GB1408352A - Electrolytic methods of etching thin films - Google Patents
Electrolytic methods of etching thin filmsInfo
- Publication number
- GB1408352A GB1408352A GB4878373A GB4878373A GB1408352A GB 1408352 A GB1408352 A GB 1408352A GB 4878373 A GB4878373 A GB 4878373A GB 4878373 A GB4878373 A GB 4878373A GB 1408352 A GB1408352 A GB 1408352A
- Authority
- GB
- United Kingdom
- Prior art keywords
- etched
- reference electrode
- auxiliary electrode
- periodicity
- oct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 229910052697 platinum Inorganic materials 0.000 abstract 4
- 239000010408 film Substances 0.000 abstract 3
- 229910052703 rhodium Inorganic materials 0.000 abstract 3
- 239000002253 acid Substances 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 229940075397 calomel Drugs 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 239000002131 composite material Substances 0.000 abstract 1
- ZOMNIUBKTOKEHS-UHFFFAOYSA-L dimercury dichloride Chemical compound Cl[Hg][Hg]Cl ZOMNIUBKTOKEHS-UHFFFAOYSA-L 0.000 abstract 1
- 238000000866 electrolytic etching Methods 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 abstract 1
- 238000007654 immersion Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052723 transition metal Inorganic materials 0.000 abstract 1
- 150000003624 transition metals Chemical class 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/07—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process being removed electrolytically
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29885672A | 1972-10-19 | 1972-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1408352A true GB1408352A (en) | 1975-10-01 |
Family
ID=23152265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB4878373A Expired GB1408352A (en) | 1972-10-19 | 1973-10-19 | Electrolytic methods of etching thin films |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3798141A (enrdf_load_stackoverflow) |
| JP (1) | JPS4974140A (enrdf_load_stackoverflow) |
| BE (1) | BE806230A (enrdf_load_stackoverflow) |
| CA (1) | CA1026704A (enrdf_load_stackoverflow) |
| DE (1) | DE2351664B2 (enrdf_load_stackoverflow) |
| FR (1) | FR2203890B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1408352A (enrdf_load_stackoverflow) |
| IT (1) | IT999661B (enrdf_load_stackoverflow) |
| NL (1) | NL157062B (enrdf_load_stackoverflow) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3898141A (en) * | 1974-02-08 | 1975-08-05 | Bell Telephone Labor Inc | Electrolytic oxidation and etching of III-V compound semiconductors |
| NL7609816A (nl) * | 1976-09-03 | 1978-03-07 | Philips Nv | Werkwijze voor het vervaardigen van een lichaam voorzien met een goudpatroon en lichaam ver- vaardigd volgens de werkwijze. |
| US4206028A (en) * | 1976-12-14 | 1980-06-03 | Inoue-Japax Research Incorporated | Electrochemical polishing system |
| GB1539309A (en) * | 1976-12-14 | 1979-01-31 | Inoue Japax Res | Electrochemical polishing |
| DE3029277C2 (de) * | 1980-08-01 | 1983-10-20 | Siemens AG, 1000 Berlin und 8000 München | Aufbau von Metallschichten |
| WO2002030401A2 (en) | 2000-10-11 | 2002-04-18 | Microchips, Inc. | Microchip reservoir devices and facilitated corrosion of electrodes |
| US6875208B2 (en) | 2001-05-31 | 2005-04-05 | Massachusetts Institute Of Technology | Microchip devices with improved reservoir opening |
| US7175752B2 (en) * | 2002-05-24 | 2007-02-13 | Federal-Mogul Worldwide, Inc. | Method and apparatus for electrochemical machining |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3566358A (en) * | 1968-03-19 | 1971-02-23 | Bevier Hasbrouck | Integrated multi-computer system |
-
1972
- 1972-10-19 US US00298856A patent/US3798141A/en not_active Expired - Lifetime
-
1973
- 1973-05-09 CA CA170,822A patent/CA1026704A/en not_active Expired
- 1973-10-15 NL NL7314162.A patent/NL157062B/xx unknown
- 1973-10-15 DE DE2351664A patent/DE2351664B2/de not_active Withdrawn
- 1973-10-18 BE BE136820A patent/BE806230A/xx unknown
- 1973-10-18 FR FR7337216A patent/FR2203890B1/fr not_active Expired
- 1973-10-18 IT IT70089/73A patent/IT999661B/it active
- 1973-10-19 GB GB4878373A patent/GB1408352A/en not_active Expired
- 1973-10-19 JP JP48116978A patent/JPS4974140A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US3798141A (en) | 1974-03-19 |
| DE2351664A1 (de) | 1974-05-02 |
| DE2351664B2 (de) | 1975-09-18 |
| BE806230A (fr) | 1974-02-15 |
| CA1026704A (en) | 1978-02-21 |
| IT999661B (it) | 1976-03-10 |
| JPS4974140A (enrdf_load_stackoverflow) | 1974-07-17 |
| FR2203890B1 (enrdf_load_stackoverflow) | 1976-07-23 |
| NL157062B (nl) | 1978-06-15 |
| FR2203890A1 (enrdf_load_stackoverflow) | 1974-05-17 |
| NL7314162A (enrdf_load_stackoverflow) | 1974-04-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |