GB1571846A - Turbo molecular pumps - Google Patents

Turbo molecular pumps Download PDF

Info

Publication number
GB1571846A
GB1571846A GB11098/77A GB1109877A GB1571846A GB 1571846 A GB1571846 A GB 1571846A GB 11098/77 A GB11098/77 A GB 11098/77A GB 1109877 A GB1109877 A GB 1109877A GB 1571846 A GB1571846 A GB 1571846A
Authority
GB
United Kingdom
Prior art keywords
rotor
bearing
shaft
pump
gem material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB11098/77A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochvakuum Dresden VEB
Original Assignee
Hochvakuum Dresden VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochvakuum Dresden VEB filed Critical Hochvakuum Dresden VEB
Publication of GB1571846A publication Critical patent/GB1571846A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00—Sliding-contact bearings for exclusively rotary movement
    • F16C17/26—Systems consisting of a plurality of sliding-contact bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB11098/77A 1976-03-16 1977-03-16 Turbo molecular pumps Expired GB1571846A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD191871A DD124315A1 (enrdf_load_stackoverflow) 1976-03-16 1976-03-16

Publications (1)

Publication Number Publication Date
GB1571846A true GB1571846A (en) 1980-07-23

Family

ID=5503940

Family Applications (1)

Application Number Title Priority Date Filing Date
GB11098/77A Expired GB1571846A (en) 1976-03-16 1977-03-16 Turbo molecular pumps

Country Status (4)

Country Link
DD (1) DD124315A1 (enrdf_load_stackoverflow)
DE (1) DE2709902A1 (enrdf_load_stackoverflow)
FR (1) FR2344744A1 (enrdf_load_stackoverflow)
GB (1) GB1571846A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113957768A (zh) * 2021-11-01 2022-01-21 广东丰能环保科技股份有限公司 一种预制型运动面层及其成型工艺

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
RU2119698C1 (ru) * 1995-11-15 1998-09-27 Валерий Моисеевич Иоффе Варикап

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113957768A (zh) * 2021-11-01 2022-01-21 广东丰能环保科技股份有限公司 一种预制型运动面层及其成型工艺

Also Published As

Publication number Publication date
FR2344744A1 (fr) 1977-10-14
DD124315A1 (enrdf_load_stackoverflow) 1977-02-16
DE2709902A1 (de) 1977-09-29
FR2344744B3 (enrdf_load_stackoverflow) 1980-01-18

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee