GB1392395A - Stabilization of optical path length differences - Google Patents

Stabilization of optical path length differences

Info

Publication number
GB1392395A
GB1392395A GB3133972A GB3133972A GB1392395A GB 1392395 A GB1392395 A GB 1392395A GB 3133972 A GB3133972 A GB 3133972A GB 3133972 A GB3133972 A GB 3133972A GB 1392395 A GB1392395 A GB 1392395A
Authority
GB
United Kingdom
Prior art keywords
beams
optical path
path length
mirror
photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3133972A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1392395A publication Critical patent/GB1392395A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02068—Auto-alignment of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Holo Graphy (AREA)
GB3133972A 1971-07-07 1972-07-05 Stabilization of optical path length differences Expired GB1392395A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712133687 DE2133687A1 (de) 1971-07-07 1971-07-07 Anordnung zur stabilisierung der optischen weglaengendifferenz

Publications (1)

Publication Number Publication Date
GB1392395A true GB1392395A (en) 1975-04-30

Family

ID=5812868

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3133972A Expired GB1392395A (en) 1971-07-07 1972-07-05 Stabilization of optical path length differences

Country Status (4)

Country Link
JP (1) JPS5434347B1 (https=)
DE (1) DE2133687A1 (https=)
FR (1) FR2145345A5 (https=)
GB (1) GB1392395A (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5469259A (en) * 1994-01-03 1995-11-21 International Business Machines Corporation Inspection interferometer with scanning autofocus, and phase angle control features
US5703684A (en) * 1996-09-23 1997-12-30 International Business Machines Corporation Apparatus for optical differential measurement of glide height above a magnetic disk
US5784163A (en) * 1996-09-23 1998-07-21 International Business Machines Corporation Optical differential profile measurement apparatus and process
US5926266A (en) * 1996-09-23 1999-07-20 International Business Machines Corporation Optical apparatus for rapid defect analysis
CN104897272A (zh) * 2015-06-12 2015-09-09 哈尔滨工业大学 无正交误差的双路圆偏振干涉和双渥拉斯特棱镜分光式零差激光测振仪
CN111982267A (zh) * 2020-08-12 2020-11-24 重庆邮电大学 一种用于声波和振动测量的光纤传感器及其工作方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2634210C2 (de) * 1976-07-30 1986-06-05 United Kingdom Atomic Energy Authority, London Interferometer
DE3404963C2 (de) * 1984-02-11 1986-09-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Laser-Interferometer zur Längenmessung
DE4108062A1 (de) * 1991-03-13 1992-09-17 Man Technologie Gmbh Vorrichtung zur interferometrischen messung von objekten
DE4224744A1 (de) * 1992-07-27 1994-02-03 Abb Research Ltd Vorrichtung zur Detektion loser Metallteilchen in gasisolierten Hochspannungs-Schaltanlagen

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5469259A (en) * 1994-01-03 1995-11-21 International Business Machines Corporation Inspection interferometer with scanning autofocus, and phase angle control features
US5703684A (en) * 1996-09-23 1997-12-30 International Business Machines Corporation Apparatus for optical differential measurement of glide height above a magnetic disk
US5784163A (en) * 1996-09-23 1998-07-21 International Business Machines Corporation Optical differential profile measurement apparatus and process
US5926266A (en) * 1996-09-23 1999-07-20 International Business Machines Corporation Optical apparatus for rapid defect analysis
CN104897272A (zh) * 2015-06-12 2015-09-09 哈尔滨工业大学 无正交误差的双路圆偏振干涉和双渥拉斯特棱镜分光式零差激光测振仪
CN104897272B (zh) * 2015-06-12 2018-01-05 哈尔滨工业大学 双路圆偏振干涉和双渥拉斯特棱镜分光式零差激光测振仪
CN111982267A (zh) * 2020-08-12 2020-11-24 重庆邮电大学 一种用于声波和振动测量的光纤传感器及其工作方法

Also Published As

Publication number Publication date
FR2145345A5 (https=) 1973-02-16
DE2133687A1 (de) 1973-01-25
JPS5434347B1 (https=) 1979-10-26

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee