GB1414400A - Method for making a silicon electron emitter - Google Patents
Method for making a silicon electron emitterInfo
- Publication number
- GB1414400A GB1414400A GB2453373A GB2453373A GB1414400A GB 1414400 A GB1414400 A GB 1414400A GB 2453373 A GB2453373 A GB 2453373A GB 2453373 A GB2453373 A GB 2453373A GB 1414400 A GB1414400 A GB 1414400A
- Authority
- GB
- United Kingdom
- Prior art keywords
- heating
- heated
- photoemission
- seconds
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 238000010438 heat treatment Methods 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 3
- 238000001816 cooling Methods 0.000 abstract 2
- 230000001235 sensitizing effect Effects 0.000 abstract 2
- 206010034972 Photosensitivity reaction Diseases 0.000 abstract 1
- 238000000137 annealing Methods 0.000 abstract 1
- 239000010406 cathode material Substances 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 230000036211 photosensitivity Effects 0.000 abstract 1
- 238000003303 reheating Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
- H01J9/125—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/32—Secondary emission electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
- Y10S438/918—Special or nonstandard dopant
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00259037A US3806372A (en) | 1972-06-02 | 1972-06-02 | Method for making a negative effective-electron-affinity silicon electron emitter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1414400A true GB1414400A (en) | 1975-11-19 |
Family
ID=22983240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2453373A Expired GB1414400A (en) | 1972-06-02 | 1973-05-23 | Method for making a silicon electron emitter |
Country Status (14)
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU519042A1 (ru) * | 1974-05-21 | 1978-07-25 | Предприятие П/Я М-5273 | Фотоэлектрический эмиттер |
| NL8501806A (nl) * | 1985-06-24 | 1987-01-16 | Philips Nv | Inrichting ten behoeve van elektronenemissie voorzien van een reservoir met elektronenuittreepotentiaalverlagend materiaal. |
| DE3752249T2 (de) * | 1986-07-04 | 1999-07-08 | Canon K.K., Tokio/Tokyo | Elektronen emittierende Vorrichtung |
| USRE40062E1 (en) | 1987-07-15 | 2008-02-12 | Canon Kabushiki Kaisha | Display device with electron-emitting device with electron-emitting region insulated from electrodes |
| USRE39633E1 (en) | 1987-07-15 | 2007-05-15 | Canon Kabushiki Kaisha | Display device with electron-emitting device with electron-emitting region insulated from electrodes |
| USRE40566E1 (en) | 1987-07-15 | 2008-11-11 | Canon Kabushiki Kaisha | Flat panel display including electron emitting device |
| US5703380A (en) * | 1995-06-13 | 1997-12-30 | Advanced Vision Technologies Inc. | Laminar composite lateral field-emission cathode |
| US5647998A (en) * | 1995-06-13 | 1997-07-15 | Advanced Vision Technologies, Inc. | Fabrication process for laminar composite lateral field-emission cathode |
-
1972
- 1972-06-02 US US00259037A patent/US3806372A/en not_active Expired - Lifetime
-
1973
- 1973-03-29 MX MX006525U patent/MX2985E/es unknown
- 1973-04-05 IT IT22634/73A patent/IT982719B/it active
- 1973-05-22 DE DE2325869A patent/DE2325869A1/de not_active Withdrawn
- 1973-05-23 GB GB2453373A patent/GB1414400A/en not_active Expired
- 1973-05-25 CA CA172,267A patent/CA974296A/en not_active Expired
- 1973-05-25 ES ES415185A patent/ES415185A1/es not_active Expired
- 1973-05-25 FR FR7319093A patent/FR2186724B1/fr not_active Expired
- 1973-05-29 SE SE7307590*A patent/SE378939B/xx unknown
- 1973-05-30 JP JP6071773A patent/JPS551663B2/ja not_active Expired
- 1973-05-31 AU AU56371/73A patent/AU468010B2/en not_active Expired
- 1973-06-01 BE BE131827A patent/BE800393A/xx unknown
- 1973-06-01 SU SU1925709A patent/SU520060A3/ru active
- 1973-06-01 NL NL7307684A patent/NL7307684A/xx not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4951869A (enrdf_load_stackoverflow) | 1974-05-20 |
| SU520060A3 (ru) | 1976-06-30 |
| AU5637173A (en) | 1974-12-05 |
| AU468010B2 (en) | 1975-12-18 |
| DE2325869A1 (de) | 1973-12-20 |
| IT982719B (it) | 1974-10-21 |
| BE800393A (fr) | 1973-10-01 |
| MX2985E (es) | 1980-01-23 |
| CA974296A (en) | 1975-09-09 |
| US3806372A (en) | 1974-04-23 |
| FR2186724B1 (enrdf_load_stackoverflow) | 1977-02-11 |
| ES415185A1 (es) | 1976-02-16 |
| NL7307684A (enrdf_load_stackoverflow) | 1973-12-04 |
| SE378939B (enrdf_load_stackoverflow) | 1975-09-15 |
| FR2186724A1 (enrdf_load_stackoverflow) | 1974-01-11 |
| JPS551663B2 (enrdf_load_stackoverflow) | 1980-01-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US2960659A (en) | Semiconductive electron source | |
| GB1414400A (en) | Method for making a silicon electron emitter | |
| GB1163495A (en) | Improvements in or relating to Cathode-Ray Tubes | |
| GB1476213A (en) | Photocathodes | |
| US2401734A (en) | Photoelectric electron multiplier | |
| GB1399260A (en) | Magnetrons | |
| US2401737A (en) | Phototube and method of manufacture | |
| GB1453965A (en) | Electron-emissive cathodes | |
| US3884539A (en) | Method of making a multialkali electron emissive layer | |
| GB1357693A (en) | Method of making an electron emitter device | |
| GB1321005A (en) | Method for increasing the electron emissivity of a semiconductor electron emitter | |
| GB496556A (en) | Improvements in electrodes for electron discharge devices | |
| US1980702A (en) | Phototube | |
| GB1143536A (enrdf_load_stackoverflow) | ||
| GB522774A (en) | Improvements in or relating to methods of manufacturing secondary emitting electrodes | |
| GB1207283A (en) | Method of making photoemissive electron tubes | |
| CA959911A (en) | Secondary electron collector electrode for cathode ray tubes | |
| GB1069536A (en) | Improvements in solid-state electron source | |
| GB1298362A (en) | Improvements relating to electric discharge tubes comprising photo-cathodes | |
| GB1362624A (en) | Method of manufacturing an electric discharge tube | |
| GB1442405A (en) | Manufacture of electron-emissive layers | |
| GB1425194A (en) | Nonthermionic electron cathode comprising a heater element | |
| US2256460A (en) | Electron discharge device | |
| GB1487272A (en) | Method for devacuating a vacuum tube | |
| GB1495859A (en) | Method of making a multialkali electron-emissive layer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |