accelerometer |
| JP5135253B2 (ja) * | 2009-02-19 | 2013-02-06 | 株式会社東芝 | 慣性センサおよび慣性測定装置 |
| JP5717247B2 (ja) * | 2011-03-08 | 2015-05-13 | セイコーインスツル株式会社 | センサ |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3478604A (en) * | 1968-05-17 | 1969-11-18 | Us Army | Electronic solid-state accelerometer |
| US3888115A (en) * | 1973-03-30 | 1975-06-10 | Texas Instruments Inc | Strain sensor |
| US3878477A (en) * | 1974-01-08 | 1975-04-15 | Hewlett Packard Co | Acoustic surface wave oscillator force-sensing devices |
| DE2754669A1 (de) * | 1977-03-28 | 1978-10-12 | Hewlett Packard Co | Messfuehler |
| FR2452714A1 (fr) * | 1979-03-30 | 1980-10-24 | Thomson Csf | Accelerometre a ondes elastiques |
-
1982
- 1982-06-08 FR FR8209952A patent/FR2528183A1/fr active Granted
-
1983
- 1983-06-07 GB GB08315576A patent/GB2123554A/en not_active Withdrawn
- 1983-06-08 JP JP10254583A patent/JPS5910855A/ja active Pending
- 1983-06-08 DE DE19833320659 patent/DE3320659A1/de not_active Withdrawn
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2140161A (en) * | 1983-05-20 | 1984-11-21 | Thomson Csf | Elastic surface wave force sensor |
| US4566329A (en) * | 1984-01-27 | 1986-01-28 | Thomson Csf | Vectorial force sensor with elastic surface waves |
| GB2156523A (en) * | 1984-03-19 | 1985-10-09 | Draper Lab Charles S | Planar inertial sensor |
| US4676104A (en) * | 1985-08-06 | 1987-06-30 | United Technologies Corporation | Surface skimming bulk acoustic wave accelerometer |
| GB2186085A (en) * | 1986-02-04 | 1987-08-05 | Draper Lab Charles S | Vibratory digital integrating accelerometer |
| GB2186085B (en) * | 1986-02-04 | 1990-09-26 | Draper Lab Charles S | Vibratory digital integrating accelerometer |
| US5373739A (en) * | 1991-03-22 | 1994-12-20 | Aisin Seiki Kabushiki Kaisha | Acceleration detector |
| US6803698B2 (en) * | 2000-10-12 | 2004-10-12 | Murata Manufacturing Co., Ltd | Acceleration sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2528183B1 (enrdf_load_stackoverflow) | 1984-10-19 |
| DE3320659A1 (de) | 1983-12-08 |
| JPS5910855A (ja) | 1984-01-20 |
| FR2528183A1 (fr) | 1983-12-09 |
| GB8315576D0 (en) | 1983-07-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |