GB1346548A - Manufacture of a monocrystalline semiconductor rod - Google Patents

Manufacture of a monocrystalline semiconductor rod

Info

Publication number
GB1346548A
GB1346548A GB2580672A GB2580672A GB1346548A GB 1346548 A GB1346548 A GB 1346548A GB 2580672 A GB2580672 A GB 2580672A GB 2580672 A GB2580672 A GB 2580672A GB 1346548 A GB1346548 A GB 1346548A
Authority
GB
United Kingdom
Prior art keywords
melt
rod
vertical
seed crystal
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2580672A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712132277 external-priority patent/DE2132277A1/de
Priority claimed from DE19712132338 external-priority patent/DE2132338A1/de
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1346548A publication Critical patent/GB1346548A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C30B15/16—Heating of the melt or the crystallised materials by irradiation or electric discharge
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/36—Single-crystal growth by pulling from a melt, e.g. Czochralski method characterised by the seed, e.g. its crystallographic orientation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
GB2580672A 1971-06-29 1972-06-02 Manufacture of a monocrystalline semiconductor rod Expired GB1346548A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19712132277 DE2132277A1 (de) 1971-06-29 1971-06-29 Verfahren zur erzielung eines gleichmaessigen radialen widerstandsverlaufes beim herstellen eines halbleitereinkristallstabes
DE19712132338 DE2132338A1 (de) 1963-03-13 1971-06-29 Verfahren zum herstellen von halbleiterstaeben durch ziehen aus der schmelze

Publications (1)

Publication Number Publication Date
GB1346548A true GB1346548A (en) 1974-02-13

Family

ID=25761343

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2580672A Expired GB1346548A (en) 1971-06-29 1972-06-02 Manufacture of a monocrystalline semiconductor rod

Country Status (4)

Country Link
BE (1) BE785624A (https=)
FR (1) FR2143743B1 (https=)
GB (1) GB1346548A (https=)
IT (1) IT956790B (https=)

Also Published As

Publication number Publication date
IT956790B (it) 1973-10-10
FR2143743A1 (https=) 1973-02-09
FR2143743B1 (https=) 1974-12-27
BE785624A (fr) 1972-12-29

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees