GB2090016B - A photomask - Google Patents

A photomask

Info

Publication number
GB2090016B
GB2090016B GB8138155A GB8138155A GB2090016B GB 2090016 B GB2090016 B GB 2090016B GB 8138155 A GB8138155 A GB 8138155A GB 8138155 A GB8138155 A GB 8138155A GB 2090016 B GB2090016 B GB 2090016B
Authority
GB
United Kingdom
Prior art keywords
photomask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8138155A
Other languages
English (en)
Other versions
GB2090016A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of GB2090016A publication Critical patent/GB2090016A/en
Application granted granted Critical
Publication of GB2090016B publication Critical patent/GB2090016B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB8138155A 1980-12-18 1981-12-17 A photomask Expired GB2090016B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH936680 1980-12-18

Publications (2)

Publication Number Publication Date
GB2090016A GB2090016A (en) 1982-06-30
GB2090016B true GB2090016B (en) 1984-07-18

Family

ID=4351232

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8138155A Expired GB2090016B (en) 1980-12-18 1981-12-17 A photomask

Country Status (5)

Country Link
JP (1) JPS57172343A (enrdf_load_stackoverflow)
DE (1) DE3147644A1 (enrdf_load_stackoverflow)
FR (1) FR2496914A1 (enrdf_load_stackoverflow)
GB (1) GB2090016B (enrdf_load_stackoverflow)
NL (1) NL8105495A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770947A (en) * 1987-01-02 1988-09-13 International Business Machines Corporation Multiple density mask and fabrication thereof
KR950002172B1 (ko) * 1991-06-13 1995-03-14 금성일렉트론주식회사 편광자를 사용한 편광노광장치 및 편광마스크 제조방법
RU2206115C1 (ru) * 2002-01-08 2003-06-10 Закрытое акционерное общество "Элма-Фотма" Фотошаблонная заготовка

Also Published As

Publication number Publication date
FR2496914B3 (enrdf_load_stackoverflow) 1983-11-10
FR2496914A1 (fr) 1982-06-25
NL8105495A (nl) 1982-07-16
JPS57172343A (en) 1982-10-23
DE3147644A1 (de) 1982-11-18
GB2090016A (en) 1982-06-30

Similar Documents

Publication Publication Date Title
CS683281A2 (en) Zpusob vyroby purinovych a pyrimidinovych sloucenin
CS682981A2 (en) Herbicidni prostredek a zpusob vyroby ucinnych latek
CS348281A2 (en) Zpusob vyroby granuli tvorenych jadrem a plastem
CS635981A2 (en) Fungicidni prostredek a zpusob pripravy ucinne latky
CS357681A2 (en) Prostredek k regulaci rustu rostlin a fungicidni prostredek a zpusob vyroby ucinne slozky
DE3166137D1 (en) A carry-bag
CS493481A2 (en) Vodici a stredici ustroji vrtaci tyce
CS640481A2 (en) Zpusob vyroby plynu obsahujicich vodik a dusik
CS520181A2 (en) Zpusob vyroby plocheho duteho telesa a zarizeni k provadeni tohoto zpusobu
CS205681A2 (en) Izotonizacni a stabilizacni cinidlo
CS65581A2 (en) Insekticidni prostredek a zpusob jeho vyroby
CS109581A2 (en) Prostredky pro rizeni rustu rostlin a zpusob vyroby ucinne latky
CS927880A1 (en) Zpusob kalibrovani a zarizeni k mereni intenzity zareni a energeticke jasnosti
CS139281A1 (en) Zarizeni k zacisteni a zakriveni koncu elektromontaznich vodicu
GB2090016B (en) A photomask
CS95081A1 (en) Fotograficka soustava a zpusob jejiho vypracovani
CS974881A2 (en) Zpusob vyroby krmnych kvasnic a nebo ethylalkoholu z rostlinneho materialu
CS752881A1 (en) Horizontalni vrtacka a freza s uhlovym stojanem
CS87581A1 (en) Zpusob a zarizeni k odebirani pekarskych vyrobku z forem zejmena kolacu
GB2080739B (en) A dockship
GB2079458B (en) A diprod
CS54581A1 (en) Zpusob a zarizeni k ohybani vyrobku pomoci vybusnin
CS139481A1 (en) Zpusob a zarizeni k sejmuti nebo ulozeni vrchni vrstvy stohu
CS877581A1 (en) Zarizeni k nakladce a vykladce vyrobku
CS87881A1 (en) Pohon stolu hrubovacich stroju a brusek

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee