GB201414549D0 - Apparatus for and a method of determining a characteristic of a sample - Google Patents

Apparatus for and a method of determining a characteristic of a sample

Info

Publication number
GB201414549D0
GB201414549D0 GBGB1414549.4A GB201414549A GB201414549D0 GB 201414549 D0 GB201414549 D0 GB 201414549D0 GB 201414549 A GB201414549 A GB 201414549A GB 201414549 D0 GB201414549 D0 GB 201414549D0
Authority
GB
United Kingdom
Prior art keywords
sample
characteristic
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB1414549.4A
Other versions
GB2529251A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taylor Hobson Ltd
Original Assignee
Taylor Hobson Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taylor Hobson Ltd filed Critical Taylor Hobson Ltd
Priority to GB1414549.4A priority Critical patent/GB2529251A/en
Publication of GB201414549D0 publication Critical patent/GB201414549D0/en
Priority to PCT/GB2015/052339 priority patent/WO2016024117A1/en
Publication of GB2529251A publication Critical patent/GB2529251A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/4133—Refractometers, e.g. differential
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
GB1414549.4A 2014-08-15 2014-08-15 Apparatus for and a method of determining a characteristic of a sample Withdrawn GB2529251A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1414549.4A GB2529251A (en) 2014-08-15 2014-08-15 Apparatus for and a method of determining a characteristic of a sample
PCT/GB2015/052339 WO2016024117A1 (en) 2014-08-15 2015-08-13 Apparatus for and a method of determining a characteristic of a sample

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1414549.4A GB2529251A (en) 2014-08-15 2014-08-15 Apparatus for and a method of determining a characteristic of a sample

Publications (2)

Publication Number Publication Date
GB201414549D0 true GB201414549D0 (en) 2014-10-01
GB2529251A GB2529251A (en) 2016-02-17

Family

ID=51662513

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1414549.4A Withdrawn GB2529251A (en) 2014-08-15 2014-08-15 Apparatus for and a method of determining a characteristic of a sample

Country Status (2)

Country Link
GB (1) GB2529251A (en)
WO (1) WO2016024117A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11644419B2 (en) 2021-01-28 2023-05-09 Kla Corporation Measurement of properties of patterned photoresist

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0415766D0 (en) * 2004-07-14 2004-08-18 Taylor Hobson Ltd Apparatus for and a method of determining a characteristic of a layer or layers
WO2006078718A1 (en) * 2005-01-20 2006-07-27 Zygo Corporation Interferometer for determining characteristics of an object surface
US7612891B2 (en) * 2005-12-15 2009-11-03 Veeco Instruments, Inc. Measurement of thin films using fourier amplitude
GB2440164A (en) * 2006-07-19 2008-01-23 Taylor Hobson Ltd Apparatus for and a method of determining surface characteristics
EP1963780B1 (en) * 2005-12-22 2012-02-08 Taylor Hobson Limited Apparatus for and a method of determining surface characteristics
DE102007034289B3 (en) * 2007-07-20 2009-01-29 Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh Method for the in-situ determination of the composition of optically thin layers, arrangements for carrying them out and applications of the method
JP2010050276A (en) * 2008-08-21 2010-03-04 Tokyo Electron Ltd Substrate processing apparatus, optical constant calculation method, and recording medium for storing program for executing the method
US8687204B2 (en) * 2011-03-24 2014-04-01 Canon Kabushiki Kaisha Method and apparatus for measuring refractive index based on a ratio between a number of second fringes divided by a difference of the number of second fringes minus a number of first fringes

Also Published As

Publication number Publication date
GB2529251A (en) 2016-02-17
WO2016024117A1 (en) 2016-02-18

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)