GB1402700A - Method of and apparatus for producing a colour display of the surface of a solid body - Google Patents

Method of and apparatus for producing a colour display of the surface of a solid body

Info

Publication number
GB1402700A
GB1402700A GB5285073A GB5285073A GB1402700A GB 1402700 A GB1402700 A GB 1402700A GB 5285073 A GB5285073 A GB 5285073A GB 5285073 A GB5285073 A GB 5285073A GB 1402700 A GB1402700 A GB 1402700A
Authority
GB
United Kingdom
Prior art keywords
radiation
emitted
ray tube
cathode
nov
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5285073A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oesterreichische Studiengesellschaft fuer Atomenergie GmbH
Original Assignee
Oesterreichische Studiengesellschaft fuer Atomenergie GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterreichische Studiengesellschaft fuer Atomenergie GmbH filed Critical Oesterreichische Studiengesellschaft fuer Atomenergie GmbH
Publication of GB1402700A publication Critical patent/GB1402700A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Video Image Reproduction Devices For Color Tv Systems (AREA)
GB5285073A 1972-11-14 1973-11-14 Method of and apparatus for producing a colour display of the surface of a solid body Expired GB1402700A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT967472A AT317313B (de) 1972-11-14 1972-11-14 Verfahren zur Erzeugung von Farbbildern von Oberflächen unter Verwendung des Rasterelektronenmikroskopes

Publications (1)

Publication Number Publication Date
GB1402700A true GB1402700A (en) 1975-08-13

Family

ID=3616273

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5285073A Expired GB1402700A (en) 1972-11-14 1973-11-14 Method of and apparatus for producing a colour display of the surface of a solid body

Country Status (4)

Country Link
JP (1) JPS5063876A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AT (1) AT317313B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2356425C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1402700A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983000921A1 (en) * 1981-09-01 1983-03-17 Antonovsky, Ariel, David Method and apparatus for image formation

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2832987B2 (ja) * 1989-02-27 1998-12-09 株式会社島津製作所 測定結果のカラー表示方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983000921A1 (en) * 1981-09-01 1983-03-17 Antonovsky, Ariel, David Method and apparatus for image formation

Also Published As

Publication number Publication date
DE2356425A1 (de) 1974-05-30
JPS5063876A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-05-30
DE2356425B2 (de) 1975-04-17
AT317313B (de) 1974-08-26
DE2356425C3 (de) 1975-12-04

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee